Shower head

JP1793498SActive Publication Date: 2025-03-13LAM RES CORP
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Patent Information

Application Number
JP2024015081D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-02-12
Filing Date
2024-07-22
Publication Date
2025-03-13
Estimated Expiration
2048-11-10

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Abstract

The article according to the present application (hereinafter referred to as "the article") is, for example, a showerhead used in a semiconductor processing apparatus used in the manufacture of semiconductors.
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