Semiconductor wafer and susceptor heater

JP1800063SActive Publication Date: 2025-06-02NUFLARE TECH INC
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Patent Information

Application Number
JP2025001614D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-29
Publication Date
2025-06-02
Estimated Expiration
2050-01-29

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Abstract

This article is a heater for heating a gas supplied from above from the outer periphery and for heating a wafer and a susceptor for holding the wafer from above in a semiconductor manufacturing apparatus or the like.
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