Focusing lens for wafer heating

JP1796579SActive Publication Date: 2025-04-18TOKYO ELECTRON LTD
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Patent Information

Application Number
JP2024021817D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-04-18
Estimated Expiration
2049-10-21

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Patent Text Reader

Abstract

This product is a condenser lens used in a heater for heating a wafer to improve the efficiency of heating the wafer by giving directionality to the secondary light shielding. As shown in the "Reference diagram showing the state of use", this product is used by being placed between a susceptor on which a wafer is placed and a heater wire.
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