Wafer inspection images

Abstract

The image of the present design is used to read and inspect a wafer to be analyzed, and is an image for setting the analysis range of the wafer. In this image, as shown in "Image Diagram," the analysis range display section is displayed on the wafer display section to be analyzed, and as shown in "Image Diagram 1 of Changed State," the analysis range display section can be enlarged and set to the desired size. Furthermore, as shown in "Image Diagram 2 of Changed State," the analysis range display section can be changed to match the shape of a notch or other part formed on the wafer, allowing for the setting of a range to be excluded from the analysis range. The area excluding the range to be excluded from the analysis range display section is the analysis range of the wafer.

Images