Substrate holder for substrate processing apparatus

JP1741513SActive Publication Date: 2026-04-17KOKUSAI DENKI KK
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
KOKUSAI DENKI KK
Filing Date
2022-09-14
Publication Date
2026-04-17

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Abstract

The present invention relates to a substrate holder for horizontally holding multiple substrates in a vertical reaction chamber of a substrate processing apparatus.
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