Information display image for wafer cleaning equipment

JP1809552SActive Publication Date: 2025-10-01SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2024027158D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-10-01
Estimated Expiration
2049-12-26

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Abstract

This image is used to display information about the alarm, such as the date and time when the alarm occurred and the location where the alarm occurred in the batch-type wafer cleaning device.
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