Strain gauge, strain measuring device and strain measuring method

Abstract

To provide a strain gauge which can improve practicability.SOLUTION: A nanogranular structure film constituting a resistor 2 formed on one main surface of a substrate 1 of a strain gauge has a composition represented by general formula L100-a-b-cMaFbOc (L: one or more kinds of non-magnetic metal elements or magnetic metal elements, M: one or more kinds of elements selected from Li, Mg, Al, Ca, Sr, Ba, Gd and Y, F: fluorine, O: oxygen, 12.0≤a≤33.0, 17.0≤b≤70.0, 0≤c≤1.0, and 50.0≤a+b+c≤90.0), in which metal particles which are represented by L and have an average particle diameter of 1.0 to 5.0 nm are distributed in an insulating matrix composed of fluoride of M or fluoride and oxide of M at an average particle interval of 0.2 to 0.6 nm.SELECTED DRAWING: Figure 1

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