Information display image for wafer cleaning equipment

JP1809551SActive Publication Date: 2025-10-01SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2024027157D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-10-01
Estimated Expiration
2049-12-26

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Abstract

This image is used to display information such as the settings and operating status of the batch-type wafer cleaning device.
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