Focusing lens for wafer heating

JP1796615SActive Publication Date: 2025-04-18TOKYO ELECTRON LTD
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Patent Information

Application Number
JP2024021816D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-04-18
Estimated Expiration
2049-10-21

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Abstract

This product is a condenser lens used in a heater that heats wafers, to improve the wafer heating efficiency by giving directionality to the secondary shading. As shown in the "Reference diagram showing the state of use," this product is used by being placed between the susceptor on which the wafer is placed and the heater wire.
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