Organometallic solution based high resolution patterning compositions and corresponding methods

Abstract

To provide radiation-based methods for patterning of materials using an organometallic coating composition.SOLUTION: Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of 25 nm or less can be achieved with a line width roughness of about 4.5 nm or less. Synthesis techniques have been developed that allow formation of alkyl tin oxide hydroxide compositions with very low metal contamination.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims priority to U.S. Provisional Patent Application No. 62 / 067,552 (Meyer et al.), filed October 23, 2014, and entitled "Organo-Tin Compounds for Forming High Resolution Radiation Patternable Films, Precursor Compounds and Solutions, and Corresponding Methods," and U.S. Provisional Patent Application No. 62 / 119,972 (Meyers et al.), filed February 24, 2015, and entitled "Organo-Tin Compounds for Forming High Resolution Radiation Patternable Films, Precursor Formulations and Solutions, and Corresponding Methods," both of which are incorporated herein by reference.

[0002] The present invention relates to radiation-based methods for patterning materials using organometallic coating compositions. The invention further relates to precursor solutions that can be deposited to form organometallic coatings that can be patterned with very high resolution by radiation, and to coated substrates and coatings formed with the precursor solutions, before and after patterning. [Background technology]

[0003] When forming semiconductor-based devices and other electronic devices or other complex microstructures, materials are typically patterned to integrate the structures. Thus, the structures are typically formed by an iterative process of sequential deposition and etching steps in which patterns are formed from various materials. In this manner, a large number of devices can be formed in a small area. Some technological advances can include a reduction in the footprint of the devices, which can be desirable for improved performance.

[0004] The organic composition can be used as a radiation patterned resist, such that a radiation pattern is used to change the chemical structure of the organic composition in response to the pattern. For example, a process for patterning a semiconductor wafer may require lithographic transfer of a desired image from a thin film of a radiation-sensitive organic material. Patterning a resist generally involves several steps, including exposing the resist to a selected energy source (e.g., through a mask) to record a latent image, and then developing and removing selected areas of the resist. In the case of a positive-tone resist, the exposed areas are altered to make such areas selectively removable, while in the case of a negative-tone resist, the unexposed areas are more easily removable.

[0005] Generally, the pattern is developed by radiation, reactive gas, or solution, with the selectively sensitive portions of the resist removed and the other portions of the resist functioning as a protective etch-resistant layer. Liquid developers can be particularly effective for developing latent images. The substrate can be selectively etched through windows or gaps in the remaining regions of the protective resist layer. Alternatively, a desired material can be deposited on the exposed regions of the underlying substrate through the developed windows or gaps in the remaining regions of the protective resist layer. Finally, the protective resist layer is removed. The process can be repeated to form additional layers of the patterned material. Functional inorganic materials can be deposited using chemical vapor deposition, physical vapor deposition, or other desired means. Additional processing steps such as the deposition of conductive materials or the implantation of dopants can be used. In the fields of micro- and nanofabrication, feature sizes within integrated circuits have become very small in order to achieve high integration densities and improve circuit functionality.

Summary of the Invention

Means for Solving the Problems

[0006] In a first aspect, the present invention relates to a coating solution comprising an organic solvent and a first organometallic compound represented by the formula RSnO (3 / 2-x / 2) (OH) x (where 0 < x < 3), with about 0.0025 M to about 1.5 M of tin included in the solution, and R is an alkyl group or cycloalkyl group having 3 to 31 carbon atoms, and the alkyl group or cycloalkyl group is bonded to tin at a secondary or tertiary carbon atom.

[0007] In a further aspect, the present invention relates to a coating solution comprising an organic solvent, a first organometallic compound represented by the formula RSnO (3 / 2-x / 2) (OH) x (where 0 < x < 3, and R is an alkyl group or cycloalkyl group having 3 to 31 carbon atoms, and the alkyl group or cycloalkyl group is bonded to tin at a secondary or tertiary carbon atom), and a second organometallic compound different from the first organometallic compound and represented by the formula R'SnO (3 / 2-x / 2)(OH) x (wherein 0 < x < 3, R' is a linear or branched alkyl group or cycloalkyl group, and R and R' are not the same), and a second organometallic compound represented thereby.

[0008] In another aspect, the present invention relates to a method for patterning a film on a substrate, the method comprising: exposing the film to an EUV dose of about 80 mJ / cm 2 or less, and developing the film to form features with a half-pitch of about 25 nm or less and a line width roughness of about 5 nm or less. Including.

[0009] In an additional aspect, the present invention relates to a method for patterning an organometallic film on a substrate, the method comprising: exposing the organometallic film to EUV radiation at a dose-to-gel value of about 15 mJ / cm 2 or less to obtain a contrast of at least about 6. Including.

[0010] Furthermore, the present invention relates to a patterned structure comprising a substrate having a surface and a coating associated with the surface, at least a portion of the coating having the formula (R) z SnO 2-z / 2-x / 2 (OH) x (0 < (x + z) < 4), where R is an alkyl group or cycloalkyl group having 3 to 31 carbon atoms, and the alkyl group or cycloalkyl group is bonded to tin at a secondary or tertiary carbon atom.

[0011] In a further aspect, the present invention relates to a solution comprising a solvent and a compound represented by the formula RSnO (3 / 2-x / 2) (OH) x (wherein 0 < x < 3 and R is an alkyl, cycloalkyl or substituted alkyl moiety having 1 to 31 carbon atoms), the solution having an individual concentration of metal contaminants of about 1 ppm by weight or less.

[0012] Furthermore, the present invention relates to a method for synthesizing a compound represented by the formula RSnOOH or RSnO (3 / 2-x / 2) (OH) x (wherein 0 < x < 3 and R is an alkyl or cycloalkyl moiety having 1 to 31 carbon atoms), and the method comprises hydrolyzing a precursor composition having the formula RSnX3 (wherein X represents a halide atom (F, Cl, Br or I), or an amide group, or a combination thereof), the hydrolysis being carried out using sufficient water to effect hydrolysis, and the hydrolysis product having an individual concentration of metals other than tin of about 1 ppm by weight or less.

Brief Description of the Drawings

[0013] [Figure 1] It is a schematic perspective view of a radiation patterning structure having a latent image. [Diagram 2] It is a side plan view of the structure of FIG. 1. [Diagram 3] It is a schematic perspective view of the structure of FIG. 1 after developing the latent image and removing the non-irradiated coating material to form a patterned structure. [Figure 4] It is a side view of the patterned structure of FIG. 3. [Diagram 5] It is a schematic perspective view of the structure of FIG. 1 after developing the latent image and removing the irradiated coating material to form a patterned structure. [Figure 6] It is a side view of the patterned structure of FIG. 5. [Figure 7] It is a side plan view of the patterned structures of FIGS. 3 and 4 after etching the lower layer. [Figure 8] It is a side plan view of the structure of FIG. 7 after etching and removing the patterned condensed coating material. [Figure 9] It is a side plan view of the process flow of "thermal freeze" double patterning. The process shown in FIGS. 1 to 3 is repeated after baking to make the first layer insoluble with respect to the second layer. [Figure 10]1 is a plot of weight loss as a function of temperature in a thermogravimetric analysis. [Figure 11] FIG. 11 is a plot of mass spectrometry analysis performed in conjunction with the thermogravimetric analysis of FIG. 10 as a function of sample temperature. [Figure 12] 1 is a histogram showing particle size distribution obtained from dynamic light scattering analysis. [Figure 13] 13 is a plot of a representative time correlation function from a dynamic light scattering measurement used to obtain a particle size distribution such as that of FIG. 12. [Figure 14] 1 is a representative 119Sn NMR spectrum of a solution of Compound 1 as described in Example 3. [Figure 15] 1 is a representative 1H NMR spectrum of a solution of compound 1 as described in Example 3. [Figure 16] 1 is a plot of intensity as a function of mass-to-charge ratio from an electrospray mass spectrometry experiment on compound 1 as described in Example 3. [Figure 17] 1 is a plot of contrast as a function of gel dose for three different coating compositions having distinct alkyl ligands (n-butyl, isopropyl, and t-butyl). [Figure 18] 1 is a scanning electron micrograph of a silicon wafer patterned with t-butyltin oxide hydroxide after exposure to a pattern of 17 nm lines on 34 nm pitch with 13.5 nm wavelength EUV radiation and after development. [Figure 19] FIG. 2 is a scanning electron micrograph of a silicon wafer patterned with isopropyl tin oxide hydroxide after exposure with 13.5 nm wavelength EUV radiation in a bright field pattern of 22 nm contact holes on a 44 nm pitch with +20% bias, and after development. [Figure 20]FIG. 11 is a series of SEM micrographs of six different formulations of various combinations of isopropyltin oxide hydroxide and / or t-butyltin oxide hydroxide patterned after exposure with 13.5 nm wavelength EUV radiation to form a pattern of 17 nm lines on 34 nm pitch and after development. [Figure 21] FIG. 21 is a plot of dose-to-size plotted as a function of coating composition for Formulations A-F used to obtain the micrographs in FIG. 20. [Figure 22] 1H NMR spectrum of i-PrSn(NMe2)3 prepared as described in Example 7. [Figure 23] 119Sn NMR spectrum of i-PrSn(NMe2)3 prepared as described in Example 7. [Figure 24] 1 is a plot of weight as a function of temperature in a thermogravimetric analysis of a sample of isopropyltin oxide hydroxide prepared by Method 1 in Example 7. [Diagram 25] 25 is a mass spectroscopic analysis carried out in conjunction with the thermogravimetric analysis of FIG. 24. [Figure 26] 1 is a plot of weight as a function of temperature in a thermogravimetric analysis of a sample of isopropyltin oxide hydroxide prepared by Method 2 in Example 7. [Figure 27] FIG. 13 is an SEM micrograph of a silicon wafer patterned with isopropyltin oxide hydroxide synthesized using Method 1 in Example 7 after exposure to EUV radiation at an imaging dose of 60 mJ cm-2, resulting in 14.5 nm resist lines patterned on a 34 nm pitch with an LWR of 2.9 nm. [Figure 28] 1 is a plot of weight as a function of temperature in a thermogravimetric analysis of a sample of isopropyltin oxide hydroxide formed using the process of Example 10. [Figure 29] 29 is a mass spectroscopic analysis carried out in conjunction with the thermogravimetric analysis of FIG. 28. [Diagram 30]1 is a 1H NMR spectrum of t-AmylSn(C≡CPh)3 synthesized by the method of Example 11. [Diagram 31] 11 is a 119Sn NMR spectrum of t-AmylSn(C≡CPh) 3 synthesized by the method of Example 11. [Diagram 32] 1 is a 119Sn NMR spectrum of t-amyltin oxide hydroxide synthesized as described in Example 11. [Diagram 33] 1 is a 1H NMR spectrum of t-amyltin oxide hydroxide synthesized as described in Example 11. [Diagram 34] A set of SEM micrographs of silicon wafers with isopropyltin oxide hydroxide (right image) or t-butyltin oxide hydroxide (left image) exposed to a 30 kEV electron beam and developed with a 32 nm pitch (top) and a 28 nm pitch (bottom). [Diagram 35] FIG. 2 is a set of two SEM micrographs of silicon wafers patterned with isopropyltin oxide hydroxide after exposure to EUV radiation and development for positive tone imaging with 100 nm (a) pitch and 60 nm (b) pitch. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] It has been discovered that organotin compounds having bonds to alkyl groups, particularly branched alkyl groups (including cyclic ligands), can be used as improved radiation patterning precursor film forming compounds. Films formed by the compounds can be patterned using desired doses of radiation to achieve very high resolution patterns. The ligand structure for the organotin compounds provides good precursor solution stability and good radiation sensitivity in forming coatings. Alkyl tin compounds with branched alkyl ligands have been found to provide particularly improved patterning at lower radiation doses, but the use of mixtures of alkyl ligands offers the potential for further improvement by engineering certain features of the resulting coating to facilitate patterning. Desirable features of coatings formed using organometallic precursor solutions provide high radiation absorption and excellent direct patterning to form patterned metal oxide coatings. Precursor solutions with low metal contamination, distinct from the metals (e.g., tin) or combinations of metals that make up the organometallic coating composition, provide for the formation of coatings useful for applications where metal contamination may be unsuitable for the associated materials and devices. Suitable processing techniques are described for the formation of low contaminant precursor solutions. The precursor solutions can be coated using suitable techniques. Radiation patterning and development of the latent image can be performed to achieve images with very small pattern features, with a high degree of resolution and low linewidth roughness.

[0015] Exposure to radiation changes the composition of the irradiated metalorganic coating material, disrupting the structure defined by the alkyl ligands and allowing further condensation and reaction with moisture from any source, such as environmental moisture. Based on these chemical changes, the selection of an appropriate developer composition can result in substantially different dissolution rates between irradiated and non-irradiated portions of the film, facilitating, in some embodiments, either negative or positive patterning with the same coating. In negative patterning, exposure to radiation and subsequent potential condensation converts the irradiated coating material into a material that is more resistant to removal by an organic solvent-based developer composition than the non-irradiated coating material. In positive patterning, the exposure sufficiently changes (e.g., increases) the polarity of the exposed coating material such that it can be selectively removed by an aqueous or other sufficiently polar solvent. Selective removal of at least a portion of the coating material can leave a pattern in which areas of the coating have been removed to expose the underlying substrate. After irradiation followed by development of the coating, the patterned oxide material can be used to facilitate processing in device formation with excellent pattern resolution. The coating material can be designed to be sensitive to selected radiation, such as extreme ultraviolet, ultraviolet and / or electron beam. Additionally, the precursor solution can be formulated to be stable with an appropriate shelf life for commercial distribution.

[0016] The metal ions are generally further bound to one or more oxo (i.e., MO) and / or hydroxo (i.e., MOH) ligands in addition to the organic ligands. The alkyl and oxo / hydroxo ligands provide desirable features to the precursor solutions and corresponding coatings by providing significant control over the condensation process to metal oxides, resulting in significant processing, patterning, and coating advantages. The use of organic solvents in the coating solutions supports the stability of the solutions, while non-aqueous based processing preserves the ability to selectively develop the resulting coating after formation of a latent image with excellent development rate contrast for both positive and negative patterning due to the altered solubility of exposed areas relative to unexposed areas. The desirable precursor solutions with dissolved alkyl stabilized metal ions provide convenient solution-based deposition to form coatings that may have high radiation sensitivity and excellent contrast with respect to etch resistance to enable the formation of fine structures. The design of the precursor composition may provide for the formation of coating compositions with high sensitivity to specific radiation types and / or energies / wavelengths.

[0017] It is believed that the ligand structure of the precursor organometallic composition provides the observed desirable stability of the precursor solution and radiation patterning capabilities. In particular, it is believed that the absorption of radiation can provide bond breaking between the metal and the organic ligand resulting in composition differentiation in the irradiated and non-irradiated portions of the coating material. This differentiation can be further amplified by appropriate processing of the exposed film before development, after development, or both. Thus, altering the composition to form an improved precursor solution also provides improved image development. In particular, the irradiated coating material can result in a stable inorganic metal oxide material with a tunable response to the developer.

[0018] Selection of an appropriate developer capable of developing either a positive or negative tone image can result in a stable inorganic metal oxide material with a tunable response to the developer. In some embodiments, an appropriate developer includes, for example, 2.38% TMAH (i.e., semiconductor industry standard). The coating layer can be thinned without pattern loss during development by removing the coating material from areas where the coating material is intended to remain after development. Compared to conventional organic resists, the materials described herein have extremely high resistance to many etching chemistries for commercially relevant functional layers. This allows for process simplification by avoiding intermediate sacrificial inorganic pattern transfer layers that may otherwise be used to supplement the patterned organic resist for mask functions. The coating material can also provide convenient double patterning. Specifically, after thermal treatment, the patterned portion of the coating material is stable with respect to contact with many compositions, including additional precursor solutions. Thus, multiple patterning can be performed without removing previously deposited hard mask or resist coating materials.

[0019] The precursor solution contains polynuclear metal oxo / hydroxo cations and alkyl ligands. The oxo / hydroxo ligands can be introduced by hydrolysis of the corresponding compounds with halide, amide, or alkynide ligands. Metal oxo / hydroxo cations, also referred to as metal suboxide cations, are polyatomic cations with one or more metal atoms and covalently bonded oxygen atoms. Metal suboxide cations with peroxide-based ligands are described in U.S. Pat. No. 8,415,000 (Stowers et al.) entitled "Patterned Inorganic Layers, Radiation Based Patterning Compositions and Corresponding Methods" ('000 patent), which is incorporated herein by reference. Aqueous solutions of metal suboxides or hydroxides can be prone to instability with respect to gelation and / or precipitation. In particular, the solutions are unstable when the solvent is removed and can form oxo-hydroxide networks with the metal cations. Incorporation of radiation-sensitive ligands such as peroxides into such solutions can improve stability, but background instability associated with network formation may persist. Any uncontrolled network formation effectively reduces the radiation sensitivity and / or development rate contrast of the coated material by providing a development rate determining pathway independent of irradiation. The use of alkyl ligands as radiation-sensitive ligands has been found to provide improved precursor solution stability, as well as large radiation absorption and excellent contrast for the formation of very fine structures.

[0020] As described herein, the use of branched alkyl ligands, such as tert-butyl or isopropyl, has been found to show improved patterning performance relative to unbranched alkyl ligands. While the use of branched alkyl groups has been found to provide desirable patterning performance, in some embodiments, appropriate mixtures of alkyltin compounds, particularly those having at least one branched alkyl group, with Sn-C bonds to branched and / or unbranched alkyl groups can be formulated to further improve nanolithographic patterning performance. The additional flexibility provided by the mixture of alkyl ligand structures is believed to allow for the selection of numerous composition properties that cannot be reached within a single ligand structure: e.g., stability, solubility, radiation sensitivity, size, etc. Thus, the formulation of metal ion mixtures with distinct alkyl ligands in a precursor composition may provide a basis for the improvement of various performance parameters, including desirable patterning dose and linewidth roughness values, as demonstrated in the subsequent examples.

[0021] The use of organometallic compounds for radiation resist coating is generally described in U.S. Patent Application Publication No. 2015 / 0056542 (Meyers et al.) titled "Organometallic Solution Based High Resolution Patterning Compositions" which is incorporated herein by reference (the " '542 application"). The '542 application exemplifies n-butylSnOOH and divinylSn(OH)2 compositions for the formation of radiation sensitive patterning layers and describes the desirability of alkyl ligands containing compounds of tin, indium, antimony or combinations thereof. These general compositions are relevant to the appropriate embodiments described herein. Branched alkyl ligands such as tert-butyl, isopropyl, or tert-amyl (1,1-dimethylpropyl) that are bonded to tin and branched at the tin-bonded carbon (α-carbon branching) have been found to be effectively usable as radiation patterning resists with lower radiation doses than those containing unbranched ligands. Similarly, other alkyl and cycloalkyl ligands branched at the α-carbon, including 2-butyl, cyclohexyl, cyclopentyl, cyclobutyl, cyclopropyl, 1-adamantyl, and 2-adamantyl, are contemplated and are included within the scope of the present disclosure in mixtures with compounds having the alkyl ligands described herein. In other words, resists having branched organic ligands are alkyl or cycloalkyl ligands bonded to the Sn atom by a secondary or tertiary carbon atom, RSnO (3 / 2-x / 2) (OH) x (where 0 < x < 3 and R is a secondary or tertiary alkyl group or cycloalkyl group having 3 to 31 carbon atoms). Alternatively, the composition is R1R2R3CSnO (3 / 2-x / 2) (OH) xIt can be represented by (0 < x < 3), where in the formula, R1 and R2 are independently alkyl groups having 1 to 10 carbon atoms, R3 is hydrogen, or an alkyl group having 1 to 10 carbon atoms. Here, R1 and R2 can form a cyclic carbon chain, and R3 can also optionally be included in the cyclic carbon structure. In the case of a cyclic structure, the range of carbon atoms is additive. Those skilled in the art will recognize that the order of R1, R2, and R3 is essentially arbitrary. Thus, the comparison of groups in different compounds can take into account any permutation and will not change the comparison of the compounds or related compounds. With the same concept, since this formula indicates the relationship between a single H and R3, a compound does not avoid the scope of this formula by arbitrarily assigning H to R1 or R2 instead of R3. Without wishing to be bound by theory, it is believed that the structure of these branched alkyl ligands promotes the cleavage of the Sn-C bond during exposure, thereby increasing the sensitivity of the resist to radiation.

[0022] This promotion may be due to the increased stability of secondary and tertiary alkyl radicals or carbocation intermediates relative to the related primary alkyl moiety. Although not directly demonstrated in studies of Sn-C radiolysis, similar characteristics are evident in the listed C-H bond-dissociation energies. Thus, the improved compositions described herein offer significant commercial advantages with less radiation processing to achieve high-resolution patterns with low line-width roughness. High-resolution patterns with low line-width roughness can thus be achieved using lower radiation doses for improved processing compared to the similar excellent resolution and low line-width roughness achieved with metal-oxide-based photoresists having peroxide-based ligands as described in the above-mentioned '000 patent.

[0023] The new precursor solutions have been formulated with improved stability and control of network formation and precipitation compared to inorganic resist materials with peroxide-based ligands. The characterization of the ligand as radiation-sensitive in this case refers to the instability of the metal-ligand bond following absorption of radiation, so that radiation can be used to cause chemical changes in the material. In particular, the alkyl ligands stabilize the precursor solution but also provide control over the processing of the material, and the selection of the ratio of alkyl ligand to metal ion can be adjusted to control the properties of the solution and the resulting coating.

[0024] The precursor composition comprising the mixture with different alkyl ligands can comprise a mixture of two alkyl-tin compounds with different organic ligands, three alkyl-tin compounds with different organic ligands, or four or more alkyl-tin compounds with different alkyl ligands. Typically, for a two-component or three-component mixture, the mixture comprises at least about 8 mole percent of each component with distinct alkyl ligands, in some embodiments at least about 12 mole percent, and in further embodiments at least about 25 mole percent of each component with distinct alkyl ligands. A person of ordinary skill in the art will recognize that additional ranges of mixture components within the explicit ranges above are contemplated and are within the scope of the present disclosure.

[0025] Alkyl ligands, especially branched alkyl ligands, stabilize metal cations against condensation in the absence of exposure. In particular, when the concentration of alkyl-based ligands is appropriate, the unintended formation of condensed metal oxides or hydroxides and related aggregates occurs very slowly, if at all, at room temperature. Based on the discovery of this stabilizing property, solutions can be formed using high concentrations of radiation-sensitive ligands with good storage stability while retaining convenient processing to form coatings. Energy from absorbed radiation can break metal-alkyl ligand bonds. When these bonds are broken, the corresponding stabilization against condensation is reduced or lost, and reactive metal centers with unsaturated valence states can be formed, possibly as transient intermediates, without wishing to be limited by theory. The composition can be further modified by reaction with atmospheric or separately supplied HO, forming M--OH, or by condensing to form M--O--M bonds, where M represents the metal atom. Thus, chemical changes can be controlled by radiation. Compositions having high radiation-sensitive ligand concentrations can be very stable with respect to avoiding unintended spontaneous hydrolysis, condensation, and aggregation.

[0026] With regard to oxo / hydroxo ligands to metal ions, these ligands may be formed during treatment by hydrolysis. In some embodiments, hydrolysis may involve the replacement of halide ligands in aqueous basic solutions or the replacement of amide ligands (-NR1R2) in water, followed by recovery of the precipitated hydrolysate and / or transfer to an organic solvent. In additional or alternative embodiments, the hydrolyzable ligands may be replaced by hydroxo ligands obtained from atmospheric moisture reacting with the precursor during coating and baking. As described herein, low metal contamination synthesis approaches can be achieved using appropriate alternative hydrolysis approaches and high purity alkyltin precursors. Three such approaches are described in the examples: utilizing water-reactive alkyltin compounds and obtaining water for hydrolysis from the ambient atmosphere, or adding a controlled amount of purified water to achieve hydrolysis in an organic solvent, or using a metal cation-free base in combination with the alkyltin halide. One or more alternative ligands susceptible to hydrolysis by aqueous or non-aqueous acids or bases may be used in other embodiments, depending on process and synthesis considerations such as reactivity, ease of synthesis, toxicity, and other factors. In general, suitable hydrolyzable ligands (X in RSnX3) include alkynides RC≡C, alkoxides RO - , Azide N3 - , carboxylate RCOO - , halides and dialkylamides.

[0027] By adopting certain synthesis procedures, precursor alkyl tin oxide hydroxide compounds can be formulated with very low metal contamination. In particular, non-tin metals can be typically reduced to 1 parts per million (ppm) or less, and alkali and alkaline earth metals can be reduced to about 100 parts per billion (ppb) or less. Solutions of the compounds can be formed accordingly. The resulting coatings can present low metal contamination risks to the underlying substrate, adjacent layers, devices, and process tools. Low metal contamination can provide the resist composition usefulness for applications where certain metal contamination, such as alkali metal contamination, is undesirable.

[0028] Processing techniques that allow for the formation of precursors with low metal contamination avoid the use of reactants such as bases (e.g., NaOH) that introduce metal contaminants into the composition. Alternative bases that can provide low metal contamination include, for example, tetramethylammonium hydroxide and other quaternary ammonium hydroxides. Also, water can be used directly in the case of hydrolysis in organic solvents with atmospheric water or water added in controlled amounts. Given the very low trace metal levels prescribed in semiconductor device manufacturing (typically <10 ppb for resist compositions), no techniques have been identified for adequately removing metal contaminants from formulated alkyl tin oxide hydroxide resists if even a small amount of metal contaminant is introduced. Thus, suitable hydrolyzable ligands, e.g., halides or amides, are replaced with oxo-hydroxo ligands by alternative hydrolysis reactions that do not contribute substantial concentrations of non-tin metals. The hydrolyzate can be purified to remove reaction by-products by appropriate techniques, such as precipitation, washing, and recrystallization and / or redissolution in a suitable solvent.

[0029] Generally, the precursor coating solution can contain sufficient radiation sensitive alkyl ligands such that the solution has a molar concentration ratio of radiation sensitive ligand to metal cation that is about 0.1 to about 2. Ligand ratios within this range can be prepared by hydrolysis of SnX4, RSnX3 or R2SnX2 precursors of appropriate stoichiometry, subject to precursor stability and solubility constraints. The coating formed from the precursor solution is influenced by the ligand structure of the ions in the precursor solution, and upon drying the ligand structure around the metal can be the same, or the ligand structure can be changed during the coating and / or drying process. The coating is also generally influenced by exposure to radiation to enable patterning capabilities. Generally, the coating is a cation of the formula (R) z SnO 2-z / 2-x / 2 (OH) x(0<(x+z)<4), where R is an alkyl or cycloalkyl group having 3-31 carbon atoms, and the alkyl or cycloalkyl group is attached to the tin at a secondary or tertiary carbon atom. In non-irradiated coatings, the value of z may be the same as or close to that of the coating solution, while irradiated coatings usually have a lower z value, which may approach 0 with further heating and / or irradiation, e.g., after patterning. In particular, the alkyl ligand concentration provides a surprisingly large improvement in precursor stability and control of network formation with solutions formed in organic solvents, typically polar organic solvents. Without wishing to be limited by theory, the appropriate range of radiation-sensitive, low polar ligand concentrations apparently reduces unintended condensation and aggregation of metal cations with corresponding oxo-ligands and / or hydroxo-ligands, stabilizing the solution. Thus, the precursor coating solution may be stable against settling of solids for at least one week, and possibly significantly longer (e.g., more than one month), without further stirring. Due to their long stability times, alkyltin oxide hydroxide precursors have increased versatility for potential commercial applications. The overall molar concentration can be selected to achieve the desired coating thickness and desired coating properties consistent with the desired stability level.

[0030] Polyatomic metal oxo / hydroxo cations with alkyl ligands can be selected to achieve the desired radiation absorption. In particular, tin-based coating materials exhibit good absorption of far UV radiation at 193 nm wavelength and extreme UV radiation at 13.5 nm wavelength. Table 1 lists the optical constants (n=refractive index and k=extinction coefficient) at selected wavelengths for coating materials formed from monobutyltin oxide hydrate and baked at 100°C.

[0031] [Table 1]

[0032] It is desirable to include Sn, In and Sb metals in the precursor solution to provide similar high radiation absorption commonly used for patterning, but these metals can be combined with other metals to tailor properties, particularly radiation absorption. Hf provides good absorption of electron beam materials and extreme ultraviolet radiation, while In and Sb provide strong absorption of extreme ultraviolet radiation at 13.5 nm. For example, one or more metal compositions including Ti, V, Mo, or W, or combinations thereof, can be added to the precursor solution to form coating materials with absorption edges shifted to longer wavelengths, for example, to provide sensitivity to 248 nm wavelength ultraviolet light. These other metal ions may or may not be associated with alkyl ligands, and suitable salts of metal ions without alkyl ligands for use in the precursor compositions described herein may include, for example, organic or inorganic salts, amides, alkoxides, etc. that are soluble in the solvent of the coating precursor solution. With regard to the determination of metal contaminants, apparently specially added functional metals are not considered contaminants; these metals can be identified by their presence in the precursor solution, usually at levels above 100 ppm by weight; such metals can be selected to avoid undesirable contamination for a particular application.

[0033] In general, the desired hydrolysate can be dissolved in an organic solvent (e.g., an alcohol, an ester, or a combination thereof) to form a precursor solution. The concentration of the species in the coating solution can be selected to achieve the desired physical properties of the solution. In particular, a lower concentration can result in desirable solution properties for certain coating techniques, such as spin-coating, where thinner coatings can be achieved overall with reasonable coating parameters. It may be desirable to use thinner coatings to achieve ultra-fine patterning and to reduce material costs. In general, the concentration can be selected as appropriate for the selected coating technique. Coating properties are further described below.

[0034] The precursor solution may generally be applied by any reasonable coating or printing technique, as further described below. The coating is generally dried, and heat may be applied to stabilize or partially condense the coating prior to irradiation. Generally, the coating is thin, e.g., having an average thickness of less than 10 microns, although very thin submicron coatings, e.g., about 100 nanometers (nm) or less, may be desired for patterning very small features. To form high resolution patterns, the pattern may be introduced using a radiation-sensitive organic composition, and the composition may be referred to as a resist, since portions of the composition may be treated to be resistant to development / etching, allowing selective material removal to be used to introduce the selected pattern. The dried coating may be exposed to appropriate radiation, e.g., extreme ultraviolet, electron beam, or ultraviolet, with the selected pattern or the negative portion of the pattern to form a latent image having developer-resistant and developer-soluble areas. After exposure to the appropriate radiation, and prior to development, the coating may be heated or otherwise reacted to further differentiate the latent image from non-irradiated areas. The latent image is contacted with a developer to form a physical image, i.e., a patterned coating. The patterned coating can be further heated to stabilize the remaining patterned coating on the surface. The patterned coating can be used as a physical mask to carry out further processing, such as etching the substrate and / or depositing additional materials according to the pattern. After using the patterned resist as desired, the remaining patterned coating can be removed at the appropriate point in processing, but the patterned coating can also be incorporated into the final structure. Very fine features can be effectively achieved by the patterning composition described herein.

[0035] In some embodiments, the resulting patterned material can be incorporated into a structure as a component of a final device after appropriate stabilization by at least some condensation to the inorganic metal oxide material. Once the patterned inorganic coating material is incorporated into a structure, for example as a stable dielectric layer, many steps in the processing procedure can be eliminated by using direct patterning of the material by radiation. In general, it has been found that very high resolution structures can be formed using thin inorganic coating materials exposed with short wavelength electromagnetic radiation and / or electron beams, and line width roughness can be reduced to very low levels for the formation of improved patterned structures.

[0036] The purified precursor solution with greater stability also provides a coating material with the potential for greater development rate contrast between radiation-exposed and non-exposed portions of the substrate, which can surprisingly be achieved simultaneously with either positive or negative patterning. Specifically, the irradiated or non-irradiated coating material can be relatively more easily dissolved by an appropriate developer composition. Thus, with the improved composition and corresponding material, positive or negative imaging can be achieved by selecting an appropriate developer. At the same time, the pitch can be made very small between adjacent elements, along with appropriate insulation, typically electrical insulation, between adjacent elements. The irradiated coating composition can be very sensitive to the subsequent development / etching process, so that the coating composition can be made very thin without compromising the efficacy of the development process in terms of selectively and cleanly removing the coating composition while leaving appropriate portions of the irradiated patterning composition on the surface of the substrate. The ability to shorten the exposure time to the developer is further consistent with using a thin coating without damaging the patterned portion of the coating.

[0037] The formation of integrated electronic devices and the like generally involves the patterning of materials to form individual elements or components within the structure. This patterning can include different compositions covering selected portions of stacked layers that interact with each other vertically and / or horizontally to induce the desired functionality. The various materials can include semiconductors, dielectrics, conductors and / or other types of materials that may have selected dopants. The radiation sensitive organometallic compositions described herein can be used to directly form desired inorganic material structures within the device and / or as radiation patternable inorganic resists that are an alternative to organic resists. In either case, significant processing improvements can be utilized and the structures of the patterned materials can also be improved.

[0038] Precursor solution The precursor solutions for forming the resist coatings typically contain tin cations with suitable alkyl stabilizing ligands in a solvent, typically an organic solvent. The precursor solutions and final resist coatings are based on metal oxide chemistry, and organic solutions of metal polycations with alkyl ligands provide stable solutions with good resist properties. Branched alkyl ligands in particular provide improved patterning capabilities.

[0039] The ligand provides radiation sensitivity, and the particular choice of ligand can affect radiation sensitivity. Also, the precursor solution can be designed to achieve a desired level of radiation absorption for a selected radiation based on the choice of metal cation and associated ligand. The concentration of the ligand-stabilized metal cation in the solution can be selected to provide suitable solution properties for a particular deposition technique (e.g., spin coating, etc.). The precursor solution is formulated to achieve a very high level of stability, and therefore the precursor solution has a suitable shelf life for commercial use. As described in the following sections, the precursor solution can be applied to a substrate surface, dried, and further processed to form an effective radiation resist. The precursor solution is designed to form a coating composition when at least partially solvent removed, and ultimately form a tin oxide-predominant inorganic solid upon irradiation and / or thermal treatment, exposure to plasma, or similar treatment.

[0040] Precursor solutions generally contain one or more tin cations. In an aqueous solution, metal cations are hydrated due to their interaction with water molecules, and hydrolysis can occur to bond oxygen atoms to the metal ions, forming hydroxide ligands or oxo bonds, and correspondingly releasing hydrogen ions. The nature of the interaction is generally pH-dependent. As additional hydrolysis occurs in the aqueous solution, the solution can become unstable with respect to precipitation of the metal oxide or with respect to gelation. Although it is desirable to ultimately form an oxide material, this progression can be better controlled using a precursor solution based on an organic solvent containing alkyl ligand-stabilized metal cations. When placed in an atmosphere containing water vapor, the solvent can contain some dissolved water that is in equilibrium with the partial pressure of water in contact with the solvent, and as demonstrated by the examples, the dissolved water is used to effect a controlled hydrolysis of the hydrolyzable ligand. In precursor solutions based on alkyl-stabilized ligands and organic solvents, the progression to the oxide can be controlled as part of a procedure to first treat the solution to form a coating material and then a final metal oxide composition having organic ligands. As described herein, alkyl ligands, particularly branched alkyl ligands and / or combinations of alkyl ligands, can be used to provide significant control over the treatment of the solution to an effective radiation resist composition.

[0041] Generally, the precursor compound can be represented by the formula RSnO (3 / 2-x / 2) (OH) x (0 < x < 3), wherein R is a linear or branched (i.e., secondary or tertiary at the metal-bonded carbon atom) alkyl group. R generally has from 1 to 31 carbon atoms and in branched embodiments from 3 to 31 carbon atoms. In particular, where the compound is otherwise represented as R1R2R3CSnO (3 / 2-x / 2) (OH) xWhen it can be represented by (0 < x < 3), a dendritic alkyl ligand is desirable, where R1 and R2 are independently alkyl groups having 1 to 10 carbon atoms, and R3 is hydrogen or an alkyl group having 1 to 10 carbon atoms. In some embodiments, R1 and R2 can form a cyclic alkyl moiety, and R3 can also be linked to other groups of the cyclic moiety. The precursor solution can also contain a blend of compositions having different alkyl ligands. Exemplary branched alkyl ligands include isopropyl (where R1 and R2 are methyl and R3 is hydrogen), tert-butyl (where R1, R2, and R3 are methyl), sec-butyl (where R1 is methyl, R2 is -CHCH3, and R3 is hydrogen), and tert-amyl (where R1 and R2 are methyl and R3 is -CHCH3). Preliminary experiments using cyclic alkyl ligands have shown promising results. Examples of suitable cyclic groups include, for example, 1-adamantyl (-C(CH2)3(CH)3(CH2)3 or tricyclo(3.3.1.13,7)decane bonded to the metal at the tertiary carbon), and 2-adamantyl (-CH(CH)2(CH2)4(CH)2(CH2) or tricyclo(3.3.1.13,7)decane bonded to the metal at the secondary carbon). Thus, the solution of the metal cation is ready for further processing. In particular, it may be desirable to use polynuclear tin oxo / hydroxocation as an additive component of the precursor solution to make the solution ready for further tin oxide composition. Generally, the precursor solution contains about 0.01 M to about 1.4 M of the metal polynuclear oxo / hydroxocation, and in further embodiments, about 0.05 M to about 1.2 M, and in additional embodiments, about 0.1 M to about 1.0 M of the metal polynuclear oxo / hydroxocation. Those skilled in the art will recognize that additional ranges of the tin polynuclear oxo / hydroxocation within the above-defined ranges are contemplated and are included within the scope of the present disclosure.

[0042] Precursor compositions comprising mixtures with different organic ligands can include mixtures of two alkyl-tin compounds with different alkyl ligands, three alkyl-tin compounds with different alkyl ligands, or four or more alkyl-tin compounds with different alkyl ligands. Typically, for binary or ternary mixtures, the mixture comprises at least about 8 mole percent of each component with distinct allyl ligands, in some embodiments at least about 12 mole percent, and in further embodiments at least about 25 mole percent of each component with distinct alkyl ligands. A person of ordinary skill in the art will recognize that additional ranges of mixture components within the explicit ranges above are contemplated and are within the scope of the present disclosure.

[0043] Metals generally have a significant effect on the absorption of radiation. Tin provides strong absorption of extreme ultraviolet radiation at 13.5 nm. In combination with alkyl ligands, the cation also provides good absorption of ultraviolet radiation at 193 nm wavelength. Tin also provides good absorption of electron beam radiation. The energy absorbed is modulated by the metal-organic interaction, which can result in metal-ligand scission and desired control over material properties.

[0044] The alkyl ligand stabilizes the composition against unintended spontaneous condensation and aggregation of the hydrolysate. In particular, when the relative concentration of the alkyl ligand is high, the formation of condensed metal oxides or hydroxides is very slow, if condensation occurs naturally at room temperature at all. Based on the discovery of this stabilizing property, a hydrolysate solution can be formed with a high concentration of radiation-sensitive ligands with good storage stability while retaining convenient processing to form coatings. The radiation-sensitive ligands include alkyl moieties that form tin-carbon bonds. Energy from absorbed radiation can break tin-alkyl ligand bonds. When these bonds are broken, the stabilization with respect to the corresponding condensation is reduced or lost. The composition can be changed by forming M--OH or by condensing to form M--O--M bonds, where M represents a metal atom. Thus, chemical changes can be controlled by radiation. A composition with a high radiation-sensitive ligand concentration can be very stable with respect to avoiding spontaneous formation of hydroxides and condensation.

[0045] Some suitable metal compositions having the desired ligand structures can be purchased from commercial sources such as Alfa Aesar (MA, USA) and TCI America (OR, USA) (see Examples below), and other metal-ligand compositions can be synthesized as described below. Precursor compositions with low metal contaminants are synthesized using the methods described herein.

[0046] In general, the alkyl ligands can be, for example, methyl, ethyl, propyl, butyl, and branched alkyl. Suitable branched alkyl ligands can be, for example, isopropyl, tert-butyl, tert-amyl, 2-butyl, cyclohexyl, cyclopentyl, cyclobutyl, cyclopropyl, 1-adamantyl, or 2-adamantyl. Improved patterning results have been obtained using branched alkyl ligands. However, by blending multiple alkyl ligands as shown in the examples provided, the teachings herein can be used to obtain separately advantageous patterning properties (e.g., dose and line width roughness) that different ligands impart, so that the use of mixed alkyl ligands allows for a fuller advantage of ligand selection.

[0047] It has been found that the radiation curing dose can be approximately linearly proportional to the mixture of precursor compounds with different alkyl ligands based on the radiation dose of each individual precursor compound. In general, it is desirable for the mixture to include at least one branched organic ligand because of the lower radiation dose that can be used with branched alkyl ligands. However, it has been found accordingly that the line width roughness can be improved by the mixture of precursor compounds with different organic ligands. Without wishing to be limited by theory, it is possible that the improved line width roughness value observed for the mixed composition can be attributed to the promotion of etching of the mixed composition without significantly reducing the contrast of the pattern. In this regard, the observation can be extended to the mixed composition containing a combination of organotin compounds with branched or unbranched alkyls.

[0048] As described herein, processing techniques have been developed that provide reduced metal contamination. Thus, precursor solutions can be formulated with very low levels of non-tin metals. In general, all non-tin metal concentrations can be individually reduced to values ​​of about 1 parts per million (ppm) or less, in further embodiments to about 200 parts per billion (ppb) or less, in additional embodiments to about 50 ppb or less, and in other embodiments to about 10 ppb or less. In some embodiments, it may be desirable to add other metal elements to affect the process, which can typically be identified at levels of at least about 1 weight percent, in some embodiments at least about 2 weight percent, and thus can be distinguished from metal contaminants, where appropriate. Metal contaminants to be reduced include, among others, alkali and alkaline earth metals, Au, Ag, Cu, Fe, Pd, Pt, Co, Mn, and Ni. One skilled in the art will recognize that additional ranges of metal levels within the above explicit levels are contemplated and are within the scope of the present disclosure.

[0049] Processing to form organotin oxide hydroxide compositions has previously involved the use of reactants that introduce significant non-tin metal contaminants (such as sodium from sodium hydroxide base). The alternative synthesis methods described herein can be used to prepare hydrolysates with linear or branched alkyl ligands, including compounds not known to be commercially available and commercially available compounds that may have corresponding metal contaminants. Since no method has been found to remove sodium to sufficiently low levels, alternative synthesis techniques have been developed. Thus, alternative processes have been developed that allow for significant reductions in metal contamination. In particular, high purity water-reactive precursor compounds can be used that do not require the addition of base to form the organotin hydrolysate. Synthesis of the hydrolysate can be carried out in a non-aqueous solvent or with an aqueous solvent in which the product compound precipitates immediately. In some embodiments, water can be introduced in an amount just sufficient to hydrolyze the hydrolyzable ligand to form the desired alkyltin oxide hydroxide compound.

[0050] With regard to oxo / hydroxo ligands to metal ions, these ligands may be formed during treatment by hydrolysis. In some embodiments, hydrolysis may involve the displacement of hydrolyzable ligands to form oxo (O) and / or hydroxo (-OH) ligands. For example, halide ligands may be hydrolyzed in aqueous base and then transferred to an organic solvent. However, it has been found desirable to carry out the hydrolysis using alternative reactions in order to produce precursor compositions with less metal contamination. Specific examples are provided below.

[0051] In some embodiments, the composition comprising the tin ion with the organic stabilizing ligand and the hydrolyzable ligand is dissolved in an organic solvent and then contacted with a basic aqueous solution, which may result in the replacement of the hydrolyzable ligand with the hydroxo ligand. After allowing sufficient time for the formation of the hydroxo ligand, the aqueous solution may be separated from the organic phase, assuming that the organic liquid is not soluble in the aqueous liquid. In some embodiments, the oxo / hydroxo ligand may be formed by hydrolysis from atmospheric water. The hydrolyzable metal ion composition may be heated in the presence of atmospheric moisture such that the oxo / hydroxo ligand is directly formed in the coating material, which may be relatively easy due to the large surface area. An example of hydrolysis from atmospheric water is also described below. In additional or alternative embodiments, sufficient water to achieve hydrolysis is dissolved in the organic solvent together with the precursor compound with the hydrolyzable ligand.

[0052] The MC bond can also be formed in a solution-phase displacement reaction to form a precursor compound having an alkyl ligand and a hydrolyzable ligand. The following reaction is a representative suitable displacement reaction to form the Sn-C bond. nRCl+Sn→R n SnCl 4-n +Residue 4RMgBr+SnCl4 → R4Sn+4MgBrCl 3SnCl4+4R3Al → 3R4Sn+4AlCl3 R4Sn+SnCl4 → 2R2SnCl2 In the formula, R represents an alky ligand. In general, different suitable halides can be substituted in the above reaction. The reaction can be carried out in a suitable organic solvent in which the reactants have reasonable solubility.

[0053] Regarding the method of forming a precursor solution with low metal contamination, reactants are selected to avoid the introduction of metal contamination during the hydrolysis reaction to form tin oxide hydroxide compounds from alkyltin compounds having hydrolyzable groups. Two general approaches have been used successfully in the examples. In some embodiments, hydrolysis is carried out with precursor compounds in an organic solvent, and sufficient water is introduced to achieve hydrolysis. Water sufficient to complete the hydrolysis of the hydrolyzable ligands can be introduced from ambient water vapor or can be injected and mixed into the organic solvent. Alternatively, hydrolysis can be carried out in water with catalytic base introduced in a manner that does not introduce metal contamination. For example, in the examples, tetramethylammonium hydroxide (TMAH) water is used, which is commercially available with low metal contamination for use in the semiconductor industry. The hydrolyzable ligands can be selected appropriately for the particular approach used in the hydrolysis reaction described in the examples.

[0054] In general, the desired hydrolysis compound can be dissolved in an organic solvent, such as an alcohol, an ester, or a combination thereof. In particular, suitable solvents include, for example, aromatic compounds (e.g., xylene, toluene), ethers (anisole, tetrahydrofuran), esters (propylene glycol monomethyl ether acetate, ethyl acetate, ethyl lactate), alcohols (e.g., 4-methyl-2-propanol, 1-butanol, methanol, isopropyl alcohol, 1-propanol), ketones (e.g., methyl ethyl ketone) mixtures, and the like. In general, the choice of organic solvent can be influenced by solubility parameters, volatility, flammability, toxicity, viscosity, and potential chemical interactions with other processing materials. After dissolving and combining the components of the solution, the properties of the species can change as a result of partial hydration and condensation, especially during the coating process. When the composition of the solution is referred to herein, the reference is to the components added to the solution, since complex formulations can result in metal polynuclear species in the solution that cannot be fully characterized. For certain applications, it is desirable for the organic solvent to have a flash point of greater than or equal to about 10° C., in further embodiments greater than or equal to about 20° C., and in further embodiments greater than or equal to about 25° C., and a vapor pressure of less than or equal to about 10 kPa, in some embodiments less than or equal to about 8 kPa, and in further embodiments less than or equal to about 6 kPa at 20° C. A person of ordinary skill in the art will recognize that additional ranges of flash point and vapor pressure within the explicit ranges above are contemplated and are within the present disclosure.

[0055] Generally, the precursor solutions are mixed thoroughly using appropriate mixing equipment appropriate for the volume of material to be formed. Appropriate filtration can be used to remove any contaminants or other components that do not dissolve properly. In some embodiments, it may be desirable to form separate solutions that can be combined to form a precursor solution from the combination. Specifically, separate solutions can be formed that include one or more of the following: metal polynuclear oxo / hydroxo cations, any additional metal cations, and organic ligands. When multiple metal cations are introduced, the multiple metal cations can be introduced in the same solution and / or in separate solutions. Generally, the separate or combined solutions can be mixed thoroughly. In some embodiments, the metal cation solution is then mixed with an organic-based ligand solution so that the organic-based ligands can bind with the metal cations. The resulting solution can be referred to as a stabilized metal cation solution. In some embodiments, the stabilized metal cation solution is reacted for an appropriate time to provide a stable ligand formation, which may or may not include cluster formation within the solution, regardless of whether mixed metal ions are introduced. In some embodiments, the reaction or stabilization time of the solution may be at least about 5 minutes, in other embodiments at least about 1 hour, and in further embodiments from about 2 hours to about 48 hours prior to further processing. A person of ordinary skill in the art will recognize that additional ranges of stabilization periods are contemplated and are within the scope of the present disclosure.

[0056] The concentration of the species in the precursor solution can be selected to achieve the desired physical properties of the solution. In particular, a lower concentration can result in desirable properties of the solution for certain coating procedures, such as spin-coating, where thinner coatings can be achieved overall with reasonable coating parameters. It may be desirable to use thinner coatings to achieve ultra-fine patterning and to reduce material costs. In general, the concentration can be selected as appropriate for the selected coating procedure. Coating properties are further described below.

[0057] The stability of the precursor solution can be evaluated in terms of changes to the initial solution. Specifically, if phase separation occurs with the generation of large sol particles or if the solution loses its ability to perform the desired pattern formation, the solution has lost stability. Based on the improved stabilization means described herein, the solution can be stable without further mixing for at least about 1 week, in further embodiments at least about 2 weeks, and in other embodiments at least about 4 weeks. Those skilled in the art will recognize that additional ranges of stabilization times are contemplated and are within the scope of the present disclosure. Solutions with sufficient stabilization times can be formulated and commercially distributed with appropriate shelf life.

[0058] Coating Materials The coating material is formed by deposition of a precursor solution onto a selected substrate and subsequent processing. A substrate generally refers to a surface onto which a coating material may be deposited, and a substrate may include multiple layers, with the surface being associated with a top layer. In some embodiments, the substrate surface may be treated to prepare the surface for adhesion of the coating material. The surface may also be cleaned and / or smoothed as necessary. Suitable substrate surfaces may include any reasonable material. Some substrates of particular interest include, for example, silicon wafers, silica substrates, other inorganic materials, such as ceramic materials, polymeric substrates, such as organic polymers, composites thereof, and combinations thereof, across the surface and / or within layers of the substrate. While wafers, such as relatively thin cylindrical structures, may be convenient, any reasonably shaped structure may be used. Substrates having a polymer layer on a polymeric substrate or non-polymeric structure may be desirable for certain applications based on their low cost and flexibility, and suitable polymers may be selected based on the relatively low processing temperatures that may be used for processing the patternable materials described herein. Suitable polymers may include, for example, polycarbonates, polyimides, polyesters, polyalkenes, copolymers thereof, and mixtures thereof. Generally, it is desirable for the substrate to have a flat surface, especially for high resolution applications. However, in certain embodiments, the substrate may have substantial topography, and the resist coating is intended to fill or planarize the features for certain patterning applications. Such functionality of resist materials is described in U.S. Patent Application Publication No. 2015 / 0253667 A1 (Bristol et al.), entitled "Pre-Patterned Hard Mask for Ultrafast Lithographic Imaging," which is incorporated herein by reference.

[0059] In general, any suitable coating process can be used to deliver the precursor solution to the substrate. Suitable coating means can include, for example, spin coating, spray coating, dip coating, knife edge coating, printing means (e.g., inkjet printing and screen printing), and the like. Some of these coating means form a pattern of the coating material during the coating process, but the resolution currently available from printing and the like has a significantly lower level of resolution than that available from the radiation-based patterning described herein. To provide greater control over the coating process, the coating material can be applied in multiple coating steps. For example, multiple spin coatings can be performed to provide the desired final coating thickness. The heat treatment described below can be applied after each coating step, or after multiple coating steps.

[0060] When patterning is performed using radiation, spin coating may be a desirable means to coat the substrate relatively uniformly, although edge effects may be present. In some embodiments, the wafer may be spun at a speed of about 500 rpm to about 10,000 rpm, in further embodiments about 1000 rpm to about 7500 rpm, and in additional embodiments about 2000 rpm to about 6000 rpm. The spin speed may be adjusted to obtain a desired coating thickness. Spin coating may be performed for a time period of about 5 seconds to about 5 minutes, and in further embodiments about 15 seconds to about 2 minutes. An initial slow speed spin (e.g., 50 rpm to 250 rpm) may be used to perform an initial bulk application of the composition across the substrate. To remove any edge bead, a backside rinse, edge bead removal step, or the like, may be performed using water or other suitable solvent. A person of ordinary skill in the art will recognize that additional ranges of spin coating parameters within the explicit ranges above are contemplated and are within the scope of the present disclosure.

[0061] The thickness of the coating may generally be a function of the concentration, viscosity and spin-coating rotation speed of the precursor solution. For other coating processes, the thickness may also generally be adjusted by selection of coating parameters. In some embodiments, it may be desirable to use a thin coating to facilitate the formation of small and highly modified features in a subsequent patterning process. For example, the coating material after drying may have an average thickness of about 10 microns or less, in other embodiments about 1 micron or less, in further embodiments about 250 nanometers (nm) or less, in additional embodiments about 1 nanometer (nm) to about 50 nm, in other embodiments about 2 nm to about 40 nm, and in some embodiments about 3 nm to about 25 nm. A person of ordinary skill in the art will recognize that additional ranges of thickness within the explicit ranges above are contemplated and are within the scope of the present disclosure. The thickness may be assessed using non-contact methods of x-ray reflectivity and / or ellipsometry based on the optical properties of the film. Generally, the coating is relatively uniform to facilitate processing. In some embodiments, the coating thickness variation differs from the average coating thickness by no more than ±50%, further embodiments by no more than ±40%, and in additional embodiments by no more than about ±25% relative to the average coating thickness. In some embodiments, such as highly uniform coatings on larger substrates, the coating uniformity assessment may be evaluated with a one centimeter edge exclusion, i.e., the coating uniformity is not assessed within one centimeter of the edge of the coating. A person of ordinary skill in the art will recognize that additional ranges within the explicit ranges above are contemplated and are within the present disclosure.

[0062] Since many coating processes form coating materials in droplets or other forms with a larger surface area and / or solution movement that stimulates evaporation, the coating process itself may result in the evaporation of some of the solvent. The loss of solvent tends to increase the viscosity of the coating material as the concentration of species in the material increases. The goal during the coating process may be to remove enough solvent to stabilize the coating material for further processing. These species may condense during coating and subsequent heating to form a hydrolyzate coating material. Generally, the coating material may be heated prior to radiation exposure to further remove solvent and promote densification of the coating material. The dried coating material may generally form a polymeric metal oxo / hydroxo network based on oxo-hydroxo ligands to the metal, where the metal also has some alkyl ligands, or a molecular solid composed of polynuclear metal oxo / hydroxo species with alkyl ligands.

[0063] The solvent removal process may or may not be quantitatively controlled with respect to the specific amount of solvent remaining in the coating material, and empirical evaluation of the properties of the resulting coating material may generally be performed to select processing conditions that are effective for the patterning process. Although heating is not required for successful process application, it may be desirable to heat the coated substrate to accelerate processing and / or increase process reproducibility. In embodiments where heating is applied to remove the solvent, the coating material may be heated to a temperature of about 45°C to about 250°C, and in further embodiments, about 55°C to about 225°C. Heating for solvent removal may generally be performed for at least about 0.1 minutes, in further embodiments, from about 0.5 minutes to about 30 minutes, and in additional embodiments, from about 0.75 minutes to about 10 minutes. One of ordinary skill in the art will recognize that additional ranges of heating temperatures and times within the explicit ranges above are contemplated and are within the scope of the present disclosure. As a result of heat treatment and densification of the coating material, the coating material may exhibit an increase in refractive index and radiation absorption without significant loss of contrast.

[0064] Patterned Exposure and Patterned Coating Materials The coating material can be finely patterned using radiation. As described above, the composition of the precursor solution, and therefore the corresponding coating material, can be designed to sufficiently absorb the desired form of radiation. Absorption of radiation produces energy that can break bonds between the metal and the alkyl ligands, such that at least a portion of the alkyl ligands are no longer available to stabilize the material. Radiolysis products, including alkyl ligands or fragments, may or may not diffuse out of the film depending on the process variables and the identity of such products. Upon absorption of a sufficient amount of radiation, the exposed coating material condenses, i.e., forms an enhanced metal oxo / hydroxo network, which may include water absorbed from the surrounding atmosphere. The radiation can generally be delivered according to a selected pattern. The radiation pattern is transferred to a corresponding pattern or latent image in the coating material having irradiated and non-irradiated regions. The irradiated regions include chemically altered coating material, and the non-irradiated regions generally include coating material as formed. As described below, upon development of the coating material by removal of the non-irradiated coating material or selective removal of the irradiated coating material, very sharp edges can be formed.

[0065] The radiation may generally be directed to the coated substrate through a mask, or the radiation beam may be controllably scanned across the substrate. Generally, the radiation may include electromagnetic radiation, an electron beam (beta radiation), or other suitable radiation. Generally, the electromagnetic radiation may have a desired wavelength or range of wavelengths, such as visible light, ultraviolet light, or x-rays. The achievable resolution for a radiation pattern generally depends on the wavelength of the radiation, with higher resolution patterns generally being achievable with shorter wavelength radiation. Thus, it may be desirable to use ultraviolet light, x-rays, or an electron beam to achieve particularly high resolution patterns.

[0066] According to the international standard ISO21348 (2007), which is incorporated herein by reference, ultraviolet light spans the wavelengths between 100 nm and less than 400 nm. A krypton fluoride laser can be used as a 248 nm ultraviolet light source. The ultraviolet light range can be subdivided in several ways under accepted standards, such as extreme ultraviolet (EUV), which is from 10 nm to less than 121 nm, and far ultraviolet (FUV), which is from 122 nm to less than 200 nm. The 193 nm line from an argon fluoride laser can be used as a radiation source in the FUV. EUV light is used for lithography at 13.5 nm, and the light is generated from a high-energy laser or a Xe or Sn plasma source excited with a discharge pulse. Soft x-rays can be defined as being from 0.1 nm to less than 10 nm.

[0067] The amount of electromagnetic radiation can be characterized by the fluence or dose, which is given by the integrated radiant flux versus exposure time. A suitable radiation fluence is approximately 1 mJ / cm 2 ~Approx. 150mJ / cm 2 and in a further embodiment about 2 mJ / cm 2 ~about 100mJ / cm 2 , and in a further embodiment, about 3 mJ / cm 2 ~about 50mJ / cm 2 A person of ordinary skill in the art will recognize that additional ranges of radiation fluence within the explicit ranges above are contemplated and are within the present disclosure.

[0068] In electron beam lithography, the electron beam typically induces secondary electrons, which typically alter the irradiated material. Resolution may be, at least in part, a function of the range of the secondary electrons within the material, where it is believed that higher resolution generally results from shorter range secondary electrons. Based on the high resolution achievable by electron lithography using the inorganic coating materials described herein, the range of secondary electrons in inorganic materials is limited. The electron beam may be characterized by the energy of the beam, with suitable energies ranging from about 5V to about 200 kV (kilovolts), and in further embodiments, from about 7.5V to about 100 kV. At 30 kV, the proximity corrected beam dose is about 0.1 microcoulombs per square centimeter to about 5 millicoulombs per square centimeter (mC / cm). 2 ), and in a further embodiment about 0.5 μC / cm 2 ~about 1mC / cm 2 , and in other embodiments, about 1 μC / cm 2 ~about 100μC / cm 2 A person of ordinary skill in the art will be able to calculate corresponding doses at other beam energies based on the teachings herein and will recognize that additional ranges of electron beam characteristics within the explicit ranges above are contemplated and are within the scope of the present disclosure.

[0069] Based on the design of the coating material, there is a large contrast in material properties between the irradiated areas with condensed coating material and the non-irradiated coating material with the organic ligands substantially unchanged. The contrast in dosage can be improved by post-exposure heat treatment, but it has been found that in some embodiments it is possible to obtain satisfactory results without post-exposure heat treatment. The post-exposure heat treatment appears to anneal the irradiated coating material to increase its condensation without significantly condensing the non-irradiated areas of the coating material based on thermal destruction of the organic ligand-metal bonds. For embodiments in which post-exposure heat treatment is used, the post-exposure heat treatment can be performed at a temperature of about 45°C to about 250°C, in additional embodiments from about 50°C to about 190°C, and in further embodiments from about 60°C to about 175°C. The post-exposure heat treatment can generally be performed for at least about 0.1 minutes, in further embodiments from about 0.5 minutes to about 30 minutes, and in additional embodiments from about 0.75 minutes to about 10 minutes. A person of ordinary skill in the art will recognize that additional ranges of post-irradiation heating temperatures and times within the explicit ranges above are contemplated and are within the present disclosure. This high contrast in material properties further facilitates the formation of sharp lines in the developed patterns described in the following section.

[0070] After exposure to radiation, the coating material is patterned with irradiated and non-irradiated regions. Referring to Figures 1 and 2, a patterned structure 100 is shown that includes a substrate 102, a thin film 103, and a patterned coating material 104. The patterned coating material 104 includes regions 110, 112, 114, 116 of irradiated coating material and non-condensed regions 118, 120, 122 of non-irradiated coating material. The patterned structure formed by the condensed regions 110, 112, 114, 116 and the non-condensed regions 118, 120, 122 represents a latent image in the coating material, the development of which is described in the following section.

[0071] Developing and patterning structures Developing the image involves contacting the patterned coating material containing the latent image with a developer composition to either remove the non-irradiated coating material to form a negative image or remove the irradiated coating to form a positive image. With the resist materials described herein, effective negative or positive patterning with desired resolution can be performed using an appropriate developer solution, generally based on the same coating. In particular, the irradiated areas are at least partially condensed to increase the metal oxide character, so that the irradiated material is resistant to dissolution by organic solvents, and the non-irradiated composition remains soluble in organic solvents. Reference to condensed coating material refers to at least partial condensation in the sense that the oxide character of the material is increased relative to the initial material. On the other hand, the non-irradiated material is less soluble in weak base or aqueous acid due to the material's hydrophobicity, and therefore aqueous base can be used for positive patterning to remove the irradiated material while retaining the non-irradiated material.

[0072] Coating compositions having organic stabilizing ligands produce materials that are relatively hydrophobic in nature. Irradiation to break at least some of the organometallic bonds changes the material to a less hydrophobic, i.e., more hydrophilic, material. This change in properties provides a significant contrast between irradiated and non-irradiated coatings, allowing both positive and negative patterning to be performed using the same resist composition. Specifically, the irradiated coating material condenses to some extent to a metal oxide rich composition, but the degree of condensation is generally moderate without significant heating, and thus the irradiated material is relatively straightforward to development with conventional developers.

[0073] For negative imaging, with reference to Figures 3 and 4, the latent image of the structure shown in Figures 1 and 2 is developed by contact with a developer to form a patterned structure 130. After development of the image, the substrate 102 is exposed along its upper surface through openings 132, 134, 135, which are located at the locations of the non-condensed regions 118, 120, 122, respectively. For positive imaging, with reference to Figures 5 and 6, the latent image of the structure shown in Figures 1 and 2 is developed to form a patterned structure 140. The patterned structure 140 has a conjugate image of the patterned structure 130. The patterned structure 140 has the substrate 102 exposed at the locations of the irradiated regions 110, 112, 114, 116 (which are developed to form openings 142, 144, 146, 148).

[0074] For negative-tone imaging, the developer may be an organic solvent, such as the solvent used to form the precursor solution. In general, the choice of developer may be influenced by the solubility parameters for the coating materials (both irradiated and non-irradiated), as well as the volatility, flammability, toxicity, viscosity, and potential chemical interactions with other process materials of the developer. In particular, suitable developers include, for example, aromatic compounds (e.g., benzene, xylene, toluene), esters (e.g., propylene glycol monomethyl ester acetate, ethyl acetate, ethyl lactate, n-butyl acetate, butyrolactone), alcohols (e.g., 4-methyl-2-pentanol, 1-butanol, isopropanol, 1-propanol, methanol), ketones (e.g., methyl ethyl ketone, acetone, cyclohexanone, 2-heptanone, 2-octanone), ethers (e.g., tetrahydrofuran, dioxane, anisole), and the like. Development may be carried out for about 5 seconds to about 30 minutes, in further embodiments from about 8 seconds to about 15 minutes, and in additional embodiments from about 10 seconds to about 10 minutes. A person of ordinary skill in the art will recognize that additional ranges within the explicit ranges above are contemplated and are within the present disclosure.

[0075] For positive imaging, the developer can generally be an acid or an aqueous base solution. In some embodiments, an aqueous base solution can be used to obtain sharper images. To reduce contamination from the developer, it may be desirable to use a developer that does not contain metal atoms. Thus, quaternary ammonium hydroxide compositions, such as tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, or combinations thereof, are desirable as developers. In general, quaternary ammonium hydroxides of particular interest can be represented by the formula R4NOH, where R=methyl, ethyl, propyl, butyl, or combinations thereof. The coating materials described herein can generally be developed with the same developers currently commonly used for polymer resists, specifically tetramethylammonium hydroxide (TMAH). Commercially available TMAH is available at 2.38 weight percent, and this concentration can be used for the processes described herein. Additionally, mixed quaternary tetraalkylammonium hydroxides can be used. Generally, the developer can contain from about 0.5 to about 30 weight percent, in further embodiments from about 1 to about 25 weight percent, and in other embodiments from about 1.25 to about 20 weight percent of a tetraalkylammonium hydroxide or similar quaternary ammonium hydroxide. A person of ordinary skill in the art will recognize that additional ranges of developer concentrations within the explicit ranges above are contemplated and are within the present disclosure.

[0076] In addition to the main developer composition, the developer may contain additional compositions to facilitate the development process. Suitable additives include, for example, dissolved salts having cations selected from the group consisting of ammonium, d-block metal cations (hafnium, zirconium, lanthanum, etc.), f-block metal cations (cerium, lutetium, etc.), p-block metal cations (aluminum, tin, etc.), alkali metals (lithium, sodium, potassium, etc.), and combinations thereof, and anions selected from the group consisting of fluorine, chlorine, bromine, iodine, nitrate, sulfate, phosphate, silicic acid, boric acid, peroxide, butoxide, formate, oxalate, ethylenediamine-tetraacetic acid (EDTA), tungstic acid, molybdic acid, and the like, and combinations thereof. Other potentially useful additives include, for example, molecular chelating agents, such as polyamines, alcohol amines, amino acids, carboxylic acids, or combinations thereof. When optional additives are present, the developer may contain up to about 10 weight percent of the additives, and in further embodiments up to about 5 weight percent of the additives. A person of ordinary skill in the art will recognize that additional ranges of additive concentrations within the explicit ranges above are contemplated and are within the present disclosure. Additives can be selected to improve contrast, sensitivity, and linewidth roughness. Additives in the developer can also inhibit metal oxide particle formation and precipitation.

[0077] For weaker developers, such as less concentrated aqueous developers, diluted organic developers or compositions (coatings with lower development rates), a higher temperature development process can be used to increase the speed of the process. For stronger developers, the temperature of the development process can be lowered to slow down the rate of development and / or control the kinetics of development. In general, the temperature of development can be adjusted between appropriate values ​​that match the volatility of the solvent. Furthermore, the developer containing dissolved coating material near the developer-coating interface can be dispersed by sonication during development.

[0078] The developer can be applied to the patterned coating material using any reasonable means. For example, the developer can be sprayed onto the patterned coating material. Also, spin coating can be used. For automated processing, a puddle method can be used, which involves pouring the developer onto the coating material in a stationary fashion. If desired, spin rinsing and / or drying can be used to complete the development process. Suitable rinsing solutions include, for example, ultrapure water, methyl alcohol, ethyl alcohol, propyl alcohol, and combinations thereof in the case of negative patterning, and ultrapure water in the case of positive patterning. After the image is developed, the coating material is disposed on the substrate as a pattern.

[0079] Once the development step is complete, the coating material may be heat treated to further condense the material and further dehydrate, densify, or remove residual developer from the material. While this heat treatment may be particularly desirable for embodiments in which the oxide coating material is incorporated into the final device, it may also be desirable to perform the heat treatment for some embodiments in which the coating material is used as a resist and is ultimately removed if stabilization of the coating material is desired to facilitate further patterning. In particular, baking of the patterned coating material may be performed under conditions in which the patterned coating material exhibits a desired level of etch selectivity. In some embodiments, the patterned coating material may be heated to a temperature of about 100° C. to about 600° C., in further embodiments from about 175° C. to about 500° C., and in additional embodiments from about 200° C. to about 400° C. Heating may be performed for at least about 1 minute, in other embodiments from about 2 minutes to about 1 hour, and in further embodiments from about 2.5 minutes to about 25 minutes. Heating may be performed in air, in vacuum, or in an inert gas atmosphere such as Ar or N2. A person of ordinary skill in the art will recognize that additional ranges of temperatures and times for thermal treatment within the explicit ranges above are contemplated and are within the present disclosure. Similarly, non-thermal treatments, including blanket UV exposure, or exposure to an oxidizing plasma, such as O2, may be used for similar purposes.

[0080] In conventional organic resists, when the aspect ratio (height divided by width) of a structure becomes very large, the structure is prone to pattern collapse. Pattern collapse can be related to mechanical instability of high aspect ratio structures, where forces associated with the processing step, such as surface tension, deform the structural elements. Low aspect ratio structures are more stable with respect to potential deformation forces. With the patternable coating materials described herein, improved patterning can be achieved without the need for high aspect ratio patterned coating materials, since structures with thinner coating material layers can be effectively processed. Thus, very high resolution features were formed without resorting to high aspect ratio features in the patterned coating materials.

[0081] The resulting structures can have sharp edges and very low linewidth roughness. In particular, in addition to being able to reduce linewidth roughness, the high contrast also allows for the formation of small features and spaces between features, as well as the ability to form very well-resolved two-dimensional patterns (e.g., sharp corners). Thus, in some embodiments, adjacent straight line portions of adjacent structures can have an average pitch (half pitch) of about 60 nm (30 nm half pitch) or less, in some embodiments about 50 nm (25 nm half pitch) or less, and in further embodiments about 34 nm (17 nm half pitch) or less.

[0082] Pitch may be evaluated by design and confirmed by scanning electron microscopy (SEM), e.g., top-down images. As used herein, pitch refers to the spatial period, i.e., center-to-center distance, of repeating structural elements, and half-pitch, as commonly used in the art, is half the pitch. Feature dimensions of a pattern may also be expressed in terms of the average width of the features, typically evaluated away from corners, etc. Features may also refer to gaps between material elements and / or material elements. In some embodiments, the average width may be about 25 nm or less, in further embodiments about 20 nm or less, and in additional embodiments about 15 nm or less. Average linewidth roughness may be about 5 nm or less, in some embodiments about 4.5 nm or less, and in further embodiments about 2.5 nm to about 4 nm. Evaluation of linewidth roughness is performed by deriving the 3σ deviation from the average linewidth by analysis of top-down SEM images. The average contains both high-frequency and low-frequency roughness, i.e., short correlation length and long correlation length, respectively. While the linewidth roughness of organic resists is primarily characterized by a long correlation length, the organometallic coating materials of the present invention exhibit a significantly shorter correlation length. In the pattern transfer process, the short correlation roughness can be smoothed out during the etching process to produce a much higher fidelity pattern. A person of ordinary skill in the art will recognize that additional ranges of pitch, average width and linewidth roughness within the explicit ranges above are contemplated and are within the scope of the present disclosure.

[0083] Further processing of the patterned coating material After forming the patterned coating material, the coating material may be further processed to facilitate the formation of a selected device. In addition, deposition, etching and / or patterning of additional materials may typically be performed to complete the structure. The coating material may or may not be ultimately removed. The quality of the patterned coating material may in either case be advanced for the formation of improved devices, such as devices with smaller footprints.

[0084] The patterned coating material forms openings to the underlying substrate, for example, as shown in Figures 3 and 4. As with conventional resists, the patterned coating material forms an etch mask that can be used to transfer patterns to selectively remove the underlying thin film. Referring to Figure 7, the underlying thin film 103 (see Figure 6) is patterned onto the substrate 102 leaving features 152, 154, 156 below the condensation regions 110, 112, 114, respectively. Compared to conventional polymer resists, the materials described herein can provide significantly greater etch resistance. Similar processing can be performed using the mask patterns shown in Figures 5 and 6, with patterned structures resulting directly from alternative mask patterns varying accordingly.

[0085] Alternatively or additionally, deposition of the further material according to the mask pattern can modify the properties of the underlying structure and / or provide contact with the underlying structure. The further coating material can be selected based on the desired material properties. In addition, the density of the patterned inorganic coating material can provide high implantation resistance so that ions can be selectively implanted into the underlying structure through the openings in the mask. In some embodiments, the further deposited material can be a dielectric, semiconductor, conductor or other suitable material. The further deposited material can be deposited using any suitable means, such as solution-based procedures, chemical vapor deposition (CVD), sputtering, physical vapor deposition (PVD), or other suitable means.

[0086] Generally, multiple additional layers may be deposited. Additional patterning may be performed in conjunction with the deposition of multiple layers. If desired, any additional patterning may be performed using additional amounts of the coating materials described herein, polymer-based resists, other patterning means, or combinations thereof.

[0087] As mentioned above, the layer of coating (resist) material after patterning may or may not be removed. If the layer is not removed, the patterned coating (resist) material is incorporated into the structure. For embodiments in which the patterned coating (resist) material is incorporated into the structure, the properties of the coating (resist) material can be selected to provide the desired patterning properties as well as the properties of the material within the structure.

[0088] When removal of the patterned coating material is desired, the coating material serves as a conventional resist. The patterned coating material is used to pattern subsequently deposited materials and / or to selectively etch the substrate through spaces within the condensed coating material prior to removal of the resist / coating material. The condensed coating material can be removed using a suitable etching process. Specifically, dry etching can be performed using, for example, BCl3 plasma, Cl2 plasma, HBr plasma, Ar plasma, or plasma with other suitable process gases to remove the condensed coating material. Alternatively or additionally, wet etching can be used using, for example, aqueous acid or base, HF(aqueous), or buffered HF(aqueous) / NH4F or oxalic acid, etc. to remove the patterned coating material. Referring to FIG. 8, the structure of FIG. 8 is shown after removal of the coating material. The etched structure 150 includes the substrate 102 and features 152, 154, 156.

[0089] Metal oxo / hydroxo based coating materials are particularly convenient for performing multiple patterning using a thermal freeze process, as generally described for conventional resists in P. Zimmerman, J. Photopolym. Sci. Technol., Vol. 22, No. 5, 2009, p. 625. The double patterning process by "thermal freeze" is outlined in FIG. 9. In a first step, the coating material is formed into a pattern 160 on the substrate 162 using a lithography process and development, as described with respect to FIG. 3 and FIG. 4. A heating step 164 is performed to remove the solvent and condense the coating material, which may or may not be accompanied by the formation of a complete oxide. This heating step is equivalent to the post-development heating step described in the development section above. This "thermal freeze" process renders the coating material insoluble for subsequent deposition of a second layer of coating material. A second lithography and development step 166 is performed to form a double patterned structure 168 on the substrate 162. After the etching step 170, the product double patterned structure 172 is formed. It is noted that this process can be easily extended to multiple coating and patterning steps, and such extensions are contemplated and are within the scope of the present disclosure. With respect to multiple patterning, a notable difference between the inorganic coating materials described herein and conventional organic resists is that the organic resists remain soluble in conventional resist casting solvents even after thermal baking. The resist materials described herein can be condensed by thermal baking, so that they are not soluble in organic solvents and subsequent coating layers can be applied. EXAMPLES

[0090] Example 1 – Hydrolysate of t-BuSn(NEt2)3 This example describes the preparation of a hydrolysate precursor solution from t-butyltris(diethylamido)tin.

[0091] Nominal t-BuSnO (3 / 2-x / 2)(OH) x Hydrolyzate oxide hydroxide product (1) with 0>x<3 was prepared from t-butyltris(diethylamido)tin (2) synthesized according to the method reported in Haenssgen, D.; Puff, H.; Beckerman, N. Journal of Organometallic Chemistry, 293, 1985, 191-195, which is incorporated herein by reference. Using a gas-tight syringe, 4.4 g of t-butyltris(diethylamido)tin was added steadily (approximately 125 μL / s) to 150 mL of DI H2O (18 MΩ), and a precipitate formed immediately and was allowed to stand for 5 minutes. The resulting slurry was stirred for 30 minutes and then suction filtered through No. 1 filter paper (Whatman). The resulting solid was rinsed three times with 50 mL portions of DI H2O. The solid retained after filtration and rinsing was dried under vacuum (about 5 torr) at room temperature for 8 hours to give 1.9 g of hydrolysate 1 as a powder solid.

[0092] Elemental analysis of a powder sample at Microanalysis, Inc. (Wilmington, DE) yielded 22.43% C, 4.79% H, and 0.11% N (by mass). These results are consistent with a composition ratio of 1 t-butyl:1 Sn (predicted: 23.01% C, 4.83% H, 0.0% N). The N content indicates complete removal of diethylamine upon hydrolysis of t-butyltris(diethylamido)tin. Thermogravimetric mass analysis performed in dry air on a powder prepared by the same procedure is similarly consistent with the empirical approximate formula for the hydrolyzate, (C4H9)SnOOH, as shown in Figures 10 and 11. Stepwise dehydration (50-150 °C, residual weight approx. 96%) and dealkylation / combustion (200-500 °C, approx. 73%) were observed, with the final residual weight corresponding to the predicted SnO2 product.

[0093] Example 2 – Hydrolysate of i-PrSnCl3 This example describes the preparation of a hydrolysate precursor solution from i-propyltin trichloride.

[0094] i-Propyltin trichloride (4, i-PrSnCl 3、 Gelest) hydrolysis product of the oxyhydroxide product (i-PrSnO (3 / 2-x / 2) (OH) x where 0 < x < 3)(3) was prepared by rapidly adding 6.5 g of the compound i-propyltin trichloride to 150 mL of 0.5 M NaOH (in water) with vigorous stirring, and a precipitate immediately formed. The resulting mixture was stirred at room temperature for 1 hour and then suction filtered through No. 1 filter paper (Whatman). The retained solid was washed three times with approximately 25 mL of DI H2O once and then dried under vacuum (about 5 torr) at room temperature for 12 hours.

[0095] Elemental analysis of the dry powder of the hydrolysis product of i-propyltin trichloride (18.04% C, 3.76% H, 1.38% Cl; Microanalysis, Inc.; Wilmington, DE) showed that substantial removal of chloride ions occurred during the hydrolysis of i-propyltin trichloride, and the empirical approximate formula of the hydrolysis product is i-PrSnO (3 / 2-x / 2) (OH) x (where x ≈ 1) (calculated values for C3H8O2Sn: 18.50% C, 4.14% H, 0.00% Cl). The results are consistent with the empirical approximate formula (C3H7)SnOOH for the hydrolysis product of i-propyltin trichloride.

[0096] Example 3 - Preparation of Photoresist Solution This example describes the preparation of a photoresist solution from a hydrolysis product precursor.

[0097] A solution of compound 1 (Example 1) was prepared by adding 0.1 g of the dry powder to 10 mL of methanol (ACS, 99.8%) with stirring to form a mixture with a Sn concentration of about 0.05 M. After stirring for 24 hours, the mixture was filtered through a 0.45 μm PTFE syringe filter to remove insoluble material. Dynamic light scattering (DLS) analysis of the resulting precursor solution (performed using a Moebius instrument (Wyatt Technology)) is consistent with a unimodal mass-weighted distribution of clusters with a mean diameter of about 1.9 nm, as shown in FIG. 12. A representative time correlation function providing such a particle size distribution is shown in FIG. 13.

[0098] Nuclear magnetic resonance (NMR) spectroscopy was performed on similar solutions prepared in d4-methanol using a Bruker Prodigy tm The results were obtained using a Bruker Avance-III-HD 600 MHz spectrometer equipped with a CryoProbe. 119 The Sn spectrum is shown in Figure 14, and a representative 1 The H spectrum is shown in Figure 15. Two major sets of proton resonances were observed, consisting of a stronger (1.58, 140 ppm) and a weaker (1.55, 1.37 ppm) resonance. The positions and integrated intensities of these correspond to the closo dodecamer cluster [(t-BuSn) 12 O 14 (OH)6] +2 or closely related chemical environments. The resonances centered at 3.33 and 4.90 ppm are assigned to the CH3 and OH protons of methanol. Two sets of closely packed 119 Sn resonances are observed at -333.86 and -336.10 ppm, and -520.33 and -521.48 ppm. These results are consistent with the results of Eychenne-Baron et al., Organometallics 19, 2000, 1940-1949, incorporated herein by reference, for (n-BuSn) 12The shifts predicted for the two tin environments in the cationic dodecamer cluster are similarly approximated as described for the cluster.

[0099] Electrospray ionization mass spectrometry (ESI-MS) was used to characterize the methanolic solution of the same hydrolysate. A representative positive ion mode mass spectrum is shown in FIG. 16. Two major cationic species are observed in the spectrum. One is a signal at a mass-to-charge (m / z) ratio of 1219, and the second is a stronger signal at m / z=2435. These m / z ratios correspond to the doubly charged ([(t-BuSn) 12 O 14 (OH)6] +2 , calculated m / z = 1218), and singly charged (deprotonated, [(t-BuSn) 12 (O 15 (OH)5] + The peak at m / z 2436 is ascribed to the presence of a cationic dodecamer species (m / z = 2435). There are several shoulder and satellite peaks around the peak at m / z 2436 that may represent the presence of methoxo and solvated or hydrated derivatives of the major dodecamer species, as well as the closely related peaks observed by NMR. 119 Sn and 1 It is estimated to correspond to H resonance.

[0100] A solution of compound 3 (Example 2) was prepared by adding 0.16 g of the dry powder to 10 mL of 4-methyl-2-pentanol (Alfa-Aesar, 99%) with stirring to form a mixture with a Sn concentration of approximately 0.08 M. After stirring for 2 h, the mixture was dried overnight through activated 4 Å molecular sieves to remove residual water and then filtered through a 0.45 μm PTFE syringe filter to remove insoluble material.

[0101] Example 4 – Resist coating, film processing, negative imaging This example demonstrates the formation of a resist pattern based on negative imaging by extreme ultraviolet radiation exposure. A branched alkyl tin oxide hydroxide photoresist was coated onto a silicon wafer and a negative characteristic contrast curve was created using EUV radiation.

[0102] Silicon wafers (100 mm diameter) with native oxide surfaces were used as substrates for thin film deposition. The Si substrates were treated with hexamethyldisilazane (HMDS) vapor prime prior to resist deposition. Silicon wafers (100 mm diameter) with native oxide surfaces were used as substrates for thin film deposition. The Si substrates were treated with hexamethyldisilazane (HMDS) vapor prime prior to resist deposition. i-Propyl and t-butyltin oxide hydroxide photoresist solutions were prepared as described in Example 3 and diluted to approximately 0.06 and 0.05 M, respectively. n-Butyltin oxide hydroxide (n-BuSnO (3 / 2-x / 2) (OH) x A precursor solution (0.057M Sn) of the resist solution was prepared as described in the '524 application. The precursor solution was spin-coated onto a Si substrate and baked for 2 minutes at the indicated rpm / temperature to form an alkyl tin oxide hydroxide resist film: 1500 rpm / 80°C ( i Pr-);1800rpm / 100℃( n Bu-); 2000rpm / 100℃( t Bu-).

[0103] EUV light (Lawrence Berkeley National Laboratory Micro Exposure Tool, MET) was used to project a linear array of 50 circular pads (approximately 500um in diameter) onto the wafer. Pad exposure times were adjusted to provide increasing EUV doses (7% exponential steps) for each pad. The resist and substrate were then post-exposure baked (PEB) on a hotplate at 100-200°C for 2 minutes. The exposed film was immersed in 2-heptanone for 15 seconds and rinsed in the same developer for an additional 15 seconds to form a negative tone image, i.e., an image in which the unexposed parts of the coating were removed. The n-butyltin oxide hydroxide resist film was further rinsed in DI H2O for 30 seconds. A final hotplate bake at 150°C for 2 minutes completed the process. The thickness of the remaining resist on the exposed pads was measured using a JA Woollam M-2000 spectroscopic ellipsometer. The measured thickness was normalized to the maximum measured resist thickness and plotted against the log of the exposure dose to form a characteristic curve for each resist at the range of PEB temperatures. The maximum slope of the normalized thickness versus log dose curve is defined as the photoresist contrast (γ). The dose value at which the tangent drawn at this point is equal to 1 is the photoresist gel dose (D g In this way, the general parameters used in characterizing photoresists can be approximated according to Mack, C. Fundamental Principles of Optical Lithography, John Wiley & Sons, Chichester, UK; pp 271-272, 2007, which is incorporated herein by reference.

[0104] γ vs D for each resist gBy plotting the contrast versus dose reduction as the PEB temperature is increased for each resist, a clear relationship between dose reduction and contrast is illustrated (FIG. 17). It can be seen that all of the branched alkyltin oxide hydroxide resists tested here have better contrast than the n-butyltin oxide hydroxide based resists, and maintain equal or better contrast at lower doses (as controlled by PEB) when developed in 2-heptanone.

[0105] The improved sensitivity and contrast from the branched alkyl tin oxide hydroxide photoresist was similarly used to generate high resolution patterns by exposure to EUV radiation. A solution of compound 1 from Example 3 was diluted in methanol to approximately 0.03M Sn, then spin-coated onto a substrate at 2000 rpm and baked on a hotplate at 100° C. for 2 minutes. The film thickness after coating and baking was measured to be approximately 23 nm by ellipsometry.

[0106] The coated substrates were exposed to extreme ultraviolet radiation (Lawrence Berkeley National Laboratory Micro Exposure Tool). The imaging dose was 43 mJ / cm. 2 A pattern of 17 nm lines with a 34 nm pitch was projected onto the wafer using 13.5 nm wavelength radiation, dipole illumination, and aperture 0.3 at 1000 nm. The patterned resist and substrate were then post-exposure baked (PEB) on a hotplate at 175 °C for 2 min. The exposed film was then immersed in 2-heptanone for 15 s, rinsed in the same developer for another 15 s, and finally rinsed in DI H2O for 30 s to form a negative tone image, i.e., an image in which the unexposed parts of the coating were removed. Finally, a hotplate bake at 150 °C for 5 min was performed after development. Figure 18 shows an SEM image of the resulting 15.4 nm resist lines patterned at a 34 nm pitch, with a calculated line width roughness (LWR) of 4.6 nm.

[0107] i-PrSnO (3 / 2-x / 2)(OH) x A solution of (compound 3 from Example 2) was used in a similar manner to achieve high resolution patterning by EUV exposure. A solution of 3 from Example 3 was diluted in 4-methyl-2-pentanol to approximately 0.06M Sn, then spin coated onto a second Si substrate at 1500 rpm and baked on a hotplate at 80°C for 2 minutes. The film thickness after coating and baking was measured to be approximately 19 nm by ellipsometry. Brightfield patterns of 22 nm contact holes on a 44 nm pitch with +20% bias were imaged at a dose of 36 mJ / cm. 2 The wafer was then projected using quadrupole illumination at 1000 nm. The patterned resist and substrate were then subjected to PEB at 150° C. for 2 min. The exposed film was then immersed in 2-octanone for 15 s and rinsed with 2-octanone for another 15 s to form a negative image in which the unexposed parts of the coating were removed, leaving a pattern of contact holes. Finally, a hotplate bake at 150° C. for 5 min was performed after development. Figure 19 shows an SEM image of the resulting 22 nm holes patterned at 44 nm pitch.

[0108] Example 5 - Preparation of photoresist solutions with mixed alkyl ligands This example describes the formulations of precursor solutions containing mixed alkyl ligands, and the effectiveness of these formulations for patterning is described in the examples that follow.

[0109] t-Butyltin oxide hydroxide hydrolysate (1) was prepared from t-butyltris(diethylamido)tin according to the method described above in Example 1. Using an airtight syringe, 4.4 g (11 mmol) of t-butyltris(diethylamido)tin was added to 150 mL of DI H2O (18 MΩ) and a precipitate formed immediately and was allowed to stand for 5 minutes. The resulting slurry was stirred for 30 minutes and then suction filtered through No. 1 filter paper (Whatman) and rinsed three times with 60 mL portions of DI H2O. The solid retained after filtration and rinsing was dried under vacuum (approximately 5 torr) at room temperature for 17 hours to yield 1.85 g of powdered solid hydrolysate t-butyltin oxide hydroxide (1).

[0110] i-Propyltin oxide hydroxide hydrolyzate (3) was similarly prepared by the method described above in Example 2. A quantity of 9.65 g (36 mmol) of i-propyltin trichloride (i-PrSnCl3, Gelest) was added rapidly to 220 mL of 0.5 M NaOH (aq) with vigorous stirring, resulting in immediate precipitation. The resulting mixture was stirred at room temperature for 1.25 h and then suction filtered through two pieces of No. 5 filter paper (Whatman). The retained solid was washed three times with approximately 30 mL portions of DI H2O and then dried under vacuum (approximately 5 torr) at room temperature for 16 h.

[0111] Separate solutions of t-butyltin oxide hydroxide hydrolysate (1) and i-propyltin oxide hydroxide hydrolysate (3) were prepared from each powder. A 1.04 g quantity of dry powder t-butyltin oxide hydroxide hydrolysate was added to 100 mL of methanol (ACS, 99.8%) and stirred for 24 hours, whereupon the mixture was syringe filtered through a 0.45 um PTFE filter to remove insoluble particles. The residual mass of the sample after evaporation of the solvent and subsequent pyrolysis of the residual solid at 700 °C in air was consistent with an initial Sn concentration of 0.035 M, assuming stoichiometric conversion to SnO2. A solution of i-propyltin oxide hydroxide hydrolysate (3) was prepared by adding 3.129 g of the dry powder to 80 mL of 4-methyl-2-pentanol (Alfa-Aesar, 99%) with stirring. After stirring for 6 h, the mixture was dried over activated 4 Å molecular sieves for 60 h and then vacuum filtered through a 0.2 um PTFE membrane filter to remove insoluble material. The Sn concentration of the solution was found to be 0.16 M by thermal decomposition to the oxide.

[0112] Photoresist formulations A-F (Table 2) were prepared by mixing a methanolic solution of t-butyltin oxide hydroxide hydrolysate (1) with a 4-methyl-2-pentanol solution of i-propyltin oxide hydroxide hydrolysate (3) and diluting the resulting mixture with pure solvent according to the volumes specified in Table 2. The resulting solutions contained i-PrSnO (3 / 2-x / 2) (OH) x and t-BuSnO (3 / 2-x / 2) (OH) x The hydrolyzates are characterized as a blend of t-BuSnO (3 / 2-x / 2) (OH) x The percentage is expressed relative to the total Sn concentration.

[0113] [Table 2]

[0114] Example 6 – Resist coating, film processing, and negative imaging using mixed alkyl ligand precursors A mixed ligand organotin oxide hydroxide photoresist was used to generate negative patterns by exposure to extreme ultraviolet radiation. This example investigates patterning using the precursor solution from Example 5 with mixed alkyl ligands.

[0115] Silicon wafers (100 mm diameter) with native oxide surfaces were used as substrates for thin film deposition. The Si substrates were treated with hexamethyldisilazane (HMDS) vapor prime prior to resist deposition. Resist formulations A-F from Example 5 were spin-coated onto the substrates at 2000-2500 rpm and baked on a hotplate at 100°C for 2 minutes. Film thickness after coating and baking was measured to be about 30 nm by ellipsometry. The coated substrates were exposed to extreme ultraviolet radiation (Lawrence Berkeley National Laboratory Micro Exposure Tool). A pattern of 17 nm lines and spaces with 34 nm pitch was projected onto the wafer using 13.5 nm wavelength radiation, dipole illumination, and aperture 0.3. The patterned resist and substrate were then post-exposure baked (PEB) on a hotplate at 170°C for 2 minutes. The exposed film was then immersed in 2-heptanone for 15 seconds and rinsed in the same developer for another 15 seconds to produce a negative image, i.e., the unexposed parts of the coating were removed. Finally, a hotplate bake at 150°C for 5 minutes was performed after development.

[0116] Figure 20 shows SEM images of the resulting resist lines patterned at 34 nm pitch. Using SuMMIT analysis software (EUV Technology Corporation), the resist critical dimensions (CD) and line width roughness (LWR) were extracted from the SEM images of 17 hp lines patterned with resist formulations A-F. The LWR and size dose (E size ) is shown in FIG. (3 / 2-x / 2) (OH) xA clear trend of decreasing dose across the formulations is observed as the proportion of t-BuSnO is increased (circular dots). Furthermore, the LWR in FIG. 21 for the blended formulations (triangular dots) is significantly lower than that of pure t-BuSnO, respectively. (3 / 2-x / 2) (OH) x and i-PrSnO (3 / 2-x / 2) (OH) x Substantially lower than formulations A and F.

[0117] Example 7 – Preparation of isopropyltin oxide hydroxide hydrolysate from isopropyltris(dimethylamido)tin precursor The water-reactive precursor isopropyltris(dimethylamido)tin (i-PrSn(NMe2)3) was synthesized under an inert atmosphere, followed by the synthesis of i-PrSnO (3 / 2-x / 2) (OH) x Hydrolysis was carried out in two ways, using 1) atmospheric moisture and 2) liquid H2O to form the hydrolysate.

[0118] A 1 L Schlenk round-bottom flask was charged with LiNMe2 (81.75 g, 1.6 mol, Sigma-Aldrich) and anhydrous hexane (700 mL, Sigma-Aldrich) under argon to form a slurry. A large stir bar was added and the vessel was sealed. i-PrSnCl was added via syringe to the addition funnel under positive argon pressure. 3( A 134.3 g, 0.5 mol, Gelest) was placed in a reaction flask and attached to the flask. The flask was cooled to -78°C and i-PrSnCl3 was added dropwise over 2 hours. The reaction was allowed to warm to room temperature overnight with stirring to allow the solid precipitate to settle. Once settled, the reaction solution was filtered under positive argon pressure through an in-line cannula filter. The solvent was removed under vacuum and the residue was distilled under reduced pressure (50-52°C, 1.4 mmHg) to give a pale yellow liquid (110 g, 75% yield). The fraction of the distillate in C6D6 solvent collected on a Bruker DPX-400 (400 MHz, BBO probe) spectrometer was 0.01 mg / ml. 1 H and 119 The Sn NMR spectra are shown in Figures 22 and 23, respectively. As shown in Figure 22, the observed 1H resonance (s, 2.82 ppm, -N(CH3)2; d 1.26 ppm, -CH3; m, 1.60 ppm, -CH) i The spectrum coincides with that expected for PrSn(NMe2)3. As shown in Figure 23, the major 119 The Sn resonances are consistent with the major product having a single tin environment, and the chemical shifts correspond to the reported monoalkyltin amide compounds.

[0119] i-Propyltin oxide hydroxide hydrolysates were prepared from i-propyltris(dimethylamido)tin (i-PrSn(NMe2)3) by H2O hydrolysis using two different methods.

[0120] Method 1: Using an airtight syringe, 23.4 g (79.6 mmol) of i-propyltris(dimethylamido)tin (i-PrSn(NMe2)3) was added to 150 mL of n-hexane (HPLC grade, >99.5% hexane, >95% n-hexane) to form an opaque suspension, which was stirred in air for 5 minutes and then poured in equal volumes into six 150 mm diameter Petri dishes. The suspension was allowed to react with atmospheric moisture while the solvent evaporated in air for 1.5 hours, leaving a crude solid that was collected, combined, and dried under vacuum for 15 hours to yield 15.8 g of solid hydrolysate (compound 3, Example 2). Elemental analysis (UC Berkeley Microanalytical Facility) of a hydrolysate powder prepared by the same procedure returned a composition of 18.91% C, 4.24% H, and 0.51% N (by mass), consistent with substantial hydrolysis of the dimethylamido ligand and evaporation of the resulting alkylamine. The results are consistent with the calculated values ​​for C3H8O2Sn: 18.50% C, 4.14% H, 0.00% N, and 60.94% Sn (by mass). Thermogravimetric analysis of the same sample in dry air (Figure 24) indicates a Sn composition of about 60% (by mass), based on the residual weight at 500 °C (75.9%), assuming complete decomposition to SnO2. Mass spectral analysis of the same decomposition (Figure 25) indicates the presence of -C3H6. Taken together, these results support the conclusion that i-PrSnSnO (3 / 2-x / 2) (OH)x This is consistent with the empirical composition of 1, where x≈1, and the possible presence of small amounts of residual dimethylamide.

[0121] Method 2: Using an airtight syringe, 1.0 g (3.4 mmol) of i-propyltris(dimethylamido)tin (i-PrSn(NMe2)3) was rapidly added directly to 15 mL of DI HO (18.2 MΩ) under vigorous stirring to form a slurry, which was stirred for an additional 60 min. The slurry was then vacuum filtered through a 0.7 μm filter and the retained solid was washed with 10 mL of DI HO. The solid was then collected and dried under vacuum for 16 h to obtain 0.7 g of solid hydrolysate. Thermogravimetric analysis (FIG. 26) performed in dry air on hydrolysate powder prepared by the same procedure similarly showed that i-PrSnSnO of 3 (Example 2) was 0.01 g / mol. (3 / 2-x / 2) (OH) x where x ≈ 1, agrees with the empirical composition. As expected based on the complete decomposition of 3 to SnO, weight losses are observed due to gradual dehydration (50–175 °C, ca. 95.7% residual weight) and dealkylation / combustion (200–500 °C, ca. 77% residual weight).

[0122] Example 8 – Trace metal analysis of organotin oxide hydroxide photoresist solutions A resist precursor solution was prepared by adding 15.8 g of the dry powder prepared according to Method 1 of the previous example to 810 mL of 4-methyl-2-pentanol (High Purity Products) and stirring for 24 hours. After stirring, the mixture was suction filtered through a 0.22 μm PTFE filter to remove insoluble material. The residual mass of the sample after evaporation of the solvent and subsequent calcination of the solid at 700° C. in air was consistent with an initial Sn concentration of 0.072 M, assuming stoichiometric conversion to SnO2.

[0123] The trace metal concentrations in the resist precursor solutions above were evaluated for hydrolysates prepared with aqueous sodium hydroxide and i-propyltin trichloride. The 0.072 M solution prepared above was further diluted to 0.042 M (Sn) with 4-methyl-2-pentanol. A second i-propyltin oxide hydroxide precursor solution was prepared by hydrolysis of i-PrSnCl3 with aqueous NaOH as described in Example 2 and diluted to 0.42 M Sn with the same high purity 4-methyl-2-pentanol. Aliquots of both solutions were analyzed to determine the concentrations of 22 metals using inductively coupled plasma mass spectrometry (ICP-MS, Balazs Nanoanalysis, Fremont, CA) with a lower detection limit (LDL) of 10 parts per billion (ng / g). The results of these analyses are shown in Tables 3 and 4. In both cases, the concentrations of all analyzed metals were less than 10 ppb, except for sodium (Na). Resist solution containing the hydrolysate prepared with NaOH(aq) (A) was found to contain 34,000 ppb residual sodium even after three washes with 18 MΩ DI H2O. In contrast, resist solution prepared from the hydrolysate of i-propyl(tris)dimethylamidotin (B) was found to contain less than 10 ppb Na, as predicted by the non-alkaline hydrolysis.

[0124] i-PrSnSnO as measured by ICP-MS with 10 ppb LDL (3 / 2-x / 2) (OH) x The trace metal concentrations in the photoresist precursor solutions are shown in Tables 3 and 4.

[0125] [Table 3]

[0126] [Table 4]

[0127] Example 9 - Film coating, processing, and negative imaging of photoresists with low trace metal contamination Silicon wafers (100 mm diameter) with native oxide surfaces were used as substrates for thin film deposition. The Si substrates were treated with hexamethyldisilazane (HMDS) vapor prime prior to resist deposition. The 0.072 M resist solution from Example 8 was dispensed onto the substrate through a 0.45 nm syringe filter, spin-coated at 1500 rpm, and baked on a hotplate at 100° C. for 2 minutes. The film thickness after coating and baking was measured to be about 25 nm by ellipsometry. The coated substrates were exposed to extreme ultraviolet radiation (Lawrence Berkeley National Laboratory Micro Exposure Tool). A pattern of 17 nm lines and spaces with a 34 nm pitch was projected onto the wafer using 13.5 nm wavelength radiation, dipole illumination, and aperture 0.3. The patterned resist and substrate were then post-exposure baked (PEB) on a hotplate at 180° C. for 2 minutes. The exposed film was then immersed in 2-heptanone for 15 seconds and rinsed in the same developer for another 15 seconds to form a negative image, i.e., the unexposed parts of the coating were removed. Finally, a hotplate bake at 150 °C for 5 minutes was performed after development. Figure 27 shows the results of the 60 mJcm -2 1 shows an SEM image of the resulting resist line / space pattern on a substrate, defined by 14.5 nm resist lines patterned at 34 nm pitch with an imaging dose of 100 nm and an LWR of 2.9 nm.

[0128] Example 10 – Preparation of i-propyltin hydrolysate by hydrolysis of isopropyltin trichloride using aqueous organic base The hydrolysis product of i-PrSnCl3 was prepared by rapidly adding 6.5 g (24 mmol) of compound 4 i-PrSnCl3 to 150 mL of 0.5 M aqueous tetramethylammonium hydroxide (TMAH) with vigorous stirring, and a precipitate formed immediately. TMAH contains no metal cations in the formulation so as to introduce less metal contamination. The resulting mixture was stirred at room temperature for 1 hour and then suction filtered through a No. 1 filter paper (Whatman). The retained solid was washed three times with approximately 25 mL of DI H2O once, and then dried under vacuum (about 5 Torr) at room temperature for 12 hours. The elemental analysis of the dried powder hydrolyzate (18.67% C, 4.22% H, 0.03% N, 0.90% Cl; Microanalysis, Inc.; Wilmington, DE) is consistent with the substantial removal of chloride ions during hydrolysis and rinsing, and further, the general stoichiometry of i-PrSnSnO (3 / 2-x / 2) (OH) x (where x ≈ 1) is consistent (calculated values for C3H8O2Sn: 18.50% C, 4.14% H, 0.00% N, 0.00% Cl). The TGA-MS analysis (dry air) of the hydrolyzate powder prepared by the same procedure (Figures 28 and 29) is similarly consistent. Weight losses due to stepwise dehydration (50 - 175 °C, residual weight approximately 97.0%) and dealkylation / combustion (200 - 500 °C, residual weight approximately 77.5%) are observed as predicted based on complete decomposition to SnO2. This experiment was not specifically performed to test for low metal contamination, but as demonstrated in the examples accompanying this specification, the experiment is designed to show the ability to synthesize a product with low metal contamination, t-amyltin oxyhydroxide.

[0129] Example 11 - Preparation of Alkyltin Oxyhydroxide Hydrolyzates by Aqueous Hydrolysis of Alkyltin Tris(alkynides) t-Amyltin oxyhydroxide hydrolyzate, t-AmylSnO (3 / 2-x / 2) (0 < x < 3) (Compound 6) was prepared by aqueous hydrolysis of (1,1-dimethylpropyl)tin tris(phenylacetylide), t-AmylSn(C≡CPh)3 (Compound 7).

[0130] Tin tetra(phenylacetylide), Sn(C≡CPh)4, Compound 8 was synthesized as reported in Levashov, A.S.; Andreev, A.A.; Konshin, V.V. Tetrahedron Letters, 56, 2015, 56, 1870 - 1872, which is incorporated herein by reference. Next, Compound 7 was prepared by a metal-exchange reaction of Compound 8 by modifying the method of Jaumier et al. (Jaumier P.; Jousseaume, B.; Lahcini, M. Angewandte Chemie, International Edition, 38, 1999, 402 - 404, which is incorporated herein by reference): In a 150 mL flask, Sn(C≡CPh)4 (9.53 g / 19.33 mmol) was dissolved in anhydrous toluene (80 mL). Next, nitrogen was bubbled through the entire solution for 10 minutes, and the solution was cooled in an ice bath. Next, a solution of 1,1-dimethylpropylmagnesium bromide in ether (30 mL / 1N) was added dropwise. The solution was warmed to room temperature and stirred for 2 hours. Next, the reaction mixture was filtered through silica and concentrated under vacuum. The resulting solid was sonicated in anhydrous hexane, filtered, and the supernatant was concentrated under vacuum. Next, the resulting waxy solid was recrystallized from 20% methanol in water (v / v) at -10 °C for about 2 hours. Representative 119 Sn and 1 1H NMR spectra are found in FIGS. 30 and 31. FIG. 30 shows the 1 1H NMR spectrum. FIG. 31 shows the 119 119Sn NMR spectrum.

[0131] tert-Amyltin oxide hydroxide, t-AmylSnO (3 / 2-x / 2) (OH) x (where 0 < x < 3) (Compound 6) was prepared using H2O by adapting the method of Jaumier et al. described for unbranched alkyltin alkynides tIt was prepared by hydrolysis of AmylSn(C≡CPh)3. Chemical Communications, 1998, 369-370, incorporated herein by reference. In a 50 mL flask, t-AmylSn(C≡CPh)3 was dissolved in tetrahydrofuran (20 mL / 2% water) and 0.5 mL water. The solution was stirred at room temperature for 2 days and the precipitate was collected and dissolved in chloroform. The resulting solution was filtered through a 0.2 μm PTFE filter and the solvent was removed under vacuum. A representative 119 Sn (Figure 32) and 1 The H NMR spectrum (FIG. 33) was collected in CDCl3. 119 The Sn resonances are, respectively, [(RSn) 12 O 14 This is characteristic of penta- and hexa-coordinated tin atoms in closo-type dodecamer clusters of the form [(OH)6](OH)2. 1 H resonances also indicate the presence of 1,1-dimethylpropyl ligands in the two chemical environments, and importantly, only a very weak phenyl resonance (7.29-7.60 ppm) is observed for Figures 32 and 33, indicating near complete hydrolysis and removal of the phenylacetylide ligand. Although this experiment was not performed to specifically test for low metal contamination, as demonstrated in the accompanying examples, the experiment provides a synthetic approach that allows a product t-amyltin oxide hydroxide with low metal contamination to be synthesized.

[0132] Example 12 – Resist coating, film processing, and negative imaging using electron beam exposure t-BuSnO (3 / 2-x / 2) (OH) x and i-PrSnSnO (3 / 2-x / 2) (OH) x The resist precursor solution was prepared as described in Example 3. The solution was spin-coated and patterned using electron beam lithography with the process parameters summarized in Table 4. Silicon wafers (25x25 mm) with a native oxide surface were 2) were used as substrates for thin film deposition. Prior to resist coating, the substrates were cleaned in O2 plasma at 25 W at 15 mTorr for 1 min. The precursor solution was dispensed onto the substrate through a 0.45 nm syringe filter, spin-coated at the indicated rpm for 30 s, and baked on a hotplate at the indicated temperature for 2 min (post-application bake, PAB). Film thickness after coating and baking was measured by ellipsometry. The coated substrate was exposed to a 30 keV electron beam rastered to form a line / space pattern at the dose indicated. The patterned resist and substrate were then post-exposure baked (PEB) for 2 min on a hotplate at the temperature indicated in Table 4. The exposed film was then immersed in developer for 15 s and rinsed in the same developer for an additional 15 s to form a negative tone image, i.e., an image in which the unexposed portions of the coating were removed. Finally, a hotplate bake at 150°C for 5 min was performed after development. FIG. 34 shows SEM images of the resulting resist line / space patterns on the substrate with pitches of 32 nm (top) and 28 nm (bottom).

[0133] [Table 5]

[0134] Example 13 – Positive imaging with EUV exposure A branched alkyl tin oxide hydroxide resist was used to generate positive images using EUV radiation. i-PrSnO (3 / 2-x / 2) (OH) xThe hydrolysate (compound 3) was prepared and dissolved in 4-methyl-2-pentanol to yield a Sn precursor solution of about 0.07 M. Silicon wafers (100 mm diameter) with native oxide surface were used as substrates for thin film deposition. A hexamethyldisilazane (HMDS) vapor prime was performed on the wafer prior to coating. The precursor solution was dispensed onto the substrate by pipette, spin-coated at 1500 rpm for 30 seconds, and baked at 100 °C for 2 minutes on a hotplate. The film thickness after coating and baking was measured to be about 23 nm by ellipsometry. EUV exposure was performed at Berkeley MET. Annular illumination and imaging dose 25 mJ cm at 13.5 nm wavelength radiation and aperture 0.3. -2 A series of line and space patterns of various pitches were projected onto the wafer using a 350 nm TEM imager 100. Immediately after exposure, the resist and substrate were baked on a hotplate at 150° C. for 2 minutes in air.

[0135] The exposed film was immersed in 0.52 M aqueous NaOH for 15 seconds and rinsed with HO for another 15 seconds to develop a positive tone image, i.e., the exposed parts of the coating were removed. Finally, a hotplate bake at 150° C. for 5 minutes was performed after development. SEM images of positive tone resist lines patterned with 100 nm (a) and 60 nm (b) pitch can be found in FIG. 35.

[0136] The above embodiments are illustrative and are not intended to be limiting. Additional embodiments are within the scope of the following claims. Moreover, although the present invention has been described with respect to specific embodiments, those skilled in the art will recognize that changes in form and detail may be made without departing from the spirit and scope of the present invention. Any incorporation by reference of the above documents is limited such that no subject matter contrary to the express disclosure herein is incorporated.

Claims

1. A method for developing a radiation-exposed organometallic patterning layer having a latent image formed by an exposed region and an unexposed region, the exposed region comprising an exposed region and an unexposed region, the method comprising the step of contacting the radiation-exposed organometallic patterning layer with a developer comprising an organic solvent and a carboxylic acid.

2. The method according to claim 1, wherein the developer composition contains 10% by weight or less of a carboxylic acid.

3. The method according to claim 1, wherein the organic solvent comprises an aromatic compound, an ester, an alcohol, a ketone, an ether, or a combination thereof.

4. The method according to claim 1, wherein the organic solvent comprises an ester, a ketone, an ether, or a combination thereof.

5. The method according to claim 1, wherein the organic solvent comprises benzene, xylene, toluene, propylene glycol monomethyl acetate, ethyl acetate, ethyl lactate, n-butyl acetate, butyrolactone, 4-methyl-2-pentanol, 1-butanol, isopropanol, 1-propanol, methanol, methyl ethyl ketone, acetone, cyclohexanone, 2-heptanone, 2-octanone, tetrahydrofuran, dioxane, anisole, or a combination thereof.

6. The method according to claim 1, wherein the organic solvent comprises 2-heptanone and / or propylene glycol monomethyl ester acetate.

7. The method according to claim 1, wherein the developer composition comprises 2-heptanone and / or propylene glycol monomethyl ester acetate and contains 10% by weight or less of a carboxylic acid.

8. The method according to claim 1, wherein the developer composition further comprises a solubilizing salt, a molecular chelating agent, a polyamine, an alcoholamine, an amino acid, or a combination thereof.

9. The method according to claim 8, wherein the developer composition comprises a dissolved ethylenediaminetetraacetic acid (EDTA) salt.

10. The organometallic oxide / hydroxide network is of the formula RSnO （３／２－ｘ／２） (OH) ｘ The method according to claim 1, represented by the formula (wherein 0 < x < 3, and R is an alkyl, cycloalkyl, or substituted alkyl moiety having 1 to 31 carbon atoms, each forming a carbon bond with a tin atom).

11. The method according to claim 1, wherein the contact step is performed using a paddle method, a dip method, a spin coating method, or a spray method to apply the developer composition to the surface of a radiation-exposed organometallic patterning layer.

12. The method according to claim 1, wherein the step of making contact is performed for 5 seconds to 30 minutes.

13. The method according to claim 1, further comprising the step of rinsing the developed pattern with a rinsing solution containing a developer composition.

14. The method according to claim 1, further comprising the step of baking the radiation-exposed organometallic patterning layer at a temperature of 50°C to 190°C (post-exposure baking temperature) before the step of contacting the radiation-exposed organometallic patterning layer with a developer.

15. The radiation-exposed organometallic patterning layer has an initial dry thickness before the step of contacting it with the developer composition, and a final dry thickness after the step of contacting it with the developer composition. The method according to claim 1, wherein the initial dry thickness is 1 nm to 50 nm.

16. Either a step of depositing a material based on a developed patterned layer, or a step of etching a substrate based on a developed patterned layer, and Step 1: Remove the developed patterned layer to form the processed substrate. The method according to claim 1, further comprising:

17. The steps include: coating the substrate with a radiation-sensitive organometallic resist material to form a radiation-sensitive organometallic resist layer on the surface of the substrate, and The step of exposing the radiation-sensitive organometallic resist layer to extreme ultraviolet light using a patterned mask to form a radiation-exposed organometallic patterning layer including exposed and unexposed portions. The method according to claim 1, further comprising forming a radiation-exposed organometallic patterning layer by a method comprising:

18. The step of exposing the radiation-sensitive organometallic resist layer is 1 mJ / cm². ２ ~150 mJ / cm ２ The method according to claim 17, comprising irradiating with extreme ultraviolet (EUV) light at a dose of [amount].

19. The step of exposing the radiation-sensitive organometallic resist layer is 2 mJ / cm². ２ ~100 mJ / cm ２ The method according to claim 17, comprising irradiating with extreme ultraviolet (EUV) light at a dose of [value].

20. The method according to claim 1, wherein a negative image is formed by the aforementioned contact step.

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