Positioning pins for wafer cleaning equipment

JP1829476SActive Publication Date: 2026-06-17SCREEN HOLDINGS CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
SCREEN HOLDINGS CO LTD
Filing Date
2025-12-10
Publication Date
2026-06-17

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Abstract

This item is used to fix wafers in a predetermined position inside a wafer cleaning apparatus.
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