Positioning Pin for Wafer Cleaning Equipment

JP1801613SActive Publication Date: 2025-06-20SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2025000598D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-01-14
Publication Date
2025-06-20
Estimated Expiration
2050-01-14

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Abstract

This article is used to fix a wafer at a predetermined position inside a wafer cleaning apparatus.
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