PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS - Patent application

Abstract

The invention relates to a component (30) of a projection exposure apparatus (1, 101) for semiconductor lithography, the component (30) comprising an optical element (31) and an actuator (32, 35, 39.x, 43, 50), the optical element (31) and the actuator (32, 35, 39.x, 43, 50) being frictionally connected to one another, the actuator (32, 35, 39.x, 43, 50) being configured to at least locally deform the optical element (31). According to the invention, the actuator (32, 35, 39.x, 43, 50) is embodied in such a way as to minimize the influence on the imaging quality of stiffness losses in a perimeter defining the actuator (32, 35, 39.x, 43, 50). The invention further relates to a method for designing a component (30) of a projection exposure apparatus (1, 101) having an optical element (31) and actuators (32, 35, 39.x, 43, 50) in order to minimize the effects of parasitic deformations on the imaging quality of the projection exposure apparatus (1, 101) in the event of deformations of the optical element (31) caused by the actuators (32, 35, 39.x, 43, 50), comprising the steps of designing the actuators (32, 35, 39.x, 43, 50) and determining whether the actuators (32, 35, 39.x, 43, 50) are capable of deforming the optical element (31) or the optical element (31) by actuation or by the actuators (32, 35, 39.x, 43, 50). The method includes the steps of: determining parasitic deformations of an optical element (31) caused by differences in the thermal expansion coefficients of the elements (32, 35, 39.x, 43, 50); determining parasitic aberrations based on the parasitic deformations, taking into account the summation effect of scanning exposures used in a projection exposure apparatus (1, 101); optimizing an actuator (32, 35, 39.x, 43, 50) based on the determined parasitic aberrations; and repeating at least some of the previous process steps (61, 62, 63, 64) until the value of the parasitic aberrations falls below a predetermined value.

Description

[Technical field]

[0001] This application claims priority to German Patent Application No. 10 2021 205 368.8, filed May 27, 2021, the contents of which are incorporated herein by reference in their entirety.

[0002] The invention relates to a component of a projection exposure apparatus for semiconductor lithography and to a method for designing said component, in particular for minimizing the adverse effects of parasitic deformations caused by actuators on the imaging quality of the projection exposure apparatus. [Background technology]

[0003] In a projection exposure apparatus for semiconductor lithography, a lithography mask, also known as a reticle, e.g. a phase mask, is imaged onto a semiconductor substrate, also known as a wafer, using optical elements such as lens elements and / or mirrors.

[0004] In order to achieve particularly high resolution in lithography optical units, EUV light, for example with wavelengths in the range of 1 nm to 120 nm, in particular 13.5 nm, has also been used in recent years compared to conventional systems with typical wavelengths of 365 nm, 248 nm or 193 nm.

[0005] The optical elements used in that case include those which are in particular mechanically manipulated in order to improve the imaging quality and to correct disturbances occurring during operation, and a distinction must be made between a pure shift of the optical element and a deformation of the optical element.

[0006] In the case of a deformable mirror, actuators, for example in the form of an actuator matrix, are adhesively connected or bonded to the back side of the mirror to create the mechanical connection for targeted deformation.

[0007] Actuator matrices are known from the prior art that are embodied in the form of a square plate and comprise a number of interconnected actuator pads. The individual actuator pads are usually square or triangular and comprise holes that are usually arranged at the corners or sides of the actuator pads. These have the function of allowing the actuator pads to be put into contact with a controller. Physical stiffness losses of the combination of actuator and optical element occur all around the actuator, i.e. around the outer edges and holes of the plate of the actuator matrix, which losses lead to parasitic deformations of the surrounding areas during operation or due to differences in thermal expansion, for example due to differences in thermal expansion coefficients. This has a negative effect on the imaging quality of the projection exposure apparatus.

[0008] Due to the scanning operation mode of today's lithography systems, i.e. the movement of the phase mask under the illumination slit and the wafer in the opposite direction, the adverse effects become even more pronounced, as the aberrations caused by the above mentioned parasitic deformations can accumulate along the scanning direction. Summary of the Invention [Problem to be solved by the invention]

[0009] The object of the invention is to provide a component that overcomes the above-mentioned drawbacks of the prior art. Yet another object of the invention consists of specifying a method for designing said component. [Means for solving the problem]

[0010] This object is achieved by a component and a method having the features of the independent claims.The dependent claims relate to advantageous developments and variants of the invention.

[0011] A component of a projection exposure apparatus for semiconductor lithography according to the invention comprises an optical element and an actuator, which are frictionally connected to one another, the actuator being configured to at least locally deform the optical element. According to the invention, the actuator is embodied in such a way as to minimize the influence of stiffness losses in the periphery defining the actuator on the imaging quality. The frictional connection between the actuator and the optical element, such as a mirror, can be realised by an adhesive connection or bonding, or by a releasable connection, such as a screw connection.

[0012] In the first embodiment of the present invention, the actuator may be implemented in the form of an actuator matrix including at least two actuator pads, and the actuator matrix typically includes 9 to 30 actuator pads.

[0013] In particular, the cumulative length of the periphery of the actuator extending on an axis parallel to the scanning direction used in the projection exposure apparatus can be minimized. Scanning exposure methods used in projection exposure apparatuses have the advantage that in this case some optical effects of disturbances extending perpendicular to the scanning direction, such as parasitic deformations, are averaged out and minimized by the scanning movement.

[0014] Furthermore, the periphery of the actuator is oriented at an at least partial incline with respect to the scanning direction, so that advantageously the sum of the scanning movements of the part of the periphery extending in the scanning direction is minimized.

[0015] In particular, the actuator includes a serpentine peripheral contour relative to the scanning direction, which may be achieved, for example, by the actuator pads being hexagonal and arranging the actuator pads in rows shifted by half the actuator pad width, with protrusions of the actuator pads protruding into recesses of adjacent pads.

[0016] Furthermore, the linear perimeter structure of the actuator can be oriented at an angle to the scanning direction, which has the advantage that the perimeter defining the actuator does not have any parts aligned in the scanning direction, however, consideration must be given to the structural effects that the tilt of the actuator may have on the deformation effect of the actuator on the optically active surface.

[0017] In particular, the contact holes of the actuator pads formed in the actuator matrix can be designed to reduce the cumulative length of the edge portions of the holes extending on an axis parallel to the scanning direction used in the projection exposure apparatus.

[0018] This can be accomplished, for example, by minimizing the area of ​​at least some of the holes, thereby reducing the cumulative total length of all the holes' edges. Holes can be formed in corners, sides, within the active surface of the actuator pad, or a combination of these portions. The size of the holes is dictated by the space required for contact.

[0019] Furthermore, the holes can be arranged such that the number of holes located on an axis extending parallel to the scanning direction is minimized, thus minimizing the parasitic aberrations accumulated due to the scanning motion. The number of holes located on an axis can be reduced, for example, by strategic placement of the holes relative to the actuator pads as described above.

[0020] In further embodiments of the invention, the actuator pads may have a triangular, rectangular or hexagonal geometric shape. In addition to the geometric shape of the actuator pads, the number of rows and columns of the actuator matrix formed by the actuator pads can also be freely selected, so that matrices with, for example, 3 rows and 3 columns to 5 rows and 5 columns or more are conceivable. The number of rows and columns does not have to be the same, so that a matrix with 4 rows and 6 columns can also be formed.

[0021] In yet another embodiment of the invention, the actuator can have a separately controllable section for compensating stiffness losses, which allows the stiffness of the entire system of actuator pads and mirror material, which varies in the region of the intermediate space, to be taken into account by correspondingly modifying the control of said section, thus reducing undesired movements / deformations and avoiding possible resulting image errors.

[0022] In particular, said portion may be formed as a peripheral actuator pad of actuator pads arranged in a peripheral region of the actuator matrix, controllable independently of a second region of actuator pads formed as a partial actuator pad, and configured to compensate for parasitic deformations caused by stiffness losses, the peripheral actuator pads providing a higher deformation effect at the periphery compared to undivided actuator pads, thus compensating for stiffness losses.

[0023] A method according to the invention for designing a component of a projection exposure apparatus in order to minimize the effects of parasitic deformations on the imaging quality of a projection exposure apparatus having an optical element and an actuator, in the event of deformations of the optical element caused by an actuator, comprises the steps of: Designing an actuator; determining parasitic deformations of the optical element caused by actuation or due to differences in the thermal expansion coefficients of the optical element and the actuator; determining the parasitic aberrations based on the parasitic deformations, taking into account the summation effect of the scanning exposure used in the projection exposure apparatus; optimizing the actuator based on the determined parasitic aberrations; repeating at least some of the previous process steps until the value of the parasitic aberration falls below a predetermined value; Includes.

[0024] The parasitic deformations can be determined, for example, by FEM simulation or on the optically active surface of the optical element using optical measurement techniques. The parasitic aberrations can be determined by simulation based on the parasitic deformations or by measurements at component level or for the entire system, i.e. in the projection exposure apparatus.

[0025] Furthermore, at least a portion of the actuator travel can be used to correct for parasitic deformations, this self-correction having the advantage, as is known, of compensating for errors at the site where they occur.

[0026] Furthermore, further measures for optimizing the imaging quality present in the projection exposure apparatus can be taken into account when determining the resulting parasitic aberrations.

[0027] In particular, the means can be embodied in the form of a manipulator for positioning or deforming further optical elements of the projection exposure apparatus. Usually, essentially all optical elements of the projection exposure apparatus are manipulable, so that many additional correction means are available.

[0028] Furthermore, a means can be embodied in the form of a simulation-based algorithm for predicting the imaging quality taking into account a number of influencing parameters and for determining the manipulator movements required therefor.

[0029] Exemplary embodiments and variants of the invention are explained in more detail below with reference to the drawings. [Brief description of the drawings]

[0030] [Figure 1] 1 shows a schematic meridian section of a projection exposure apparatus for EUV projection lithography; [Diagram 2] 3 shows a schematic meridian section of yet another projection exposure apparatus for DUV projection lithography; [Figure 3a] 1 shows components known from the prior art; [Figure 3b] A wavefront diagram is shown. [Figure 4a] 1 shows a first embodiment of a component according to the invention. [Figure 4b] A wavefront diagram is shown. [Diagram 5] 1 shows a detailed view of a component according to the invention; [Figure 6] 4 illustrates yet another embodiment of a component according to the present invention. [Figure 7] 1 shows a detailed view of the present invention. [Figure 8] 3 shows a flow chart of a method for designing a component according to the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] The essential components of a microlithographic projection exposure apparatus 1 are firstly described by way of example with reference to Figure 1. It should be understood that the description here of the basic structure of the projection exposure apparatus 1 and its components is not limiting.

[0032] An embodiment of the illumination system 2 of the projection exposure apparatus 1 comprises, in addition to the radiation source 3, an illumination optical unit 4, which illuminates an object field 5 in an object plane 6. In an alternative embodiment, the light source 3 can also be provided as a separate module from the rest of the illumination system. In this case, the illumination system does not include the light source 3.

[0033] A reticle 7 arranged in the object field 5 is exposed. The reticle 7 is held by a reticle holder 8. The reticle holder 8 is displaceable in particular in the scanning direction by a reticle displacement drive 9.

[0034] For illustrative purposes, a Cartesian xyz coordinate system is shown in Fig. 1. The x direction extends perpendicular to the plane of the drawing. The y direction extends horizontally and the z direction extends vertically. In Fig. 1, the scanning direction extends along the y direction. The z direction extends perpendicular to the object plane 6.

[0035] The projection exposure apparatus 1 comprises a projection optical unit 10. The projection optical unit 10 serves to image the object field 5 into an image field 11 in an image plane 12. The image plane 12 extends parallel to the object plane 6. Alternatively, angles other than 0° between the object plane 6 and the image plane 12 are also possible.

[0036] The structures on the reticle 7 are imaged onto a photosensitive layer of a wafer 13, which is arranged in the region of the image field 11 of the image plane 12. The wafer 13 is held by a wafer holder 14. The wafer holder 14 is displaceable, in particular along the y direction, by a wafer displacement drive 15. The displacement of the reticle 7 by the reticle displacement drive 9 on the one hand and the displacement of the wafer 13 by the wafer displacement drive 15 on the other hand can be effected synchronously with respect to one another.

[0037] The radiation source 3 is an EUV radiation source. The radiation source 3 in particular emits EUV radiation 16, also referred to in the following as working radiation, illumination radiation or illumination light. In particular, the working radiation has a wavelength in the range of 5 nm to 30 nm. The radiation source 3 may be a plasma source, for example an LPP (Laser Produced Plasma) source or a GDPP (Gas Discharge Plasma) source. It may also be a synchrotron-based radiation source. The radiation source 3 may be a Free Electron Laser (FEL).

[0038] Illumination radiation 16 coming from the radiation source 3 is focused by a collector 17. The collector 17 may be a collector with one or more ellipsoidal and / or hyperbolic reflecting surfaces. The illumination radiation 16 may be incident on at least one reflecting surface of the collector 17 at grazing incidence (GI), i.e. at an angle of incidence greater than 45°, or at normal incidence (NI), i.e. at an angle of incidence smaller than 45°. The collector 17 may be structured and / or coated, firstly to optimize its reflectivity for the radiation used and secondly to suppress extraneous light.

[0039] Downstream of the collector 17, the illumination radiation 16 propagates through an intermediate focus in an intermediate focal plane 18. The intermediate focal plane 18 may represent a separation between the source module comprising the radiation source 3 and the collector 17 and the illumination optical unit 4.

[0040] The illumination optical unit 4 comprises a deflection mirror 19 and a first facet mirror 20 arranged downstream thereof in the beam path. The deflection mirror 19 can be a plane deflection mirror or a mirror with a beam-influencing effect beyond a pure deflection effect. Alternatively or additionally, the deflection mirror 19 can be in the form of a spectral filter which separates the used optical wavelength of the illumination radiation 16 from extraneous light of wavelengths deviating therefrom. If the first facet mirror 20 is arranged in a plane of the illumination optical unit 4 which is optically conjugate with the object plane 6 as a field plane, it is also referred to as a field facet mirror. The first facet mirror 20 comprises a plurality of individual first facets 21, also referred to as field facets in the following. FIG. 1 shows only some of said facets 21 by way of example.

[0041] The first facet 21 may be in the form of a macroscopic facet, in particular a rectangular facet or a facet having an arcuate or part-circular peripheral contour. The first facet 21 may be in the form of a planar facet or a convexly or concavely curved facet.

[0042] The first facet 21 itself can also consist of a number of individual mirrors, in particular a number of micromirrors, as is known, for example, from DE 10 2008 009 600. The first facet mirror 20 can in particular be formed as a microelectromechanical system (MEMS system). See DE 10 2008 009 600 for further information.

[0043] Between the collector 17 and the deflection mirror 19, the illumination radiation 16 travels horizontally, ie along the y direction.

[0044] In the beam path of the illumination optical unit 4, a second facet mirror 22 is arranged downstream of the first facet mirror 20. If the second facet mirror 22 is arranged in a pupil plane of the illumination optical unit 4, it is also referred to as a pupil facet mirror. The second facet mirror 22 can also be arranged away from the pupil plane of the illumination optical unit 4. In this case, the combination of the first facet mirror 20 and the second facet mirror 22 is also referred to as a specular reflector. Specular reflectors are known from US 2006 / 0132747, EP 1 614 008 and US 6,573,978.

[0045] The second facet mirror 22 includes a plurality of second facets 23. In the case of a pupil facet mirror, the second facets 23 are also referred to as pupil facets.

[0046] The second facet 23 may likewise be a macroscopic facet, which may for example have a circular, rectangular or hexagonal perimeter, or a facet consisting of a micromirror. In this respect, reference is likewise made to DE 10 2008 009 600 A1.

[0047] The second facet 23 may have a planar reflective surface or a convexly or concavely curved reflective surface.

[0048] The illumination optical unit 4 results in a double-faceted system. This basic principle is also called a fly's eye condenser (fly's eye integrator).

[0049] It may be advantageous not to arrange the second facet mirror 22 exactly in a plane that is optically conjugate with the pupil plane of the projection optical unit 10. In particular, as described in DE 10 2017 220 586 A1, the pupil facet mirror 22 may be arranged at an angle with respect to the pupil plane of the projection optical unit 10.

[0050] The individual first facets 21 are imaged into the object field 5 by means of a second facet mirror 22. The second facet mirror 22 is the last beam-shaping mirror in the beam path upstream of the object field 5 or indeed the final mirror for the illumination radiation 16.

[0051] In yet another embodiment (not shown) of the illumination optical unit 4, a transfer optical unit, which in particular contributes to the imaging of the first facet 21 into the object field 5, can be arranged in the beam path between the second facet mirror 22 and the object field 5. The transfer optical unit can have exactly one mirror or two or more mirrors arranged one behind the other in the beam path of the illumination optical unit 4. The transfer optical unit can in particular comprise one or two normal incidence mirrors (NI mirrors) and / or one or two grazing incidence mirrors (GI mirrors).

[0052] In the embodiment shown in FIG. 1, the illumination optical unit 4 comprises exactly three mirrors downstream of the collector 17 , in particular a deflection mirror 19 , a field facet mirror 20 and a pupil facet mirror 22 .

[0053] In yet another embodiment of the illumination optical unit 4, the deflection mirror 19 is not required either, so that the illumination optical unit 4 can then have exactly two mirrors downstream of the collector 17, in particular a first facet mirror 20 and a second facet mirror 22.

[0054] The imaging of the first facet 21 onto the object plane 6 by the second facet 23 or by means of the second facet 23 and the transfer optical unit is usually only an approximate imaging.

[0055] The projection optical unit 10 comprises a number of mirrors Mi, which are numbered according to their position in the beam path of the projection exposure apparatus 1 .

[0056] In the example shown in Fig. 1, the projection optical unit 10 comprises six mirrors M1-M6. A substitution of 4, 8, 10, 12 or any other number of mirrors Mi is likewise possible. The penultimate mirror M5 and the last mirror M6 each have a passing aperture for the illumination radiation 16. The projection optical unit 10 is a double-shielded optical unit. The projection optical unit 10 has an image-side numerical aperture which is greater than 0.5, may be greater than 0.6, and may for example be 0.7 or 0.75.

[0057] The reflective surface of the mirror Mi can be embodied as a freeform surface without an axis of rotational symmetry. Alternatively, the reflective surface of the mirror Mi can be designed as an aspheric surface with exactly one axis of rotational symmetry of the reflective surface shape. Like the mirrors of the illumination optical unit 4, the mirror Mi can have a coating that is highly reflective with respect to the illumination radiation 16. These coatings can in particular be designed as multilayer coatings with alternating layers of molybdenum and silicon.

[0058] The projection optical unit 10 has a large object-image offset in the y direction between the y coordinate of the center of the object field 5 and the y coordinate of the center of the image field 11. In the y direction, this object-image offset may be approximately the same size as the z distance between the object plane 6 and the image plane 12.

[0059] In particular, the projection optical unit 10 can have an anamorphic form. In particular, it has different imaging scales βx, βy in the x-direction and the y-direction. The two imaging scales βx, βy of the projection optical unit 10 are preferably (βx, βy)=(+ / -0.25, + / -0.125). A positive imaging scale β means imaging without image inversion. A negative sign of the imaging scale β means imaging with image inversion.

[0060] The projection optical unit 10 results in a size reduction in the x-direction, ie perpendicular to the scanning direction, by a ratio of 4:1.

[0061] The projection optical unit 10 provides a size reduction of 8:1 in the y-direction, ie the scan direction.

[0062] Other imaging scales are possible as well. Imaging scales of the same sign and the same absolute value in the x and y directions, for example 0.125 or 0.25, are also possible.

[0063] The number of intermediate image planes in the x- and y-directions in the beam path between the object field 5 and the image field 11 may be the same or may differ depending on the embodiment of the projection optical unit 10. Examples of projection optical units 10 with different numbers of such intermediate images in the x- and y-directions are known from US 2018 / 0074303.

[0064] Each of the pupil facets 23 is assigned to exactly one of the field facets 21 in order to respectively form an illumination channel which illuminates the object field 5. In particular, this makes it possible to obtain an illumination according to the Köhler principle. The far field is decomposed into a number of object fields 5 by means of the field facets 21. The field facets 21 generate a number of images of intermediate foci on the respectively assigned pupil facets 23.

[0065] By means of the respectively assigned pupil facets 23, the field facets 21 are imaged onto the reticle 7 in an overlapping manner in order to illuminate the object field 5. The illumination of the object field 5 is in particular as uniform as possible. Its uniformity error is preferably less than 2%. By overlapping the different illumination channels, field uniformity can be obtained.

[0066] The illumination of the entrance pupil of the projection optical unit 10 can be geometrically defined by the arrangement of the pupil facets. By selecting the illumination channels, and in particular the subset of pupil facets, which guide the light, the intensity distribution in the entrance pupil of the projection optical unit 10 can be set. This intensity distribution is also called the illumination setting.

[0067] An equally favorable pupil uniformity in the region of a defined illumination portion of the illumination pupil of the illumination optical unit 4 can be achieved by redistribution of the illumination channels.

[0068] Further aspects and details of the illumination of the object field 5, in particular the entrance pupil of the projection optical unit 10, are explained below.

[0069] In particular, the projection optical unit 10 may have a concentric entrance pupil. It may be accessible. It may be inaccessible.

[0070] The entrance pupil of the projection optical unit 10 cannot usually be illuminated exactly by means of the pupil facet mirror 22. In the case of imaging of the projection optical unit 10 telecentrically imaging the centre of the pupil facet mirror 22 onto the wafer 13, the aperture rays often do not intersect at a single point. However, it is possible to find a surface for which the determined distance of the pair of aperture rays is minimal. This surface represents the entrance pupil or a real space surface conjugate thereto. In particular, this surface has a finite curvature.

[0071] The projection optical unit 10 may have different entrance pupil positions for the tangential and sagittal beam paths. In this case, an imaging element, in particular an optical component part of the transfer optical unit, should be provided between the second facet mirror 22 and the reticle 7. This optical element can be used to take into account the different positions of the tangential and sagittal entrance pupils.

[0072] In the arrangement of the components of the illumination optical unit 4 shown in Fig. 1, the pupil facet mirror 22 is arranged in a plane conjugate with the entrance pupil of the projection optical unit 10. The field facet mirror 20 is arranged at an incline with respect to the object plane 6. The first facet mirror 20 is arranged at an incline with respect to the arrangement plane defined by the deflection mirror 19.

[0073] The first facet mirror 20 is disposed so as to be inclined with respect to a placement plane defined by the second facet mirror 22 .

[0074] FIG. 2 shows diagrammatically in meridian section yet another projection exposure apparatus 101 for DUV projection lithography in which the invention can also be used.

[0075] The construction and imaging principle of the projection exposure apparatus 101 are comparable to those described in Fig. 1. Identical component parts are designated by reference numbers which are 100 higher than in Fig. 1, ie the reference numbers in Fig. 2 start with 101.

[0076] 1, the DUV radiation 116 used as the light used has a large wavelength in the range of 100 nm to 300 nm, in particular 193 nm, so that refractive, diffractive and / or reflective optical elements 117, such as lens elements, mirrors, prisms, end plates etc., can be used for imaging or illumination in the DUV projection exposure apparatus 101. The projection exposure apparatus 101 in this case essentially comprises an illumination system 102, a reticle holder 108 which receives and accurately positions a reticle 107 provided with structures which determine the subsequent structure on a wafer 113, a wafer holder 114 which holds, moves and accurately positions said wafer 113, and a projection lens 110 with a number of optical elements 117, which are held by mounts 118 in a lens housing 119 of the projection lens 110.

[0077] Illumination system 102 provides the DUV radiation 116 required for imaging reticle 107 onto wafer 113. A laser, plasma source, etc. can be used as the source of this radiation 116. The radiation 116 is shaped by optics in illumination system 102 so that upon incidence on reticle 107, the DUV radiation 116 has desired characteristics in terms of diameter, polarization, wavefront shape, etc.

[0078] Besides the additional use of refractive optical elements 117 such as lens elements, prisms, end plates, etc., the configuration of the downstream projection optical unit 110 having a lens housing 119 does not differ in principle from the configuration described in FIG. 1 and therefore will not be described in further detail.

[0079] FIG. 3a shows a component 30 known from the prior art, comprising a mirror 31 and two actuators in the form of actuator matrices 32. The actuator matrices 32 are arranged side by side on the rear side of the mirror 31, which is positioned opposite the optically active surface (not shown) of the mirror 31. Each actuator matrix 32 has a number of square actuator pads 33 arranged in a row and column, with holes at its corners for contacting the actuator pads 33 with a controller (not shown). The plate-like actuator matrix 32 is rectangular, with two of the four peripheries of the actuator matrix 32 extending in the scanning direction, indicated by the thick arrow in FIG. 3a. The holes 34 between the actuator pads 33 are positioned respectively behind and next to each other on an axis (indicated by a dashed line) extending parallel to the scanning direction. The resulting parasitic deformations accumulate in the scanning direction and cause aberrations. The actuator matrix 32 can in principle also have a curved shape. The number of actuator matrices 32 arranged on the mirror 31 can be freely selected, i.e. three, four or more actuator matrices 32 can also be formed on the mirror 31. Likewise, the number of rows and columns of the actuator matrices 32 can be freely selected. Thus, in addition to the embodiment described in Fig. 3a with two actuator matrices 32 with 4 rows and 3 columns, the component 30 can also comprise three actuator matrices 32 with 5 rows and 5 columns, or four matrices 32 with 4 rows and 5 columns, or any other combination on the mirror 31. The number of actuator matrices 32 and rows and columns here depends mainly on the application and productivity of the actuator matrices 32.

[0080] Fig. 3b shows a diagram of the parasitic aberrations accumulating with a scanning motion. These are caused by parasitic deformations due to edge effects of the actuator matrix 32 due to stiffness losses. The point densities used in the diagram correspond here to wavefront deviations in the positive or negative direction. The aberrations aligned in the scanning direction, indicated by the thick arrows in Fig. 3b, are clearly visible in the form of areas of identical point density extending in the scanning direction.

[0081] FIG. 4a shows a component 30 according to the invention, comprising a mirror 31 and two actuators in the form of actuator matrices 35 arranged side by side. Each actuator matrix 35 has hexagonal actuator pads 36, which likewise have holes 38 at the corners for contacting the actuator pads 36 with a controller (not shown). The holes 38 are elliptical, with the long axis of the holes 38 aligned perpendicular to the scanning direction. The actuator pads 36 are arranged in rows 37 perpendicular to the scanning direction, indicated by the thick arrows in FIG. 4a. The rows 37 are also arranged perpendicular to the scanning direction, alternately offset from one another by half the width of the actuator pads, respectively. This results in a peripheral contour that meanders with respect to the scanning direction around the actuator matrices 35 positioned parallel to the scanning direction. Thus, the parasitic deformations caused in the peripheral contour by stiffness losses are advantageously averaged out by the scanning movement, and the resulting aberrations are thus minimized. In addition to the adaptation of the perimeter contour to the scanning direction, the minor axis of the elliptical contact holes 38 of the actuator pads 36 is smaller than the diameter of the holes shown in FIG. 3a, so that the cumulative length of the edge parts of the holes 38 running parallel to the scanning direction is reduced. Furthermore, the holes 38 on multiple axes, shown by dotted and dashed lines in FIG. 4a, are arranged parallel to the scanning direction due to the hexagonal shape of the actuator pads 36, so that the parasitic cumulative error per axis is small. As a result, the amplitude of the aberrations is advantageously minimized. In order to keep the distance between adjacent actuator matrices 35 as small as possible, the actuator matrices 35 are arranged in an interdigitated manner. The deformation effect of the actuator pads 36 at the abutting edges of two adjacent actuator matrices 35 is therefore comparable to the actuator matrix 32 described in FIG. 3a known from the prior art. As already explained with respect to FIG. 3a, the actuator matrix 32 can in principle also have a curved shape. Furthermore, the number of actuator matrices 32 arranged on the mirror 31 can be freely selected, i.e. three, four or more actuator matrices 32 can be formed on the mirror 31. Similarly, the number of rows and columns of the actuator matrices 32 can be freely selected.4a with two actuator matrices 32 with 4 rows and 3 columns, the component 30 can therefore also comprise three actuator matrices 32 with 5 rows and 5 columns, or four matrices 32 with 4 rows and 5 columns, or any other combination on the mirror 31. The number of actuator matrices 32 and rows and columns here depends mainly on the application and productivity of the actuator matrices 32.

[0082] Compared to the parasitic aberration diagram described in FIG. 3b, FIG. 4b shows a significant reduction in the parasitic aberrations accumulated by the scanning motion, which can be recognized firstly by a reduction in the average absolute value of the point density and secondly by a deviation from the scanning direction of the profile of areas of identical point density and therefore identical aberrations.

[0083] Figures 5a to 5f show further alternative embodiments of the actuator matrix 39.1, 39.2, 39.3, 39.4, 39.5, 39.6 with different geometries of the actuator pads 40.1, 40.2, 40.3, 40.4, 40.5, 40.6 and different arrangements of the contact holes 41.1, 41.2, 41.3, 41.4, 41.5, 41.6. The different combinations of geometry of the actuator pads 40.1, 40.2, 40.3, 40.4, 40.5, 40.6 and shapes and arrangements of the holes 41.1, 41.2, 41.3, 41.4, 41.5, 41.6 are shown in the table below. The scanning direction is illustrated by the arrows.

[0084] [Table 1]

[0085] Fig. 6 shows yet another embodiment of the invention showing a component 30 comprising a mirror 31 and an actuator matrix 43. As already mentioned above, parasitic deformations caused by stiffness losses in the peripheral region of the actuator matrix 43 are minimized by the scanning action if the perimeter of the actuator matrix 43 is minimized on an axis aligned parallel to the scanning direction. In the exemplary embodiment shown in Fig. 6, by making the actuator matrix 43 trapezoidal, the entire circumference is not aligned parallel to the scanning direction, so that parasitic aberrations caused by parasitic deformations in the peripheral region can advantageously be almost completely avoided or can be largely averaged out by the scanning action.

[0086] Figure 7 shows a detailed view of the component 30, comprising a mirror 31 and actuator pads 51 arranged around the periphery of the actuator embodied in the form of an actuator matrix 50. The actuator pads 51 are divided into partial actuator pads 52 and peripheral actuator pads 53, which are controllable independently of one another via respective lines 54, 55. This has the advantage that the deformation of the optically active surface 56 caused by the peripheral actuator pads 53, shown in solid lines in Figure 7, is greater in the peripheral region than the deformation caused by the undivided actuator pads, shown in dashed lines in Figure 7. Advantageously, parasitic deformations caused by stiffness losses in the peripheral region of the actuator matrix 50 are thereby at least partially compensated, so that parasitic aberrations are minimized.

[0087] FIG. 8 shows a possible way of designing a component 30 of a projection exposure apparatus 1, 101 in order to minimize the effect of parasitic deformations on the imaging quality of the projection exposure apparatus 1, 101 having an optical element 31 and actuators 32, 35, 39.x, 43, 50 when deformations of the optical element 31 occur due to the actuators 32, 35, 39.x, 43, 50.

[0088] In a first method step 61, the actuators 32, 35, 39.x, 43, 50 are designed.

[0089] In a second method step 62, the parasitic deformations of the optical element 31 caused by actuation or due to differences in the thermal expansion coefficients of the optical element 31 and the actuators 32, 35, 39.x, 43, 50 are determined.

[0090] In a third method step 63, the parasitic aberrations are determined on the basis of the parasitic deformations, taking into account the summation effect of the scanning exposure used in the projection exposure apparatus.

[0091] In a fourth method step 64, the actuator is optimized based on the determined parasitic aberrations, whereby in particular the shape and arrangement of the individual actuator pads and holes can be varied.

[0092] In a fifth step 65, at least some of the previous process steps are repeated until the value of the parasitic aberrations falls below a predetermined value. [Explanation of symbols]

[0093] 1. Projection exposure equipment 2. Lighting system 3 Radiation source 4. Illumination optical unit 5 Object field of view 6 Object plane 7 Reticle 8 Reticle Holder 9 Reticle Displacement Drive 10 Projection optical unit 11 Image field 12 Image plane 13 Wafer 14 Wafer holder 15 Wafer Displacement Drive 16 EUV radiation 18 Intermediate focal plane 19 Deformable Mirror 20 Faceted Mirror 21 Facet 22 Faceted Mirror 23 Facet 30 Components 31 Mirror 32 Actuator Matrix 33 Actuator Pad 34 holes 35 Actuator Matrix 36 Actuator Pad 37 rows 38 holes 39.1~39.6 Actuator matrix 40.1~40.6 Actuator pad 41.1~41.6 hole 42 electrodes 43 Actuator Matrix 50 Actuator Matrix 51 Actuator Pad 52 Partial Actuator Pad 53 Periphery Actuator Pad 54 Line 55 Line 56 Optically Effective Surface 61 Method Step 1 62 Method Step 2 63 Method Step 3 64 Method Step 4 65 Method Step 5 101 Projection exposure equipment 102 Lighting system 107 Reticle 108 Reticle Holder 110 Projection optical unit 113 Wafer 114 Wafer holder 116 DUV radiation 117 Optical Elements 118 Mount 119 Lens Housing

Claims

1. A projection exposure apparatus (1, 101) with a projection objective (10, 110) including a component (30), the component (30) including an optical element (31) and an actuator (32, 35, 39.x, 43, 50), the optical element (31) and the actuator (32, 35, 39.x, 43, 50) being connected to each other in a force-fixed manner, the actuator (32, 35, 39.x, 43, 50) being configured to at least locally deform the optical element (31), The actuator (32, 35, 39.x, 43, 50) is embodied to minimize a cumulative length of a periphery of the actuator (32, 35, 39.x, 43, 50) extending on an axis parallel to a scanning direction used in the projection exposure apparatus (1, 101).

2. 2. A projection exposure apparatus (1, 101) according to claim 1, 1. A projection exposure apparatus, characterized in that the actuator is in the form of an actuator matrix (32, 35, 39.x, 43, 50) comprising at least two actuator pads (33, 36, 40.x, 51).

3. 2. A projection exposure apparatus (1, 101) according to claim 1, 10. A projection exposure apparatus, characterized in that the outer periphery of the actuator (35, 39.x, 43, 50) is oriented at least partially inclined with respect to the scanning direction.

4. A projection exposure apparatus (1, 101) according to any one of claims 1 to 3, 4. A projection exposure apparatus, comprising: an actuator (35) having a peripheral contour that is serpentine relative to the scanning direction.

5. A projection exposure apparatus (1, 101) according to any one of claims 1 to 3, 10. A projection exposure apparatus, characterized in that the linear perimeter structure of the actuator (43) is oriented obliquely with respect to the scanning direction.

6. 3. A projection exposure apparatus (1, 101) according to claim 2, A projection exposure apparatus, characterized in that the contact holes (34, 38, 41.x) of the actuator pads (33, 36, 40.x, 51) formed in the actuator matrix (32, 35, 39.x, 43, 50) are designed to reduce the cumulative length of the edge portions of the holes (34, 38, 41.x) extending on an axis parallel to a scanning direction used in the projection exposure apparatus (1, 101).

7. 7. A projection exposure apparatus (1, 101) according to claim 6, A projection exposure apparatus, characterized in that the area of ​​at least some of said holes (34, 38, 41.x) is minimized.

8. 7. A projection exposure apparatus (1, 101) according to claim 6, 10. A projection exposure apparatus, comprising: a projection lens having a first aperture and a second aperture, the first aperture being arranged on an axis extending parallel to the scanning direction, the first aperture being arranged on an axis extending parallel to the scanning direction, the second ...

9. 3. A projection exposure apparatus (1, 101) according to claim 2, 10. A projection exposure apparatus, characterized in that said actuator pads (33, 36, 40.x, 51) have a triangular, rectangular or hexagonal geometric shape.

10. 2. A projection exposure apparatus (1, 101) according to claim 1, 10. A projection exposure apparatus, characterized in that the actuator (50) has a separately controllable part (53) for compensating for stiffness losses.

11. A projection exposure apparatus (1, 101) according to claim 10, The projection exposure apparatus is characterized in that the portion is formed as a peripheral actuator pad (53) of actuator pads (51) arranged in a peripheral region of an actuator matrix (50), is controllable independently of a second region of the actuator pads (51) formed as a partial actuator pad (52), and is configured to correct parasitic deformations caused by stiffness losses.

12. 1. A method for designing a component (30) of a projection exposure apparatus (1, 101) with an optical element (31) and an actuator (32, 35, 39.x, 43, 50) in order to minimize the effect of parasitic deformations on the imaging quality of the projection exposure apparatus (1, 101) when deformations of the optical element (31) are caused by the actuator (32, 35, 39.x, 43, 50), comprising: designing said actuators (32, 35, 39.x, 43, 50); determining parasitic deformations of the optical element (31) caused by actuation or by differences in the thermal expansion coefficients of the optical element (31) and the actuators (32, 35, 39.x, 43, 50); determining parasitic aberrations based on parasitic deformations, taking into account the summation effect of the scanning exposure used in the projection exposure apparatus (1, 101); optimizing said actuators (32, 35, 39.x, 43, 50) based on the determined parasitic aberrations; repeating at least some of the previous process steps (61, 62, 63, 64) until the value of the parasitic aberration falls below a predetermined value; The method includes:

13. 13. The method of claim 12, A method comprising: correcting for parasitic deformations using at least a portion of the movement of the actuators (32, 35, 39.x, 43, 50).

14. 14. The method according to claim 12 or 13, 13. A method according to claim 12, further comprising taking into account further measures for optimizing the imaging quality present in the projection exposure apparatus (1, 101) when determining the parasitic aberrations.

15. 15. The method of claim 14, 4. Method according to claim 3, characterized in that said means are embodied in the form of manipulators for positioning or deformation of further optical elements of the projection exposure apparatus (1, 101).

16. 15. The method of claim 14, 10. A method, characterized in that it embodies a means in the form of a simulation-based algorithm for the prediction of the imaging quality taking into account a number of influencing parameters and for the determination of the manipulator movements required therefor.

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