Plasma source assembly for substrate processing system

JP1837940SActive Publication Date: 2026-10-13APPLIED MATERIALS INC
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Patent Information

Application Number
JP2026008371D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Priority Date
2025-11-05
Filing Date
2026-05-01
Publication Date
2026-10-13
Estimated Expiration
2051-05-01

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