Heater for heating semiconductor wafers and susceptors

JP1817419SActive Publication Date: 2026-01-20NUFLARE TECH INC
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
JP2025011820D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-06-16
Publication Date
2026-01-20
Estimated Expiration
2047-10-20

Smart Images

  • Figure 0001817419000001
    Figure 0001817419000001
  • Figure 0001817419000002
    Figure 0001817419000002
  • Figure 0001817419000003
    Figure 0001817419000003
Patent Text Reader

Abstract

The article is a heater for heating a wafer and a susceptor that holds the wafer in a semiconductor manufacturing device.
Need to check novelty before this filing date? Find Prior Art