Optical system for metrology system, and metrology system with such optical system

By integrating a transmissive optical focusing component with an imaging optical unit to increase working distance and reduce chromatic aberrations, the measurement system addresses handling and accuracy issues, enabling non-contact object measurement with improved precision.

JP2024170372AActive Publication Date: 2024-12-10CARL ZEISS SMT GMBH
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Patent Information

Application Number
JP2024074682
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2023-05-05
Filing Date
2024-05-02
Publication Date
2024-12-10
Estimated Expiration
2044-05-02

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Abstract

To provide an optical system for a metrology system so as to facilitate handling thereof, particularly handling with respect to object arrangement.SOLUTION: An optical system 21 for a metrology system for measuring an object has an object holder for holding the object in an object plane 13. A transmissive optical focusing component 11 is arranged in the beam path of illumination light 4 between a light source of the metrology system and an object field 12 in the object plane 13. The transmissive optical focusing component 11 has a focal length (s1) less than 5 mm. A detection device is used for detecting the illumination light 4 in the beam path downstream of the object field 12. An imaging optical unit 22 is used for imaging an illumination focus 16 generated by the transmissive optical focusing component 11 into a further illumination focus 16' in the region of the object field 12. As a result, the optical system facilitates handling thereof, particularly handling with respect to object arrangement.SELECTED DRAWING: Figure 7
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Citation Information

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