Image for displaying semiconductor inspection processes

JP1834688SActive Publication Date: 2026-09-01HAMAMATSU PHOTONICS KK
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Patent Information

Application Number
JP2026001157D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2026-01-23
Publication Date
2026-09-01
Estimated Expiration
2051-01-23

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Abstract

This image is used to monitor and display the results of a fully automated semiconductor inspection process. The image includes a slot section, a recipe section, and a sequence section. The slot section displays the wafer loading status for semiconductor inspection in a list format, with color coding used to indicate the wafer's condition. Wafers currently being inspected are highlighted in blue. The recipe section displays various setting values, such as coordinate information. The sequence section displays the progress of the semiconductor inspection process. The image's color coding provides excellent readability, allowing for quick and easy understanding of the status at a glance.
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