Process chamber collimator

JP1816375SActive Publication Date: 2026-01-13APPLIED MATERIALS INC
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Patent Information

Application Number
JP2024018761D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2024-03-21
Filing Date
2024-09-11
Publication Date
2026-01-13
Estimated Expiration
2049-09-11

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