Crucible for vacuum deposition

Abstract

This article is a crucible for vacuum deposition, installed in the vacuum chamber of a vacuum deposition apparatus and used to deposit a predetermined thin film on the surface of a substrate to be processed. As shown in the reference perspective view, this article consists of a crucible body made of a metal such as titanium, molybdenum, or stainless steel, and a lid plate made of a metal such as titanium, molybdenum, or stainless steel provided at the top opening of the crucible body. The crucible body includes a first part in which the deposition material is pre-filled, and a second part connected above the first part, which is larger in length and width than the first part. The evaporation material filled in the first part of the crucible body is heated in a vacuum chamber in a vacuum atmosphere to vaporize or sublimate, and this vaporized or sublimated deposition material is released through the second part and out of the release opening formed in the lid plate to deposit a film on the surface of the substrate to be processed.

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