Hydrogen gas sensor and method of using the same
JP2024035268A5Pending Publication Date: 2025-08-04NAT INST FOR MATERIALS SCI
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Patent Information
- Application Number
- JP2022139622
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2022-09-02
- Publication Date
- 2025-08-04
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Abstract
To provide an inexpensive, compact hydrogen gas sensor.SOLUTION: A hydrogen gas sensor is provided, having a structure consisting of a semiconductor layer, a metal oxide film with oxygen deficiency, and a conductor film made of hydrogen catalyst metal or a hydrogen catalyst alloy sequentially laminated in the described order.SELECTED DRAWING: Figure 1
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