Carrier positioning jig

Abstract

This item is a carrier positioning jig. As shown in the "Reference Diagram Showing Usage and Part Names," this item is used in CVD (chemical vapor deposition) equipment (e.g., microwave plasma CVD equipment) for depositing semiconductors and insulators such as diamond, when setting up a carrier (also called a wafer holder) by placing this item against a protruding ring on the stage or the inner wall of the chamber. When this item is placed against a protruding ring on the stage or the inner wall of the chamber, the carrier can be accurately positioned on the stage by simply placing the carrier so that it is inscribed on the tip of each spoke when setting up the carrier in the space in the center of the cross. After the carrier has been placed in the space in the center of the cross, this item can be removed from the stage to set up the carrier in the predetermined position.

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