Crucible for vacuum deposition

Abstract

This product is a crucible for vacuum deposition, installed in the vacuum chamber of a vacuum deposition apparatus and used to deposit a predetermined thin film on the surface of a substrate to be processed. As shown in the reference perspective view, this product consists of a metal crucible body made of titanium, molybdenum, or stainless steel, which is pre-filled with deposition material, and a metal lid plate made of titanium, molybdenum, or stainless steel, which is provided at the top opening of the crucible body. The evaporation material filled in the crucible body is heated in a vacuum chamber under a vacuum atmosphere to vaporize or sublimate, and this vaporized or sublimated deposition material is released from the release opening formed in the lid plate to form a film on the surface of the substrate to be processed.

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