Substrate transfer device for substrate processing apparatus

JP1741512SActive Publication Date: 2026-04-17KOKUSAI DENKI KK
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
KOKUSAI DENKI KK
Filing Date
2022-09-14
Publication Date
2026-04-17

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Abstract

The present invention relates to a substrate moving device for a substrate processing apparatus, which is used by being mounted inside a substrate holder that holds multiple substrates in the reaction chamber of the substrate processing apparatus. The annular projection on the bottom surface of the present invention is positioned by fitting into a hole in the bottom plate of the substrate holder, and the moving device pushes up the bottom plate of the substrate moving device, lifting the multiple substrates from the claws of the substrate holder and moving them up and down.
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