Purge Ring for Substrate Processing Chamber

JP1800489SActive Publication Date: 2025-06-09APPLIED MATERIALS INC
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Patent Information

Application Number
JP2023000480D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2022-07-14
Filing Date
2023-01-13
Publication Date
2025-06-09
Estimated Expiration
2048-01-13

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