Information display image for wafer cleaning equipment

JP1809553SActive Publication Date: 2025-10-01SCREEN HOLDINGS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
JP2024027159D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-10-01
Estimated Expiration
2049-12-26

Smart Images

  • Figure 0001809553000001
    Figure 0001809553000001
  • Figure 0001809553000002
    Figure 0001809553000002
Patent Text Reader

Abstract

This image is used to set up maintenance for a batch-type wafer cleaning device.
Need to check novelty before this filing date? Find Prior Art