Wind speed measuring jig

JP1836155SActive Publication Date: 2026-09-18SCREEN HOLDINGS CO LTD
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Patent Information

Application Number
JP2026007125D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2026-04-15
Publication Date
2026-09-18
Estimated Expiration
2051-04-15

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Abstract

This item is used to hold an air velocity sensor in a predetermined position when measuring the air velocity inside a wafer cleaning apparatus using the air velocity sensor. When in use, it is attached to a vacuum chuck with the air velocity sensor housed inside.
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