Wafer cleaning equipment

JP1829442SActive Publication Date: 2026-06-17SCREEN HOLDINGS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2025-12-18
Publication Date
2026-06-17

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Abstract

This item is a wafer cleaning device equipped with a safety rail on the top surface to prevent wafers from falling.
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