Positioning pins for wafer cleaning equipment

JP1829475SActive Publication Date: 2026-06-17SCREEN HOLDINGS CO LTD
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2025-12-10
Publication Date
2026-06-17

Smart Images

  • Figure 0001829475000001
    Figure 0001829475000001
  • Figure 0001829475000002
    Figure 0001829475000002
  • Figure 0001829475000003
    Figure 0001829475000003
Patent Text Reader

Abstract

This item is used to fix wafers in a predetermined position inside a wafer cleaning apparatus.
Need to check novelty before this filing date? Find Prior Art