Semiconductor processing showerhead

JP1796368SActive Publication Date: 2025-04-16LAM RES CORP
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Patent Information

Application Number
JP2024025788D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-06-17
Filing Date
2024-12-13
Publication Date
2025-04-16
Estimated Expiration
2049-12-13

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Abstract

The article according to the present application (hereinafter referred to as "the article") is, for example, a showerhead for emitting process gases used in semiconductor manufacturing processes.
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