Dielectric Materials Based on Amide-Imide-Extended Bismaleimides

Abstract

The present invention relates to a new class of dielectric polymer materials, particularly suitable for the manufacture of electronic devices. The dielectric polymer materials are formed by reacting bismaleimide compounds, which exhibit a balanced profile of advantageous material properties. The bismaleimide compounds have an oligomeric structure with an amide-imide extended repeat unit in the middle portion of the molecule and a maleimide group at each end of the molecule. Additionally, a method for forming said dielectric polymer materials is provided. In addition, the present invention relates to dielectric polymer materials and electronic devices comprising the same.

Description

[Technical field]

[0001] FIELD OF THEINVENTION The present invention relates to a novel class of dielectric polymer materials that are particularly suitable for the manufacture of electronic devices. The dielectric polymer materials are formed by reacting a new type of bismaleimide compound and exhibit a balanced and advantageous profile of favorable material properties, especially with respect to the requirements in advanced electronic packaging applications, such as, for example, wafer level packaging (WLP) and low dielectric adhesive applications. The dielectric polymer materials of the present invention have (a) favorable thermomechanical properties, such as high glass transition temperature (Tg), low coefficient of thermal expansion (CTE), high elongation at break, and high tensile strength, (b) favorable dielectric properties, such as low dielectric constant and low dissipation factor, (c) good adhesion properties, especially with copper and SiO 2 It exhibits an advantageous balanced profile of material properties including high adhesion strength to passivated wafers.

[0002] The dielectric polymer material of the present invention is formed by reacting bismaleimide compounds. As bismaleimide compounds, certain amide-imide extended bismaleimide compounds are described herein. Such compounds are photostructurable and can be used as starting materials for various applications in electronic device manufacturing, such as for preparing repassivation layers in packaged electronic devices (including passivation of conductive or semiconducting components of redistribution layers (RDL) or die attach), thin film formulations and / or adhesive formulations. Furthermore, the bismaleimide compounds have excellent film-forming ability and are easy to process from conventional solvents to form dielectric polymers as spin-on materials.

[0003] The bismaleimide compounds of the present invention have an oligomeric structure having an amide-imide extended repeat unit in the middle portion of the molecule and a maleimide group at each end of the molecule. Further provided is a method for forming said dielectric polymer material.Furthermore, the present invention relates to a dielectric polymer material and an electronic device comprising said polymer material as a dielectric material.The bismaleimide compounds and related dielectric polymer materials of the present invention enable cost-effective and reliable manufacture of microelectronic devices with a significantly reduced number of defective devices caused by mechanical deformation (warpage) due to undesired thermomechanical expansion. [Background technology]

[0004] 2. Background of the Invention As solid-state transistors began to replace vacuum tube technology, it became possible to attach electronic components such as resistors, capacitors, and diodes directly to the printed substrate of the card with wire leads, establishing the basic building block or level of packaging still in use today. Complex electronic functions often require many more individual components than can be interconnected on a single printed circuit card. The capability of multi-layer cards was accompanied by the development of three-dimensional packaging of daughter cards onto multi-layer motherboards. Integrated circuits allow many individual circuit elements such as resistors and diodes to be embedded into separate, relatively small components known as integrated circuit chips or dies. However, despite the incredible degree of circuit integration, multiple packaging levels are usually required, in part due to the technology of the integrated circuit itself. Integrated circuit chips are very fragile and have very small terminals. The first level of packaging fulfills the primary functions of providing mechanical protection, cooling, and electrical connection to the delicate integrated circuit. Some components (high power resistors, mechanical switches, capacitors) cannot be easily integrated onto the chip, so at least one additional packaging level, such as a printed circuit card, is utilized. For very complex applications such as mainframe computers, a hierarchy of multiple packaging levels is required.

[0005] A variety of advanced packaging technologies exist to meet the requirements of today's semiconductor industry. Advanced packaging technologies - wafer level packaging (WLP), fan-out wafer level packaging (FOWLP), 2.5D interposers, chip-on-chip stacking, package-on-package stacking, embedded ICs - all require thin substrates, redistribution layers, and other components such as high-resolution interconnects. End consumer markets are constantly pushing for smaller, thinner devices with lower cost and higher functionality. This is driving the need for next-generation packaging with finer features and improved reliability at competitive manufacturing costs.

[0006] Wafer-level packaging (WLP) is one of the most promising semiconductor packaging technologies for the next generation of small, high-performance electronic devices. In general, WLP is the process of packaging integrated circuits while they are still part of a wafer. This contrasts with the more traditional method of cutting the wafer into individual circuits and then packaging them. WLP is based on redistribution layers (RDLs), which allow connections between the die and solder balls, improving signal propagation and enabling smaller form factors (see Figure 1). The main application areas for WLP are smartphones and wearables due to size constraints.

[0007] With current materials, WLP processes are limited to applications with medium chip sizes. The reason for this limitation is based on inadequate thermomechanical properties and non-optimized processing of these materials. Dielectric materials used for next-generation microchip RDLs must meet certain requirements. In addition to a low dielectric constant, thermomechanical properties such as, for example, a high glass transition temperature (Tg), a low coefficient of thermal expansion (CTE), high elongation at break, and high tensile strength play an important role.

[0008] An important class of materials that meets some of the above requirements are imide-extended maleimide compounds, which have been described in various state-of-the-art publications. US2004 / 0225026A1 and US2011 / 0130485A1 relate to thermosetting (adhesive) compositions comprising imide-extended mono-, bis-, or polymaleimide compounds. The imide-extended maleimide compounds are prepared by condensing a suitable anhydride with a suitable diamine to obtain amine-terminated compounds. These compounds are then condensed with an excess of maleic anhydride to obtain the imide-extended maleimide compounds. The imide-extended maleimide compounds, when incorporated into thermosetting compositions, are said to reduce the brittleness and increase the toughness of the compositions without sacrificing thermal stability. US2011 / 0049731A1 and US2013 / 0228901A1 relate to materials and methods for reducing stress in semiconductor wafer passivation layers. Compositions containing low modulus photoimageable polyimides for use as passivation layers, and semiconductor wafers and devices made therefrom that include the passivation layers are described.

[0009] US 2017 / 0152418 A1 relates to maleimide adhesive films made from thermosetting maleimide resins containing imide-extended monomaleimides, bismaleimide compounds, and polymaleimide compounds. The maleimide adhesive films are said to be photostructurable and suitable for the manufacture of electronic devices, integrated circuits, semiconductor devices, passive devices, solar cells, solar cell modules, and / or light emitting diodes.

[0010] However, the imide-extended maleimide compounds described above have poor solubility in common solvents used in industry and poor thermomechanical properties such as low glass transition temperatures and high coefficients of thermal expansion (CTE) below Tg, making them unsuitable for WLP applications. Material modifications aimed at reducing the CTE of this material class make the material very brittle and reduce the elongation at break, so that it cannot be used in WLP applications. Another trend in the semiconductor industry concerns the demand for materials with low dielectric properties (low dielectric constant, low dielectric tangent) in the high frequency range. With the increase in signal transmission speed on printed circuit boards, the frequency of the signals has also increased. In addition, the 5G era requires reliable materials with unique properties that meet specific requirements. In general, for low dielectric constant materials, the polarity of these insulating films is usually low, resulting in poor adhesion strength. New materials that combine low-loss dielectric behavior with good adhesion properties are of great interest for the development of various future applications.

[0011] WO2019 / 141833A1 relates to a dielectric polymer having excellent film-forming ability, excellent mechanical properties, low dielectric constant, and low thermal expansion coefficient. The dielectric polymer is prepared from a polymerizable compound having a mesogenic group, and can be used as a dielectric material for preparing a passivation layer of an electronic device. Although these materials have many beneficial properties, some properties, such as glass transition temperature and processability, need to be enhanced or improved in order to realize the full potential of these materials. A material with low coefficient of thermal expansion (CTE) is reported in SDKimetal., Sci. Adv., 2018;4:eaau1956, 1-10, which describes a new poly(amide-imide) material for transparent and flexible displays with a CTE value of 4 ppm / K. The new poly(amide-imide) material is based on 4,4'-biphenyldiamine monomer with two trifluoromethyl groups introduced at the 2- and 6-positions of one of the aromatic rings. The material is said to be transparent, stable at high temperatures, and has a low CTE. However, such materials have poor adhesive strength and, from a material property standpoint, the above mentioned compounds and materials do not meet all the requirements for a dielectric suitable for modern packaging applications, especially photoimageable dielectrics. Summary of the Invention

[0012] Objective of the invention The object of the present invention is to overcome the shortcomings and disadvantages of the prior art and to provide a new class of dielectric polymer materials that exhibit a balanced and advantageous profile of favorable material properties, in particular with regard to the requirements in advanced electronic packaging applications, such as, for example, Wafer Level Packaging (WLP), as well as for low dielectric adhesive applications.

[0013] It is therefore an object of the present invention to provide a polymeric material having (a) favorable thermomechanical properties, such as, for example, a high glass transition temperature (Tg), a low coefficient of thermal expansion (CTE), high elongation at break, and high tensile strength; (b) favorable dielectric properties, such as, for example, a low dielectric constant and a low dissipation factor; (c) good adhesion properties, especially to copper and SiO 2 The objective is to provide a dielectric polymer material that exhibits a balanced and advantageous profile of material properties, including high adhesion strength to passivated wafers. A further object of the present invention is to provide bismaleimide compounds from which said dielectric polymeric materials can be obtained. It is an object of the present invention that such bismaleimide compounds are photostructurable and can be used as starting materials for various applications in electronic device manufacturing, such as for example for the preparation of repassivation layers in packaged electronic devices (including passivation of conductive or semiconducting components in redistribution layers (RDL) or die attach), thin film formulations and / or adhesive formulations. Furthermore, said bismaleimide compounds should have good film forming capabilities and be easy to process from conventional solvents. It is further an object of the present invention to provide a method for forming said dielectric polymer material using a bismaleimide compound.Finally, it is an object of the present invention to provide a dielectric polymer material and an electronic device comprising said polymer as a dielectric material.

[0014] It is an object of the present invention that bismaleimide compounds and related dielectric polymer materials enable cost-effective and highly reliable manufacturing of microelectronic devices with a significantly reduced number of defective devices caused by mechanical deformation (warpage) due to undesirable thermo-mechanical properties.

[0015] SUMMARY OF THE PRESENT APPLICATION The present inventors have surprisingly found that the above objectives are achieved by dielectric polymer materials formed from new types of bismaleimide compounds that exhibit (a) favorable thermomechanical properties, such as, for example, a high glass transition temperature (Tg), a low coefficient of thermal expansion (CTE), high elongation at break, and high tensile strength, (b) favorable dielectric properties, such as, for example, a low dielectric constant and a low dissipation factor, (c) good adhesion properties, especially to copper and SiO 2 It exhibits an advantageous balanced profile of material properties including high adhesion strength to passivated wafers.

[0016] The bismaleimide compound of the present invention is represented by the formula (1) or the formula (2). [ka] During the ceremony: A, B and Z are, independently and at each occurrence independently of one another, a linking unit containing one or more aliphatic, aromatic, or siloxane moieties, where optionally one or more of A, B and Z contain a cardo or spiro center; [ka] represents one single bond or two single bonds, [ka] represents a single or double bond, R a and R b are, independently and at each occurrence independently of each other, a linking unit that contains one or more aliphatic, aromatic, or siloxane moieties; R z is R a or R b and X, at each occurrence, independently, is a linking unit containing one or more aliphatic, aromatic, or siloxane moieties; R 1 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and R 2 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and n is an integer from 1 to 60, preferably from 1 to 50, more preferably from 2 to 30, and most preferably from 3 to 20; m is an integer from 0 to 60, preferably from 0 to 50, more preferably from 0 to 30, and most preferably from 0 to 20; and z is an integer from 0 to 60, preferably 0 to 50, more preferably 0 to 30, and most preferably 0 to 20; wherein at least one m or z is ≠0, preferably at least one m or z is ≧1, more preferably at least one m or z is ≧2, and most preferably at least one m or z is ≧3.

[0017] Said bismaleimide compounds are used as monomer compounds to form a new class of dielectric polymer materials, which are prepared by the following method, which also forms part of the present invention.

[0018] below: (i) providing a formulation comprising one or more bismaleimide compounds of the present invention; and (ii) curing the formulation A method for forming a dielectric polymer material comprising the steps of:

[0019] Further provided is a dielectric polymer material obtainable or obtainable by the method for forming a dielectric polymer material described above. Further provided is a dielectric polymeric material comprising at least one repeat unit derived from a bismaleimide compound according to the present invention. Finally, there is provided an electronic device comprising a dielectric polymer material according to the present invention. Preferred aspects of the invention are set out below and in the dependent claims. [Brief description of the drawings]

[0020] [Figure 1] Schematic diagram of a fan-out wafer-level packaging (WLP) structure. [Diagram 2] DMA measurements of polymeric materials obtained from oligomer (7) cured with 5 wt.-% IrgacureOXE-02. [Diagram 3] DMA measurements of polymeric materials obtained from oligomer (7) cured with 10 wt.-% bis(3-ethyl-5-methyl-4-maleimidophenyl)methane (CASRN: 105391-33-1, TCI) as structural additive and 5 phr of IrgacureOXE-02. [Figure 4] DMA measurements of polymeric materials obtained from oligomer (8) cured with 5 wt.-% IrgacureOXE-02. [Diagram 5] DMA measurements of polymeric materials obtained from oligomer (8) cured with 25 wt.-% tetra(ethylene glycol) diacrylate (CASRN: 17831-71-9, Merck Sigma-Aldrich) as structural additive and 5 phr of Irgacure OXE-02. [Figure 6] DMA measurements of polymeric material obtained from oligomer (10) cured with 5 wt% IrgacureOXE-02. [Figure 7] DMA measurements of polymeric materials obtained from oligomer (10) cured with 10 wt.-% bis(3-ethyl-5-methyl-4-maleimidophenyl)methane (CASRN: 105391-33-1, TCI) as a structural additive and 5 phr of IrgacureOXE-02. [Figure 8]DMA measurements of polymeric materials obtained from standard material BMI3000 (commercial grade, Designer Molecules Inc.) BMI3000 was cured with 5 wt.-% IrgacureOXE-02. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Detailed Description definition The term "linking unit" as used herein refers to an organic structural unit that links two or more parts of a molecule. A linking unit is usually composed of different moieties. A linking unit may be divalent or polyvalent, preferably divalent or tetravalent. The term "spiro compound" as used herein refers to a compound having a spiro center consisting of two rings connected at right angles through one common quaternary bond atom. Usually, a carbon atom serves as the spiro center. The simplest spiro compounds are bicyclic or have a bicyclic moiety as part of a larger ring system, in either case the two rings are connected through a common quaternary bond atom that defines the spiro center. The spiro center, together with the adjacent groups attached to it, forms the so-called "spiro moiety" and can be considered as the characteristic structural unit of the spiro compound. The spiro moiety is typically attached to at least two adjacent further structural units of the chemical compound. Polymeric spiro compounds are also called "spiropolymers".

[0022] The term "cardo polymers" as used herein describes a subgroup of polymers in which carbons in the backbone of the polymer chain are also incorporated into ring structures. These backbone carbons are quaternary centers (cardo centers) and form part of the so-called "cardo moieties". Thus, the cyclic side groups are located perpendicular to the plane of the polymer chain and form a loop structure. Cardo structures are very similar to spiro structures, but only one ring is attached to the cardo center, whereas two rings are attached to the spiro center. The cardo center, together with the adjacent groups attached to it, forms the so-called "cardo moiety", which can be considered as the characteristic structural unit of cardo polymers. The cardo moiety is typically attached to at least two adjacent further structural units of a chemical compound.

[0023] The term "aliphatic moiety" as used herein refers to a linear, branched, cyclic or bridged cyclic aliphatic unit that forms part of the structure of a compound. The aliphatic moiety may contain one or more heteroatoms selected from N, O, S, and P. The aliphatic moiety may be unsubstituted or substituted with one or more substituents, preferably selected from the list consisting of -C(O)Rv, -C(O)ORv, -NRvRw, -ORv, -Rx, -CN, -F and -Cl, where R v =H, C6-C14 aryl or C1-C14 alkyl, R w =H, C6-C14 aryl or C1-C14 alkyl and R x = C6-C14 aryl or C1-C14 alkyl, preferably R v =H, methyl, ethyl, propyl or phenyl, R w =H, methyl, ethyl, propyl or phenyl and R x = methyl, ethyl, propyl or phenyl. The aliphatic moiety may contain one or more functional groups, preferably selected from the list consisting of a C=C double bond, a C≡C triple bond, an amide, a carbamate, a carbonate, an ester, an ether, a secondary or tertiary amine, and a keto. The aliphatic moiety is typically attached to at least two adjacent further structural units of the chemical compound.

[0024] The term "aromatic moiety" as used herein refers to a monocyclic or polycyclic aromatic that forms part of the structure of a compound. A polycyclic aromatic unit encompasses two or more connected aromatic ring systems fixed in one plane. The aromatic moiety can be (i) a hydrocarbon aromatic moiety or (ii) a heteroatom-containing aromatic moiety, also called a heteroaromatic moiety. A hydrocarbon aromatic moiety contains an aromatic ring structure composed of carbon atoms, whereas a heteroaromatic moiety contains an aromatic ring structure, and a heteroaromatic unit contains one or more heteroatoms selected from N, O, S, and P. The aromatic moiety may be unsubstituted or substituted with one or more substituents, preferably selected from the list consisting of -C(O)Rv, -C(O)ORv, -NRvRw, -ORv, -Rx, -CN, -F and -Cl, where R v =H, C6-C14 aryl or C1-C14 alkyl, R w =H, C6-C14 aryl or C1-C14 alkyl and R x = C6-C14 aryl or C1-C14 alkyl, preferably R v =H, methyl, ethyl, propyl or phenyl, R w =H, methyl, ethyl, propyl or phenyl and R x = methyl, ethyl, propyl or phenyl. The aromatic moiety is typically attached to at least two adjacent further structural units of the chemical compound. The term "siloxane moiety" as used herein refers to a structural unit of a compound that contains at least one Si-O-Si bond. The siloxane moiety may be linear, branched, or cyclic. The siloxane moiety may be unsubstituted or substituted with one or more substituents, preferably selected from the list consisting of -C(O)Rv, -C(O)ORv, -NRvRw, -ORv, -Rx, -CN, -F, and -Cl, where R v =H, C6-C14 aryl or C1-C14 alkyl, R w =H, C6-C14 aryl or C1-C14 alkyl and R x= C6-C14 aryl or C1-C14 alkyl, preferably R v =H, methyl, ethyl, propyl or phenyl, R w =H, methyl, ethyl, propyl or phenyl and R x = methyl, ethyl, propyl or phenyl. The siloxane moiety is typically attached to at least two adjacent further structural units of the chemical compound.

[0025] The term "polymer" includes, but is not limited to, homopolymers, copolymers, such as block, random, and alternating copolymers, terpolymers, quaterpolymers, etc., and blends and modifications thereof. Furthermore, unless otherwise specifically limited, the term "polymer" is intended to include all possible configurational isomers of a material. These configurations include, but are not limited to, isotactic, syndiotactic, and atactic symmetries. Polymers are molecules of high relative molecular weight, the structure of which essentially comprises multiple repeats of units (i.e., repeat units) derived, actually or conceptually, from molecules of lower relative mass (i.e., monomers). The term "oligomer" refers to a molecular complex composed of a small number of monomer units, in contrast to a polymer, in which the number of monomers is in principle unlimited. Dimers, trimers, and tetramers are, for example, oligomers composed of two, three, and four monomers, respectively. In the context of the present invention, an oligomer may be composed of up to 60 monomers.

[0026] The term "monomer" as used herein refers to a molecule that can undergo polymerization, thereby providing a building block (repeating unit) to the essential structure of a polymer or oligomer. The term "homopolymer" as used herein refers to a polymer derived from one type of monomer (real, implicit or hypothetical).

[0027] The term "copolymer" as used herein generally refers to any polymer derived from two or more monomers and containing two or more corresponding repeat units. In one embodiment, a copolymer is the reaction product of two or more monomers and thus contains two or more corresponding repeat units. Preferably, the copolymer contains two, three, four, five or six repeat units. Copolymers obtained by copolymerization of three monomer types are also called terpolymers. Copolymers obtained by copolymerization of four monomer types are also called quaterpolymers. Copolymers can exist as block, random and / or alternating copolymers.

[0028] As used herein, the term "block copolymer" refers to polymers in which adjacent blocks are structurally different, i.e., adjacent blocks are derived from different types of monomers, or from the same type of monomers but contain repeat units having different compositions or sequence distributions of the repeat units. Furthermore, as used herein, the term "random copolymer" refers to a polymer formed of macromolecules in which the probability of finding a given repeat unit at any site in the chain does not depend on the nature of the adjacent repeat units. Typically, in random copolymers, the sequence distribution of the repeat units follows Bernoulli statistics.

[0029] The term "alternating copolymer" as used herein refers to a copolymer consisting of macromolecules that contain two types of repeat units in alternating order.

[0030] "Electronic packaging" is a major area of ​​electronics engineering and encompasses a wide variety of technologies. It refers to the insertion of discrete components, integrated circuits, MSI (medium-scale integrated circuit) and LSI (large-scale integrated circuit) chips (usually attached to a lead frame by beam leads) through holes in a multilayer circuit board (also called a card) into a plate, where they are soldered into place. Packaging of electronic systems must consider protection from mechanical damage, cooling, high frequency noise emissions, protection from maintenance due to electrostatic discharge, operator convenience, and cost.

[0031] The term "microelectronic device" as used herein refers to electronic devices of very small electronic designs and components. Usually, but not always, this means micrometer scale or smaller. These devices are typically made from semiconductor materials and contain one or more microelectronic components that are interconnected in a packaged structure to form the microelectronic device. Many of the electronic components of typical electronic designs are available as microelectronic equivalents. These include transistors, capacitors, inductors, resistors, diodes, and of course insulators and conductors can all be found within a microelectronic device. Due to the unusually small size of the components, leads, and pads in microelectronics, proprietary wiring techniques such as wire bonding are also often used.

[0032] Preferred Aspects Bismaleimide Compounds The present invention also relates to a bismaleimide compound represented by formula (1) or (2): [ka] [ka] During the ceremony: A, B and Z are, independently and at each occurrence independently of one another, a linking unit containing one or more aliphatic, aromatic, or siloxane moieties, where optionally one or more of A, B and Z contain a cardo center or a spiro center; [ka] represents one single bond or two single bonds; [ka] represents a single or double bond; R a and R bare, independently and at each occurrence independently of each other, a linking unit that contains one or more aliphatic, aromatic, or siloxane moieties; R z is R a or R b and; X, at each occurrence, independently, is a linking unit containing one or more aliphatic, aromatic, or siloxane moieties; R 1 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and; R 2 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and; n is an integer from 1 to 60, preferably from 1 to 50, more preferably from 2 to 30, and most preferably from 3 to 20; m is an integer from 0 to 60, preferably from 0 to 50, more preferably from 0 to 30, and most preferably from 0 to 20; and z is an integer from 0 to 60, preferably from 0 to 50, more preferably from 0 to 30, and most preferably from 0 to 20; wherein at least one of m or z is ≠0, preferably at least one of m or z is ≧1, more preferably at least one of m or z is ≧2, and most preferably at least one of m or z is ≧3.

[0033] In formula (2), * The binding sites marked with are interconnected. The bismaleimide compounds according to formula (2) contain two or three different repeat units, represented by the repeat units marked with the indices m, n and z, respectively, where the different repeat units may form blocks (block co-oligomers), vary (alternating co-oligomers), or be randomly distributed throughout the co-oligomer (random co-oligomers). It is preferred that A and B, independently, and independently of each other at each occurrence, are divalent or polyvalent, preferably divalent or tetravalent, linking units.

[0034] When A and / or B represent a polyvalent linking unit, such polyvalent linking unit is preferably attached to two carbon atoms of each of the adjacent cyclic imide moieties.When A and / or B represent a tetravalent linking unit, such tetravalent linking unit is preferably attached to two carbon atoms of each of the adjacent cyclic imide moieties. In a preferred embodiment of the invention, m is 0. In this case, the bismaleimide compound according to formula (2) is represented by formula (2a): [ka] where the definition of formula (2) applies accordingly.

[0035] In another preferred embodiment of the present invention, z is 0. In this case, the bismaleimide compound according to formula (2) is represented by formula (2b): [ka] where the definition of formula (2) applies accordingly. Preferably, A, B and Z are independently and at each occurrence independently of one another a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or combinations thereof, wherein optionally one or more of A, B and Z contain a cardo center or a spiro center.

[0036] Preferably, R a and R bare independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or a combination thereof; and R z is R a or R b It is. Preferably, X is each occurrence independently a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or a combination thereof.

[0037] In a preferred embodiment of the present invention, the bismaleimide compound according to formula (1) is represented by formula (3a) or (3b), and the bismaleimide compound according to formula (2) is represented by formula (4a) or (4b). [ka] [ka] During the ceremony: A 1 , B 1 and Z 1 are independently and independently of each other at each occurrence a linking unit containing one or more aliphatic, aromatic, or siloxane moieties, where optionally one or more A 1 , B 1 and Z 1 contains a cardo or spiro center;

[0038] R a and R bare independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or combinations thereof; R z is R a or R b and;

[0039] X's are, independently of each other at each occurrence, a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or a combination thereof; R 1 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and; R 2 is H or alkyl having 1 to 5 carbon atoms, preferably H or CH 3 and; n is an integer from 1 to 60, preferably 1 to 50, more preferably 2 to 30, and most preferably 3 to 20;

[0040] m is an integer from 0 to 60, preferably 0 to 50, more preferably 0 to 30, and most preferably 0 to 20; and z is an integer from 0 to 60, preferably 0 to 50, more preferably 0 to 30, and most preferably 0 to 20; wherein at least one of m or z is ≠0, preferably at least one of m or z is ≧1, more preferably at least one of m or z is ≧2, and most preferably at least one of m or z is ≧3.

[0041] In formulas (4a) and (4b) * The binding sites marked with are interconnected. The bismaleimide compounds according to formula (4a) or (4b) contain two or three different repeat units, represented by the repeat units marked with the indices m, n and z, respectively. The compounds may thus be regarded as co-oligomers, where the different repeat units may form blocks (block co-oligomers), vary (alternating co-oligomers), or be randomly distributed throughout the co-oligomer (random co-oligomers).

[0042] When m=0, the bismaleimide compound of formula (4a) is represented by formula (4aa). [ka] where the definition of formula (4a) applies accordingly.

[0043] When z=0, the bismaleimide compound of formula (4a) is represented by formula (4ab). [ka] where the definition of formula (4a) applies accordingly.

[0044] When m=0, the bismaleimide compound of formula (4b) is represented by formula (4ba). [ka] where the definition of formula (4b) applies accordingly.

[0045] When z=0, the bismaleimide compound of formula (4b) is represented by formula (4bb). [ka] where the definition of formula (4b) applies accordingly.

[0046] Preferably, A 1 , B1 and Z 1 are independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 80 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 80 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 80 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, preferably a dimethylsiloxane, methylphenylsiloxane, diphenylsiloxane moiety, or a combination thereof, wherein A 1 , B 1 and Z 1 Optionally, it contains a caldo center or a spiro center.

[0047] More preferably, A 1 , B 1 and Z 1 are represented independently and independently of each other at each occurrence by formula (5): [ka] During the ceremony: A 21 , A 22 and A 23 are independently and independently of each other at each occurrence a divalent aromatic group, preferably having 4 to 30 carbon atoms, a divalent aliphatic group, preferably having 2 to 20 carbon atoms, or a divalent mixed aromatic aliphatic group, preferably having 6 to 30 carbon atoms, optionally containing one or more heteroatoms selected from N, O and S, and optionally substituted with one or more substituents selected from the list consisting of halogen, alkyl having 1 to 10 carbon atoms, alkoxy having 1 to 10 carbon atoms, aryl having 6 to 10 carbon atoms, and aryloxy having 6 to 10 carbon atoms, Here, A is 1 or more. 21 , A 22 and A 23 optionally containing a cardo center or a spiro center;

[0048] G 21 , G 22 , G 23and G 24 are independently and independently of each other at each occurrence -O-, -S-, -CO-, -(CO)-O-, -O-(CO)-, -S-(CO)-, -(CO)-S-, -O-(CO)-O-, -(CO)-NR 01 -, -NR 01 -(CO)-, -NR 01 -(CO)-NR 02 -, -NR 01 -(CO)-O-, -O-(CO)-NR 01 -, -OCH 2 -, -CH 2 O-, -SCH 2 -, -CH 2 S-, -CF 2 O-, -OCF 2 -, -CF 2 S-, -SCF 2 - 、 -CH 2 CH 2 -, -(CH 2 ) 4 -, -CF 2 CH 2 -, -CH 2 CF 2 -, -CF 2 CF 2 -, -CH=N-, -N=CH-, -N=N-, -CH=CR 01 -, -CY 01 =CY 02 -, -C≡C-, -CH=CH-(CO)-O-, -O-(CO)-CH=CH-, or a single bond, where R 01 and R 02 are each independently H or an alkyl group having 1 to 5 carbon atoms; Y 01 and Y 02 are each independently H, an alkyl having 1 to 5 carbon atoms, phenyl, F, Cl, or CN; and k and l are each independently 0, 1, 2, 3 or 4, preferably 0 or 1, and more preferably k and l are 1.

[0049] Preferably, A 21 , A 22 and A 23are independently and independently of each other at each occurrence represented by any one of formulas (6a) to (6u): [ka] [ka] where [ka] represents the binding site; L is an alkyl having 1 to 5 carbon atoms, halogenyl, Ph or CN, preferably methyl, F, Cl, Ph or CN; R Alk is alkyl having 1 to 5 carbon atoms; Q is O, S or CH 2 and q is an integer from 0 to 4, preferably from 0 to 2, more preferably 0 or 1, and most preferably 0.

[0050] In a preferred embodiment of the present invention, R a and R b are each independently a substituted or unsubstituted aliphatic moiety having 2 to 60 carbon atoms, preferably 10 to 50 carbon atoms, more preferably 10 to 36 carbon atoms; and R z is R a or R b It is. In a more preferred embodiment of the present invention, R a and R b are represented independently and independently of each other at each occurrence by formula (7a) or (7b): [ka] where [ka] represents the binding site; x and y are, independently of each other, integers from 0 to 10, preferably from 1 to 8, more preferably from 3 to 8; R I and R II are each independently an alkyl group having 1 to 10 carbon atoms, preferably 1 to 8 carbon atoms, linear, or a branched alkyl group having 3 to 10 carbon atoms, preferably 3 to 8 carbon atoms, more preferably -C 6 H 13 , -C 8 H 17 or -CH 2 CH(C 2 H 5 ) C 4 H 9 It is.

[0051] In the most preferred embodiment of the present invention, R a and R b are represented independently and independently of each other at each occurrence by formula (8a) or (8b): [ka] where [ka] represents the binding site.

[0052] In preferred embodiments of the invention, X is a substituted or unsubstituted aliphatic moiety having 1 to 30 carbon atoms, preferably 1 to 20 carbon atoms, more preferably 1 to 10 carbon atoms, and most preferably 1 to 5 carbon atoms. Specific preferred bismaleimide compounds according to the present invention are: [ka] [ka] [ka]

[0053] The bismaleimide compounds of the present invention can be prepared by any standard synthesis. Usually, the compounds are retrosynthetically cut into smaller units and formed stepwise from suitable precursor compounds. For this purpose, amide formation, imide formation, ester formation and related acid activation can be used, for example. It has proven to be particularly advantageous to attach the maleimide group at a later stage of the synthesis, typically at the very end of the synthesis. In this way, undesired side reactions and premature polymerization of the compounds can be avoided. Exemplary implementations of the retrosynthesis are provided by Schemes 1 and 2 below, which should not be construed as limiting the invention in any way.

[0054] [ka] [ka] The maleimide group is a functional group capable of undergoing polymerization reactions, such as radical polymerization, ionic chain polymerization, polyaddition, polycondensation, or polymerization-like reactions, such as addition or condensation, on a polymer backbone. The invention further provides a method of forming a dielectric polymer material comprising repeat units derived from one or more bismaleimide compounds. The dielectric polymer material may be linear or crosslinked.

[0055] The method for forming a dielectric polymer material according to the present invention comprises the steps of: (i) providing a formulation comprising one or more bismaleimide compounds according to the present invention; and (ii) curing the formulation Includes steps.

[0056] Preferably, the formulation provided in step (i) further comprises one or more additional compounds capable of reacting with the bismaleimide compound according to the invention, preferably to form a copolymer. Using basic chemical knowledge, a person skilled in the art may find and select, for a given bismaleimide compound of the invention, suitable additional compounds capable of reacting with the first one, preferably to form a copolymer.

[0057] Additional compounds that can react with the preferred bismaleimide compounds according to the present invention are selected from the list consisting of acrylates, epoxides, olefins, vinyl ethers, vinyl esters, polythiols, polyamines, and polymaleimides.

[0058] Preferred acrylates are acrylic acid, methacrylic acid, methyl acrylate, methyl methacrylate, methyl cyanoacrylate, ethyl acrylate, ethyl methacrylate, ethyl cyanoacrylate, propyl acrylate, propyl methacrylate, propyl cyanoacrylate, butyl acrylate, butyl methacrylate, butyl cyanoacrylate, pentyl acrylate, pentyl methacrylate, pentyl cyanoacrylate, hexyl acrylate, hexyl meth ... methacrylate, hexyl cyanoacrylate, heptyl acrylate, heptyl methacrylate, heptyl cyanoacrylate, octyl acrylate, octyl methacrylate, octyl cyanoacrylate, ethylene glycol dimethacrylate, 2-ethylhexyl acrylate, glycidyl methacrylate, (hydroxyethyl)acrylate, (hydroxyethyl)methacrylate, methyl 2-chloroacrylate, and methyl 2-fluoroacrylate.

[0059] Preferred epoxides are ethylene oxide, propylene oxide, butylene oxide, pentylene oxide, hexylene oxide, heptylene oxide, octylene oxide, glycidamide, glycidol, styrene oxide, 3,4-epoxytetrahydrothiophene-1,1-dioxide, ethyl 2,3-epoxypropionate, methyl 2-methylglycidate, methyl glycidyl ether, ethyl glycidyl ether, diglycidyl ether, cyclopentene oxide, cyclohexene oxide, cycloheptene oxide, cyclooctene oxide, and stilbene oxide.

[0060] Preferred olefins are ethylene, propylene, butylene, pentylene, hexylene, heptylene, octylene, isoprene styrene, and vinyl ethylene. Preferred vinyl ethers are divinyl ether, methyl vinyl ether, ethyl vinyl ether, propyl vinyl ether, butyl vinyl ether, pentyl vinyl ether, hexyl vinyl ether, heptyl vinyl ether, and octyl vinyl ether.

[0061] Preferred vinyl esters are vinyl formate, vinyl acetate, vinyl propanoate, vinyl butanoate, vinyl pentanoate, vinyl hexanoate, vinyl heptanoate, vinyl octanoate, vinyl nonanoate, vinyl decanoate, vinyl acrylate, vinyl methacrylate, vinyl benzoate, vinyl 4-tert-butylbenzoate, vinyl cinnamate, and vinyl trifluoroacetate.

[0062] Preferred polythiols are organosulfur compounds having two or more thiol functional groups. Particularly preferred polythiols are HS-(C n H 2n )-SH, where n=2 to 20, preferably 2 to 12; C n H 2n-1 (SH) 3 , where n=3-20, preferably 3-12; HS-Ar-SH, where Ar=substituted or unsubstituted C 6-C 20 arylene, and HS-(CH 2 ) m -Ar-(CH 2 ) m -SH, where Ar = substituted or unsubstituted C 6 -C 20 arylene, and m=1-12.

[0063] Preferred polyamines are organic amine compounds having two or more amino functional groups. Specifically preferred polyamines are 2 N-(C n H 2n )-NH 2 , where n=2 to 20, preferably 2 to 12; H 2 N-(C n H 2n NH)-NH 2 , where n=2 to 20, preferably 2 to 12; C n H 2n-1 (NH 2 ) 3 , where n=3 to 20, preferably 3 to 12; H 2 N-Ar-NH 2 where Ar=substituted or unsubstituted C 6 -C 20 arylene; and H 2 N-(CH 2 ) m -Ar-(CH 2 ) m -H 2 N, where Ar = substituted or unsubstituted C 6 -C 20 Selected from the list consisting of arylene and m=1-12.

[0064] A preferred polymaleimide is a maleimide end-capped polyimide as described in US 2004 / 0225026 A1 and US 2017 / 0152418 A1, the disclosures of which are incorporated herein by reference. The polymaleimide is preferably a bismaleimide selected from compounds represented by the following formula (A) or formula (B): [ka]

[0065] Here, R 1 and Q 1 is independently selected from the list consisting of structures derived from unsubstituted or substituted aliphatic, alicyclic, alkenyl, aryl, heteroaryl, siloxane, poly(butadiene co-acrylonitrile) and poly(alkylene oxide); X 1 ~X 4 are each independently H or an alkyl group having 1 to 6 C atoms; and n=0 to 30; [ka] Here, R 2 and Q 2 is independently selected from the list consisting of structures derived from unsubstituted or substituted aliphatic, alicyclic, alkenyl, aryl, heteroaryl, siloxane, poly(butadiene-co-acrylonitrile), and poly(alkylene oxide); X 5 ~X 8 are each independently H or an alkyl group having 1 to 6 C atoms; R 3 and R 4 are each independently H or CH 3 where R of at least 1 3 and R 4 CH 3 and n = 0–30.

[0066] In preferred embodiments of formulas (A) and (B), the unsubstituted or substituted aliphatic, alicyclic, alkenyl, aryl, heteroaryl, siloxane, poly(butadiene co-acrylonitrile) and poly(alkylene oxide) derived structures are selected from the group consisting of alkyl, alkenyl, alkynyl, hydroxyl, oxo, alkoxy, mercapto, cycloalkyl, substituted cycloalkyl, heterocyclic, substituted heterocyclic, aryl, substituted aryl, heteroaryl, substituted heteroaryl, aryloxy, substituted aryloxy, halogen, haloalkyl, cyano, nitro, nitrone, amino, amido, -C(O)H, acyl, oxyacyl, carboxyl, carbamate, sulfonyl, sulfonamide, sulfuryl, or -C(O)-, -S-, -S(O) 2 -, -OC(O)-O-, -NA-C(O)-, -NAC(O)-NA-, -OC(O)-NA-, (wherein A is H or an alkyl group having 1 to 6 carbons), which preferably contain further terminal substituents.

[0067] Preferred substituents are alkyl groups, alkenyl groups, alkynyl groups, hydroxyl groups, oxo groups, alkoxy groups, mercapto groups, cycloalkyl groups, substituted cycloalkyl groups, heterocyclic groups, substituted heterocyclic groups, aryl groups, substituted aryl groups, heteroaryl groups, substituted heteroaryl groups, aryloxy groups, substituted aryloxy groups, halogens, haloalkyl groups, cyano groups, nitro groups, nitrone groups, amino groups, amido groups, -C(O)H, acyl groups, oxyacyl groups, carboxyl groups, carbamate groups, sulfonyl groups, sulfonamide groups, sulfuryl groups, or -C(O)-, -S-, -S(O) 2 -, -OC(O)-O-, -NA-C(O)-, -NAC(O)-NA-, -OC(O)-NA-, (wherein A is H or an alkyl group having 1 to 6 carbons), an acyl group, an oxyacyl group, a carboxyl group, a carbamate group, a sulfonyl group, a sulfonamide group, or a sulfuryl group.

[0068] In a more preferred embodiment of formulas (A) and (B), R 1 and R 2 , and Q 1 and Q 2 is independently selected from the list consisting of substituted or unsubstituted aliphatic, alicyclic, alkenyl, aromatic, siloxane, poly(butadiene-co-acrylonitrile), or poly(alkylene oxide) moieties. Preferred aliphatic moieties are straight or branched chain C 1 -C 50 Alkylene, more preferably a linear or branched chain C 1 -C 36 It is alkylene.

[0069] Preferred alicyclic moieties are both aliphatic and cyclic, and contain one or more all-carbon rings which may be substituted or unsubstituted and optionally fused and / or bridged. Preferred alicyclic moieties have 3 to 72 C atoms, more preferably 3 to 36 C atoms. Particularly preferred alicyclic moieties are -Sp 1 -Cy-Sp 2 and Sp 1 and Sp 2 represent, independently of one another, an alkylene having 1 to 12 C atoms or a single bond. G represents a cycloalkylene having 3 to 12 C atoms, optionally mono- or polysubstituted by alkyl having 1 to 12 C atoms.

[0070] Preferred alkenyl moieties are linear or branched hydrocarbyl moieties having at least one carbon-carbon double bond and ranging up to about 100 C atoms. More preferably, the alkenyl moiety is 2 -C 50 Alkenylene, most preferably C 2 -C 36 It is alkenylene.

[0071] Preferred aromatic moieties include (i) hydrocarbon aromatic moieties such as arylene groups having 6 to 20 carbon atoms, more preferably 6 to 14 carbon atoms, which may be substituted or unsubstituted, and (ii) heteroaromatic moieties having 3 to 20 carbon atoms, preferably having 3 to 14 C atoms and one or more heteroatoms selected from N, O, S and P in the aromatic ring structure, which may be substituted or unsubstituted.

[0072] Preferred siloxane moieties are -[R a R b Si-O] n -R a R b Si-, where R a and R b are independently H or C 1 -C 6 Alkyl, and n=1-1000, more preferably 1-100. A preferred poly(alkylene oxide) moiety is poly(C 1 -C 12 alkylene oxide) moiety.

[0073] Preferably, the molar ratio between the bismaleimide compound of the present invention and the additional compound capable of reacting with the bismaleimide compound in the formulation is from 0.1:100 to 100:0.1. It is further preferred that the formulation provided in step (i) comprises one or more inorganic or organic fillers. Preferred inorganic fillers are selected from the list consisting of nitrides, titanates, diamonds, oxides, sulfides, sulfites, sulfates, silicates and carbides, and may be surface modified with a capping agent. More preferably, the inorganic filler is selected from the list consisting of AlN, Al 2 O 3 , BN, BaTiO 3 , B 2 O 3 , Fe 2 O 3 , SiO 2 , TiO 2 , ZrO 2, PbS, SiC, diamond and glass particles, which may be surface modified with a capping agent. Preferred organic fillers are diamondoids or organic polymer particles. Preferred diamondoids are adamantane (C 10 H 16 ), Icean (C 12 H 18 ), BC-8(C 14 H 20 ), Diamantane (C 14 H 20 ), triamantane (C 18 H 24 ), isotetramantane (C 22 H 28 ), Pentamantane (C 26 H 32 and C 25 H 30 ), cyclohexamantane (C 26 H 30 ) and super adamantane (C 30 H 36 ).

[0074] Preferably, the total content of inorganic or organic fillers in the composition is in the range of 0.001 to 90% by weight, more preferably 0.01 to 70% by weight, and most preferably 0.01 to 50% by weight, based on the total weight of the composition. In a preferred embodiment, the formulation is provided on a surface of a substrate in step (i) and forms a dielectric polymeric material on said surface after curing in step (ii).The substrate is preferably a substrate of an electronic or microelectronic device.

[0075] Preferably, the formulation is provided in step (i) as a layer having an average thickness of 0.5 to 50 μm, more preferably 2 to 30 μm, most preferably 3 to 15 μm in a single coating. The method of applying the composition in step (i) is not particularly limited.Preferred application methods are dispensing, dipping, screen printing, stencil printing, roller coating, spray coating, slot coating, slit coating, spin coating, gravure printing, flexographic printing or inkjet printing.

[0076] The bismaleimide compounds of the present invention can be provided in the form of formulations which are suitable for gravure, flexographic and / or inkjet printing. For the preparation of such formulations, ink base formulations as known from the state of the art can be used. Alternatively, the bismaleimide compounds of the present invention may be provided in the form of a formulation suitable for photolithography. In the photolithography process, light is used to transfer a geometric pattern from a photomask to a photocurable composition, thereby allowing the creation of a photopattern. Typically, such photocurable compositions contain a photochemically activatable polymerization initiator. For the preparation of such formulations, photoresist-based formulations known from the state of the art can be used.

[0077] Without wishing to be bound by theory, curing of the bismaleimide compounds according to the present invention may occur via various types of reactions such as, for example, radical polymerization, ionic polymerization, Michael addition reactions and / or cycloaddition reactions. The formulation is cured in step (ii) by exposure to heat, preferably at a temperature in the range of 25-200° C., more preferably at a temperature in the range of 25-150° C., and / or by exposure to radiation.

[0078] It is further preferred that the formulation comprises an initiator for free radical polymerization or an initiator for ionic polymerization. Preferably, initiators for radical polymerization are thermally activated by exposure to heat or photochemically activated by exposure to radiation such as UV and / or visible light.

[0079] Preferred initiators for radical polymerization are tert-amyl perbenzoate, 4,4-azobis(4-cyanovaleric acid), 1,1'-azobis(cyclohexanecarbonitrile), 2,2'-azobisisobutyronitrile (AIBN), benzoyl peroxide, 2,2-bis(tert-butylper)butane, 1,1-bis(tert-butylper)cyclohexane, 2,5-bis(tert-butylper)-2,5-dimethylhexane, 2,5-bis(tert-butylper)-2,5-dimethyl-3-hexyne, bis(1 -(tert-butylper)-1-methylethyl)benzene, 1,1-bis(tert-butylper)-3,3,5-trimethylcyclohexane, tert-butyl hydroperoxide, tert-butyl peracetate, tert-butyl peroxide, tert-butyl perbenzoate, tert-butyl persopropyl carbonate, cumene hydroperoxide, cyclohexanone peroxide, dicumyl peroxide, lauroyl peroxide, 2,4-pentanedione peroxide, peracetic acid, and potassium persulfate. Typically, such initiators are radical polymerization initiators that can be thermally activated.

[0080] Further preferred initiators for radical polymerization are acetophenone, p-anisil, benzil, benzoin, benzophenone, 2-benzoylbenzoic acid, 4,4'-bis(diethylamino)benzophenone, 4,4'-bis(dimethylamino)benzophenone, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether, benzoin ethyl ether, 4-benzoylbenzoic acid, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, methyl 2-benzoylbenzoate, 2-(1,3-benzodioxol-5-yl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-benzyl-2-(dimethylamino)-4'-morpholinobutyrophenone, (±)-camphorquinone, 2-chlorothioxanthone, 4,4'-dichlorobenzophenone. , 2,2-diethoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,4-diethylthioxanthen-9-one, diphenyl(2,4,6-trimethylbenzoyl)phosphine oxide, 1,4-dibenzoylbenzene, 2-ethylanthraquinone, 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methylpropiophenone, 2-hydroxy-4'-(2-hydroxyethoxy)-2-methylpropiophenone, 2-isopropylthioxanthone, lithium phenyl(2,4,6-trimethylbenzoyl)phosphinate, 2-methyl-4'-(methylthio)-2-morpholinopropiophenone, 2-isonitrosopropiophenone, 2-phenyl-2-(p-toluenesulfonyloxy)acetophenone, and phenylbis(2,4,6-trimethylbenzoyl)phosphine oxide.

[0081] Typically such initiators are radical polymerization initiators that can be photochemically activated. Preferred initiators for ionic polymerization are alkyllithium compounds, alkylaminelithium compounds, and pentamethylcyclopentadienyls of titanium, zirconium, and hafnium (Cp * ) complex.

[0082] Further preferred initiators for ionic polymerization are bis(4-tert-butylphenyl)iodonium hexafluorophosphate, bis(4-fluorophenyl)iodonium trifluoromethanesulfonate, cyclopropyldiphenylsulfonium tetrafluoroborate, dimethylphenacylsulfonium tetrafluoroborate, diphenyliodonium hexafluorophosphate, diphenyliodonium hexafluoroarsenate, diphenyliodonium trifluoromethanesulfonate, 2-(3,4-di ... methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-1,3,5-triazine, 4-isopropyl-4'-methyldiphenyliodonium tetrakis(pentafluorophenyl)borate, 2-[2-(5-methylfuran-2-yl)vinyl]-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-( 4-Methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, (2-methylphenyl)(2,4,6-trimethylphenyl)iodonium trifluoromethanesulfonate, (3-methylphenyl)(2,4,6-trimethylphenyl)iodonium trifluoromethanesulfonate, (4-methylphenyl)(2,4,6-trimethylphenyl)iodonium trifluoromethanesulfonate, 4-nitrobenzenediazonium tetrafluoroborate, (4-nitrophenyl)(phenyl)iodonium iodonium trifluoromethanesulfonate, triphenylsulfonium tetrafluoroborate, triphenylsulfonium bromide, tri-p-tolylsulfonium hexafluorophosphate, tri-p-tolylsulfonium trifluoromethanesulfonate, [3-(trifluoromethyl)phenyl](2,4,6-trimethylphenyl)iodonium trifluoromethanesulfonate, and [4-(trifluoromethyl)phenyl](2,4,6-trimethylphenyl)iodonium trifluoromethanesulfonate. Typically, such initiators are cationic polymerization initiators that can be photochemically activated.

[0083] Further preferred initiators for ionic polymerization are acetophenone O-benzoyloxime, 1,2-bis(4-methoxyphenyl)-2-oxoethylcyclohexylcarbamate, nifedipine, 2-nitrobenzylcyclohexylcarbamate, 2-(9-oxoxanthene-2-yl)propionic acid 1,5,7-triazabicyclo[4.4.0]dec-5-ene salt, 2-(9-oxoxanthene-2-yl)propionic acid 1,5-diazabicyclo[4.3.0]non-5-ene salt, and 2-(9-oxoxanthene-2-yl)propionic acid 1,8-diazabicyclo[5.4.0]undec-7-ene salt. Typically such initiators are anionic polymerization initiators that can be photochemically activated.

[0084] Exposure to radiation includes exposure to visible light and / or ultraviolet light. Visible light is preferably electromagnetic radiation having a wavelength of >380-780 nm, more preferably >380-500 nm. UV light is preferably electromagnetic radiation having a wavelength of 380 nm or less, more preferably having a wavelength of 100-380 nm. More preferably, UV light is selected from UV-A light having a wavelength of 315-380 nm, UV-B light having a wavelength of 280-315 nm, and UV-C light having a wavelength of 100-280 nm. Exposure to radiation preferably includes wavelengths according to g, h, i rays and / or broadband. As a UV light source a mercury vapor lamp or a UV laser is viable, as an IR light source a ceramic emitter or an IR laser diode is viable, and for light in the visible range a laser diode is viable.

[0085] Preferred UV light sources are a) single wavelength radiation with a maximum wavelength less than 255 nm, such as, for example, 254 nm and 185 nm Hg low pressure discharge lamps, 193 nm ArF excimer lasers and 172 nm Xe2 layers, or b) sources having a broad wavelength distribution radiation with wavelength components less than 255 nm, such as, for example, non-doped mercury low pressure discharge lamps.

[0086] In a preferred embodiment of the invention, the light source is a xenon flashlight, which preferably has a broad emission spectrum with a short wavelength component down to about 200 nm.

[0087] Further provided is a dielectric polymeric material obtainable or obtainable by the above-mentioned method for forming a dielectric polymeric material according to the present invention. The polymeric material is preferably a linear or crosslinked polymer, more preferably a linear polymer.

[0088] There is provided a dielectric polymer material comprising at least one repeat unit derived from a bismaleimide compound represented by any one of formulas (1), (2), (2a), (2b), (3a), (3b), (4a), (4b), (4aa), (4ab), (4ba) or (4bb) as defined above.

[0089] In a preferred embodiment, the dielectric polymer material comprises at least one repeat unit comprising a structural unit represented by formula (9) or (10): [ka] where [ka] represents one single bond or two single bonds; [ka] represents a single or double bond; and

[0090] A, B, Z, R a , R b , R z, X, n, m and z have one of the definitions of the preferred, more preferably, specifically preferred or most preferred embodiments mentioned above for or related to formulas (1), (2), (2a), (2b), (3a), (3b), (4a), (4b), (4aa), (4ab), (4ba) and (4bb).

[0091] In a preferred embodiment, the dielectric polymeric material further contains additional repeat units derived from additional compounds capable of reacting with the bismaleimide compounds defined above. Furthermore, there is provided an electronic device comprising a dielectric polymer material according to the invention, for which the polymer material preferably forms a dielectric layer, which serves to electrically isolate one or more electronic components that are part of the electronic device from each other.

[0092] Preferably, the electronic device is a microelectronic device and the dielectric polymer material is included as a repassivation material in a redistribution layer of the microelectronic device. The present invention is further illustrated by the following examples, which should not be construed as limiting in any way. Those skilled in the art will recognize that various modifications, additions and variations can be made to the present invention without departing from the spirit and scope of the invention, as defined in the appended claims.

[0093] example A. Synthesis of building blocks Synthesis of 2,2'-(1,3,5,7-tetraoxo-5,7-dihydropyrrolo[3,4-f]isoindole-2,6(1H,3H)-diyl)diacetic acid (1) [ka]

[0094] Pyromellitic dianhydride (PMDA, 15 g, 68.8 mmol) was dissolved in toluene / NMP (240 mL, 3:1, v / v) and glycine (12.9 g, 172 mmol) was added. The reaction mixture was refluxed for 16 h using a Dean-Stark apparatus and then cooled to room temperature to precipitate a solid, which was filtered and washed several times with toluene. The crude product was recrystallized from acetonitrile / water (5:1, v / v) and dried in vacuum at 40° C. for 12 h to give a white solid (15.2 g, 66.7%).

[0095] Analytics: 1 HNMR (500MHz, THF-d 8 ):δ=11.72(broad s, 2H), 8.35(s, 4H), 4.43(s, 4H)ppm.

[0096] Synthesis of 4,4'-((1s,3s,5r,7r)-adamantane-1,3-diyl)diphenol (2) [ka]

[0097] Phenol (105 g, 1.1 mol) was dissolved in TFA (340 mL) and heated. Then, 1,3-adamantanediol (89 g, 0.53 mol) dissolved in 170 mL of TFA was added dropwise over 2.5 h. The reaction mixture was refluxed for 16 h, cooled to room temperature, and carefully quenched with water (600 mL). The resulting suspension was stirred at 40° C. for 2 h, and the solid was filtered, washed twice with water (500 mL each), and dried under vacuum at room temperature. The crude product was finally recrystallized from acetonitrile / water (6:1, v / v), filtered, and dried under vacuum to give a white solid (134 g, 77%).

[0098] Analytics: 1 HNMR (500 MHz, DMSO-d 6):δ=9.07(broad s, 2H), 7.20-7.14(m, 4H), 6.71-6.65(m, 4H), 2.23-2.17(m, 2H), 1.86-1.76(m, 10H), 1.70(d, J=3.2Hz, 2H)ppm.

[0099] Synthesis of ((1s,3s,5r,7r)-adamantane-1,3-diyl)bis(4,1-phenylene)bis(1,3-dioxo-1,3-dihydroisobenzofuran-5-carboxylate) (3) [ka]

[0100] Diphenol (2) (56 g, 171 mmol) was dissolved in THF (450 mL) and pyridine (41.5 mL, 0.51 mol). Trimellitic anhydride chloride (84.6 g, 394 mmol) dissolved in 300 mL of THF was added dropwise, followed by refluxing for 16 h. The reaction mixture was then cooled to room temperature, treated with acetonitrile (800 mL) and stirred at room temperature for 30 min. The solid was filtered, suspended in acetonitrile (1.2 L) and stirred at 80 °C for 4 h, yielding a white solid after filtration and drying in vacuum (92.5 g, 80%).

[0101] Analytics: 1 HNMR (500MHz, THF-d 8 ):δ=8.73(t, J=1.0Hz, 2H), 8.70(dd, J=7.8, 1.4Hz, 2H), 8.21(d, J=7.9Hz, 2H), 7.57-7.50(m, 4H), 7. 30-7.22(m, 4H), 2.34(q, J=3.2Hz, 2H), 2.13(s, 2H), 2.04(d, J=3.0Hz, 8H), 1.86(d, J=3.1Hz, 2H)ppm.

[0102] Synthesis of 2,2'-((((((1s,3s,5r,7r)-adamantane-1,3-diyl)bis(4,1-phenylene))bis(oxy))bis(carbonyl))bis(1,3-dioxoisoindoline-5,2-diyl))diacetic acid (4)

[0103] [ka]

[0104] Dianhydride (3) (29.4 g, 44 mmol) and glycine (8.3 g, 110 mmol) were both dissolved in toluene / NMP (155 mL, 3:1, v / v). The reaction mixture was refluxed for 16 h using a Dean-Stark apparatus and then cooled to room temperature to precipitate a solid, which was filtered and washed several times with toluene. The crude product was treated with water, stirred at 40° C. for 4 h, filtered, recrystallized from acetonitrile / THF (5:1, v / v), and dried in vacuum at 40° C. for 12 h to give a white solid (13.4 g, 38.4%).

[0105] Analytics: 1 HNMR (500 MHz, DMSO-d 6 ):δ=13.38(broad s, 2H), 8.58(dd, J=7.8, 1.5Hz, 2H), 8.50-8.46(m, 2H), 8.15(dd, J=7.8, 0.7Hz, 2H), 7.60-7.54 (m, 4H), 7.34-7.28(m, 4H), 4.38(s, 4H), 2.30(p, J=3.2Hz, 2H), 2.05(s, 2H), 2.01-1.89(m, 8H), 1.79(s, 2H)ppm.

[0106] Synthesis of (9H-fluorene-9,9-diyl)bis(4,1-phenylene)bis(1,3-dioxo-1,3-dihydroisobenzofuran-5-carboxylate) (5) [ka]

[0107] 4,4'-(9H-fluorene-9,9-diyl)diphenol (14.8 g, 40 mmol) and trimellitic anhydride (TMAC, 18.9 g, 88 mmol) were reacted in anhydrous acetone (100 mL) in the presence of pyridine (9.5 g, 120 mmol). After the reaction, the solvent was removed and the resulting pale yellow solid was washed with toluene, followed by water, and dried under vacuum at 200 °C for 12 h. The crude product was recrystallized from a mixed solvent (toluene / acetic anhydride, 25 / 2, v / v) and dried under vacuum at 200 °C for 12 h (14.5 g, 52%).

[0108] Analytics: 1 HNMR (500MHz, THF-d 8 ):δ=8.74(s, 2H), 8.71(dd, J=7.9, 1.4Hz, 2H), 8.23(d, J=7.9Hz, 2H), 7.90(d, J=7.5Hz, 2H), 7.56(d, J=7.6Hz, 2H), 7.43(td, J=7.5, 1.0Hz, 2H), 7.40-7.32(m, 6H), 7.27-7.22(m, 4H)ppm.

[0109] Synthesis of 2,2'-(((((9H-fluorene-9,9-diyl)bis(4,1-phenylene))bis(oxy))bis(carbonyl))bis(1,3-dioxoisoindoline-5,2-diyl))diacetic acid (6) [ka]

[0110] Dianhydride (5) (31 g, 44 mmol) and glycine (8.3 g, 110 mmol) were dissolved together in toluene / NMP (155 mL, 3:1, v / v). The reaction mixture was refluxed for 16 h using a Dean-Stark apparatus and then cooled to room temperature to precipitate a solid, which was filtered and washed several times with toluene. The crude product was treated with water, stirred at 40 °C for 4 h, filtered, recrystallized from acetonitrile / THF (5:1, v / v), and dried in vacuum at 40 °C for 12 h to give a white solid (22.1 g, 61%).

[0111] Analytics: 1 HNMR (700 MHz, CDCl 3 ):δ=8.65(dt, J=5.2, 1.0Hz, 2H), 8.55(ddd, J=6.2, 4.8, 1.5Hz, 2H), 8.03-7.99(m, 2H), 7. 81-7.74(m, 2H), 7.44-7.34(m, 4H), 7.34-7.25(m, 6H), 7.14-7.05(m, 4H), 4.52(s, 4H)ppm.

[0112] Synthesis of B oligomer Synthesis of oligomer (7) [ka]

[0113] The diacid (1) (6.6 g, 20 mmol) was dissolved in CaCl 2 (4.9 g, 44 mmol) was dissolved in NMP (50 mL) together with pyridine (12.7 g, 160 mmol) and triphenyl phosphite (15.5 g, 50 mmol). Priamine™ (21.4 g, 40 mmol) was added and the reaction mixture was stirred at 120° C. for 3 h, cooled to room temperature and precipitated by the addition of 500 mL of ethanol. The solid was washed several times with ethanol, hot water and again with ethanol and dried in vacuum. The intermediate was suspended in p-xylene (40 mL), carefully mixed with methanesulfonic acid (13.9 g, 144 mmol), triethylamine (14.2 g, 140 mmol) and maleic anhydride (4.9 g, 50 mmol) and refluxed for 5 h using a Dean-Stark apparatus. After cooling to room temperature, the product was precipitated by adding ethanol (500 mL). After drying in vacuum, a brown resin was obtained (16 g, 57%).

[0114] Analytics:GPC:M n : 5.6kDa, M w : 9.9kDa, PDI: 1.77. 1 HNMR (500MHz, THF-d 8):δ =10.57(s), 8.69(s), 8.26(d, J=13.6Hz), 6.76(s), 4.28(s), 3.68(d, J=7.0Hz), 3.65-3.59(m), 3 .44(t, J=7.2Hz), 3.14(dt, J=14.8, 7.8Hz), 1.81-1.75(m), 1.29(s), 0.88(q, J=9.7, 7.9Hz)ppm.

[0115] Synthesis of Oligomer (8) [ka]

[0116] The diacid (4) (3.9 g, 5 mmol) was dissolved in CaCl 2 (1.2 g, 11 mmol), pyridine (3.2 g, 11 mmol) and triphenyl phosphite (3.9 g, 12.5 mmol) were dissolved in NMP (20 mL). Priamine™ (5.4 g, 10 mmol) was added and the reaction mixture was stirred at 120° C. for 3 h, cooled to room temperature and precipitated by adding 100 mL of ethanol. The solid was washed several times with ethanol, hot water and again with ethanol and dried under vacuum. The intermediate was suspended in p-xylene (20 mL) and carefully mixed with methanesulfonic acid (3.5 g, 36 mmol), triethylamine (3.5 g, 35 mmol) and maleic anhydride (1.2 g, 12.5 mmol) and refluxed for 5 h using a Dean-Stark apparatus. After cooling to room temperature the product was precipitated by adding ethanol (100 mL). After drying under vacuum a brown resin was obtained (6.5 g, 67%).

[0117] Analytics:GPC:M n :7.6kDa, M w : 13.2kDa, PDI: 1.75. 1 HNMR (700MHz, THF-d 8):δ=10.52(s), 8.55(t, J=6.2Hz), 8.01(dd, J=8.0, 4.5Hz), 7.52(d, J=8.2Hz), 7.48-7.38(m), 7.25(d, J=8.2Hz), 6.75(s), 4. 36-4.23(m), 3.44(t, J=7.2Hz), 3.24-3.03(m), 2.43-2.29(m), 2.12(s), 2.02(s), 1.85(s), 1.57-1.08(m), 0.97-0.67(m)ppm.

[0118] Synthesis of oligomer (9) [ka]

[0119] The diacid (6) (7.0 g, 7.5 mmol) was dissolved / suspended in 20 mL of toluene, 0.1 mL of dry DMF was added, then the mixture was treated dropwise with thionyl chloride (2.2 mL, 30 mmol) and heated at 100 °C for 3 h. After cooling to room temperature, the solvent was removed and the crude product was dissolved in dry DMAc (50 mL) without further workup. Triethylamine (2.3 g, 23 mmol) and PriAmine® (8.2 g, 15.3 mmol) were added at 0 °C. The reaction mixture was then stirred at room temperature for 16 h and precipitated by adding 300 mL of ethanol. The resin was dissolved in p-xylene, treated with methanesulfonic acid (5.3 g, 55 mmol), triethylamine (5.4 g, 54 mmol) and maleic anhydride (1.5 g, 15 mmol) and refluxed for 5 h using a Dean-Stark apparatus. After cooling to room temperature, the product was precipitated by adding ethanol (300 mL) to give a brown resin after drying in vacuum (6.5 g, 45%).

[0120] Analytics:GPC:M n : 3.5kDa, M w : 6.1kDa, PDI: 1.74. 1 HNMR (500MHz, THF-d 8)δ=10.50(s), 8.53(t, J=6.8Hz), 7.99(tt, J=7.9, 5.1, 4.2Hz), 7.85(d, J= 7.7Hz), 7.80(d, J=7.6Hz), 7.52(d, J=7.6Hz), 7.43(d, J=7.5Hz), 7.38-7. 24(m), 7.19(d, J=8.4Hz), 6.91(s), 4.24(d, J=9.4Hz), 3.67(t, J=7.2Hz), 3.44(td, J=7.2, 3.0Hz), 1.66-1.50(m), 1.36-1.32(m), 0.88-0.81(m)ppm.

[0121] Synthesis of oligomer (10) [ka]

[0122] The diacid (4) (3.9 g, 5 mmol) and adamantane-1,3-dicarboxylic acid (Accela, 1.1 g, 5 mmol) were dissolved in CaCl 2 (2.4 g, 22 mmol), pyridine (6.4 g, 22 mmol) and triphenyl phosphite (7.8 g, 25 mmol) were dissolved in NMP (40 mL). Priamine® (10.7 g, 20 mmol) was added and the reaction mixture was stirred at 120° C. for 3 h, cooled to room temperature and precipitated by adding 300 mL of ethanol. The solid was washed several times with ethanol, hot water and again with ethanol and dried under vacuum. The intermediate was suspended in p-xylene (50 mL) and carefully mixed with methanesulfonic acid (7 g, 72 mmol), triethylamine (7 g, 70 mmol) and maleic anhydride (2.4 g, 25 mmol) and refluxed for 5 h using a Dean-Stark apparatus. After cooling to room temperature, the product was precipitated by adding ethanol (300 mL). After drying under vacuum, a brown resin was obtained (7.3 g, 48%).

[0123] Analytics:GPC:M n : 4.3kDa, M w : 7.1kDa, PDI: 1.66. 1 HNMR (500MHz, THF-d8 ):δ10.77(s), 8.57(d, J=8.8Hz), 8.34-8.16(m), 8.02(t, J=5.9Hz), 7.53(d, J= 8.4Hz), 7.44-7.32(m), 7.25(d, J=8.5Hz), 6.76(s), 6.73-6.65(m), 4.27(s), 3 .69-3.59(m), 3.44(t, J=7.2Hz), 3.14(dq, J=13.5, 7.3Hz), 2.33(s), 2.05(q, J =23.1Hz), 1.78(td, J=6.5, 3.2Hz), 1.30(d, J=11.4Hz), 0.88(q, J=9.7, 8.0Hz).

[0124] C. Mechanical Test dynamic mechanical analysis Free-standing films were prepared as follows: A concentrated solution of oligomer mixed with photoinitiator and structural additives is slit-coated onto a glass substrate. The resulting film is first dried at room temperature and then dried on a hotplate at 100 °C for 30 min. The film is then exposed to broadband UV exposure (UVACUBE 2000, Hoenle, mercury lamp, dose: 10 J / cm). 2 ) and finally removed from the substrate after immersion in water. The free-standing films are allowed to dry in air for 20 h. Dynamic mechanical analysis (DMA) was performed using a Netzsch DMA 242 E instrument with a heating rate of 3 K / min in air.

[0125] DMA results: (1) Oligomer (7) is cured with 5 wt.-% Irgacure OXE-02. See Figure 2: Tg(tan δ): 66.5°C. (2) Oligomer (7) is cured with 10 wt.-% bis(3-ethyl-5-methyl-4-maleimidophenyl)methane (CAS RN: 105391-33-1, TCI) as a structural additive and 5 phr of Irgacure OXE-02. See Figure 3: Tg(tan δ): 71.6°C.

[0126] (3) Oligomer (8) is cured with 5 wt% Irgacure OXE-02. See Figure 4: Tg(tan δ): 91.5°C. (4) Oligomer (8) is cured with 25 wt. % tetra(ethylene glycol) diacrylate (CAS RN: 17831-71-9, Merck Sigma-Aldrich) and 5 phr Irgacure OXE-02 as structural additives. See Figure 5: Tg(tan δ): 81.9°C. (5) Oligomer (10) is cured with 5 wt% Irgacure OXE-02. See Figure 6: Tg(tan δ): 64.4°C.

[0127] (6) Oligomer (10) is cured with 10 wt.-% bis(3-ethyl-5-methyl-4-maleimidophenyl)methane (CAS RN: 105391-33-1, TCI) as a structural additive and 5 phr of Irgacure OXE-02. See Figure 7: Tg(tan δ): 73.2°C. Reference material BMI3000 (commercial grade, Designer Molecules Inc.) (7) BMI3000 is cured with 5 wt.-% Irgacure OXE-02. See Figure 8: Tg(tan δ): 43.5°C.

[0128] Young's modulus and elongation at break Young's modulus and elongation at break were measured on a mechanical testing machine (500N Zwicki) using the following parameters: Pre-measurement: 0.1N at an elongation rate of 10mm / min; Main elongation rate 50mm / min. All experiments were carried out at room temperature using free-standing films prepared by the method described above. The film dimensions were 25mm in length and 15mm in width, with typical film thicknesses ranging from 40 to 60μm.

[0129] result: [Table 1]

[0130] D Conclusion Surprisingly, the introduction of an additional amide bond next to the imide functionality creating an amide-imide motif resulted in materials with improved thermomechanical properties compared to prior art bismaleimide resins such as BMI3000. The glass transition temperatures of these materials are increased by more than 20°C compared to conventional bismaleimide resins of the same type. As a further unexpected effect, the polymer networks formed with oligomer (7) are characterized by an almost twice as high modulus compared to the polymer films produced with BMI3000.

Claims

1. Bismaleimide compound represented by formula (1) or (2) 【Chemistry 1】 (In the formula: A, B and Z are, independently and at each occurrence independently of one another, a linking unit comprising one or more aliphatic, aromatic, or siloxane moieties, where optionally one or more of A, B and Z contain a cardo or spiro center; 【Chemistry 2】 represents one single bond or two single bonds; 【Chemistry 3】 represents a single or double bond; R ａ and R ｂ are, independently and independently of each other at each occurrence, a linking unit that contains one or more aliphatic, aromatic, or siloxane moieties; R ｚ is R ａ Or R ｂ and X, at each occurrence, independently, is a linking unit containing one or more aliphatic, aromatic, or siloxane moieties; R １ is H or alkyl having 1 to 5 carbon atoms; R ２ is H or alkyl having 1 to 5 carbon atoms; n is an integer from 1 to 60; m is an integer from 0 to 60; and z is an integer from 0 to 60; where at least one of m or z is ≠0.

2. 2. The bismaleimide compound of claim 1, wherein A, B and Z are independently, and independently of each other at each occurrence, a substituted or unsubstituted aliphatic moiety having from 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having from 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having from 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having from 2 to 50 silicon atoms, or combinations thereof, wherein optionally one or more of A, B and Z contains a cardo center or a spiro center.

3. R ａ and R ｂ are independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, or a combination thereof; and R ｚ is R ａ Or R ｂ The bismaleimide compound according to claim 1 or 2,

4. 4. The bismaleimide compound according to claim 1, wherein X, at each occurrence, is independently a substituted or unsubstituted aliphatic moiety having from 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having from 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having from 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having from 2 to 50 silicon atoms, or a combination thereof.

5. The bismaleimide compound according to formula (1) is represented by formula (3a) or (3b), and the bismaleimide compound according to formula (2) is represented by formula (4a) or (4b): 【Chemistry 4】 【Chemistry 5】 During the ceremony, A １ , B １ and Z １ are independently and independently of each other at each occurrence a linking unit containing one or more aliphatic, aromatic, or siloxane moieties, where A is １ , B １ and Z １ one or more of the following contains a cardo center or a spiro center; R ａ and R ｂ are independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, or a combination thereof; R ｚ is R ａ Or R ｂ and X are, independently of each other at each occurrence, a substituted or unsubstituted aliphatic moiety having from 2 to 100 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having from 6 to 100 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having from 4 to 100 carbon atoms, a substituted or unsubstituted siloxane moiety having from 2 to 50 silicon atoms, or a combination thereof; and R １ , R ２ 2. The bismaleimide compound according to claim 1, wherein n, m and z are as defined in claim 1.

6. A １ , B １ and Z １ are independently and independently of each other at each occurrence a substituted or unsubstituted aliphatic moiety having 2 to 80 carbon atoms, a substituted or unsubstituted hydrocarbon aromatic moiety having 6 to 80 carbon atoms, a substituted or unsubstituted heteroaromatic moiety having 4 to 80 carbon atoms, a substituted or unsubstituted siloxane moiety having 2 to 50 silicon atoms, or a combination thereof, wherein optionally, A １ , B １ and Z １ 6. The bismaleimide compound of claim 5, wherein one or more of the following contains a cardo center or a spiro center.

7. A １ , B １ and Z １ are represented by formula (5), independently and independently of each other at each occurrence: 【Chemistry 6】 During the ceremony: A ２１ , A ２２ and A ２３ are independently and independently of each other at each occurrence a divalent aromatic group, a divalent aliphatic group or a divalent mixed aromatic aliphatic group, which may contain one or more heteroatoms selected from N, O and S, and which may be substituted with one or more substituents selected from the list consisting of halogen, alkyl having 1 to 10 carbon atoms, alkoxy having 1 to 10 carbon atoms, aryl having 6 to 10 carbon atoms, and aryloxy having 6 to 10 carbon atoms, where A ２１ , A ２２ and A ２３ one or more of optionally contains a caldo center or a spiro center; G ２１ , G ２２ , G ２３ and G ２４ are independently and independently of each other at each occurrence -O-, -S-, -CO-, -(CO)-O-, -O-(CO)-, -S-(CO)-, -(CO)-S-, -O-(CO)-O-, -(CO)-NR 01 -, -NR 01 -(CO)-, -NR 01 -(CO)-NR 02 -, -NR 01 -(CO)-O-, -O-(CO)-NR 01 -, -OCH 2 -, -CH 2 O-, -SCH 2 -, -CH 2 S-, -CF 2 O-, -OCF 2 -, -CF 2 S-, -SCF 2 - 、 -CH 2 CH 2 -, -(CH 2 ) 4 -, -CF 2 CH 2 -, -CH 2 CF 2 -, -CF 2 CF 2 -, -CH=N-, -N=CH-, -N=N-, -CH=CR 01 -, -CY 01 =CY 02 -, -C≡C-, -CH=CH-(CO)-O-, -O-(CO)-CH=CH-, or a single bond, where R ０１ and R ０２ are each independently H or an alkyl group having 1 to 5 carbon atoms; Y ０１ and Y ０２ are each independently H, an alkyl having 1 to 5 carbon atoms, phenyl, F, Cl, or CN, and 7. The bismaleimide compound according to claim 5 or 6, wherein k and l are each independently 0, 1, 2, 3 or 4.

8. A ２１ , A ２２ and A ２３ are independently and independently of each other at each occurrence represented by any one of formulas (6a) to (6u): 【Chemistry 7】 【Chemistry 8】 【Chemistry 9】 During the ceremony, 【Chemistry 10】 represents the binding site, L is an alkyl having 1 to 5 carbon atoms, halogenyl, Ph or CN; R Ａｌｋ is alkyl having 1 to 5 carbon atoms; Q is O, S or CH ２ and 8. The bismaleimide compound according to claim 7, wherein q is an integer from 0 to 4.

9. R ａ and R ｂ are, independently of each other, substituted or unsubstituted aliphatic moieties having 2 to 60 carbon atoms; and R ｚ is R ａ Or R ｂ The bismaleimide compound according to any one of claims 1 to 8,

10. R ａ and R ｂ are independently and independently of each other at each occurrence represented by formula (7a) or (7b): 【Chemistry 11】 During the ceremony, 【Chemistry 12】 represents the binding site; x and y are each independently an integer from 0 to 10; R Ｉ and R ＩＩ and each independently represent a linear alkyl group having 1 to 10 carbon atoms or a branched alkyl group having 3 to 10 carbon atoms.

11. R ａ and R ｂ are independently and independently of each other at each occurrence represented by formula (8a) or (8b): 【Chemistry 13】 During the ceremony, 【Chemistry 14】 The bismaleimide compound according to any one of claims 1 to 10, wherein represents a binding site.

12. 12. The bismaleimide compound according to any one of claims 1 to 11, wherein X is a substituted or unsubstituted aliphatic moiety having 1 to 30 carbon atoms.

13. below (i) providing a formulation comprising one or more bismaleimide compounds according to any one of claims 1 to 12, and (ii) Curing the formulation A method for forming a dielectric polymer material comprising the steps of:

14. 14. The method for forming a dielectric polymer material of claim 13, wherein the formulation further comprises one or more additional compounds capable of reacting with the bismaleimide compound.

15. 15. The method for forming a dielectric polymer material according to claim 13 or 14, wherein the formulation further comprises one or more inorganic fillers.

16. A dielectric polymer material obtainable by the method according to any one of claims 13 to 15.

17. A dielectric polymer material comprising at least one repeat unit derived from a bismaleimide compound as defined in any one of claims 1 to 12.

18. The dielectric polymer material of claim 17, wherein the repeating unit comprises a structural unit represented by formula (9) or (10): 【Chemistry 15】 【Chemistry 16】 During the ceremony, 【Chemistry 17】 A, B, Z, R ａ , R ｂ , R ｚ , X, n, m and z are as defined in any one of claims 1 to 12.

19. An electronic device comprising the dielectric polymer material according to any one of claims 16 to 18.

20. 20. The electronic device of claim 19, wherein the electronic device is a microelectronic device, and the dielectric polymer material is included as a repassivation material in a redistribution layer of the microelectronic device.

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