Vibration device and oscillator

Abstract

To provide a vibration device improved in G sensitivity characteristics, and an oscillator.SOLUTION: A vibration device 1 comprises: a vibration piece 3 which consists of an SC cut crystal substrate rotating at a predetermined angle around an X axis of an orthogonal coordinate system (X, Y, Z) and including a face 5 orthogonal to a Y" axis of an orthogonal coordinate system (X', Y", Z') rotating at a predetermined angle around a Z' axis of a new orthogonal coordinate system (X, Y', Z') obtained by the rotation and includes a support section 34 provided in one end in a planar view, an excitation section 33 where an excitation electrode 36 is provided on the face 5 and a slit 35 at least partially provided between the support section 34 and the excitation electrode 36; and a substrate 10 in which the support section 34 of the vibration piece 3 is mounted. An angle Ψ formed from a virtual line 50 passing a center 52 of the support section 34 and a center 51 of the excitation electrode 36 and the X' axis in the planar view is 30° or more and 65° or less or -150° or more and -125° or less.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a vibration device and an oscillator. [Background technology]

[0002] For example, Patent Document 1 discloses a quartz crystal resonator in which two fixed parts are arranged on either one of a first side along the X' axis and a second side along the Z' axis of a twice-rotated quartz crystal piece and fixed to a container, the positions of the two fixed parts being shifted to the left end side of one side, and the angle ω formed by a line segment connecting the center of the excitation electrode and the center between the two fixed parts and the other side of the first and second sides is specified. When one side is the first side, the range of angle ω is set to 7.9° to 20.4°, and when one side is the second side, the range of angle ω is set to 2.7° to 15°, thereby reducing the rate of change in frequency due to temperature. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-78062 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the quartz crystal resonator described in Patent Document 1 has improved temperature characteristics by reducing the supporting stress caused by temperature changes, but has a problem in that it does not take into consideration G sensitivity. [Means for solving the problem]

[0005] The vibration device is composed of an SC-cut quartz crystal substrate having a surface orthogonal to the Y'' axis of a Cartesian coordinate system (X',Y'',Z') rotated by a predetermined angle around the X-axis of a Cartesian coordinate system (X,Y,Z) and rotated by a predetermined angle around the Z'-axis of a new Cartesian coordinate system (X,Y',Z') obtained by this rotation, and is equipped with a vibrating piece having, in a planar view, a support portion provided at one end, an excitation portion having an excitation electrode arranged on said surface, and a slit at least partially provided between the support portion and the excitation electrode, and a substrate to which the support portion of the vibrating piece is attached, and in a planar view, an angle formed by a virtual line passing through the center of the support portion and the center of the excitation electrode and the X'-axis is 30° or more and 65° or less, or -150° or more and -125° or less.

[0006] The oscillator includes the vibration device described above and an oscillation circuit connected to the excitation electrode and exciting the excitation portion, the oscillation circuit being provided on the substrate. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view showing a schematic structure of a vibration device according to a first embodiment. [Diagram 2] Cross-sectional view taken along line A1-A1 in Figure 1. [Diagram 3] FIG. 2 is a plan view showing a schematic structure of a vibrating element included in the vibrating device according to the first embodiment. [Figure 4] FIG. 4 is a plan view illustrating an angle Ψ which is an in-plane rotation angle of the vibrating element. [Diagram 5] 1 is a graph showing G sensitivity versus angle Ψ, which is the in-plane rotation angle of the vibrating element. [Figure 6] FIG. 11 is a plan view showing a schematic structure of a vibration device according to a second embodiment. [Figure 7] Cross-sectional view taken along line A2-A2 in Figure 6. [Figure 8] FIG. 11 is a plan view showing a schematic structure of a vibrating element included in a vibrating device according to a third embodiment. [Figure 9] FIG. 13 is a plan view showing a first modified example of a vibrating element included in the vibrating device according to the third embodiment. [Figure 10]FIG. 13 is a plan view showing a schematic structure of a vibrating element included in a vibrating device according to a fourth embodiment. [Figure 11] FIG. 13 is a plan view showing a first modified example of a vibrating element included in a vibrating device according to a fourth embodiment. [Figure 12] FIG. 13 is a plan view showing a second modified example of the vibrating element included in the vibrating device according to the fourth embodiment. [Figure 13] FIG. 13 is a plan view showing a schematic structure of a vibrating element included in a vibrating device according to a fifth embodiment. [Figure 14] FIG. 13 is a plan view showing a first modified example of a vibrating element included in a vibrating device according to a fifth embodiment. [Figure 15] FIG. 13 is a plan view showing a second modified example of the vibrating element included in the vibrating device according to the fifth embodiment. [Figure 16] FIG. 13 is a plan view showing a third modified example of a vibrating element included in a vibrating device according to a fifth embodiment. [Figure 17] FIG. 13 is a plan view showing a fourth modified example of the vibrating element included in the vibrating device according to the fifth embodiment. [Figure 18] FIG. 13 is a plan view showing a schematic structure of a vibrating element included in a vibrating device according to a sixth embodiment. [Figure 19] FIG. 23 is a plan view showing a first modified example of a vibrating element included in the vibrating device according to the sixth embodiment. [Figure 20] FIG. 13 is a plan view showing a schematic structure of an oscillator according to a seventh embodiment. [Figure 21] A cross-sectional view taken along line A3-A3 in Figure 20. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] 1. First embodiment First, a resonator in which a resonator element 3 is housed in a substrate 10 and a lid body 20 will be described with reference to Fig. 1, Fig. 2, and Fig. 3. Note that Fig. 1 illustrates a state in which the lid body 20 is removed for the convenience of describing the internal configuration of the resonator device 1.

[0009] For ease of explanation, the following drawings of the vibration devices 1, 1a and the oscillator 2 show three mutually perpendicular axes, an X axis, a Y axis and a Z axis. The direction along the X axis is called the "X direction", the direction along the Y axis is called the "Y direction", and the direction along the Z axis is called the "Z direction". The tip side of the arrow in each axial direction is called the "plus side", and the base side is called the "minus side".

[0010] Furthermore, for ease of explanation, the following drawings of the vibrating bars 3, 3a, 3b, 3c, 3d, and 3e show an X'' axis, a Y'' axis, and a Z'' axis as three mutually orthogonal crystal axes corresponding to the crystal axes of quartz. The direction along the X'' axis is called the "X'' direction", the direction along the Y'' axis is called the "Y'' direction, and the direction along the Z'' axis is called the "Z'' direction. The tip side of the arrow in each axial direction is also called the "plus side", and the base side is also called the "negative side". The X axis coincides with the X'' axis of the crystal axis, the Y axis coincides with the Z'' axis of the crystal axis, and the Z axis coincides with the Y'' axis of the crystal axis.

[0011] As shown in FIGS. 1 and 2, the vibration device 1 includes a substrate 10, a cover 20, and a vibration element 3.

[0012] The substrate 10 has a third surface 13 and a fourth surface 14, which are opposite surfaces, and the third surface 13 faces the vibrating bar 3. On the third surface 13, a first electrode pad 11 and a second electrode pad 12 for joining the vibrating bar 3 are arranged side by side along the Y direction, and on the fourth surface 14, a plurality of external terminals 15 are provided for supplying power and outputting frequencies. The first electrode pad 11 and the second electrode pad 12 are electrically connected to the external terminals 15 by wiring or through electrodes (not shown). Silicon is preferable as a constituent material of the substrate 10, but glass, ceramic, etc. may also be used.

[0013] The lid 20 is provided with a recess 21 that opens to the substrate 10 side, and is joined to the third surface 13 of the substrate 10 via a joining member 25, forming an accommodation space 22 that accommodates the vibrating element 3 together with the substrate 10. The lid 20 and the substrate 10 may be joined directly without using the joining member 25. The accommodation space 22 is in a reduced pressure state, preferably a state closer to a vacuum. This reduces viscous resistance and improves the oscillation characteristics of the vibrating element 3. Silicon is a suitable material for the lid 20, but glass, ceramics, etc. may also be used.

[0014] The vibrating element 3 has a vibrating substrate 30, an excitation electrode 36, a first connection electrode 39, and a second connection electrode 40. The vibration substrate 30 is an SC-cut quartz substrate. The SC-cut quartz substrate has crystal axes X, Y, and Z that are mutually orthogonal, and the X-axis is called the electrical axis, the Y-axis is called the mechanical axis, and the Z-axis is called the optical axis. The substrate has a surface 5 that is orthogonal to the Y''-axis of the orthogonal coordinate system (X',Y'',Z') that is rotated left by a predetermined angle, for example, about 34°, around the X-axis of the orthogonal coordinate system (X,Y,Z), and rotated left by a predetermined angle, for example, about 22°, around the Z'-axis of the new orthogonal coordinate system (X,Y',Z'). The vibration substrate 30 of this embodiment has a new orthogonal coordinate system (X'',Y'',Z'') that is obtained by rotating left by a predetermined angle, for example, 30° to 65°, around the Y''-axis of the orthogonal coordinate system (X',Y'',Z').

[0015] As shown in FIG. 3, the vibration substrate 30 is rectangular in plan view, with the X″ direction being the long side direction, the Z″ direction being the short side direction, and the Y″ direction being the thickness direction. A surface 5 including the X″ axis and the Z″ axis perpendicular to the Y″ axis is the main surface, and thickness-shear vibration is excited on the main surface as the main vibration.

[0016] The vibration substrate 30 includes, in a plan view, a support portion 34 provided at one end which is one side of a rectangle, an excitation portion 33 having an excitation electrode 36 arranged on a surface 5, and a slit 35 at least a portion of which is provided between the support portion 34 and the excitation electrode 36. The support portion 34 is provided at the center in the Z'' direction which is the longitudinal direction of one side.

[0017] The surface 5 of the vibration substrate 30 has a first surface 31 and a second surface 32 which are opposite to each other, and the first surface 31 faces the third surface 13 of the substrate 10. An excitation electrode 36, a first connection electrode 39, and a second connection electrode 40 are provided on the first surface 31, which is one surface 5 of the vibration substrate 30. The excitation electrode 36 is disposed on the excitation portion 33, and the first connection electrode 39 and the second connection electrode 40 are disposed on the support portion 34. The first connection electrode 39 and the second connection electrode 40 are disposed side by side along a short side which is one side of the vibration substrate 30. The excitation electrode 36 is provided on the second surface 32, which is the other surface 5 of the vibration substrate 30. In addition, in a plan view, a virtual line 50 passing through a center 52 of the support portion 34 and a center 51 of the excitation electrode 36 is along the X'' axis.

[0018] The excitation electrode 36 provided on the first surface 31 is electrically connected to a first connection electrode 39 via a lead electrode 37. The excitation electrode 36 provided on the second surface 32 is electrically connected to a second connection electrode 40 provided on the first surface 31 via the lead electrode 37 and a side electrode 38 provided on a side surface on the negative side in the X direction of the vibration substrate 30. The excitation electrode 36 provided on the first surface 31 and the excitation electrode 36 provided on the second surface 32 are arranged to overlap each other in a plan view.

[0019] A slit 35 penetrating from the first surface 31 to the second surface 32 is provided between the support portion 34 and the excitation electrode 36, and can suppress distortion caused by joining the vibrating piece 3 to the substrate 10 and stress caused by temperature changes.

[0020] 1 and 2, the support portion 34 of the resonator element 3 and the substrate 10 are joined via conductive bonding members 41 and 42. Specifically, the conductive bonding member 41 bonds and electrically connects the first connection electrode 39 arranged on the support portion 34 to the first electrode pad 11, and the conductive bonding member 42 bonds and electrically connects the second connection electrode 40 arranged on the support portion 34 to the second electrode pad 12. The conductive bonding members 41 and 42 are made of a material such as a metal bump, solder, or conductive adhesive.

[0021] Next, the relationship of G sensitivity to the angle Ψ, which is the in-plane rotation angle of the vibrating bar 3, will be described with reference to FIGS. The angle Ψ, which is the in-plane rotation angle of the vibrating bar 3, is the angle formed by a virtual line 50 passing through the center 52 of the support 34 and the center 51 of the excitation electrode 36, and the X' axis in a plan view, as shown in FIG. 4. FIG. 5 shows the results of simulating the G sensitivity in each direction with respect to the angle Ψ, which is the in-plane rotation angle of the vibrating bar 3, and shows the G sensitivity in the X, Y, and Z directions of the vibrating device 1 in FIG. 1 when the angle Ψ rotated left around the Y'' axis with respect to the X' axis as a reference is positive, and the angle Ψ rotated right around the Y'' axis is negative. Γ is a value obtained by taking the square root of the sum of the squares of the G sensitivity in the X, Y, and Z directions. The angle Ψ at which Γ is less than 1 ppb / G is 30° or more and 65° or less, or -150° or more and -125° or less. Therefore, by setting the angle Ψ, which is the in-plane rotation angle of the vibrating bar 3, to 30° or more and 65° or less, or -150° or more and -125° or less, the G sensitivity in the X direction, Y direction, and Z direction can each be made less than ±1 ppb / G.

[0022] As described above, in the vibration device 1 of this embodiment, the angle Ψ between the virtual line 50 passing through the center 52 of the support portion 34 of the vibration bar 3 and the center 51 of the excitation electrode 36 and the X' axis is 30° or more and 65° or less, or -150° or more and -125° or less, so that the G sensitivity in the X direction, Y direction, and Z direction can be reduced to less than ±1 ppb / G, respectively. Furthermore, since the slits 35 are provided between the support portions 34 and the excitation electrodes 36, it is possible to suppress the frequency fluctuation and deterioration of aging characteristics caused by the influence of the support stress generated by bonding the vibrating element 3 and the substrate 10.

[0023] 2. Second embodiment Next, a vibration device 1a according to a second embodiment will be described with reference to Fig. 6 and Fig. 7. In Fig. 6, for the sake of convenience in describing the internal configuration of the vibration device 1a, a state in which the lid 20 is removed is illustrated.

[0024] The resonator device 1a of this embodiment is similar to the resonator device 1 of the first embodiment, except that the structure of the substrate 10a and the structure of the resonator element 3a are different from those of the resonator device 1 of the first embodiment. Note that the following description will focus on the differences from the first embodiment, and descriptions of similar matters will be omitted.

[0025] As shown in FIGS. 6 and 7, the vibration device 1a includes a substrate 10a, a cover 20, and a vibration element 3a.

[0026] The substrate 10a has a first electrode pad 11a and a second electrode pad 12a arranged side by side along the X direction, which is the longitudinal direction, on a third surface 13. A plurality of external terminals 15 used for supplying power and outputting frequencies are provided on a fourth surface 14.

[0027] The vibrating element 3a includes a vibrating substrate 30, an excitation electrode 36, a first connection electrode 39a, and a second connection electrode 40a.

[0028] The vibration substrate 30 includes a support portion 34, an excitation portion 33, and a slit 35 provided between the support portion 34 and the excitation portion 33. The support portion 34 is provided at the center in the Z'' direction, which is the longitudinal direction of one side.

[0029] The surface 5 of the vibration substrate 30 has a first surface 31 and a second surface 32 which are opposite surfaces, and a first connection electrode 39a is provided on the first surface 31 which is one surface 5 of the support portion 34, and a second connection electrode 40a is provided on the second surface 32 which is the other surface 5 of the support portion 34. The first connection electrode 39a and the second connection electrode 40a overlap in a plan view.

[0030] An excitation electrode 36 is provided on the excitation portion 33 of the vibration substrate 30, and the excitation electrode 36 provided on the first surface 31 of the excitation portion 33 is electrically connected to a first connection electrode 39a via a lead electrode 37. The excitation electrode 36 provided on the second surface 32 of the excitation portion 33 is electrically connected to a second connection electrode 40a via the lead electrode 37.

[0031] The first connection electrode 39a is disposed at a position overlapping with a first electrode pad 11a provided on the substrate 10a, and is joined and electrically connected to the first electrode pad 11a via a conductive bonding member 41. The second connection electrode 40a is electrically connected to a second electrode pad 12a provided on the substrate 10a via a bonding wire 42a.

[0032] With this configuration, the vibrating element 3a is supported at one point, the influence of the supporting stress can be further reduced, and the same effect as in the first embodiment can be obtained.

[0033] 3. Third embodiment Next, a vibrating element 3b included in a vibrating device according to a third embodiment will be described with reference to Fig. 8. The vibrating device of this embodiment is similar to the vibrating device 1 of the first embodiment except that the structure of the vibrating element 3b is different. Fig. 8 also illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0034] The vibrator bar 3b of this embodiment is similar to the vibrator bar 3 of the first embodiment except that the shape of the slits 35b is different from that of the vibrator bar 3 of the first embodiment. Note that the following description will focus on the differences from the first embodiment described above, and descriptions of similar matters will be omitted.

[0035] As shown in FIG. 8, the vibration substrate 30b of the vibration element 3b includes a first portion 61 in which the slit 35b extends along a first direction intersecting with the imaginary line 50 in a plan view. Note that the first direction in this embodiment is the Z'' direction. A length L2 of the first portion 61 in the Z'' direction, which is a direction perpendicular to the imaginary line 50, is longer than a length L1 of the support portion 34 in the perpendicular direction.

[0036] With this configuration, the slits 35b are longer than the support portions 34, so that the influence of the support stress can be further reduced, and the same effects as those of the first embodiment can be obtained.

[0037] 3.1. Modification 1 of the third embodiment Next, a first modified example of the vibrating element 3b included in the vibrating device according to the third embodiment will be described with reference to Fig. 9. Note that Fig. 9 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0038] The vibrating bar 13b of this modified example 1 is similar to the vibrating bar 3b of the third embodiment except that the shape of the slit 135b is different from that of the vibrating bar 3b of the third embodiment. Note that the following description will focus on the differences from the third embodiment described above, and descriptions of similar matters will be omitted.

[0039] 9, in the vibrating substrate 130b of the vibrating element 13b, the first direction in which the slits 135b extend is inclined with respect to the Z'' direction. Note that the length L2 of the first portion 61 in the Z'' direction is longer than the length L1 of the support portion 34 in the Z'' direction.

[0040] With this configuration, it is possible to obtain the same effects as in the third embodiment.

[0041] 4. Fourth embodiment Next, a vibrating piece 3c included in a vibrating device according to a fourth embodiment will be described with reference to Fig. 10. The vibrating device of this embodiment is similar to the vibrating device 1 of the first embodiment except for the structure of the vibrating piece 3c. Fig. 10 also illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0042] The vibrator bar 3c of this embodiment is similar to the vibrator bar 3 of the first embodiment except that the shape of the slit 35c is different from that of the vibrator bar 3 of the first embodiment. Note that the following description will focus on the differences from the first embodiment described above, and descriptions of similar matters will be omitted.

[0043] 10, the vibrating substrate 30c of the vibrating piece 3c includes a first portion 61 in which the slit 35c extends along a first direction intersecting with the virtual line 50 in a plan view, and a second portion 62 that is connected to the first portion 61 and extends along a second direction in which the support portion 34 and the excitation electrode 36 are aligned. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0044] With this configuration, the slit 35c has the second portion 62 along the second direction, so that the influence of the support stress can be further reduced, and the same effect as in the first embodiment can be obtained.

[0045] 4.1. Modification 1 of the fourth embodiment Next, a first modified example of the vibrating element 3c included in the vibrating device according to the fourth embodiment will be described with reference to Fig. 11. Note that Fig. 11 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0046] The vibrating bar 13c of the present modified example 1 is similar to the vibrating bar 3c of the fourth embodiment except that the shape of the slit 135c is different from that of the vibrating bar 3c of the fourth embodiment. Note that the following description will focus on the differences from the fourth embodiment described above, and descriptions of similar matters will be omitted.

[0047] 11, the vibrating substrate 130c of the vibrating piece 13c includes a first portion 161 in which the slit 135c extends along a first direction intersecting with the virtual line 50 in a plan view, and two second portions 162 that are connected to both ends of the first portion 161 in the first direction and extend along a second direction in which the support portion 34 and the excitation electrode 36 are aligned. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0048] With this configuration, it is possible to obtain the same effects as in the fourth embodiment.

[0049] 4.2. Modification 2 of the fourth embodiment Next, a second modified example of the vibrating element 3c included in the vibrating device according to the fourth embodiment will be described with reference to Fig. 12. Note that Fig. 12 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0050] The vibrating bar 23c of the present modified example 2 is similar to the vibrating bar 3c of the fourth embodiment except that the shape of the slit 235c is different from that of the vibrating bar 3c of the fourth embodiment. Note that the following description will focus on the differences from the fourth embodiment described above, and descriptions of similar matters will be omitted.

[0051] 12, the vibrating substrate 230c of the vibrating element 23c includes a first portion 261 in which the slit 235c extends along a first direction intersecting with the virtual line 50 in a plan view, and two second portions 262 that are connected to both ends of the first portion 261 in the first direction and extend along a second direction in which the support portion 34 and the excitation electrode 36 are aligned. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0052] With this configuration, it is possible to obtain the same effects as in the fourth embodiment.

[0053] 5. Fifth embodiment Next, a vibrating element 3d included in a vibrating device according to a fifth embodiment will be described with reference to Fig. 13. The vibrating device of this embodiment is similar to the vibrating device 1 of the first embodiment except that the structure of the vibrating element 3d is different. Fig. 13 also illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0054] The vibrator bar 3d of this embodiment is similar to the vibrator bar 3 of the first embodiment except that the shape of the slit 35d is different from that of the vibrator bar 3 of the first embodiment. Note that the following description will focus on the differences from the first embodiment described above, and descriptions of similar matters will be omitted.

[0055] 13, the vibrating substrate 30d of the vibrating element 3d includes a first portion 61d in which the slit 35d extends along a first direction intersecting with the imaginary line 50 in a plan view, and a second portion 62d connected to the first portion 61d and provided on the support portion 34 side relative to the first portion 61d. Note that the first direction in this embodiment is the Z'' direction.

[0056] With this configuration, the slit 35d has a second portion 62d that is provided closer to the support portion 34 than the first portion 61d, so that the effect of the support stress can be further reduced and an effect equivalent to that of the first embodiment can be obtained.

[0057] 5.1. Modification 1 of the fifth embodiment Next, a first modified example of the vibrating element 3d included in the vibrating device according to the fifth embodiment will be described with reference to Fig. 14. Note that Fig. 14 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0058] The vibrator bar 13d of this modified example 1 is similar to the vibrator bar 3d of the fifth embodiment except that the shape of the slit 135d is different from that of the vibrator bar 3d of the fifth embodiment. Note that the following description will focus on the differences from the fifth embodiment described above, and descriptions of similar matters will be omitted.

[0059] 14, the vibrating substrate 130d of the vibrating element 13d includes a first portion 161d having a slit 135d extending along a first direction intersecting with the imaginary line 50 in a plan view, and two second portions 162d connected to both ends of the first portion 161d in the first direction and provided closer to the support portion 34 than the first portion 161d. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0060] With this configuration, it is possible to obtain the same effects as in the fifth embodiment.

[0061] 5.2. Modification 2 of the fifth embodiment Next, a second modified example of the vibrator element 3d included in the vibrator device according to the fifth embodiment will be described with reference to Fig. 15. Note that Fig. 15 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0062] The vibrator bar 23d of the present modified example 2 is similar to the vibrator bar 3d of the fifth embodiment except that the shape of the slits 235d is different from that of the vibrator bar 3d of the fifth embodiment. Note that the following description will focus on the differences from the fifth embodiment described above, and descriptions of similar matters will be omitted.

[0063] 15, the vibrating substrate 230d of the vibrating element 23d includes a first portion 261d having a slit 235d extending along a first direction intersecting with the imaginary line 50 in a plan view, and two second portions 262d that are connected to the imaginary line 50 side from both ends of the first portion 261d in the first direction and are provided closer to the support portion 34 than the first portion 261d. Note that the first direction in this embodiment is the Z'' direction.

[0064] With this configuration, it is possible to obtain the same effects as in the fifth embodiment.

[0065] 5.3. Modification 3 of the fifth embodiment Next, a third modified example of the vibrator element 3d included in the vibrator device according to the fifth embodiment will be described with reference to Fig. 16. Note that Fig. 16 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0066] The vibrator bar 33d of the present modified example 3 is similar to the vibrator bar 3d of the fifth embodiment except that the shape of the slits 335d is different from that of the vibrator bar 3d of the fifth embodiment. Note that the following description will focus on the differences from the fifth embodiment described above, and descriptions of similar matters will be omitted.

[0067] As shown in FIG. 16, the vibration substrate 330d of the vibration piece 33d includes a first portion 361d having a slit 335d extending along a first direction intersecting with the imaginary line 50 in a plan view, and two second portions 362d connected to the imaginary line 50 side of both ends of the first portion 361d in the first direction and provided closer to the support portion 34 side than the first portion 361d. The second portion 362d connected to the positive side of the first direction has a fourth portion 64 extending in the negative direction of the first direction at the tip of the second portion 362d, and the second portion 362d connected to the negative side of the first direction has a fourth portion 64 extending in the positive direction of the first direction at the tip of the second portion 362d. The first direction in this embodiment is the Z'' direction.

[0068] With this configuration, it is possible to obtain the same effects as in the fifth embodiment.

[0069] 5.4. Modification 4 of the fifth embodiment Next, a fourth modified example of the vibrating element 3d included in the vibrating device according to the fifth embodiment will be described with reference to Fig. 17. Note that Fig. 17 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0070] The vibrating bar 43d of the present modified example 4 is similar to the vibrating bar 3d of the fifth embodiment except that the shape of the slit 435d is different from that of the vibrating bar 3d of the fifth embodiment. Note that the following description will focus on the differences from the fifth embodiment described above, and descriptions of the similar points will be omitted.

[0071] 17, the vibrating substrate 430d of the vibrating element 43d includes a first portion 461d having a slit 435d extending along a first direction intersecting with the imaginary line 50 in a plan view, and two second portions 462d connected to both ends of the first portion 461d in the first direction and provided closer to the support portion 34 than the first portion 461d. The two second portions 462d are spaced apart from each other as they extend in the negative second direction. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0072] With this configuration, it is possible to obtain the same effects as in the fifth embodiment.

[0073] 6. Sixth embodiment Next, a vibrating piece 3e included in the vibrating device according to the sixth embodiment will be described with reference to Fig. 18. The vibrating device of this embodiment is similar to the vibrating device 1 of the first embodiment except for the vibrating piece 3e. Fig. 18 also illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0074] The vibrator bar 3e of this embodiment is similar to the vibrator bar 3 of the first embodiment except that the shape of the slit 35e is different from that of the vibrator bar 3 of the first embodiment. Note that the following description will focus on the differences from the first embodiment described above, and descriptions of similar matters will be omitted.

[0075] 18, the vibration substrate 30e of the vibration piece 3e includes a first portion 61e in which the slit 35e extends along a first direction intersecting with the virtual line 50 in a plan view, two second portions 62e connected to both ends of the first portion 61e in the first direction and extending along a second direction in which the support portion 34 and the excitation electrode 36 are aligned closer to each other than the first portion 61e, and a third portion 63e connected to the first portion 61e and disposed between the first connection electrode 39 and the second connection electrode 40. In this embodiment, the first direction is the Z'' direction, and the second direction is the X'' direction.

[0076] With this configuration, the slit 35e has a third portion 63e arranged between the first connection electrode 39 and the second connection electrode 40, so that the two connection electrodes 39, 40 are separated, the effect of the support stress can be further reduced, and an effect equivalent to that of the first embodiment can be obtained.

[0077] 6.1. Modification 1 of the sixth embodiment Next, a modified example of the vibrating element 3e included in the vibrating device according to the sixth embodiment will be described with reference to Fig. 19. Note that Fig. 19 illustrates a state in which conductive bonding members 41 and 42 are arranged.

[0078] The vibrating bar 13e of this modified example 1 is similar to the vibrating bar 3e of the sixth embodiment except that the shape of the slit 135e is different from that of the vibrating bar 3e of the sixth embodiment. Note that the following description will focus on the differences from the sixth embodiment described above, and descriptions of similar matters will be omitted.

[0079] 19, the vibrating substrate 130e of the vibrating element 13e includes a first portion 161e in which the slit 135e extends along a first direction intersecting with the virtual line 50 in a plan view, two second portions 162e connected to both ends of the first portion 161e in the first direction and provided closer to the support portion 34 than the first portion 161e, and a third portion 163e connected to the first portion 161e and disposed between the first connection electrode 39 and the second connection electrode 40. Note that the first direction in this embodiment is the Z'' direction.

[0080] With this configuration, it is possible to obtain the same effects as in the sixth embodiment.

[0081] 7. Seventh embodiment Next, the oscillator 2 according to the seventh embodiment will be described with reference to Fig. 20 and Fig. 21, taking as an example a crystal oscillator including the above-mentioned vibrating piece 3. Note that Fig. 20 illustrates a state in which the cover 20 is removed for the convenience of explaining the internal configuration of the oscillator 2.

[0082] The oscillator 2 includes a substrate 10, a cover 20, a vibrating element 3, and an oscillation circuit 60, as shown in FIGS.

[0083] The structure of the oscillator 2 is substantially the same as that of the resonator device 1 of the first embodiment, and an oscillator circuit 60 is provided on a substrate 10. The oscillator circuit 60 is electrically connected to an excitation electrode 36 provided on the resonator element 3, and can excite the excitation portion 33 of the resonator element 3.

[0084] As described above, the oscillator 2 of the present embodiment uses a vibrating bar 3 in which the angle Ψ between the virtual line 50 passing through the center 52 of the support portion 34 of the vibrating bar 3 and the center 51 of the excitation electrode 36 and the X'-axis is 30° or more and 65° or less, or -150° or more and -125° or less. Therefore, the G sensitivity in the X direction, Y direction, and Z direction can be reduced to less than ±1 ppb / G, respectively. Furthermore, since a vibrating bar 3 having a slit 35 between the support portion 34 and the excitation electrode 36 is used, frequency fluctuations and deterioration of aging characteristics caused by the influence of support stress generated by bonding between the vibrating bar 3 and the substrate 10 can be suppressed. [Explanation of symbols]

[0085] 1,1a...vibration device, 2...oscillator, 3,3a,3b,3c,3d,3e...vibration piece, 5...surface, 10...substrate, 11...first electrode pad, 12...second electrode pad, 13...third surface, 14...fourth surface, 15...external terminal, 20...lid, 21...recess, 22...accommodation space, 25...joint member, 30...vibration substrate, 31...first surface, 32...second surface, 33...excitation portion, 34...support portion, 35...slit, 36...excitation electrode, 37...lead electrode, 38...side electrode, 39...first connection electrode, 40...second connection electrode, 41,42...conductive joint member, 50...virtual line, 51,52...center, 60...oscillating circuit, L1,L2...length, Ψ...angle.

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