Rectifier board

JP1829131SActive Publication Date: 2026-06-15NUFLARE TECH INC
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
NUFLARE TECH INC
Filing Date
2025-12-01
Publication Date
2026-06-15

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Abstract

This item is a rectifier plate installed in semiconductor manufacturing equipment and the like to suppress the accumulation of by-products and other substances on the liner components inside the furnace.
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