Carrier positioning jig

Abstract

This item is a carrier positioning jig. This item is used when setting up carriers (also called wafer holders) in CVD (chemical vapor deposition) equipment (e.g., microwave plasma CVD equipment) for depositing semiconductors and insulators, such as diamond. This item is used in a state where it is placed on the surface of the stage, as shown in the "Reference Diagram Showing Usage State and Names of Each Part". The position of this item relative to the stage is uniquely determined by fitting the circular recess formed on the bottom surface of this item into the convex shape on the surface of the stage. Therefore, when placing a carrier in the space in the center of the cross, this item can accurately position the carrier in the predetermined position on the stage simply by placing the carrier so that it is inscribed in the tip of each spoke. After the carrier has been placed in the space in the center of the cross, this item can be removed from the stage to set up the carrier in the predetermined position.

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