STEAM GENERATOR FOR VAPOR-PHASE CHEMICAL DEPOSITION PLANTS.

Abstract

THE STEAM GENERATOR FOR CHEMICAL STORAGE PLANTS FROM THE STEAM PHASE ALLOWS THE EXTRACTION OF VAPORS FROM SOLID OR LIQUID SOURCES. IT CONSISTS ESSENTIALLY IN A CONTAINER INTO WHICH A GAS IS INTAKED WHICH, PASSING IN THE PROXIMITY OF THE REAGENT, SATURATES THE VAPORS PRODUCED AND TRANSPORTS THEM TO THE REACTION CHAMBER. ONLY THE GENERATOR IS RAISED AT A TEMPERATURE HIGHER THAN THE ENVIRONMENT IN ORDER TO OBTAIN A SATURATED STEAM WITH A HIGH QUANTITY OF REAGENT. TO AVOID THE CONDENSATION OF THE STEAM IN THE PIPES THAT TRANSPORT IT FROM THE GENERATOR TO THE REACTION CHAMBER, IT IS DILUTED WITH A CARRIER GAS DIRECTLY INTO THE HEATED GENERATOR BODY, SO OBTAINING THE LOWERING OF THE STEAM CONDENSATION TEMPERATURE, MADE UNSATURATED. FOR THIS PURPOSE, THE GENERATOR CONTAINS IN THE UPPER BASE A THROUGH LINE FOR THE DILUTION IN WHICH THE CARRIER GAS IS MADE FLOW. THE PIPES THAT GO FROM THE GENERATOR TO THE REACTION CHAMBER CAN BE KEPT AT ROOM TEMPERATURE WITHOUT RISK OF CONDENSATION.