System with heated valve manifold assembly and method for manufacturing the system

Abstract

1. A system for semiconductor manufacturing that distributes fluid to one or more tools, the system comprising: at least one heated valve manifold assembly, the at least one heated valve manifold assembly comprising: a thermally conductive plate having a total surface area, the thermally conductive plate having a first side and a second side; at least one heater in contact with the at least one thermally conductive plate; a valve manifold comprising a plurality of valves and pipes, the plurality of valves and pipes having a total surface area, a portion of the surface area of ​​the plurality of valves and pipes in contact with the at least one thermally conductive plate; and one or more layers of insulation covering: (i) a majority of the surface area of ​​the plurality of valves and pipes, the portion of the surface area of ​​the plurality of valves and pipes in contact with the at least one thermally conductive plate; (ii) the at least one heater in contact with the at least one thermally conductive plate; and (iii) a majority of the surface area of ​​the at least one thermally conductive plate.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Application No. 63 / 057872, filed July 28, 2020, the entire contents of which are incorporated herein by reference for all possible purposes. [Background technology]

[0002] The present invention relates to a heating valve. tube The present invention relates to an assembly, a system having the same, a method for assembling the same, and a method for repairing the same.

[0003] It is often necessary to distribute chemicals to a series of points of use located in an industrial facility. For example, in a semiconductor manufacturing facility, liquid chemicals such as photoresist, slurries, hydrofluoric acid, hydrogen peroxide, ammonium hydroxide, etc. are distributed to various tools used in semiconductor manufacturing. Similarly, gas phase chemicals such as hydrogen fluoride, nitrogen trifluoride, and anhydrous ammonia may need to be distributed in the same manner. Typically, a source unit, which may be one or more pumps, a chemical container, or a pressure vessel, is connected to a series of valves that are used to connect the group of tools to a fluid circuit. tube The fluid circuit includes a valve manifold. tube As a result, the pipes or valve manifolds are tube Possible leakage from any of the valves tube The valve manifold is then deposited in the VMB. tube The boxes serve to contain any leaks. These boxes can utilize ventilation to provide a means of exclusion or protection from hazardous vapor phase process materials. Alternatively, if no hazardous materials are present, there may be no contained box at all. In this case, the entire assembly would be a valve manifold. tubeIt may also be called a panel or VMP.

[0004] Various tube may also be provided in a gas or chemical transport cabinet. Typically, a gas transport cabinet delivers gas from a supply container filled with gas to one or more tools in a semiconductor manufacturing facility. A chemical transport cabinet delivers fluid to one or more tools in a semiconductor manufacturing facility. The fluid may be a gas or a liquid when delivered to the tool from a supply container that typically has a solid, liquid or gas therein. With gas and chemical transport cabinets, it may be very complicated to enable the delivery of push or purge gas and / or the delivery of solvent cleaning or gas to pneumatic actuators or the like.

[0005] The valve manifold may be used in particular where the fluid is viscous at low temperatures and / or where room temperature is at or near the temperature at which the fluid changes into (or out of) the desired transport phase of the material. tube Used in, for example, valve manifolds tube It may be necessary or advantageous to heat valves and pipes used in a box, gas transport cabinet, or chemical transport cabinet to improve the flow of one or more fluids therein.

[0006] Typically, a multi-purpose heater is used to provide heat to each valve and pipe. tube By using electrical resistance heating wire, heat tracing, which surrounds each valve and pipe that makes up the tubeHeat is provided to the valves and pipes that make up the cabinet. Typically, one or more layers of insulating tape are wrapped over the wires to prevent heat from radiating to the surrounding environment. FIG. 1 shows heat tracing used around pipes in a prior art gas or chemical transport cabinet. When repairs are required to the valves or pipes, the heat tracing must be unwrapped and removed. While heat tracing is effective and reliable when there are no interruptions, when the heat tracing is removed, the wires often break and must be replaced. The heat tracing, and the insulating layers attached thereon, require a lot of labor and time to install during original manufacture, to remove for repairs, and to reinstall after the repairs have been made. There is a strong drive to maximize the uptime of all of the tools in a manufacturing facility, including the systems that supply the gases and chemicals required for manufacturing, and therefore the various systems that supply the gases and chemicals to the tools. tube There is a push to increase the uptime of all systems that have tube , and various tube There is also an effort to reduce the footprint of transport systems having therein an increase in the number of valves and pipes in a given space, including for pneumatic and chemical transport cabinets an increase in the size and number of feeds to the containers in those cabinets. tube There is a demand to accelerate the production of . The present invention addresses these problems. Summary of the Invention

[0007] In one aspect, the present invention provides a system for distributing fluid to one or more tools for semiconductor manufacturing, the system comprising at least one heated valve manifold. tube At least one heating valve manifold assembly tubeThe assembly includes a valve manifold comprising: a thermally conductive plate having a total surface area, the thermally conductive plate having a first side and a second side; at least one heater in contact with the at least one thermally conductive plate; and a plurality of valves and pipes having a total surface area, a portion of the total surface area of ​​the plurality of valves and pipes in contact with the at least one thermally conductive plate. tube and (i) a majority of the surface area of ​​the plurality of valves and pipes, said portion being in contact with at least one thermally conductive plate, (ii) at least one heater in contact with the at least one thermally conductive plate, and (iii) one or more layers of thermal insulation material covering a majority of the surface area of ​​the at least one thermally conductive plate.

[0008] In the system, one or more layers of insulation may include insulation boards, insulation mounted in a plastic cover; and / or insulated jackets, which may be made of soft insulating material or may be shaped to fit multiple valves and pipes. Shaped to fit the shape The thermally conductive plate may be made of a material that is shaped like a wire and / or shaped to provide a heated air volume toward the center of the thermally conductive plate, where many of the pipes and valves are attached to the thermally conductive plate. One or more layers of insulation in any of the embodiments described herein may be removably attached to the conductive plate by using fasteners selected from bolts, screws, clamps, cable ties, magnets, adhesives, zippers, snaps, clasps, bungee cords, hook and eye, or hook and loop strips (e.g., Velcro®) or the like.

[0009] In one alternative embodiment of the present invention, alone or in addition to any embodiment, a portion of the plurality of valves and pipes are in contact with the first side of at least one thermally conductive plate; and at least one heater is in contact with the second side of at least one thermally conductive plate. In a further embodiment, alone or in addition to any other embodiment, a portion of the plurality of valves and pipes are in contact with the first side of at least one thermally conductive plate, and one or more heaters are in contact with the first side of at least one thermally conductive plate. In a further embodiment, alone or in addition to any other embodiment, a portion of the plurality of valves and pipes are in contact with the first and / or second sides of at least one thermally conductive plate, and one or more heaters are in contact with the first and / or second sides of at least one thermally conductive plate. In any system, the pipes and valves may be attached to the thermally conductive plate, and / or one or more heaters may be attached to the thermally conductive plate. In one alternative embodiment, alone or in addition to any other embodiment, the assembly comprises a first insulator board attached to or covering a first side of the thermally conductive plate, and a second insulator board attached to or covering a second side of the thermally conductive plate. In one alternative embodiment, alone or in addition to any other embodiment, the pipe attached to the thermally conductive plate includes a heating valve manifold. tube It has a quick release connector that can be disconnected and reconnected for rapid removal and replacement of the assembly. In one alternative aspect, alone or in addition to any other aspect, the system of any of the preceding claims further comprises a cabinet and at least one container of fluid, the cabinet including a heating valve manifold. tube In one alternative embodiment, alone or in addition to any other embodiment, the system of any of the preceding claims further comprises a cabinet, the cabinet including a heating valve manifold. tube Houses the assembly.

[0010] In one alternative embodiment, alone or in addition to any other embodiment, a heating valve multi-function device is provided. tube Assembly includes heating valve tube It is attached to a wall or panel using spacers to prevent contact between the assembly and the wall or panel. tube Any system comprising the assembly may further comprise a backup heater, one or more temperature sensors, one or more controllers, and / or a controller for the one or more heaters. Any system may further comprise a gas or chemical transport cabinet, a valve manifold, tube Box or valve manifold tube In addition, any heating valve manifold of any system may be used. tube The assembly may have one or more layers of insulator removably attached to the conductive plate using a substantially adhesive-free or adhesive-free fastener. In one alternative aspect, the invention provides a method of making the system of the invention, comprising: tube contacting and / or attaching one or more heaters to the thermally conductive plate; covering and / or attaching one or more layers of insulation to the one or more heaters over a majority of the surfaces of the heating pipes and valves and / or over a majority of the surface area of ​​the thermally conductive plate, tube Further provided is a method of forming the assembly. In one alternative embodiment, the method comprises: tube By combining the pipes and valves, the valve manifold can be tube In fluid tight The method further comprises the step of creating a seal. In one alternative embodiment of the method of manufacturing, alone or in conjunction with other embodiments, the method of manufacturing includes attaching one or more layers of insulation with mechanical fasteners. In any method, the step of attaching one or more layers of insulation may be substantially free or free of adhesives. One alternative embodiment, alone or in conjunction with other embodiments, is a method of repairing a system, comprising removing one or more layers of insulation to remove a valve manifold. tubeThe method includes the steps of: accessing the defective valve, pipe, or other component; repairing the defective valve, pipe, or other component; and reinstalling one or more layers of insulation. In another embodiment of the method of repairing, the removing step is preceded by the step of removing one or more mechanical fasteners, and the reinstalling step includes the step of reinstalling the one or more mechanical fasteners. In another embodiment of the invention, the method of repairing a system includes removing a heated valve, pipe, or other component as a single unit from the system. tube The process of removing the assembly and replacing it with a new already assembled heating valve manifold tube In one alternative embodiment of the method of repair, the removing step is preceded by the step of removing one or more mechanical fasteners and opening a number of quick release connectors, and the replacing step includes the steps of reinstalling the one or more mechanical fasteners and closing the number of quick release connectors.

[0011] The present invention relates to a heating valve. tube This provides for faster manufacture and repair of assemblies and systems using the same. By removing a small number of fasteners, typically mechanical fasteners such as nuts, bolts, screws and / or others, and one or more layers of thermal insulation, a defective valve, for example, or other defective component, can be easily accessed and repaired, and then the layer or layers of thermal insulation can be reinstalled using one or more fasteners, resulting in a heated valve assembly. tube The assembly is ready for reuse after any necessary purging steps. tube The method of repairing the assembly may include the steps of closing any valves to the process gas supply before removing any fixtures and / or insulation layers, closing the heating valves and manifolds if necessary due to the nature of the process gas. tube Assembly and / or gas cabinet or valve manifold tube Box or valve manifold tube There is a step of purging and / or evacuating the panel. tubeThe assemblies can be manufactured and repaired without the labor-intensive process of surrounding each pipe and valve multiple times with layers of heat trace wire and thermal insulation. tube The use of assemblies speeds up the manufacture and repair of the system. tube If a pipe or valve or other component of the assembly is not working, the entire heating valve manifold tube The assembly can be removed after unscrewing any pipe connections, unplugging any electrical connections, and removing any mounting fixtures, if any, and then replacing the entire assembly with a new heating valve manifold. tube The assembly can be replaced with the removed non-operating heating valve manifold. tube The assembly may then be sent back to the factory for curing, quality analysis and testing, and possibly later reuse. tube Maximize the uptime of all tools in the facility, which are supplied with the gases and chemicals required for production from a system with assemblies and heating valves. tube The assembly of the present invention allows for increased uptime of the system. tube The assembly is versatile by eliminating the space required for a layer of thermal insulation around each valve and pipe. tube It also allows for maximizing space for pipes and valves inside, thereby allowing for an increased number of valves and pipes and supply containers in the same footprint or cabinet. These and other advantages are provided by the present invention.

[0012] While the specification is intended to be complete with claims separately pointing out the subject matter which applicant regards as applicant's invention, it is believed the invention will be better understood when taken in conjunction with the accompanying drawings, in which: [Brief description of the drawings]

[0013] [Figure 1]FIG. 1 is a partial front view of the interior of a prior art system showing pipes and valves surrounded by heat tracing and thermal insulation.

[0014] [Diagram 2] FIG. 2 is a partial front view of the interior of the system of the present invention showing one embodiment of a heating valve manifold assembly.

[0015] [Diagram 3] FIG. 13 is a partial front view of the interior of the system of the present invention showing a second embodiment of a heating valve manifold assembly.

[0016] [Figure 4] FIG. 2 is a front view of a heated valve manifold assembly used in the system of the present invention with the layer of thermal insulation removed.

[0017] [Diagram 5] FIG. 2 is a partially exploded view of a portion of a heating valve manifold assembly used in the system of the present invention.

[0018] [Figure 6] FIG. 2 is a rear perspective view of one embodiment of a heating valve manifold assembly used in the system of the present invention.

[0019] [Figure 7] FIG. 2 is a perspective cross-sectional view of another embodiment of a system of the present invention having a heated valve manifold assembly of the present invention therein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Detailed Description of the Invention

[0021] The systems of the present invention include VMBs and VMPs, gas and chemical transport systems, or any system that transports fluids to one or more tools in a facility. The description of one type of system is not meant to be limiting. Additionally, as used herein, insulation means thermal insulation and may include heat reflective materials if desired.

[0022] 1 shows a number of pipes 12 and valves 14 in a prior art system, each pipe and valve having heat tracing (not shown) thereon and taped insulation 16. As shown, the system may be a gas or chemical supply cabinet having a housing 65, a supply container 83 and a refill container 84. As previously mentioned, while effective, installing, removing and reinstalling the taped insulation and heat tracing is time consuming and cumbersome. The layers of heat tracing and insulation take up space, requiring empty space around the pipes and valves for repair personnel to reach in and / or make repairs.

[0023] 2 and 3 show portions of the same or similar system 100, such as the gas or chemical delivery system shown in FIG. 1, with similarly numbered pipes 12 and valves 14, but with the heated valve manifold of the present invention. tube Various embodiments of the assembly 20 are used. tube Various components connected to the assembly 20 or in the system tube The pipes leading from the assembly 20 can be heated and insulated using heat tracing (not shown) and insulation 16 taped to the pipes, however, the area of ​​the pipes and valves and the heated valve manifold used in the system of the present invention may vary. tubeAt least a small percentage of the area of ​​those pipes and valves in contact with the thermally conductive plate of the assembly is heated by the thermally conductive plate of the present invention, thereby eliminating the need for heat tracing and overlying wrapped insulation tape. Because the pipes and valves are at least substantially, if not entirely, made of metal, by heating the pipes and valves in contact with the thermally conductive plate, the fluids, gases or chemicals in those pipes and valves are also heated thereby. Preferably, the valve manifold is heated by the thermally conductive plate as previously described. tube At least most or most of the pipes and valves of the assembly are in contact with the thermally conductive plate. tube For most or the remainder of the surface area of ​​the pipes and valves that are part of the assembly, at least a portion of that surface is heated valve manifold. tube At least some portion of the surface area of ​​those pipes and valves of the assembly that are not in contact with the thermally conductive plate are preferably in close proximity to the thermally conductive plate. The close proximity is relative to the size of the pipes in the system, but is preferably separated from the thermally conductive plate by a distance less than equal to the diameter of the largest diameter pipe connected to the thermally conductive plate. Alternatively, in some embodiments, the close proximity is preferably less than the distance equal to the diameter of the largest diameter pipe connected to the thermally conductive plate. tube It means that at least the nearest portion of the pipe or valve of the assembly is separated from the surface of the thermally conductive plate by less than 10, 5, 4, 2 or 1 centimeters.

[0024] The heating valve of the present invention tube The outer layer of insulation 22, which is part of the assembly 20, is as shown in Figure 2. The outer layer of insulation 22 may comprise one or more pieces of insulation board or insulating foam. The insulation includes at least a thermally conductive plate (not shown), a heater (not shown), and a valve manifold with pipes and valves in contact with the thermally conductive plate. tubeThe insulation may be a rigid sheet, such as rigid foam or board, cut to cover most of the area. Additionally, as known to those skilled in the art, insulation may be a wide variety of materials. tube (chemical supply lines, purge gas, pneumatic gas lines, tubes or pipes) or tube (fluid supplied to tool, drain line) Manifold to fluid supply pipe tube Alternatively or additionally, the insulation board or foam may be cut or shaped to allow passage of the valves and pipes through the insulation to make the necessary connections. tube Other components that are part of the assembly It follows the shape of the base For valves and pipes that are not in contact with the plate, have portions that protrude from the plate, or are adjacent (offset) to the thermally conductive plate, an additional layer of insulation may be added on top of the layer or layers of insulation, with at least a portion of the bottommost layer of insulation covering and / or in contact with at least a portion of the thermally conductive plate and / or at least a portion of the valve or pipe that is in contact with the thermally conductive plate. The insulation may be cloth, board, or foam, and may be made of polystyrene foam, urethane foam, fiberglass, ceramic wool, cellulose, cork, silicone rubber, perlite, vermiculite, or others known in the art. An additional (outer) layer of insulation, shown in FIG. 2 as 97 and 98, is formed to fit valves that protrude from or are offset (or adjacent) to the thermally conductive plate. Insulation layers 97 and 98 are generally rectangular and may be contoured to fit the bulb and / or may be retained by hook and loop strips or the like attached to the underside of the insulation layers. The term insulation layers is intended to be illustrative of, but not limiting of, the various valve configurations of the present invention. tube Includes pieces or parts applied or attached to an assembly.

[0025] For example, in an alternative embodiment shown in FIG. tube One or more layers, or at least the outer layer, of insulation that is part of the assembly 20 may be tube The thermal jacket 28 may take the form of a thermal jacket 28 that surrounds and / or covers at least a portion of the one or more thermally conductive plates and the one or more heaters. As shown in FIG. tube , one or more thermally conductive plates, and one or more heaters, with openings for valves and pipes as necessary. The thermal jacket is attached using fasteners 27, including any of those mentioned above and others, such as zippers, snaps, clasps, bungee cords, hook-and-eye or hook-and-loop strips (e.g., Velcro®), or the like. In yet other embodiments, other insulator materials can be used, such as insulating cloth. In yet other embodiments, a combination of several materials, or several different layers of materials, can be used. For example, a multi-layer tube Part of, for example, tube The rear side of the assembly may include (or be covered by) a rigid insulation board, and the front side may be covered by a thermal jacket. tube The front side of the assembly is shown in Figures 2 and 3. Alternatively and in addition, a heated valve manifold may be used. tube Part or all of the heater may be covered by a fitted plastic cover (not shown) to protect the insulating layer underneath. The plastic cover and the underlying insulating layer or layers may be attached to the heater. tube Installation of assemblies to pipes and valves tube and is provided with the necessary openings to allow for electrical connections. The plastic cover may have an insulator attached to it.

[0026] Preferably, the insulator is sized to cover a majority, more than 75%, more than 90% or more than 99% of the exterior (surface area) of one or more thermally conductive plates, all exterior (surface area) of pipes and valves in contact with one or more thermally conductive plates, and a majority of the exterior (meaning the part of one or more heaters not in contact with the thermally conductive plates) of one or more heaters in contact with one or more thermally conductive plates or attached to one or more thermally conductive plates. In a more preferred embodiment, the insulator is sized to cover a majority, more than 75%, more than 90% or more than 99% of the surface area of ​​one or more thermally conductive plates, all exterior (surface area) of pipes and valves in contact with the thermally conductive plates, and a majority, more than 75%, more than 90% or more than 99% of the exterior surface area of ​​one or more heaters in contact with one or more thermally conductive plates or attached to one or more thermally conductive plates. Heated valve manifolds that are not covered by one or more layers of insulation tube The assembly parts are minimized to prevent loss of heat to the atmosphere or to the rest of the system. In some embodiments, the entire heating valve manifold is tube The assembly is covered by a thermal insulator. The insulator layer may cover the thermally conductive plate or the pipes or valves attached thereto, but may or may not be in contact with the entire surface of the conductive plate that is not in contact with the heater or heaters and with the pipes and valves. Furthermore, if connections must be made to other valves and pipes, the valves may remain uncovered by the insulator, but preferably the uncovered portions of the valves are minimized. Covered by the insulator does not necessarily mean in contact with the insulator, but in some embodiments covered may mean both covered by the insulator and in contact with the insulator.

[0027] In some embodiments, insulation may be placed around the edges of the thermally conductive plate, such as a picture frame or part of a picture frame, for example by using strips of insulation board, for example by two vertical strips and one or two horizontal strips across the top and / or bottom of the thermally conductive plate, and then a second, larger layer of insulation board may be attached to the top of the picture frame. By applying a layer of insulation in this manner, a heating volume 64 (defined by the surface of the thermally conductive plate on one side, the vertical and / or horizontal strips of insulation preferably located around the outer edge of the thermally conductive plate, and the underside of the layer of insulation attached to the vertical and / or horizontal strips of insulation) is created, which allows the heat in the heating volume to be retained and provided more uniformly to the pipes and valves located in contact with the thermally conductive plate in the heating volume. Typically, the heating volume is an air-filled or inert gas-filled space that is heated.

[0028] The layer or layers of insulation may be held to the thermally conductive plate by any attachment mechanism, such as one or more selected from screws, nuts, bolts, Velcro, straps, clamps, zippers, cable ties, magnets, or adhesive. In a preferred embodiment, the insulation board and strips of insulation board are secured by partially threaded bolts that pass through holes in the thermally conductive plate, and washers and corresponding threaded nuts. In some embodiments, the removable fasteners or attachment mechanisms for the insulation do not include adhesives.

[0029] FIG. 4 shows the heating manifold with the top layer of insulation board removed. tube 1 shows a portion of one embodiment of an assembly 20, which includes a valve manifold having a plurality of valves 14 and pipes 12. tube 33 and a portion of the thermally conductive plate 400 below the top layer of the insulator board. tube33 may further include electrical components and wires, for example to a controller and / or sensors (not shown in FIG. 4). As shown, in FIG. tube Assembly 20 comprises a thermally conductive plate 400 to which the pipes and valves may be in contact and / or physically attached or located by any number of attachment mechanisms 88. In the embodiment depicted in FIG. 5, these mechanisms may include standoffs or Z-blankets secured to either the valves or pipes, screws attached directly to the body of the valve through the conductive plate, and / or tie-down or anchoring locations to the back plate of the VMP or VMB or to the housing (e.g., back wall) of the gas or chemical delivery system. tube Fasteners for securing the assembly may be provided. In Fig. 4, the mounting mechanism is a number of brackets 88, preferably constructed of a material having suitable thermal conductive properties, such as a metal, e.g., aluminum, which may be bolted or screwed to the plate 400 or otherwise attached to the plate 400 alone. In the embodiment shown in Fig. 4, there are two (vertical) strips 29 of insulator board, or the like, that cover the vertical ends of the thermally conductive plate 400. When the top layer of insulator board (not shown) is attached to the insulator strips 29 (by holes in the top layer of insulator board that allow attachment of the pipes to the valves), a heating volume 64 for the pipes and valves is created below the top layer of insulator board. Before adding the top layer of insulation, further insulation may be added to cover the pipes and valves, if desired, especially at or near the top end 75 and / or at or near the bottom end 76 of the thermally conductive plate 400. Alternatively, an additional layer of insulation may be added, such as a thermal jacket (not shown in FIG. 4). Bolt holes 81 are shown in FIG. 4 to receive bolts that hold the layer of insulation to the thermally conductive plate 400.

[0030] For the embodiment shown of the chemical transport cabinet, the thermally conductive plate may be one of the walls of the housing 65, such as the back wall, but is preferably a separate thermally conductive plate or plates mounted on the cabinet. The wall or panel may be a valve manifold. tube Box, valves tube Although it may be used as a heating plate for the panel, a separate thermally conductive plate or plates may be used in conjunction with the heating valve of the present invention. tube The thermally conductive plate is preferably used in a system having an assembly. The thermally conductive plate may be a metal plate. Currently preferred metals are aluminum and copper and their alloys, but any metal capable of conducting heat may be used. The thermally conductive plate may be of any shape. The thermally conductive plate is preferably rigid, i.e., the valve manifold of the present invention is preferably rigid. tube Preferably, the thermally conductive plate is a valve manifold. tube The part of the assembly 20 that needs to be heated, at least a portion, at least a majority, at least more than 80%, at least more than 90%, or ideally more than 99% of the pipes and valves are sized to be heated by and / or in contact with one or more thermally conductive plates. tube Pipes that are part of the VMB or VMP do not include gas or chemical transport cabinet systems or piping and valves outside the VMB or VMP that distribute process gases or chemicals to the tools. tube The thermally conductive plate or plates in contact with the pipes and valves are typically generally rectangular in shape, but may be any shape, and are preferably multi-layered. tube and sized to have sufficient surface area for a portion of one or more heaters; tube And various tube Effectively heats the fluid in the pipes and valves. tubeIn systems where there is a cabinet, box or housing in which the assembly must fit, the thermally conductive plate and the heating valve manifold tube The assembly is sufficiently diverse. tube The thermally conductive plate is sized to contact the pipes and valves of the system and preferably provides at least a 35%, at least a 50%, or at least a 60% reduction in the area of ​​the pipes and valves that must be heated by the heat tracing and insulated by the insulating tape in the system. tube The valve manifold may be physically strong (having a thickness or other dimension) enough to support the weight of the valves and pipes 33 and the weight of the heater(s), and therefore the valves and pipes and the heater(s) may be attached and / or mounted to the thermally conductive plate(s). tube The heater may be in contact with or attached to the opposite side of the thermally conductive plate, or may be a valve manifold. tube and the one or more heaters may be in contact with and / or attached to the same side of the thermally conductive plate. Alternatively, the thermally conductive plate may be physically strong enough to support only the weight of the heaters, and the thermally conductive plate may be a valve manifold. tube (including pipes and valves) and has a heater attached to it. tube The heat transfer valve may be in contact with a first side of the heat transfer plate and the heater may be in contact with and / or attached to an opposite side, a second side of the heat transfer plate. In one alternative embodiment, the heat transfer plate is a valve manifold. tube In that embodiment, the conductive plate may be in pressure contact with the heater or heaters on a first side and may be physically strong enough to support the weight of the valves and pipes of 33 or the heater or heaters. tube are on the same (first) or opposite (second) sides (not shown) of the thermally conductive plate, all of which are multi-layered. tube Preferably, the thermally conductive plate is supported by a multi-layered tubeand is physically strong enough to support the weight of one or more heaters attached thereto.

[0031] The heating valve manifold shown in Figures 4 and 5 tube In the assembly 20, the heater 410 is a valve manifold. tube In an alternative embodiment, not shown, on the side of the heat conductor plate 400 opposite 33, one or more heaters may be valve manifolds. tube In yet other embodiments not shown, the heater may be in contact with or wrapped around the lower end 76 of the thermally conductive plate 400, and / or in yet other embodiments, in contact with any portion of the thermally conductive plate 400. tube 33 and heater 410 are on the opposite side of the thermally conductive plate 400. tube In embodiments where the assembly is in a chemical or gas transport cabinet or other cabinet, e.g., for use in a VMB, an access panel is provided on the opposite side of the cabinet or the cabinet has removable walls allowing access to both sides of the thermally conductive plate.

[0032] FIG. 5 shows the heating valve multi-purpose of the present invention. tube5 shows a partially exploded front view of one embodiment of a portion of the assembly. FIG. 5 shows an insulator layer 22, e.g., an insulator board. The insulator layer is sized to cover a first side 41 of a thermally conductive plate 400. The thermally conductive plate 400 is shown with a valve assembly 33 attached to the first side 41 of the thermally conductive plate 400. One or more heaters 410 are attached to or in contact with a second side (not shown) of the thermally conductive plate 400. The heaters may be resistive wires that can be attached directly to the second side (opposite the first side) of the thermally conductive plate by adhesive tape, or heating mats or pads that are attached directly to the second side of the thermally conductive plate by adhesive, screws, or bolts. Resistive wires and heating mats or pads are commercially available from a number of sources. Alternatively, the heater or heaters may utilize other heating means including induction (the thermally conductive plate can act as a susceptor), radiation, convection, or a heat exchange pipe having a heating fluid therein that is in contact with the thermally conductive plate, preferably on one of the sides of the thermally conductive plate. Preferably, the heater is sized to cover much of the surface area of ​​one of the sides, such as the second side (not shown) of the thermally conductive plate. In addition, as shown in FIG. 5, a heating valve manifold is provided. tubeThe assembly 20 further comprises an insulator layer 420 covering and / or in contact with one or more sides of the heater away from the side of the heater in contact with the second side of the thermally conductive plate. Preferably, the insulator 420 is sized to at least match the size of the surface area of ​​the second side (not shown) of the thermally conductive plate 400. The insulator layer 420 may be comprised of any number of insulator materials, preferably the insulator material or materials have a controllable shape, such as foam sheets (soft or hard), silicone rubber, fiberglass, ceramic wool, or "blow-in" foam. The insulator 420 may be attached to the heater 410 and / or the thermally conductive plate 400 by using adhesives, screws, bolts, fasteners as described above, or any other fasteners. When the insulator is assembled to cover one or more heaters in contact with and / or attached to the thermally conductive plate 400, the insulator 420 may be formed and placed to surround one, more or all of the edges 75, 76, 77 and 79 of the thermally conductive plate 400. When the insulator 420 surrounds the edges on a portion of the opposing surface of the thermally conductive plate, the insulator 420 can be used to define and form a heating volume as described in connection with the embodiment shown in FIG.

[0033] 5 illustrates optional bolt hole 81 and optional bolt hole 82. As shown, bolt hole 81 is used to allow at least some of the insulation layers 22 to be connected to the heating valve manifold. tube The assembly is attached to a thermally conductive plate 400. tube Valve manifold with assembly tube A heating valve manifold can be attached to the back wall of a chemical or pneumatic transport cabinet, box or panel, or any other system wall, using bolt holes 82. tubeAs shown in FIG. 5, an optional spacer 89 (e.g., a plastic, wood, ceramic, or rubber washer) can be used to mount the heated valve manifold. tube If mounted, the heater valve manifold may be held away from the wall or plate or any other possible conductive surface in a cabinet, panel or box. Alternatively, any mounting mechanism and fasteners may be used to hold the heater valve manifold in contact, together as a unit, and / or to hold the heater valve manifold in place. tube Place the assembly in the correct location in the system and heat the valve manifold. tube Layers and individual components of an assembly may be attached and / or held together.

[0034] Furthermore, Figure 5 shows the heating valve manifold. tube An assembly 20 communicates with a controller (not shown) to control the heating valve manifold. tube 1 shows that the assembly may include one or more temperature sensors 78 that adjust the heat output from one or more heaters that are part of the assembly. If the temperature sensor detects a low temperature, the heater will increase its heat output, and if the temperature sensor detects a high temperature, the heater will decrease its heat output. Additionally, the temperature sensor communicates heater failure to a controller (not shown). (More preferably, the controller is used to turn the heaters on and off based on the demand for fluid from the system. Electrical wiring from the heaters and sensors are not shown.) In some embodiments, during manufacture, if one heater fails, a second heater will be turned on, thereby allowing the heating valve to be multi-manifold. tube Heating valve manifold for extending the life of the assembly and therefore heater replacement tube One or more backup heaters may be connected to the heating valve manifold so that assembly shutdown can be avoided. tube It can be provided in an assembly.

[0035] In addition, in some embodiments, the heating valve tube In the event that repairs are required to any component of the assembly, the entire heating valve manifold of the present invention tube The assembly is disconnected, removed and replaced with a new heating valve assembly manufactured at a remote location. tube Replace the assembly and heat valve tube Assembly downtime can be minimized, which can be achieved by using a system that supplies one or more tools, e.g., a valve manifold. tube This can be done while boxes, valve panels, gas transport cabinets or chemical transport cabinets are in use. tube Quick release arrangement to aid in quick removal of the assembly tube Attachment 95 (shown in FIGS. 4 and 6) is attached to the valve manifold around the edge of thermally conductive plate 400. tube 33. Additionally, optional electrical wires may be provided attached to the thermally conductive plate to facilitate disconnecting and reconnecting the electrical connector 96 (shown in FIG. 6).

[0036] FIG. 6 shows the valve manifold of the present invention. tube FIG. 6 illustrates a rear perspective view of one alternative embodiment of assembly 20, similar to that illustrated in FIG. 5. The same numbers have been used to label parts already described in the previous figures. Additionally, FIG. 6 illustrates electrical wires 94 that facilitate disconnecting and reconnecting electrical connector 96. As shown in FIG. 6, in some embodiments, ends 75, 76, 77 and 79 of the heating plate are not covered by one or more layers of insulation, while in other embodiments, the thermally conductive plates (and / or valve manifolds thereon), including the ends of thermally conductive plate 400, are not covered by one or more layers of insulation. tube Insulation is added to cover the entire surface area of ​​the .

[0037] FIG. 7 shows the valve manifold of the present invention. tube 1 shows a system 100 according to one alternative embodiment of the present invention, comprising an assembly 20. The system 100 shown is a valve manifold. tube Box (VMB). Valve manifold tubeThe box includes a cabinet 72 with two doors, although only one door 71 is shown present with the second door removed, thereby exposing the valve manifold behind the door. tube The assembly is shown with the valve manifold tube The assembly includes the insulator 22, the insulator pieces 97 and 98 covering the valve, and the manifold including the pipe 12 and the valve 14. tube 33 and a thermally conductive plate 400 are further shown in cutaway view behind the insulation 22. Not shown are one or more heaters, preferably on the opposite side of the thermally conductive plate 400, and one or more further layers of insulation. As shown, the system includes one or more exhaust pipes 73 (preferably one exhaust pipe with a valve manifold). tube For assembly 33, preferably one exhaust pipe is multi-way. tube (for any leakage from the cabinet 72 contained therein) and the valve manifold tube 33, and one or more process material supply pipes 67 shown with heat tape thereon, and a heating valve manifold. tube and one or more process material supply pipes exiting the assembly 20 and supplying a process or tool with process material from the VMB. As shown, the system 100 further includes an outlet 68. Preferably, the system includes a valve manifold. tube It further comprises a controller (not shown) and electrical attachments for controlling the heaters and / or valves therein.

[0038] One advantage of the present invention is reduced manufacturing time and reduced repair time for systems having pipes and valves that are heated within. tube In the valve tubeWhen pipes and valves need to be heated, the pipes and valves are carefully surrounded by resistance wire (heat trace) and then a second layer of adhesive insulation. When repairs are required, the insulation and heat trace must be removed from the affected valve or pipe, and the heat trace and insulation must then be reinstalled on the repaired pipe and / or valve. Additionally, if faulty or broken heat trace is the problem, the heat trace and insulation must be attached to the entire valve manifold. tube The heat trace must be removed from the system, replaced with new heat trace and surrounded by insulation. Installing, removing and reinstalling the heat trace and insulation in conventional systems is a time consuming task.

[0039] By using the system of the present invention, manufacturing and repair times can be significantly reduced. tube There are many different ways to manufacture a system having assemblies. tube contacting and / or attaching the pipes and valves to the thermally conductive plate; contacting and / or attaching one or more heaters to one or more side surfaces of the thermally conductive plate; covering, contacting and / or attaching one or more layers of insulation to the one or more heaters, over a majority of the surface area of ​​the pipes and valves heated by or in contact with the thermally conductive plate, and / or over a majority of the surface area of ​​the thermally conductive plate. More preferably, the step of covering, contacting and / or attaching one or more layers of insulation is over more than 75%, more than 90% or more than 99% of the surface area of ​​the one or more thermally conductive plates, over a majority, more than 75%, more than 90% or more than 99% of all surface areas of pipes and valves in contact with the thermally conductive plates, and over a majority, more than 75%, more than 90% or more than 99% of the external surface area of ​​one or more heaters in contact with or attached to the one or more thermally conductive plates. tube The pipes and valves are attached, screwed, soldered or otherwise joined to form a valve manifold. tube The method may further include the step of making tube Some or all of the components are first connected together to form a valve manifold. tube We make valves for various purposes. tube Alternatively, the valve manifold may be attached to or in contact with a thermally conductive plate. tube The components are attached to a thermally conductive plate and connected together in separate steps to form a multi-step process on the thermally conductive plate. tube Alternatively, in one alternative embodiment, the valves and portions of the pipes may be connected together in separate steps and then attached to the thermally conductive plate in a separate step, resulting in a valve manifold attached to the thermally conductive plate. tube In one alternative embodiment, a thermally conductive plate is first attached to the system and the valve manifold is tube may be manufactured separately and attached to the thermally conductive plate in a single step, or the valve manifold may be tube The components are attached to each other and to a thermally conductive plate in successive steps, and finally the valve manifold is attached to the thermally conductive plate. tube or bring about a wide range of tube The components may be attached to the thermally conductive plate, together and simultaneously. The manufacturing process may further include one or more steps of adding insulation, which may be performed in any order. For example, one or more layers of insulation may be attached to the one or more heaters after the one or more heaters are attached to the thermally conductive plate, and the valve manifold may be attached to the one or more heaters after the one or more heaters are attached to the thermally conductive plate. tube After mounting on the thermally conductive plate, tube One or more layers of insulation covering the thermally conductive plate may be attached to or in contact with the thermally conductive plate.

[0040] In one embodiment, the heating valve of the present invention tubeA method of repairing a system comprising the assembly includes removing one or more layers of insulation by removing one or more fasteners (which may be mechanical fasteners such as screws, nuts, bolts, washers, zippers, hook-and-loop strips, etc.) to access a number of pipes and valves that are heated by, in contact with, and / or attached to the thermally conductive plate; repairing or replacing defective valves or pipes that are heated by, in contact with, and / or attached to the thermally conductive plate; and reinstalling the one or more layers of insulation using the one or more fasteners.

[0041] Heating valves tube The assembly is manufactured separately and then the heating valve manifold is tube Connect the assembly pipes to the receiving pipes, or to the heating valve manifold in the system if none exist. tube The heating valve manifold can be connected via corresponding connectors provided on the pipes of the assembly and the receiving pipes in the system. tube Assembly, heating valve, various tube The heating valve manifold can be inserted into a box, cabinet or panel that has pipes that are adapted to receive the pipes that are part of the assembly. tube Methods of manufacturing or repairing a system having an assembly are also contemplated by the present invention. Reusable, quick connect connectors, such as the VCR coupling manufactured by Swagelok Company, can be utilized to provide a repeatable means of joining two sections of fluid piping together in ultra-high purity applications, such as those commonly found in the semiconductor industry. When repair is required, the previously mentioned defective heated valve manifold in the system can be replaced. tube The assembly is assembled by disconnecting the quick connect connectors and removing the entire heating valve manifold. tube By removing the assembly, it can be removed and replaced with a new or refurbished heating valve manifold. tube The assembly is preferably connected to the heating valve manifold by the same mating connector. tube When replacing the assembly, the same pipe and valve layout is reconnected as already there. Heating Valve Manifold tube If electrical components are present as part of the assembly, the heating manifold shall include quick release electrical connectors which function similarly to quick connect pipe connectors. tube It may also be provided as part of an assembly.

[0042] Although the present invention has been described with reference to preferred embodiments, many modifications, additions, and omissions can be made therein, as will be appreciated by those skilled in the art, without departing from the spirit and scope of the invention. The use of "comprising" includes the narrower "consisting essentially of" and "consisting of." Examples of embodiments of the present invention are listed in the following items [Aspect 1] to [Aspect 31]. [Aspect 1] 1. A system for distributing fluid to one or more tools for semiconductor manufacturing, comprising at least one heated valve manifold assembly, the at least one heated valve manifold assembly comprising: a thermally conductive plate having a total surface area, the thermally conductive plate having a first side and a second side; at least one heater in contact with the at least one thermally conductive plate; a valve manifold comprising a plurality of valves and pipes, the plurality of valves and pipes having a total surface area, a portion of the surface area of ​​the plurality of valves and pipes in contact with the at least one thermally conductive plate; and one or more layers of insulation covering: (i) a majority of a surface area of ​​the plurality of bulbs and pipes, the majority of the surface area of ​​the plurality of bulbs and pipes, the portion of which is in contact with the at least one thermally conductive plate; (ii) the at least one heater in contact with the at least one thermally conductive plate; and (iii) a majority of a surface area of ​​the at least one thermally conductive plate. A system comprising: [Aspect 2] 2. The system of embodiment 1, wherein the one or more layers of insulation comprise an insulation board. [Aspect 3] 3. The system of any one of the preceding claims, wherein the one or more layers of insulation comprise insulation attached to a plastic cover. [Aspect 4] The system of any one of the preceding aspects, wherein the one or more layers of insulation include an insulating jacket made of a soft insulating material. [Aspect 5] 5. The system of any one of aspects 1-4, wherein the one or more layers of insulation are removably attached to the conductive plate using fasteners selected from bolts, screws, clamps, zippers, Velcro®, cable ties, magnets, adhesives, snaps, clasps, bungee cords, and hooks and eyes. [Aspect 6] 6. The system of any one of the preceding aspects, wherein the one or more layers of insulation are custom made to conform to the shape of the valves and pipes. [Aspect 7] 7. The system of any one of the preceding aspects, wherein the one or more layers of insulation are shaped to provide a heated air volume when the plurality of pipes and valves are attached to the thermally conductive plate. [Aspect 8] 8. The system of any one of aspects 1-7, wherein a portion of the plurality of valves and pipes is in contact with a first side of the at least one thermally conductive plate; and the at least one heater is in contact with a second side of the at least one thermally conductive plate. [Aspect 9] 9. The system of any one of the preceding aspects, wherein a portion of the plurality of valves and pipes are in contact with a first side of the at least one thermally conductive plate; and the one or more heaters are in contact with a first side of the at least one thermally conductive plate. [Aspect 10] The system of any one of aspects 1-9, wherein the pipes and valves are attached to the thermally conductive plate. [Aspect 11] The system of any one of the preceding aspects, wherein the one or more heaters are attached to the thermally conductive plate. [Aspect 12] 12. The system of any one of aspects 1-11, wherein the assembly comprises a first insulator board attached to or covering a first side of the thermally conductive plate and a second insulator board attached to or covering a second side of the thermally conductive plate. [Aspect 13] 13. The system of any one of aspects 1-12, wherein a pipe attached to the thermally conductive plate has a quick release connector that can be disconnected and reconnected for rapid removal and replacement of the heating valve manifold assembly. [Aspect 14] 14. The system of any one of aspects 1-13, further comprising at least one container of fluid and a cabinet, the cabinet housing the heating valve manifold assembly and the at least one container. [Aspect 15] 15. The system of any one of aspects 1-14, wherein the heating valve manifold assembly is attached to a wall or panel using a spacer to prevent contact between the heating valve manifold assembly and the wall or panel. [Aspect 16] 16. The system of any one of embodiments 1-15, further comprising a back-up heater. [Aspect 17] 17. The system of any one of aspects 1-16, further comprising one or more temperature sensors. [Aspect 18] The system of any one of aspects 1 to 17, further comprising one or more controllers. [Aspect 19] 19. The system of any one of the preceding aspects, further comprising a controller for the one or more heaters. [Aspect 20] 20. The system of any one of the preceding embodiments, wherein the system is a gas or chemical transport cabinet. [Aspect 21] 21. The system of any one of embodiments 1-20, wherein the system is a valve manifold box. [Aspect 22] 22. The system of any one of embodiments 1-21, wherein the system is a valve manifold panel. [Aspect 23] 23. The system of any one of the preceding aspects, wherein the one or more layers of insulator are removably attached to the conductive plate using adhesive-free fasteners. [Aspect 24] A method for producing the system according to any one of aspects 1 to 23, comprising the steps of: contacting and / or attaching the pipes and valves of the valve manifold to the thermally conductive plate; contacting and / or attaching one or more heaters to the thermally conductive plate; providing one or more layers of insulation to cover and / or contact the one or more heaters, to a majority of the surface area of ​​the pipes and valves heated by or in contact with the thermally conductive plate, and / or to a majority of the surface area of ​​the thermally conductive plate; A manufacturing method comprising: [Aspect 25] 25. The method of claim 24, further comprising joining pipes and valves of the valve manifold to create a fluid-tight seal at the valve manifold. [Aspect 26] 26. The method of claim 24 or 25, wherein the method of attaching the one or more layers of insulation comprises a mechanical fastener. [Aspect 27] 27. The method of any one of embodiments 24 to 26, wherein the method of attaching the layer or layers of insulation does not involve adhesive. [Aspect 28] A method of repairing the system of any one of aspects 1-23, comprising the steps of: removing one or more layers of insulation to access the valve manifold; repairing a defective valve, pipe or other component; and reinstalling the one or more layers of insulation. [Aspect 29] A method for repairing a system as described in aspect 27, wherein the removing step includes a step of removing one or more mechanical fasteners, and the reinstalling step includes a step of reinstalling the one or more mechanical fasteners. [Aspect 30] A method of repairing the system of any one of aspects 1-23, comprising removing the heated valve manifold assembly from the system and replacing it with a new heated valve manifold assembly. [Aspect 31] A method for repairing the system described in aspect 29, wherein prior to the removing step, there is a step of removing one or more mechanical fasteners and opening several quick release connectors; and the replacing step includes a step of reinstalling the one or more mechanical fasteners and closing several quick release connectors.

Claims

1. 1. A system for distributing fluid to one or more tools for semiconductor manufacturing, comprising at least one heated valve manifold assembly, the at least one heated valve manifold assembly comprising: a thermally conductive plate having a total surface area, the thermally conductive plate having a first side and a second side; at least one heater in contact with the at least one thermally conductive plate; a valve manifold comprising a plurality of valves and pipes, the plurality of valves and pipes having a total surface area, a portion of the surface area of ​​the plurality of valves and pipes in contact with the at least one thermally conductive plate; and One or more layers of insulation covering: (i) more than 75% of a surface area of ​​the plurality of bulbs and pipes, said portion being in contact with the at least one thermally conductive plate; (ii) the at least one heater in contact with the at least one thermally conductive plate; and (iii) more than 75% of a surface area of ​​the at least one thermally conductive plate. Equipped with A system in which pipes attached to the thermally conductive plate have quick release connectors that can be disconnected and reconnected for rapid removal and replacement of the heating valve manifold assembly.

2. The system of claim 1 , wherein the one or more layers of insulation comprise an insulation board.

3. The system of claim 1 or 2, wherein the one or more layers of insulation include insulation attached to a plastic cover.

4. The system of any one of claims 1 to 3, wherein the one or more layers of insulation include an insulating jacket made of a soft insulating material.

5. 5. The system of claim 1, wherein the one or more layers of insulation are removably attached to the thermally conductive plate using fasteners selected from bolts, screws, clamps, zippers, Velcro, cable ties, magnets, adhesives, snaps, clasps, bungee cords, and hooks and eyes.

6. The system of any one of claims 1 to 5, wherein the layer or layers of insulation are custom tailored to conform to the shape of the plurality of valves and pipes.

7. 7. The system of any one of claims 1 to 6, wherein the one or more layers of insulation are shaped to define an air-filled or inert gas-filled space that is heated when the plurality of pipes and valves are attached to the thermally conductive plate.

8. 8. The system of claim 1, wherein a portion of the plurality of valves and pipes are in contact with a first side of the at least one thermally conductive plate; and the at least one heater is in contact with a second side of the at least one thermally conductive plate.

9. 9. The system of claim 1, wherein a portion of the plurality of valves and pipes are in contact with a first side of the at least one thermally conductive plate; and the one or more heaters are in contact with a first side of the at least one thermally conductive plate.

10. The system according to any one of claims 1 to 9, wherein the pipes and valves are attached to the thermally conductive plate.

11. The system of any one of claims 1 to 10, wherein the one or more heaters are attached to the thermally conductive plate.

12. 12. The system of any one of claims 1 to 11, wherein the heating valve manifold assembly comprises a first insulator board attached to a first side of the thermally conductive plate and a second insulator board attached to a second side of the thermally conductive plate.

13. A system as described in any one of claims 1 to 11, wherein the heating valve manifold assembly comprises a first insulator board attached to a first side of the thermally conductive plate and a second insulator board covering a second side of the thermally conductive plate.

14. A system as described in any one of claims 1 to 11, wherein the heating valve manifold assembly comprises a first insulator board covering a first side of the thermally conductive plate and a second insulator board attached to a second side of the thermally conductive plate.

15. A system as described in any one of claims 1 to 11, wherein the heating valve manifold assembly comprises a first insulator board covering a first side of the thermally conductive plate and a second insulator board covering a second side of the thermally conductive plate.

16. The system of any one of claims 1 to 15, further comprising at least one container of said fluid and a cabinet, said cabinet housing said heating valve manifold assembly and said at least one container.

17. 17. The system of any one of claims 1 to 16, wherein the heat valve manifold assembly is attached to a wall or panel using a spacer to prevent contact between the heat valve manifold assembly and the wall or panel.

18. The system of any preceding claim, further comprising a back-up heater.

19. The system of any preceding claim, further comprising one or more temperature sensors.

20. The system of any preceding claim, further comprising one or more controllers.

21. The system of any preceding claim, further comprising a controller for the one or more heaters.

22. The system of any one of claims 1 to 21, which is a gas or chemical transport cabinet.

23. A system according to any preceding claim which is a valve manifold box.

24. A system according to any preceding claim which is a valve manifold panel.

25. The system of any one of claims 1 to 24, wherein the one or more layers of insulation are removably attached to the thermally conductive plate using adhesive-free fasteners.

26. A method for producing a system according to any one of claims 1 to 25, comprising the steps of: contacting and / or attaching the pipes and valves of the valve manifold to the thermally conductive plate; contacting and / or attaching one or more heaters to the thermally conductive plate; providing one or more layers of insulation covering and / or contacting said one or more heaters over more than 75% of the surface area of ​​said pipes and valves heated by or in contact with said thermally conductive plate and / or over more than 75% of the surface area of ​​said thermally conductive plate; A manufacturing method comprising:

27. 27. The method of claim 26, further comprising joining pipes and valves of the valve manifold to create a fluid-tight seal at the valve manifold.

28. 28. The method of claim 26 or 27, wherein the method of attaching the layer or layers of insulation comprises mechanical fasteners.

29. The method of any one of claims 26 to 28, wherein the method of attaching the layer or layers of insulation does not involve adhesives.

30. 26. A method of repairing the system of claims 1-25, comprising the steps of removing one or more layers of insulation to access the valve manifold; repairing a defective valve, pipe or other component; and reinstalling one or more layers of insulation.

31. 31. The method of repairing a system of claim 30, wherein the removing step is preceded by the step of removing one or more mechanical fasteners, and the reinstalling step includes the step of reinstalling the one or more mechanical fasteners.

32. 26. A method of repairing the system of any one of claims 1 to 25, comprising removing the heated valve manifold assembly from the system and replacing it with a new heated valve manifold assembly.

33. 33. A method for repairing the system of claim 32, wherein the removing step includes the step of removing one or more mechanical fasteners and opening several quick release connectors; and the replacing step includes the step of reinstalling the one or more mechanical fasteners and closing several quick release connectors.

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