Rotating shaft sealing device

JP1828753SActive Publication Date: 2026-06-09SEALINK
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SEALINK
Filing Date
2026-01-21
Publication Date
2026-06-09

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Abstract

This article is a sealing device for a rotating shaft in a substrate processing apparatus for processing wafers, which prevents fluid leakage from between the rotating shaft and the housing. The rotating shaft is located in a hollow rotating section, and the rotating section rotates due to a motor attached to it, causing the rotating shaft to rotate. Furthermore, a wafer boat is attached to the rotating shaft, and the wafer rotates.
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