Wafer holding heater

JP1818678SActive Publication Date: 2026-02-06SUMITOMO ELECTRIC INDUSTRIES LTD
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Patent Information

Application Number
JP2025016061D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2024-08-01
Publication Date
2026-02-06
Estimated Expiration
2049-08-01

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