Cover for wafer holding chuck

JP1801609SActive Publication Date: 2025-06-20SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2025000594D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-14
Publication Date
2025-06-20
Estimated Expiration
2050-01-14

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Abstract

As shown in the reference drawing indicating the usage state, this article is used by being attached to the center of the upper surface of a wafer holding chuck, and a plurality of purge holes are formed along the outer edge portion.
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