Gas ring cover

JP1800060SActive Publication Date: 2025-06-02NUFLARE TECH INC
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Patent Information

Application Number
JP2025001317D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-24
Publication Date
2025-06-02
Estimated Expiration
2050-01-24

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Abstract

This article is a gas ring cover that is provided downstream of a gas introduction part such as a semiconductor manufacturing apparatus, places a flow straightening plate for straightening the gas, and covers the inner wall of the gas ring that supports the gas introduction part.
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