Processing system
JP2024152441A5Pending Publication Date: 2026-03-05TOKYO ELECTRON LTD
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-04-14
- Publication Date
- 2026-03-05
AI Technical Summary
Technical Problem
Existing substrate transport systems lack an efficient method to determine the state of adhesion of a substrate to a transport device, which can lead to issues with substrate detachment during handling.
Method used
A processing system equipped with a substrate platform, measuring devices, and a determination unit that measures the load applied by the substrate upon transfer to determine the adhesion state based on load measurements, using a threshold value to assess adhesion force.
Benefits of technology
Enables easy and accurate determination of whether the substrate is firmly fixed to the transport device, preventing substrate detachment and facilitating continuous operation by identifying and addressing adhesion abnormalities.
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Abstract
To provide technology for easily determining whether the fixed state of a substrate to a transport device is good or not.SOLUTION: A disclosed processing system comprises a substrate placement unit, at least one measurer, and a determination unit. The substrate placement unit is constituted so that a substrate transported by a transport device is placed on it. The at least one measurer measures the load that the substrate placement unit receives from a substrate when the substrate is transported from the transport device to the substrate placement unit. The determination unit determines whether the fixed state of a substrate to the transport device is good or not, on the basis of the load measured by the at least one measurer.SELECTED DRAWING: Figure 6
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