Lifting pin

JP1800062SActive Publication Date: 2025-06-02NUFLARE TECH INC
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Patent Information

Application Number
JP2025001613D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-29
Publication Date
2025-06-02
Estimated Expiration
2050-01-29

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Abstract

This article is a push-up pin for pushing up wafers, susceptors, etc. in semiconductor manufacturing equipment and the like.
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