Holder for transporting circuit boards

JP1830579SActive Publication Date: 2026-07-01TOKYO ELECTRON LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
TOKYO ELECTRON LTD
Filing Date
2025-12-05
Publication Date
2026-07-01

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Abstract

This item is a substrate transport holder for holding and transporting substrates such as semiconductor wafers. As shown in the "Reference Diagram Showing Usage," this item constitutes a part of a substrate transport device and is used to transport substrates while they are placed and held on the substrate holding part of this item.
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