Peeling device, peeling system and peeling method

Abstract

To provide a peeling device, a peeling system, and a peeling method that reduce false determination of peeling completion.SOLUTION: A peeling device 5 includes a first holding unit 50, a second holding unit 70, a control unit, a light projector and a light receiver. The first holding unit suctionally holds a first substrate of the polymerized substrates T to which the first substrate W1 and a second substrate W2 are joined, and moves the first substrate away from the second substrate. The second holding unit suctionally holds the second substrate among the polymerized substrates. The control unit controls the first holding unit to execute a peeling process that moves the first substrate suctionally held by the first holding unit away from the second substrate.SELECTED DRAWING: Figure 3

Images