Crosslinkable siloxane compounds for preparation of dielectric materials
By using silicone oligomers or polymers prepared by copolymerization or copolymerization of siloxane monomers containing maleimide groups, the problems of insufficient mechanical properties and thermal expansion of dielectric materials in the prior art are solved, and the excellent mechanical properties and low thermal expansion characteristics of the material are achieved.
JP2025060740APending Publication Date: 2025-04-10MERCK PATENT GMBH
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Patent Information
- Application Number
- JP2024224000
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2019-03-08
- Filing Date
- 2024-12-19
- Publication Date
- 2025-04-10
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Figure 2025060740000046 
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Figure 2025060740000001
Abstract
To provide novel siloxane oligomers and polymers and crosslinkable compositions, which may be used for the preparation of dielectric materials having excellent barrier, passivation and / or planarization properties, and to provide a monomer composition from which the siloxane oligomers or polymers may be obtained and a method for preparing the siloxane oligomers or polymers.SOLUTION: Beyond that, the present invention relates to a manufacturing method for preparing a microelectronic structure, wherein a crosslinkable composition is applied to a surface of a substrate and then cured, and to an electronic device comprising a microelectronic structure which is obtained by the manufacturing method.SELECTED DRAWING: None
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