Coordinate measuring instrument, light source, and method

Abstract

To specify a coordinate measuring instrument capable of improving optical measurement of a gear.SOLUTION: A coordinate measuring instrument includes: an optical distance sensor that has at least two linear axes (x, y, z), has at least one rotation axis C, and detects measurement points on a workpiece to be measured; a light emitting body 14 that has a light source 10, is mounted on a carrier board 12, and has a material radiating wideband light while the linear axes and rotation axes are adapted so as to execute relative operation between a workpiece to be measured and the optical distance sensor, and the light source provides source light 11 for the optical distance sensor; a laser 18 exciting the light emitting body; a device 22 for actively adjusting light intensity of source light generated by the light source; a device 24 for actively adjusting temperature within the light source; an optical system 26; and a light guide 28. The optical system is adapted so as to condense source light in the light guide, and the light guide is coupled to the optical distance sensor.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a coordinate measuring machine.The present invention further relates to a light source and a method for operating a coordinate measuring machine and a light source. [Background technology]

[0002] Coordinate measuring machines are used in gear metrology to determine the deviation of manufactured gears from a specified nominal shape before or during the manufacturing process or to measure the quality of manufactured gears.

[0003] Coordinate measuring machines used for gear metrology often differ from conventional gantry type coordinate measuring machines in that they are built around a rotating table or axis of rotation. The rotating table is used to hold the gear to be measured and rotate it about its own axis during measurement.

[0004] So far, tactile measuring systems have achieved the highest measurement accuracy in gear metrology. Such tactile measuring systems are characterized, for example, by a measuring probe with a probe ball attached to the tip of a shaft. When measuring the geometry of a gear by touch, the probe is moved into the tooth space and brought into contact with the tooth flank of the gear. The measuring probe can be moved into contact with the tooth flank along the profile and / or lateral direction in order to detect multiple measurement points, or individual measurement points can be approached and measured by probing. After measuring or probing the relevant side of the tooth space, the measuring probe is retracted, i.e. moved out of the tooth space, and screwed into the next tooth space to be measured. It can be seen that the speed of tactile measurements is limited by the necessary physical contact between the measuring probe and the gear. Summary of the Invention [Problem to be solved by the invention]

[0005] Over the last few years, non-contact optical metrology has been used frequently not only for general coordinate metrology but also for the more specialized field of gear metrology. One reason for using optical metrology is that it shortens the measurement time while providing the same quality of measurement data.

[0006] Optical metrology of gears poses special challenges due to the geometry of the gears and the nature of the surfaces to be measured. Due to the inclination of the teeth and their mutual shadowing, it is often not possible to achieve an optimal probing angle for optical measurements. Furthermore, tooth surfaces are highly reflective, which makes optical measurement difficult. For measurements close to production, contamination, vibrations and temperature variations can also limit the capabilities of optical measurement systems. The challenge for optical gear metrology is therefore to meet the high demands on both absolute accuracy and repeatability in gear metrology.

[0007] The ability of an optical measurement system to evaluate a certain amount of light within a certain time interval makes it possible to draw conclusions about the accuracy that can be achieved by optical measurement in a given time, i.e. how fast the optical measurement system operates or can operate. This is because the measurement time gain, i.e. the reduction of the measurement time compared to a tactile system, is a central requirement to justify the use of an optical measurement system over a tactile system.

[0008] For the ability of an optical measuring system to evaluate a certain amount of light within a certain time interval, it is important, inter alia, that the signal-to-noise ratio is sufficiently high. Furthermore, the quality of the optical measurement depends on the properties of the optical components of the sensor head of the optical measuring system, such as the numerical aperture or the transmittance and other transmission properties of the components used, as well as the efficiency of the detector, i.e. the quantum efficiency of a CMOS or CCD-based detector.

[0009] Another decisive factor for the quality of an optical measurement system is the quality of the light source used, which can be assessed for example by the intensity, bandwidth, stability and spectral uniformity of the light source in question. This is especially evident in gear metrology, since it is not possible to specially prepare parts for measurement, for example with chalk spray.

[0010] Against this background, the present invention is based on the technical problem of identifying a coordinate measuring machine that allows improving the optical measurement of gears. [Means for solving the problem]

[0011] The above-stated technical problem is solved by the independent claims. Further embodiments and further developments of the invention result from the dependent claims and the following description.

[0012] According to the invention, a coordinate measuring machine is specified, the coordinate measuring machine having two or more linear axes, at least one rotational axis, an optical distance sensor for detecting a measurement point on a workpiece to be measured, and a light source. The linear and rotational axes are adapted to perform a relative movement between the workpiece to be measured and the optical distance sensor. The light source is adapted to provide source light to the optical distance sensor. The light source comprises a light emitter mounted on a carrier board and having a material that emits broadband light under excitation, such as phosphorus, a laser for exciting the light emitter with laser light, a device for actively adjusting the light intensity of the source light generated by the light source, a device for actively adjusting the temperature in the light source, an optical system, and a light guide. The optical system is adapted to focus the source light in the light guide. The light guide is coupled to the optical distance sensor.

[0013] It has been shown that by combining active temperature regulation with active light intensity regulation a particularly stable, broadband and spectrally homogeneous light source can be identified, which is particularly suitable for gear measurement with optical distance sensors. Overall, an improved coordinate measuring machine for optical gear measurement can thus be identified.

[0014] The light guide may be an optical fiber.

[0015] The light guide may have a core diameter of 50 micrometers (μm).

[0016] The light guide may have a core diameter of 25 micrometers (μm).

[0017] Source light may include light emitted by a light emitter and laser light. Thus, source light may consist of a combination of laser light used to excite the light emitter and emitted light. For this reason, a distinction is made herein between "source light," "emitted light," and "laser light."

[0018] The source light is the light generated by the light source and introduced into the light guide for transmission to the optical distance sensor.

[0019] The emitted light is produced by excitation of a light emitter or by input of laser light energy to the light emitter.

[0020] The laser light, which may also be called pump light, is generated by a laser.

[0021] While laser light has a specific wavelength, emitted light is particularly broadband, having a wider range of wavelengths than laser light.

[0022] The wavelength of the laser light may be different from the wavelength range of the emitted light, so that the wavelength of the laser light is not in the spectrum of the light emitted by the light emitter.

[0023] It may be provided that the source light consists of the light emitted by the light emitter and does not include the laser light, which can be achieved, for example, by a filter connected upstream of the input of the light guide essentially completely filtering out the laser light or pump light.

[0024] According to an embodiment of the coordinate measuring machine, it may be provided that the device for actively regulating the temperature comprises a heater device, such as a resistive heater element, a thermoelectric element or the like.

[0025] The device for actively regulating the temperature may comprise a cooling device.

[0026] The device for actively regulating the temperature may comprise an active cooling device such as a cooling circuit having a cooling medium, a fan, or the like.

[0027] Alternatively or complementary, the active temperature regulating device may comprise a passive cooling device, such as cooling fins.

[0028] It may be provided that the device for actively regulating the temperature is adapted to regulate the temperature of the carrier board, which serves as a thermal interface for regulating the temperature of the light emitters, so that the temperature of the light emitters can be regulated indirectly via the carrier board.

[0029] It may be provided that the heater device, in particular the thermoelectric element, is coupled to the carrier board.It may be provided that the heater device, in particular the thermoelectric element, is integrated into the carrier board.

[0030] It may be provided that an active cooling device is coupled to the carrier board. It may be provided that the active cooling device is integrated into the carrier board. If a fan is provided, it may be adapted to supply cooling air to the carrier board.

[0031] It may be provided that the carrier board is coupled to a passive cooling device.It may be provided that the carrier board comprises a passive cooling device.

[0032] The device for actively adjusting the temperature may include a thermoelectric element, which is a heater device such as a Peltier element and a cooling device. For example, a certain target temperature can be set, and this target temperature is adjusted by the heating or cooling operation of the thermoelectric element depending on the operating and environmental conditions.

[0033] The optical system may have two lenses, in particular two aspheric lenses. The optical system may have exactly two aspheric lenses.

[0034] The optical system may include two or more lenses. The optical system may include spherical lenses and / or aspherical lenses.

[0035] The optical system may include a filter element, in particular a long-pass filter, the long-pass filter being particularly transmissive to wavelengths above 475 nanometers (nm).

[0036] The filter element may be disposed between the lenses.

[0037] The light source may also comprise a further laser for exciting the light emitter with laser light. In particular, the light source may comprise just two lasers for exciting the light emitter with laser light.

[0038] The light source may include a light sensor, such as a photodiode, for measuring the light intensity of the generated source light.

[0039] The light sensor may be located between the lenses.

[0040] In particular, the device for actively adjusting the light intensity may be connected to the light sensor and adapted to adjust the excitation of the light emitter by the laser light based on the light intensity measured by the light sensor. In particular, the output or current of the laser may be adjusted by the device for actively adjusting the light intensity in order to adjust the energy input to the light emitter and adjust the light intensity. Thus, the device for actively adjusting the light intensity is used to adjust one or more lasers.

[0041] More than one light sensor may be provided.

[0042] The laser light may have a wavelength of less than 500 nanometers (nm). In particular, the laser light may have a wavelength of 450 nanometers (nm).

[0043] The light source may comprise a temperature sensor for measuring the temperature, in particular for measuring the temperature of the light emitter and / or the carrier board and / or the laser.

[0044] The device for actively regulating the temperature may be connected to the temperature sensor and adapted to regulate active heating and / or active cooling of the light emitter and / or the carrier board and / or the laser based on the temperature measured by the temperature sensor.

[0045] More than one temperature sensor may be provided.

[0046] The light guide may be removably and exchangeably attached to a housing which contains the optical system, in particular it may be attached to the housing by means of a plug-in connection.

[0047] The optical system may be displaceable with respect to the light emitter, in particular displaceable laterally with respect to the optical axis of the optical system, in such a way that the optical system is displaceable relative to the light emitter in order to obtain a maximum amount of light, i.e. in order that the largest possible proportion of the light generated by excitation of the light emitter is guided by the optical system into the light guide.

[0048] The light source may include a mechanical adjustment device for adjusting the relative position between the optical system and the light emitter, so that the relative position between the optical system and the light emitter can be adjusted and fixed in a simple manner.

[0049] The mechanical adjustment device may include two or more micrometer screws that allow for precise fine adjustment of the position of the optical system relative to the light emitter in a simple manner.

[0050] It may be provided that at least a first micrometer screw of the two or more micrometer screws is adapted to adjust a relative position between the optical system and the light emitter in a first direction and at least a second micrometer screw of the two or more micrometer screws is adapted to adjust a relative position between the optical system and the light emitter in a second direction, the first direction being, in particular, oriented orthogonal to the second direction. For example, the adjustment of the relative position may be performed in a plane oriented orthogonal to an optical axis of the optical system, and a first translational displacement of the optical system relative to the light emitter may be performed along the first direction and a second translational displacement of the optical system relative to the light emitter may be performed along the second direction.

[0051] The light source may have a device for adjusting the focus of the optical system, which device for adjusting the focus is particularly mechanically designed and has an adjustment screw, which is adapted to convert a rotation into a translational focus shift, in particular along the optical axis of the optical system.

[0052] The coordinate measuring machine may have a counter for counting the active operation time of the light source, so that the wear condition of the light source, laser and other components can be determined based on the operation time.

[0053] It may be provided that the light source is a broadband white light source, the light source is adapted to generate source light having a bandwidth greater than 20 nanometers (nm), and the light source is adapted to generate wavelengths greater than 400 nanometers (nm) and less than 700 nanometers (nm).

[0054] The distance sensor may be a confocal chromatic distance sensor.

[0055] The optical distance sensor may be a point sensor for optical distance measurement. In particular, the point sensor can measure individual measurement points one after the other. Each measurement point may be detected by the point sensor individually, independently of the other measurement points. This means that it is possible by the point sensor to detect in particular a single measurement point without simultaneously detecting further measurement points. The individual measurement points may be assigned three spatial coordinates, for example an x-value, a y-value and a z-value in a Cartesian coordinate system xyz.

[0056] It may be provided that the focal diameter of the optical distance sensor is less than or equal to 50 microns, in particular less than or equal to 20 microns.

[0057] It may be provided that the optical distance measuring point sensor has depth resolution.

[0058] For example, looking along the optical axis of the point sensor, the depth, i.e. the distance of the optically probed surface or tooth surface along the optical axis in a predefined coordinate system, can be measured in a depth measurement range along the optical axis, e.g. the distance to the origin of the predefined coordinate system or to another geometric reference such as the position of the lens. It may be provided that the distance measurement is one-dimensional along the optical axis and that three-dimensional measurements are calculated based on the position of the optical measurement system.

[0059] For example, looking along the optical axis of the point sensor, the depth, i.e. the distance of the optically probed surface or tooth surface along the optical axis in a predefined coordinate system, e.g. the distance to the origin of the predefined coordinate system or to another geometric reference such as the position of the lens, can be measured in a depth measurement range of a few centimeters or millimeters along the optical axis, or in a depth measurement range of less than one millimeter. In particular, based on the distance information of the point sensor, a three-dimensional measurement point can be generated, taking into account information about the axial position of a coordinate measuring machine supporting the optical point sensor. It may be provided that the distance measurement is performed one-dimensionally along the optical axis and that the three-dimensional measurement value is calculated based on the position of the optical distance sensor.

[0060] It may be provided that the coordinate measuring machine has two or more point sensors for optical distance measurement.

[0061] The point sensors are arranged in a line or distributed in rows and columns like a grid, each point sensor therefore having a depth measurement range that is in particular adapted in the manner described above for optical distance measurement and has in particular a depth resolution along the optical axis. The point sensors may record measurements simultaneously.

[0062] In particular, coordinate measuring machines do not have cameras for the optical measurement of the geometry of the workpiece, in particular they do not have cameras for two-dimensional photography.

[0063] In particular, it may be provided that no camera is provided for the acquisition of the measurement points by image analysis or pixel analysis.In particular, it may be provided that no camera for two-dimensional photography is provided for the acquisition of the measurement points by image analysis or pixel analysis.

[0064] Measurement points are recorded on each tooth flank of the gear, in particular at positions away from the ends of each tooth flank.

[0065] It may be provided that the optical axis of the optical distance sensor when detecting the measurement point on the tooth surface makes an angle with the tooth surface that is not equal to 90°, in other words, that the normal on the tooth surface starting from the measurement point is not oriented parallel to the optical axis.

[0066] It may be provided that a plurality of measurement points are detected on each tooth flank along the tooth width, i.e. in the flank line direction. It may be provided that a plurality of measurement points are detected along the tooth width, i.e. in the flank line direction, as individual measurement points of each tooth flank, in particular that a first individual measurement point in the flank line direction is detected in time before a second individual measurement point in the flank line direction.

[0067] In this specification, the terms tooth face and flank are used synonymously.

[0068] The coordinate measuring machine may in particular be a gear measuring machine, which may be configured to provide correction parameters to a gear cutting machine, such as a gear grinding machine and / or a gear milling machine, based on the deviation of a measured gear from a predefined nominal gear form.

[0069] The coordinate measuring machine may have a tactile measuring device with a measuring probe for detecting measuring points on the workpiece to be measured. Thus, in addition to the optical distance sensor, the coordinate measuring machine may have a tactile measuring system for tactile gear measurements.

[0070] The coordinate measuring machine may be characterised in that a simulated light source is provided, that a switching device is provided for switching on and off or pulsing a laser of the light source, and that the simulated light source is adapted to simulate operating parameters of the light source when the laser is switched off or in pulsed mode and to transfer said operating parameters to a device for actively adjusting the light intensity and / or a device for actively adjusting the temperature.

[0071] The light intensity can be adjusted in particular by switching the laser on and off for short periods of time, so-called pulsing. In order to avoid excessive adjustment responses of the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature, simulated operating parameters can be transferred to the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature, so that for the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature it appears that the laser is constantly on. The above also applies if two or more lasers are provided, in which case two or more lasers are pulsed and a simulated light source generates the simulated operating parameters of the light source.

[0072] A simulated light source may be provided by an electrical circuit that simulates the electrical characteristics of a light source, but does not itself emit light.

[0073] For example, a simulated sensor signal may be generated by an electric circuit and transferred to the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature, the value of which corresponds to the sensor signal transferred to the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature upon operation when the light source is switched on. Thus, for the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature, it still appears that the light source is switched on. Thus, a simulated light source may be generated, for example, at a signal level.

[0074] Alternatively, the simulated light source may be provided in a software-based manner. When the light source is switched off and / or in a pulsed mode, the simulated light source may be "activated" by the software. In this case, it may be provided, for example, that the device for actively adjusting the light intensity and / or the device for actively adjusting the temperature does not generate changed manipulated variables, despite changed sensor data. Thus, in this case, simulated signals are not generated at the signal level to create the appearance of a continued operation of the light source for actively adjusting the light intensity and / or the device for actively adjusting the temperature, but the sensor input data processed in the control software is overwritten and replaced with values ​​reflecting the continued operation of the light source.

[0075] Alternatively, it may be provided that when the light source is switched off and switched on again or in the case of pulsed operation, the regulating operation of the device for actively regulating the light intensity and / or the device for actively regulating the temperature is in each case "frozen" and the device for actively regulating the light intensity and / or the device for actively regulating the temperature continues to be operated with unchanged operating parameters for a predetermined period of time, regardless of the changed input signal.

[0076] It may be provided that the coordinate measuring machine has three or more linear axes.

[0077] A coordinate measuring machine may be provided having exactly three linear axes and exactly one rotational axis.

[0078] It may be provided that the optical distance sensor is translatable by a linear axis and a rotational axis is set to pick up and rotate the part about a longitudinal or rotational axis.

[0079] The terms "part" and "workpiece" are used interchangeably herein.

[0080] The coordinate measuring machine may be adapted to move the part relative to the optical distance sensor during detection of the measurement points. In particular, the part may be rotated about an axis. In particular, the part may be rotated about an axis while the optical distance sensor is stationary and / or moved by one or more linear axes.

[0081] The coordinate measuring machine may be adapted to continuously move the part relative to the optical distance sensor during detection of the measurement points. In particular, the part may be continuously rotated about an axis while the optical distance sensor is stationary and / or moved by one or more linear axes.

[0082] The present invention relates to a light source, the light source having a light emitter mounted on a carrier board and having a material that emits broadband light under excitation, such as phosphor, a laser for exciting the light emitter with laser light, a device for actively adjusting the light intensity of source light generated by the light source, a device for actively adjusting the temperature within the light source, an optical system, a light guide that can be coupled to an optical distance sensor, or an output for connecting the light guide, the optical system adapted to focus the source light into the light guide or into the output.

[0083] It is shown that active regulation of temperature combined with active regulation of light intensity can provide a stable, broadband and spectrally homogeneous light source that is particularly suitable for gear measurements with optical distance sensors.

[0084] All the features described above with reference to the light source of the coordinate measuring machine are equally applicable to the light source according to the invention or can also be part of the light source according to the invention.

[0085] According to a further aspect of the invention, there is provided a method comprising the steps of providing a light source according to the invention or a coordinate measuring machine according to the invention, actively adjusting the light intensity of source light generated by the light source, and actively adjusting the temperature within the light source.

[0086] A simulated light source may be provided which simulates operating parameters of the light source when the laser is switched off and transfers said operating parameters to a device for actively adjusting the light intensity of the light source and / or to a device for actively adjusting the temperature. [Brief description of the drawings]

[0087] The invention will now be explained in more detail with reference to the drawings, which show exemplary embodiments. In either case, the figures are shown diagrammatically. [Figure 1] 1 shows a coordinate measuring machine according to the present invention; [Diagram 2] 1 shows a light source according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0088] FIG. 1 shows a coordinate measuring machine 2 according to the invention.

[0089] The coordinate measuring machine 2 has three linear axes x, y, z and a rotary axis C. In the figure, the references x, y, z and their associated arrows represent both the Cartesian coordinate system and the CNC-controlled linear axes and the respective translational degrees of freedom for performing relative measuring movements. The same applies to the rotary axis with reference C, which represents both a rotational degree of freedom and a CNC-controlled rotary drive for performing relative measuring movements.

[0090] The coordinate measuring machine 2 comprises an optical distance sensor 4 for optically detecting a measuring point on a workpiece 6 to be measured.

[0091] The coordinate measuring machine 2 has a measuring probe 8 for tactilely detecting a measuring point on a workpiece 6 to be measured. The workpiece 6 to be measured is a gear. The coordinate measuring machine 2 is a gear measuring machine.

[0092] The coordinate measuring machine 2 comprises a light source 10 according to the invention for supplying a source light 11 to the optical distance sensor 4. The light source 10 is explained below with reference to FIG.

[0093] The light source 10 comprises a light emitter 14 mounted on a carrier board 12, the light emitter 14 comprising a material such as phosphor that emits a broadband light 16 when excited, in particular white light.

[0094] The light source 10 has two lasers 18 for exciting the light emitter 14 with laser light 20 .

[0095] The light source 10 comprises a device 22 for actively adjusting the light intensity of the source light 11 generated by the light source 10. For this purpose, the device 22 adjusts the output of the laser 18 and thus the energy input to the light emitter 14 of the laser 18.

[0096] The light source 10 comprises a device 24 for actively regulating the temperature within the light source 10, in this case the temperature of the carrier board 12.

[0097] The light source 10 comprises an optical system 26 and a light guide 28, where the optical system 26 is adapted to focus the source light 11 into the light guide 28. The light guide 28 is coupled to the optical distance sensor 4 (FIG. 1).

[0098] The device 24 for actively regulating temperature comprises a heater device 30. The heater device 30 is a thermoelectric element.

[0099] The device 24 for actively regulating the temperature includes an active cooling device 32 .

[0100] According to an alternative embodiment, it may be provided that the device 24 for actively regulating the temperature is a thermoelectric element, ie a Peltier element, which is both a heating device and a cooling device.

[0101] The optical system 26 includes two aspheric lenses 34 .

[0102] A filter element 36 is disposed between the lenses 34 .

[0103] The filter element 36 is a long-pass filter, which is transparent for wavelengths above 475 nanometers (nm). Thus, the laser light 20 having a wavelength of 450 nanometers (nm) is substantially completely filtered out. Thus, only the light 16 emitted by the light emitter 14 enters the light guide 28 as the source light 11. According to an alternative exemplary embodiment, it may be provided that a combination of the laser light 20 and the emitted light 16 is focused into the light guide 28 as the source light 11.

[0104] The light source 10 has a light sensor 40 for measuring the light intensity of the generated source light 11. The light sensor 40 is a photodiode. The light sensor 40 is disposed between the lenses 34.

[0105] The device 22 for adjusting the light intensity uses the light intensity measured by the light sensor 40 as a measurement to adjust or regulate the output of the laser 18 .

[0106] The light source 10 has a temperature sensor 42 for measuring the temperature of the carrier board 12, and the device 24 for regulating the temperature of the carrier board 12 uses the temperature measured by the temperature sensor 42 to regulate the active heater means 30 and the active cooling means 32.

[0107] The light guide 28 is removably and replaceably mounted in a housing 44 which contains the optical system 26 and is provided by a plug-in connection.

[0108] The optical system 26 is displaceable relative to the light emitter 14, i.e., displaceable laterally relative to an optical axis 46 of the optical system 26. To this end, the light source 10 includes a mechanical adjustment device 48 for adjusting the relative position between the optical system 26 and the light emitter 14. The mechanical adjustment device 48 includes micrometer screws 50, 52.

[0109] A first micrometer screw 50 is used to adjust the relative position between the optical system 26 and the light emitter 14 in a first direction x.

[0110] The second micrometer screw 52 is used to adjust the relative position between the optical system 26 and the light emitter 14 in the second direction y. The first direction x is oriented orthogonal to the second direction y.

[0111] The light source 10 has a device for focusing of the optical system 26, which is constructed mechanically and includes an adjustment screw 54. The adjustment screw 54 is adapted to convert a rotation into a translational focus shift along the optical axis 46, i.e. in the z-direction.

[0112] The light source 10 is a broadband white light source, the light source being adapted to generate source light having a bandwidth greater than 20 nanometers (nm), and the light source being adapted to generate wavelengths greater than 400 nanometers (nm) and less than 700 nanometers (nm).

[0113] The distance sensor 4 is a confocal chromatic distance sensor.

[0114] The light source 10 has a simulated light source 56. The simulated light source 56 is an electric circuit that simulates the electrical characteristics of the light source 10, but does not emit light itself.

[0115] The light source 10 has a switching device 58 which is provided for switching the lasers 18 of the light source 10 on and off - in this case pulsing them.

[0116] The simulated light source 56 is adapted to simulate the operating parameters of the light source 10 when the laser 18 is off or during pulsed operation and to provide such parameters to the device 22 for actively adjusting the light intensity of the light source 10 and the device 24 for actively adjusting the temperature within the light source 10. [Explanation of symbols]

[0117] 2 Coordinate Measuring Instrument 4 Distance Sensor 6 Workpieces / Parts / Gears 8 Measuring Probes 10 light source 11 Source Light 12 Carrier Board 14 Luminous Object 16 Broadband light / synchrotron radiation 18 Laser 20 Laser light 22 Device for actively adjusting light intensity 24 Devices for active regulation of temperature 26 Optical system 28 Light Guide 30 Heater device 32 Cooling device 34 Lens 36 Filter Elements 40 Light Sensor 42 Temperature Sensor 44 Housing 46 Optical axis 48 Mechanical Adjustment Device 50 micrometer screw 52 Micrometer screw 54 Adjustment screw 56 Simulated light source 58 Switching Device x coordinate axis / NC axis / translational degree of freedom y coordinate axis / NC axis / translational degree of freedom z coordinate axis / NC axis / translational degree of freedom C Rotational axis / NC axis / Rotational freedom

Claims

1. It is a coordinate measuring instrument, It has two or more linear axes (x, y, z), It has a rotating axis (C), It has an optical distance sensor (4) for detecting a measurement point on the workpiece (6) to be measured, It has a light source (10), The linear axis (x, y, z) and the rotation axis (C) are adapted to perform relative motion between the workpiece (6) and the optical distance sensor (4). The light source (10) is adapted to provide source light (11) for the optical distance sensor (4), The light source (10) is A light-emitting element (14) is mounted on a carrier board (12) and has a material that emits broadband light when excited by phosphorus, A laser (18) for exciting the light-emitting element (14) with laser light (20), A device (22) for actively adjusting the light intensity of the source light (11) generated by the light source (10), A device (24) for actively adjusting the temperature inside the light source (10), Optical system (26) and Light guide (28) and It has, The optical system (26) is configured to focus the source light (11) onto the optical guide (28), The optical guide (28) is coupled to the optical distance sensor (4). Coordinate measuring instrument.

2. The device (24) for actively adjusting the temperature includes a heater device (30) such as a thermoelectric element. and / or The device (24) for actively adjusting the temperature has a cooling device (32), in particular the device for actively adjusting the temperature has an active cooling device such as a cooling medium, a cooling circuit with a fan, etc. and / or The device for actively adjusting the temperature has a passive cooling device such as cooling fins. and / or The device (24) for actively adjusting the temperature has a thermoelectric element that is both a heating device, such as a Peltier element, and a cooling device. The coordinate measuring device according to claim 1, characterized in that...

3. The optical system (26) has two lenses (34), in particular two aspherical lenses (34), The optical system (26) has a filter element (36), the filter element (36) is in particular a long-pass filter (36), the long-pass filter (36) is in particular transparent to wavelengths exceeding 475 nm, and the filter element (36) is in particular positioned between the lenses (34). The coordinate measuring instrument according to claim 1 or 2.

4. A photo sensor (40), such as a photodiode (40), is provided for measuring the light intensity of the generated source light (11). The coordinate measuring instrument according to feature 3.

5. The light sensor (40) is positioned between the lenses (34). The coordinate measuring instrument according to feature 4.

6. The laser light (20) has a wavelength of less than 500 nm, and more particularly, a wavelength of 450 nm. A coordinate measuring instrument according to claim 1 or 2.

7. A temperature sensor (42) is provided to measure temperature, in particular to measure the temperature of the light-emitting element (14) and / or the carrier board (12) and / or the laser (18), and / or The optical guide (28) is detachably and interchangeably attached to the housing (44) that houses the optical system (26), and is particularly attached to the housing by a plug-in connection. A coordinate measuring instrument according to claim 1 or 2.

8. The optical system (26) is displaceable with respect to the light-emitting element (14), and in particular, is displaceable laterally with respect to the optical axis (46) of the optical system (26). A coordinate measuring instrument according to claim 1 or 2.

9. A mechanical adjustment device (48) is provided to adjust the relative position between the optical system (26) and the light-emitting element (14), In particular, the mechanical adjustment device (48) has two or more micrometer threads (50, 52), Of the two or more micrometer threads (50, 52), at least the first micrometer thread (50) is adapted to adjust the relative position between the optical system (26) and the light-emitting element (14) in the first direction (x), and in particular, of the two or more micrometer threads (50, 52), at least the second micrometer thread (52) is adapted to adjust the relative position between the optical system (26) and the light-emitting element (14) in the second direction (y), The first direction (x) is oriented in particular to be perpendicular to the second direction (y), A coordinate measuring instrument according to claim 1 or 2.

10. A device for adjusting the focus of the optical system is provided, and the device for adjusting the focus is particularly mechanically designed and has an adjustment screw (54). The adjustment screw (54) is adapted to convert rotation into a translational shift of focus. A coordinate measuring instrument according to claim 1 or 2.

11. A counter is provided for counting the active operating time of the light source (10). A further laser (18) is provided to excite the light-emitting element (14) with laser light (20), and / or The optical distance sensor (4) is a confocal chromatic distance sensor (4), and / or The tactile measuring device (8) is equipped with a measuring probe for detecting a measurement point on the workpiece (6) to be measured. and / or The light source (10) is a broad-field white light source, and the light source (10) is adapted to generate source light having a bandwidth of more than 20 nm, and the light source (10) is adapted to generate wavelengths between 400 nm and less than 700 nm. A coordinate measuring instrument according to claim 1 or 2.

12. A simulated light source (56) is provided. A switching device (58) is provided for switching the laser (18) of the light source on and off or for pulsing it. The simulated light source (56) is configured to simulate the operating parameters of the light source (10) when the laser (18) is switched off or switched to pulsed operation, and to transfer these operating parameters to the device (22) for actively adjusting the light intensity and / or the device (24) for actively adjusting the temperature. A coordinate measuring instrument according to claim 1 or 2.

13. It is a light source, It has a light-emitting element mounted on a carrier board (12) and made of a material that emits broadband light when excited by phosphorus, etc. The device has a laser (18) for exciting the light-emitting element (14) with laser light (20), The system includes a device (22) for actively adjusting the light intensity of the source light (11) generated by the light source (10), The device (24) has a mechanism for actively adjusting the temperature inside the light source (10). It has an optical system (26), It has an optical guide (28) that can be connected to an optical distance sensor (4), or an output unit for connecting to the optical guide (28), The optical system (26) is a light source adapted to focus the source light (11) onto the optical guide (28) or output.

14. It is a method, To provide a light source according to claim 13 or a coordinate measuring instrument according to claim 1, Actively adjust the light intensity of the source light (11) generated by the light source (10), Actively adjusting the temperature inside the light source (10) A method that includes this.

15. The coordinate measuring instrument is A simulated light source (56) is provided. A switching device (58) is provided for switching the laser (18) of the light source on and off or for pulsing it. The simulated light source (56) is configured to simulate the operating parameters of the light source (10) when the laser (18) is switched off or switched to pulsed operation, and to transfer these operating parameters to the device (22) for actively adjusting the light intensity and / or the device (24) for actively adjusting the temperature. The simulated light source simulates the operating parameters of the light source when the laser (18) is switched off or switched to pulsed mode, and transmits these operating parameters to the device (22) for actively adjusting the light intensity and / or the device (24) for actively adjusting the temperature. The method according to claim 14.

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