Wafer holding chuck cover

JP1817420SActive Publication Date: 2026-01-20SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2025012606D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-06-25
Publication Date
2026-01-20
Estimated Expiration
2050-01-14

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Abstract

As shown in the reference diagram showing the state of use, this item is attached to the center of the top surface of a wafer holding chuck and has multiple purge holes formed along its outer edge.
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