Power semiconductor device including slanted gate trench

Abstract

To provide a power semiconductor device.SOLUTION: A power semiconductor device includes a semiconductor layer structure including a drift region including a wide band gap semiconductor material having a first conductivity type, a well region having a second conductivity type, and a source region having the first conductivity type in an upper portion of the well region, and a gate trench in an upper portion of the semiconductor layer structure including a portion that is obliquely inclined in plan view. Sidewalls of the gate trench may extend along substantially the same crystallographic plane in the semiconductor layer structure.SELECTED DRAWING: Figure 2E

Description

[Technical field]

[0001] This application claims priority to U.S. patent application Ser. No. 17 / 383,696, filed July 23, 2021, U.S. patent application Ser. No. 17 / 172,481, filed February 10, 2021, and U.S. patent application Ser. No. 17 / 082,647, filed October 28, 2020, the entire contents of each of which are incorporated by reference into this application.

[0002] The present invention relates to power semiconductor devices, and more particularly to power semiconductor devices having gate trenches and methods of manufacturing such devices. [Background technology]

[0003] A metal-insulator-semiconductor field effect transistor ("MISFET") is a well-known type of semiconductor transistor that can be used as a switching device. A MISFET is a three-terminal device having a gate terminal, a drain terminal, a source terminal, and a semiconductor body. Source and drain regions are formed in the semiconductor body separated by a channel region, and a gate electrode (which may act as the gate terminal or may be electrically connected to the gate terminal) is disposed adjacent to the channel region. A MISFET can be turned on or off by applying a bias voltage to the gate electrode. When a MISFET is turned on (i.e., the MISFET is in its "on state"), current is conducted through the channel region of the MISFET between the source and drain regions. When the bias voltage is removed from the gate electrode (or falls below a threshold level), current ceases to be conducted through the channel region. An n-type MISFET has n-type source and drain regions and a p-type channel. An n-type MISFET therefore has an "npn" topology. An n-type MISFET is turned on when a gate bias voltage sufficient to form a conductive n-type inversion layer in the p-type channel region that electrically connects the n-type source and drain regions together, thereby allowing majority carrier conduction between them. The gate electrode of a power MISFET is typically separated from the channel region by a thin gate dielectric layer. A p-type MISFET has a "pnp" configuration and is turned on when a gate bias voltage sufficient to form a conductive p-type inversion layer in the n-type channel region that electrically connects the p-type source and drain regions together is applied to the gate electrode.

[0004] In some applications, MISFETs need to carry large currents and / or be able to block high voltages. Such MISFETs are often referred to as "power" MISFETs. Power MISFETs are often fabricated from wide band gap semiconductor materials, such as silicon carbide ("SiC") or gallium nitride ("GaN") based semiconductor materials. Here, wide band gap semiconductor materials refer to semiconductor materials with a band gap greater than 1.40 eV. Power MISFETs typically implement a thin gate dielectric layer using an oxide layer, such as a silicon oxide layer. A power MISFET that includes an oxide gate dielectric layer is called a metal oxide semiconductor field effect transistor ("MOSFET").

[0005] A power semiconductor device can have a lateral or vertical structure. In a device having a lateral structure, the terminals of the device (e.g., the drain terminal, the gate terminal, and the source terminal in a power MOSFET device) are on the same major surface (i.e., top or bottom) of the semiconductor layer structure. In contrast, in a device having a vertical structure, at least one terminal is provided on each major surface of the semiconductor layer structure (e.g., in a vertical MOSFET device, the source may be on the top surface of the semiconductor layer structure and the drain may be on the bottom surface of the semiconductor layer structure). The semiconductor layer structure may or may not include an underlying substrate such as a growth substrate. Herein, the term "semiconductor layer structure" refers to a structure including one or more semiconductor layers such as a semiconductor substrate and / or a semiconductor epitaxial layer.

[0006] A conventional power semiconductor device generally has a semiconductor substrate, such as a silicon carbide substrate, having a first conductivity type (e.g., an n-type substrate), on which an epitaxial layer structure having a first conductivity type (e.g., n-type) is formed. A portion of the epitaxial layer structure (which may include one or more separate layers) serves as a drift region for the power semiconductor device. The device generally includes an "active region" that includes one or more power semiconductor devices having junctions, such as pn junctions. The active region may be formed on and / or within the drift region. The active region serves as a primary junction for blocking voltage in a reverse bias direction and conducting current in a forward bias direction. The power semiconductor device may also have an edge termination in a termination region adjacent to the active region. One or more power semiconductor devices may be formed on the substrate, with each power semiconductor device generally having its own edge termination. After the substrate is fully processed, the resulting structure may be diced to separate the individual edge-terminated power semiconductor devices. Power semiconductor devices may have a unit cell structure in which the active area of ​​each power semiconductor device includes multiple individual "unit cell" devices electrically connected in parallel and together function as a single power semiconductor device.

[0007] Vertical power semiconductor devices, including MOSFET transistors, can have a standard gate electrode configuration, where the transistor's gate electrode is formed on top of a semiconductor layer structure, or can have the gate electrode recessed in a trench within the semiconductor layer structure. MOSFETs with a recessed gate electrode are commonly referred to as gated trench MOSFETs. In the standard gate electrode configuration, the channel region of each unit cell transistor is located horizontally under the gate electrode. In contrast, in the gated trench MOSFET configuration, the channel is located vertically. Gated trench MOSFETs offer improved performance but generally require more complex manufacturing processes. Summary of the Invention [Means for solving the problem]

[0008] According to some embodiments of the present invention, there is provided a semiconductor layer structure comprising a drift region comprising a wide band gap semiconductor material, the drift region having a first conductivity type; a gate trench in an upper portion of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls each extending parallel to the longitudinal axis; and first and second well regions having a second conductivity type different from the first conductivity type in an upper portion of the semiconductor layer structure above the drift region, the first well region forming a portion of the first sidewall and the second well region forming a portion of the second well region. A power semiconductor device is provided that includes first and second well regions, the well regions constituting a portion of the second sidewall, a deep shield region having a second conductivity type in a semiconductor layer structure below the gate trench, and a plurality of deep shield connection patterns having the second conductivity type on top of the semiconductor layer structure and spaced apart from one another along a first direction, each deep shield connection pattern extending in a second direction different from the first direction, each deep shield connection pattern constituting a portion of the first sidewall of the gate trench and constituting a portion of the second sidewall of the gate trench. The deep shield connection patterns electrically connect the deep shield regions to the first and second well regions.

[0009] In some embodiments, the power semiconductor device further comprises a plurality of semiconductor channel regions having a first conductivity type on the first and second sidewalls of the gate trench, the semiconductor channel regions being located between adjacent deep shield connection patterns.

[0010] In some embodiments, the power semiconductor device further comprises first and second source regions having the first conductivity type over the first and second well regions, respectively.

[0011] In some embodiments, the deep shield connection patterns have a higher doping concentration than the first and second well regions. In some embodiments, the deep shield connection patterns extend to a top surface of the semiconductor layer structure. In some embodiments, the deep shield connection patterns subdivide the first source region into a plurality of spaced apart segments and subdivide the second source region into a plurality of spaced apart segments. In some embodiments, portions of the deep shield regions aligned with respective deep shield connection patterns along the second direction have a higher doping concentration of the second conductivity type dopant than remaining portions of the deep shield regions.

[0012] In some embodiments, the power semiconductor device further comprises a gate insulating layer in the gate trench covering a bottom surface and first and second sidewalls of the gate trench, a gate electrode in the gate trench on the gate insulating layer, first source / drain contacts in direct contact with the first source region, the second source region, and the deep shield connection pattern, and second source / drain contacts on a bottom surface of the semiconductor layer structure.

[0013] In some embodiments, the second direction is substantially perpendicular to the first direction.

[0014] In some embodiments, the wide band gap semiconductor includes silicon carbide.

[0015] In some embodiments, the power semiconductor device further comprises a plurality of further gate trenches in an upper portion of the semiconductor layer structure, each of the further gate trenches having respective first and second opposing sidewalls extending in a first direction, and a plurality of further deep shielding regions having a second conductivity type in the semiconductor layer structure below each of the further gate trenches. In such embodiments, each deep shielding connection pattern extends continuously in the second direction and is formed on both the first and second sidewalls of each of the further gate trenches. The semiconductor device may further comprise a plurality of further semiconductor channel regions having the first conductivity type in the first and second sidewalls of each of the further gate trenches, the semiconductor channel regions being located between adjacent deep shielding connection patterns in each of the further gate trenches.

[0016] In some embodiments, the first and second source regions completely cover top surfaces of the respective first and second well regions.

[0017] According to a further embodiment of the present invention there is provided a power semiconductor device comprising: a semiconductor layer structure including a drift region comprising a wide band gap semiconductor material having a first conductivity type; a plurality of gate trenches in an upper portion of the semiconductor layer structure, each gate trench having a longitudinal axis extending in a first direction and each gate trench having first and second opposed sidewalls extending in the first direction; a plurality of source trenches in an upper portion of the semiconductor layer structure, each source trench having a longitudinal axis extending in a second direction different from the first direction and each source trench having first and second opposed sidewalls extending in the second direction; and a plurality of deep shielding regions having a second conductivity type in the semiconductor layer structure below each source trench.

[0018] In some embodiments, a metal source contact extends into the source trench.

[0019] In some embodiments, the power semiconductor device further comprises a plurality of further deep shield regions having a second conductivity type in the semiconductor layer structure beneath each gate trench.

[0020] In some embodiments, each gate trench comprises a segmented gate trench comprising a plurality of spaced apart, collinear gate trench segments.

[0021] In some embodiments, each source trench comprises a segmented source trench comprising a plurality of spaced apart, collinear source trench segments. In some embodiments, each source trench comprises a continuous source trench. In some embodiments, each source trench comprises a segmented source trench comprising a plurality of spaced apart, collinear source trench segments.

[0022] In some embodiments, each gate trench comprises a segmented gate trench comprising a plurality of spaced apart collinear gate trench segments, hi some embodiments, each gate trench comprises a continuous gate trench.

[0023] In some embodiments, the semiconductor layer structure further comprises a plurality of well regions having a second conductivity type different from the first conductivity type, the well regions being on top of the drift region, and a metal source contact electrically connecting the deep shielding region to the well regions.

[0024] In some embodiments, the power semiconductor device further comprises a source region having the first conductivity type on a top surface of the well region.

[0025] In some embodiments, the power semiconductor device further comprises a gate electrode in each gate trench and a dielectric pattern electrically insulating sidewalls of the gate electrode from the metal source contact.

[0026] In some embodiments, the second direction is substantially perpendicular to the first direction.

[0027] In some embodiments, the wide band gap semiconductor includes silicon carbide.

[0028] According to yet another embodiment of the present invention, there is provided a power semiconductor device including a semiconductor layer structure having a drift region comprising a wide band gap semiconductor material, the drift region having a first conductivity type; a gate trench in an upper portion of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposed sidewalls each extending in the first direction; a first gate electrode on a first sidewall of the gate trench, a second gate electrode on a second sidewall of the gate trench, and a source contact in the gate trench between the first gate electrode and the second gate electrode.

[0029] In some embodiments, the power semiconductor device further comprises a first gate dielectric layer between a first sidewall of the gate trench and the first gate electrode, and a second gate dielectric layer between a second sidewall of the gate trench and the second gate electrode.

[0030] In some embodiments, the power semiconductor device further comprises a deep shield region having a second conductivity type in the semiconductor layer structure below the gate trench.

[0031] In some embodiments, the portion of the source contact that is in the gate trench directly contacts the deep shield region.

[0032] In some embodiments, the power semiconductor device further comprises first and second well regions having a second conductivity type different from the first conductivity type on either side of the drift region, and first and second source regions having the first conductivity type on top of the respective first and second well regions.

[0033] In some embodiments, the power semiconductor device further comprises a first intermetal dielectric layer in the gate trench between the first gate electrode and the source contact, and a second intermetal dielectric layer in the gate trench between the second gate electrode and the source contact.

[0034] In some embodiments, the source contact comprises a metal source contact and is also directly over the first and second source regions.

[0035] In some embodiments, a first gate dielectric layer extends between the deep shielding region and the first gate electrode, and a second dielectric layer extends between the deep shielding region and the second gate electrode.

[0036] In some embodiments, the first intermetal dielectric layer directly contacts the first source region and the second intermetal dielectric layer directly contacts the second source region.

[0037] In some embodiments, the first and second intermetal dielectric layers directly contact the deep shield region.

[0038] In some embodiments, the source contact comprises a continuous source contact extending between the first and second gate electrodes substantially the length of the gate trench.

[0039] In some embodiments, the source contact comprises a metal pattern extending over the semiconductor layer structure that comprises a plurality of spaced apart downwardly extending plugs that extend into the gate trench.

[0040] According to a further embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, comprising: a semiconductor layer structure including a wide band gap semiconductor material, the semiconductor layer structure comprising a drift region having a first conductivity type and a well layer having a second conductivity type different from the first conductivity type, the well layer being on an upper surface of the drift region; a gate trench is formed on top of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls extending parallel to the longitudinal axis, the gate trench dividing the well layer into at least first and second well regions; and a deep shielding region having the second conductivity type is provided in the semiconductor layer structure below the gate trench. A plurality of spaced apart deep shield connection patterns having a second conductivity type are formed over the well region and the drift region, each deep shield connection pattern extending in a second direction different from the first direction, each deep shield connection pattern forming a portion of a first sidewall of the gate trench and forming a portion of a second sidewall of the gate trench. The deep shield connection patterns electrically connect the deep shield region to the first and second well regions.

[0041] In some embodiments, the method further includes forming a source layer having the first conductivity type over the well layer, and the step of forming the gate trench divides the source layer into at least first and second source regions.

[0042] In some embodiments, the deep shield connection pattern is formed prior to formation of the source regions. In some embodiments, the deep shield connection pattern divides each of the first and second source regions into a plurality of spaced apart sub-regions separated from one another by the deep shield connection pattern. In some embodiments, the deep shield connection pattern is formed prior to formation of the gate trench. In some embodiments, the deep shield connection pattern is formed after formation of the first and second source regions.

[0043] In some embodiments, the method further includes forming a mask over the source regions and in the gate trenches; and forming a plurality of spaced apart openings in the mask, each opening extending in the second direction and exposing a respective portion of a top surface of the first source region, a respective portion of a top surface of the second source region, respective portions of each of the first and second sidewalls of the gate trenches, and a respective portion of a top surface of each deep shield region.

[0044] In some embodiments, forming the plurality of spaced apart deep shield interconnect patterns includes implanting a second conductive dopant into exposed portions of the first and second sidewalls of each of the gate trenches and into exposed portions of a top surface of the deep shield regions after forming openings in the mask.

[0045] In some embodiments, the second conductivity dopant is implanted into exposed portions of the first and second sidewalls of the gate trench, respectively, by first and second angled ion implantation steps.

[0046] In some embodiments, the first and second angled ion implantation steps are performed at an ion implantation energy of less than 300 kV.

[0047] In some embodiments, the second conductivity dopant is implanted into the exposed portions of the first and second sidewalls of each of the gate trenches by an ion implantation step performed vertically relative to a top surface of the semiconductor layer structure.

[0048] In some embodiments, the ion implantation step is carried out at an ion implantation energy of at least 100 kV.

[0049] In some embodiments, a plurality of semiconductor channel regions having a first conductivity type are provided on first and second sidewalls of each of the gate trenches, the semiconductor channel regions being located between adjacent deep shield connection patterns.

[0050] In some embodiments, the deep shielding connection pattern extends to a top surface of the semiconductor layer structure.

[0051] In some embodiments, portions of the deep shield region that are aligned with the respective deep shield connection patterns along the second direction have a higher doping concentration of the second conductivity type dopant than remaining portions of the deep shield region.

[0052] According to yet another embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, the method including providing a semiconductor layer structure including a wide band gap semiconductor material, the semiconductor layer structure including a drift region having a first conductivity type. A plurality of gate trenches are formed in an upper portion of the semiconductor layer structure, each gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls extending in the first direction. A plurality of source trenches are formed in an upper portion of the semiconductor layer structure, each source trench having a longitudinal axis extending in a second direction different from the first direction and having first and second opposing sidewalls extending in the second direction. A plurality of deep shielding regions having a second conductivity type different from the first conductivity type are formed in the semiconductor layer structure beneath at least some of the source trenches.

[0053] In some embodiments, the method further includes forming a source contact comprising a projection extending into each of the source trenches.

[0054] In some embodiments, the method further includes forming a respective gate electrode in each of the gate trenches.

[0055] In some embodiments, the protrusions directly contact the deep shielded regions.

[0056] In some embodiments, each gate electrode comprises a plurality of spaced apart gate electrode segments.

[0057] In some embodiments, each of the source contact projections extends continuously within each of the source trenches, and each of the source contact projections extends between a respective pair of gate electrode segments of each of the gate electrodes.

[0058] In some embodiments, each of the protrusions comprises a plurality of spaced apart segments.

[0059] In some embodiments, the method further comprises forming additional deep shielding regions having a second conductivity type in the semiconductor layer structure beneath at least some of the gate trenches.

[0060] In some embodiments, the second direction is substantially perpendicular to the first direction.

[0061] According to yet another embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, the method including forming a semiconductor layer structure including a wide band gap semiconductor material, the semiconductor layer structure having a drift region having a first conductivity type. A gate trench is formed in an upper portion of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls extending in the first direction. A first gate electrode is formed in the first sidewall of the gate trench. A second gate electrode is formed in the second sidewall of the gate trench. A source contact is formed in the gate trench between the first gate electrode and the second gate electrode.

[0062] In some embodiments, the method further includes forming a first gate dielectric layer on a first sidewall of the gate trench before forming the first gate electrode, and forming a second gate dielectric layer on a second sidewall of the gate trench before forming the second gate electrode.

[0063] In some embodiments, the method further includes forming a deep shield region having a second conductivity type in the semiconductor layer structure below the gate trench.

[0064] In some embodiments, the method further includes forming first and second well regions having a second conductivity type different from the first conductivity type in an upper portion of the semiconductor layer structure on either side of the gate trench, and forming first and second source regions having the first conductivity type in an upper portion of the respective first and second well regions.

[0065] In some embodiments, the method further includes forming an intermetal dielectric layer in the gate trench between the first gate electrode and the second gate electrode.

[0066] In some embodiments, the source contact penetrates the intermetal dielectric layer to directly contact the deep shield region.

[0067] In some embodiments, the source contact comprises a metal source contact and is directly on the first and second source regions.

[0068] In some embodiments, a first gate dielectric layer is between the deep shielding region and the first gate electrode, and a second dielectric layer is between the deep shielding region and the second gate electrode.

[0069] According to yet another embodiment of the present invention, there is provided a power semiconductor device comprising: a semiconductor layer structure having a drift region comprising a wide band gap semiconductor material, the drift region having a first conductivity type; a first gate structure and an adjacent second gate structure on top of the semiconductor layer structure; a deep shielding region in the drift region below the first gate structure and the second gate structure (e.g., extending from below the first gate structure to below the second gate structure) and having a second conductivity type different from the first conductivity type; and a connection region protruding (e.g., protruding upwardly) from the deep shielding region and separating the first gate structure and the second gate structure from each other.

[0070] In some embodiments, the connection region comprises an upper portion that overlaps (eg, vertically overlaps) at least a portion of the first gate structure and the second gate structure.

[0071] In some embodiments, the first gate structure and the second gate structure are spaced apart from each other in a first direction, and a top of the connection region has a first width in the first direction, the first width being greater than a distance in the first direction between the first gate structure and the second gate structure.

[0072] In some embodiments, each of the first and second gate structures comprises an inner sidewall facing and adjacent the connection region and an outer sidewall opposite the inner sidewall, and each of the first and second gate structures comprises a gate dielectric layer defining the outer sidewall and an inter-gate dielectric layer defining the inner sidewall, the inter-gate dielectric layer having a thickness substantially the same as or greater than the gate dielectric layer.

[0073] In some embodiments, each of the first and second gate structures includes an inner sidewall facing and adjacent the connection region and an outer sidewall opposite the inner sidewall, and the deep shielding region protrudes beyond the outer sidewalls of the first and second gate structures and includes portions where the first and second gate structures do not vertically overlap.

[0074] In some embodiments, the power semiconductor device further comprises a first bottom dielectric layer between the first gate structure and the deep shield region, and a second bottom dielectric layer between the second gate structure and the deep shield region.

[0075] In some embodiments, each of the first and second gate structures comprises a gate electrode and a gate dielectric layer extending between the gate electrode and the first bottom dielectric layer or the second bottom dielectric layer, the gate dielectric layer comprising a different material than the first and second bottom dielectric layers. A central portion of a top surface of each of the first and second bottom dielectric layers is curved. Each of the first and second bottom dielectric layers comprises an additive comprising boron (B), phosphorus (P), sodium (Na), barium (Ba), strontium (Sr), potassium (K), lithium (Li), calcium (Ca), magnesium (Mg), and / or lead (Pb).

[0076] In some embodiments, each of the first and second gate structures comprises an inner sidewall facing and adjacent to the connection region and an outer sidewall opposite the inner sidewall. The upper portion of the semiconductor layer structure comprises a first protrusion on the outer sidewall of the first gate structure and a second protrusion on the outer sidewall of the second gate structure. Each of the first and second protrusions comprises a well region having a second conductivity type and a source region having a first conductivity type and in an upper portion of the well region, the source region surrounding the well region in a plan view. Each of the first and second protrusions has a hexagonal shape in a plan view.

[0077] In some embodiments, the first gate structure extends longitudinally in a first direction, the second gate structure comprises a plurality of second gate structures spaced apart and collinear in the first direction, and the connection region extends between the first gate structure and the plurality of second gate structures and comprises a plurality of protrusions protruding from the connection region in a second direction perpendicular to the first direction, each of the plurality of protrusions of the connection region separating two adjacent second gate structures.

[0078] In some embodiments, the connection region comprises a plurality of connection regions between the first and second gate structures, the plurality of connection regions being spaced apart from one another in a direction along which the first gate structure extends longitudinally.

[0079] In some embodiments, the connection region protrudes from a central portion of the deep shield region.

[0080] In some embodiments, each of the first and second gate structures comprises an inner sidewall that directly contacts the connection region.

[0081] In some embodiments, the connection region and the deep shield region comprise a second conductivity type dopant, the connection region having a greater dopant concentration than the deep shield region.

[0082] In some embodiments, the connection region comprises a semiconductor material having the second conductivity type, the connection region comprises a wide band gap semiconductor material (e.g., silicon carbide) or polysilicon.

[0083] In some embodiments, each of the first and second gate structures comprises an inner sidewall facing and adjacent the connection region and an outer sidewall opposite the inner sidewall, and each of the first and second gate structures comprises a gate dielectric layer defining the outer sidewall, an inter-gate dielectric layer defining the inner sidewall, and a gate electrode between the gate dielectric layer and the inter-gate dielectric layer.

[0084] In some embodiments, the deep shield region is a single deep shield region, and each of the first and second gate structures vertically overlaps the deep shield region.

[0085] In some embodiments, each of the first and second gate structures comprises an inner sidewall facing and adjacent the connection region and an outer sidewall opposite the inner sidewall. The upper portion of the semiconductor layer structure comprises a first well region on the outer sidewall of the first gate structure and a second well region on the outer sidewall of the second gate structure, the first and second well regions having a second conductivity type, and first and second source regions having a first conductivity type on top of the respective first and second well regions. The power semiconductor device further comprises a source contact comprising a metal and in direct contact with the first and second source regions and the connection region.

[0086] According to yet another embodiment of the present invention, there is provided a method for manufacturing a semiconductor device, the method including the steps of forming a semiconductor layer structure including a wide band gap semiconductor material, the semiconductor layer structure comprising a drift region having a first conductivity type, forming a deep shielding region on an upper portion of the drift region, the deep shielding region having a second conductivity type different from the first conductivity type, forming a connection region in the semiconductor layer structure, the connection region protruding from the deep shielding region (e.g., protruding from the deep shielding region toward a top surface of the semiconductor layer structure) and having the second conductivity type, and forming a first gate structure and a second gate structure in the semiconductor layer structure on opposite sidewalls of the connection region, respectively, the first and second gate structures covering (e.g., vertically overlapping) the deep shielding region.

[0087] In some embodiments, forming the first and second gate structures includes forming a first gate trench and a second gate trench by etching the semiconductor layer structure to expose opposite sidewalls of the connection region, respectively; implanting a first dopant of a second conductivity type into the connection region through opposite sidewalls of the connection region by an angled ion implantation process; forming first and second dielectric layers on surfaces of the first and second gate trenches, respectively, after implanting the first dopant into the connection region; and then forming first and second gate electrodes in the first and second gate trenches, respectively.

[0088] In some embodiments, the method further includes, prior to forming the first and second gate trenches, forming a first well region and a second well region in an upper portion of the semiconductor layer structure by implanting a second dopant of the second conductivity type, and forming a first source region and a second source region in an upper portion of the respective first and second well regions by implanting a third dopant of the first conductivity type.

[0089] In some embodiments, forming the first and second gate trenches includes forming a first protrusion and a second protrusion protruding from the drift region by etching an upper portion of the semiconductor layer structure, the first protrusion comprising a first well region and a first source region, and the second protrusion comprising a second well region and a second source region, each of the first and second protrusions having a hexagonal shape in plan view.

[0090] In some embodiments, forming the first and second dielectric layers includes oxidizing surfaces of the first and second gate trenches.

[0091] In some embodiments, the method further includes forming a first bottom dielectric layer and a second bottom dielectric layer at a bottom of the respective first and second gate trenches prior to forming the first and second dielectric layers.

[0092] In some embodiments, the method further comprises forming a source contact on the semiconductor layer structure, the source contact comprising a metal and directly contacting the connection region.

[0093] In some embodiments, forming the semiconductor layer structure includes performing an epitaxial growth process using the substrate as a seed layer.

[0094] In some embodiments, forming the semiconductor layer structure includes forming a lower portion of the semiconductor layer structure comprising a drift region by performing a first epitaxial growth process using the substrate as a seed layer, and forming a deep shielding region and then forming an upper portion of the semiconductor layer structure by performing a second epitaxial growth process using the drift region as a seed layer.

[0095] In some embodiments, the connection region comprises a semiconductor material having the second conductivity type. The connection region comprises silicon carbide.

[0096] According to yet another embodiment of the present invention, there is provided a method for manufacturing a semiconductor device, the method including the steps of forming a semiconductor layer structure including a wide band gap semiconductor material, the semiconductor layer structure having a drift region having a first conductivity type, forming a gate trench in an upper portion of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls extending in the first direction, forming a first gate electrode on a first sidewall of the gate trench, forming a second gate electrode on a second sidewall of the gate trench, and forming a connection region in the gate trench between the first gate electrode and the second gate electrode.

[0097] In some embodiments, the method further includes forming a first gate dielectric layer on a first sidewall of the gate trench before forming the first gate electrode, and forming a second gate dielectric layer on a second sidewall of the gate trench before forming the second gate electrode.

[0098] In some embodiments, the method further includes forming a deep shield region in the drift region below the gate trench, the deep shield region having a second conductivity type different from the first conductivity type.

[0099] In some embodiments, the method further includes forming first and second well regions in an upper portion of the semiconductor layer structure on first and second sidewalls of the gate trench, respectively, the first and second well regions having a second conductivity type; and forming first and second source regions in an upper portion of the respective first and second well regions, the first conductivity type being formed.

[0100] In some embodiments, the method further includes forming an inter-gate dielectric layer in the gate trench between the first gate electrode and the second gate electrode.

[0101] In some embodiments, the connection region extends through the inter-gate dielectric layer to directly contact the deep shield region.

[0102] In some embodiments, a first gate dielectric layer is between the deep shielding region and the first gate electrode, and a second gate dielectric layer is between the deep shielding region and the second gate electrode.

[0103] In some embodiments, the method further includes forming a bottom dielectric layer in a lower portion of the gate trench prior to forming the first and second gate dielectric layers.

[0104] In some embodiments, the method further comprises, after forming the connection region, forming a source contact on the semiconductor layer structure, the source contact comprising a metal and directly contacting the connection region.

[0105] In some embodiments, the method further includes the connection region comprising a semiconductor material having a second conductivity type different from the first conductivity type. The connection region comprises polysilicon.

[0106] In some embodiments, the steps of forming the first gate electrode and the second gate electrode and forming the connection region include forming a gate electrode layer in the gate trench, forming the connection trench by removing a portion of the gate electrode layer, and forming the connection region in the connection trench.

[0107] According to some embodiments of the present invention, a power semiconductor device is provided that includes a semiconductor layer structure including a drift region including a wide band gap semiconductor material having a first conductivity type, a well region having a second conductivity type, a source region having the first conductivity type atop the well region, a gate trench atop the semiconductor layer structure and including an obliquely sloping portion in plan view, and a gate structure within the gate trench, the well region on a side of the gate structure.

[0108] In some embodiments, the gate trench surrounds the well region in plan view. The well region has an upper outer surface having a parallelogram shape with four internal oblique angles, a hexagon shape, or an octagon shape. The first elongated well region and the second elongated well region each have a zigzag shape in plan view.

[0109] In some embodiments, the well region comprises an upper exterior surface having a circular shape.

[0110] In some embodiments, the power semiconductor device further comprises a first elongated well region and a second elongated well region, the well region being between the first and second elongated well regions, a sidewall of the first elongated well region including a first section and a second section, the first section being parallel to but not coplanar with the second section.

[0111] In some embodiments, the gate trench comprises a first gate trench and a second gate trench, the well region comprises a plurality of spaced apart first well regions and a plurality of spaced apart second well regions, the first gate trench surrounding the plurality of first well regions and the second gate trench surrounding the plurality of second well regions.

[0112] In some embodiments, the obliquely sloping gate trench portion is sloped in a range from about 100 degrees to about 140 degrees in plan view.

[0113] In some embodiments, the side of the gate structure is a first side, the gate structure further comprises a second side opposite the first side, and the power semiconductor device further comprises a deep shielding region below the gate structure, the deep shielding region having a second conductivity type and a higher concentration of second conductivity type dopants than the well region, the deep shielding region extending continuously from a bottom surface of the gate structure to a top of the second side of the gate structure, and a drift region separating the well region from the deep shielding region.

[0114] In some embodiments, the gate trench comprises a first gate trench and a second gate trench spaced apart from one another, the gate structure comprises a first gate structure and a second gate structure in the first gate trench and in the second gate trench, respectively, the first gate structure comprises a first side facing the second gate structure and a second side opposite the first side, the second gate structure comprises a third side facing the first gate structure and a fourth side opposite the third side, the well region comprises a first well region on the second side of the first gate structure, and the semiconductor layer structure comprises a second gate structure. and a second well region on a fourth side of the structure, the power semiconductor device further comprising a first deep shielding region below the first gate structure and a second deep shielding region below the second gate structure, each of the first and second deep shielding regions having a second conductivity type and a higher concentration of the second conductivity type dopant than the first and second well regions, the first deep shielding region extending continuously from a lower surface of the first gate structure to a top of the first side of the first gate structure and the second deep shielding region extending continuously from a lower surface of the second gate structure to a top of a third side of the second gate structure.

[0115] In some embodiments, the drift region separates the first well region from the first deep shield region and separates the second well region from the second deep shield region.

[0116] In some embodiments, the first and second deep shield regions are part of a common deep shield region, and each of the first well region, the second well region, and the common deep shield region has an upper outer surface that has a hexagonal shape in plan view.

[0117] In some embodiments, the first and second deep shielding regions are part of a common deep shielding region, and each of the first well region and the second well region has an upper outer surface having an octagonal shape in a plan view, and the common deep shielding region has an upper outer surface having a rectangular shape.

[0118] In some embodiments, the drift region separates the first and second deep shield regions from one another, and the power semiconductor device further comprises a conductive Schottky contact contacting a top surface of the first and second deep shield regions.

[0119] In some embodiments, the first and second deep shield regions are part of a common deep shield region, and the power semiconductor device further comprises a conductive Schottky contact extending through the common deep shield region and contacting a portion of the drift region below the common deep shield region.

[0120] In some embodiments, the gate trench comprises a plurality of main trenches spaced apart from one another in a first direction, each of the plurality of main trenches extending longitudinally in a second direction, and a plurality of connection trenches, each of the plurality of main trenches connecting two adjacent main trenches of the plurality of main trenches and defining an oblique angle with each adjacent main trench of the plurality of main trenches.

[0121] In some embodiments, the oblique angle ranges from about 100 degrees to about 140 degrees.

[0122] In some embodiments, trenches of the plurality of contact trenches are aligned along a third direction that defines an oblique angle relative to the second direction.

[0123] In some embodiments, trenches of the plurality of connecting trenches connecting two adjacent main trenches of the plurality of main trenches are spaced apart from one another in the second direction by non-uniform distances.

[0124] According to some embodiments of the present invention, a power semiconductor device is provided comprising a semiconductor layer structure having a drift region including a wide band gap semiconductor material having a first conductivity type, a well region having a second conductivity type, and a source region having the first conductivity type atop the well region, the well region having an upper outer surface having a circular shape in plan view, a gate trench defining sides of the well region, and a gate structure within the gate trench.

[0125] In some embodiments, the gate structure comprises a first side facing the well region and a second side opposite the first side, and the power semiconductor device further comprises a deep shield region below the gate structure, the deep shield region having a second conductivity type and a higher concentration of the second conductivity type dopant than the well region, the deep shield region extending continuously from a bottom surface of the gate structure to a top of the second side of the gate structure.

[0126] In some embodiments, a portion of the drift region separates the well region from the deep shield region.

[0127] According to some embodiments of the present invention, a power semiconductor device is provided that includes a semiconductor layer structure having a drift region including a wide band gap semiconductor material having a first conductivity type, a well region having a second conductivity type, and a source region having the first conductivity type in an upper portion of the well region, and a gate structure on top of the semiconductor layer structure and on a side of the well region and surrounding the well region in a plan view.

[0128] In some embodiments, in plan view, the well region comprises two portions that are connected to each other to form an oblique angle.

[0129] In some embodiments, the well area has an upper exterior surface that has a parallelogram shape with four internal oblique angles, a hexagon shape, or an octagon shape.

[0130] In some embodiments, the power semiconductor device further comprises a first elongated well region and a second elongated well region, the well region being between the first and second elongated well regions. A sidewall of the first elongated well region includes a first section and a second section, the first section being parallel to but not coplanar with the second section. The first elongated well region and the second elongated well region each have a zigzag shape in plan view.

[0131] In some embodiments, the gate structure comprises a first gate structure and a second gate structure, the well region comprises a plurality of first well regions spaced apart from one another and a plurality of second well regions spaced apart from one another, the first gate structure surrounding the plurality of first well regions, and the second gate structure surrounding the plurality of second well regions.

[0132] In some embodiments, the oblique angle ranges from about 100 degrees to about 140 degrees in plan view.

[0133] In some embodiments, the gate structure comprises a first side facing the well region and a second side opposite the first side, and the power semiconductor device further comprises a deep shield region below the gate structure, the deep shield region having a second conductivity type and a higher concentration of the second conductivity type dopant than the well region, the deep shield region extending continuously from a bottom surface of the gate structure to a top of the second side of the gate structure.

[0134] In some embodiments, a drift region separates the well region from the deep shield region.

[0135] In some embodiments, the gate structure comprises a first gate structure and a second gate structure spaced apart from one another, the first gate structure comprising a first side facing the second gate structure and a second side opposite the first side, the second gate structure comprising a third side facing the first gate structure and a fourth side opposite the third side, the well region comprising a first well region on the second side of the first gate structure and a second well region on the fourth side of the second gate structure, and the power semiconductor device comprises a first gate structure and a second gate structure. the first deep shielding region below the well structure and a second deep shielding region below the second gate structure, each of the first and second deep shielding regions having a second conductivity type and a higher concentration of the second conductivity type dopant than the first and second well regions, the first deep shielding region extending continuously from the lower surface of the first gate structure onto a top of the first side of the first gate structure and the second deep shielding region extending continuously from the lower surface of the second gate structure to a top of the third side of the second gate structure.

[0136] In some embodiments, the drift region separates the first well region from the first deep shield region and separates the second well region from the second deep shield region.

[0137] In some embodiments, the first and second deep shield regions are part of a common deep shield region, and each of the first well region, the second well region, and the common deep shield region has an upper outer surface that has a hexagonal shape in plan view.

[0138] In some embodiments, the first and second deep shielding regions are part of a common deep shielding region, and each of the first well region and the second well region has an upper outer surface having an octagonal shape in a plan view, and the common deep shielding region has an upper outer surface having a rectangular shape.

[0139] In some embodiments, the drift region separates the first and second deep shield regions from one another, and the power semiconductor device further comprises a conductive Schottky contact contacting a top surface of the first and second deep shield regions.

[0140] In some embodiments, the first and second deep shield regions are part of a common deep shield region, and the power semiconductor device further comprises a conductive Schottky contact extending through the common deep shield region and contacting a portion of the drift region below the common deep shield region.

[0141] According to some embodiments of the present invention, there is provided a method of forming a power semiconductor device, the method including the steps of providing a semiconductor layer structure including a drift region including a wide band gap semiconductor material and having a first conductivity type, a well region over the drift region and having a second conductivity type, and a source region over the well region and having the first conductivity type, forming a gate trench extending through the well region, a first side of the gate trench defining a portion of the well region, a lower end of the gate trench exposing the drift region, the gate trench comprising an obliquely sloping portion in plan view, and forming a gate structure in the gate trench.

[0142] In some embodiments, the gate trench surrounds the well region in plan view.

[0143] In some embodiments, the well area has an upper exterior surface that has a parallelogram shape with four internal oblique angles, a hexagon shape, or an octagon shape.

[0144] In some embodiments, the obliquely sloping gate trench portion slopes in a range from about 100 degrees to about 140 degrees in plan view.

[0145] In some embodiments, the gate trench further comprises a second side opposite the first side of the gate trench, and the well region defines a top of the second side of the gate trench. The method further includes forming a deep shielding region prior to forming the gate structure in the gate trench, a bottom end and the second side of the gate trench exposing the deep shielding region, the deep shielding region having a higher concentration of the second conductivity type dopant than the well region.

[0146] In some embodiments, the method further includes forming a source contact after forming the gate structure, the source contact directly contacting a top surface of the deep shield region.

[0147] In some embodiments, the well region is spaced from the deep shield region.

[0148] In some embodiments, forming the source region includes forming a first source region and a second source region in the well region, forming the gate trench includes forming a first gate trench and a second gate trench spaced apart from one another, a first side of the first gate trench exposing the first source region and a first side of the second gate trench exposing the second source region, each of the first and second gate trenches further comprising a second side opposite the first side, and the method further includes forming a first deep shielding region and a second deep shielding region prior to forming the gate structure, a bottom end and a second side of the first gate trench exposing the first deep shielding region and a bottom end and a second side of the second gate trench exposing the second deep shielding region, each of the first and second deep shielding regions having a higher concentration of the second conductivity type dopant than the well region.

[0149] In some embodiments, no source region is formed between the second side of the first gate trench and the second side of the second gate trench.

[0150] In some embodiments, a portion of the drift region separates the first deep shield region from the second deep shield region, and the method further includes forming a conductive Schottky contact in contact with top surfaces of the first and second deep shield regions and a top surface of the drift region.

[0151] In some embodiments, the first deep shield region and the second deep shield region are part of a common deep shield region that extends continuously between the second sides of the first and second gate trenches, and the method further includes forming a conductive Schottky contact extending through the common deep shield region and contacting a portion of the drift region below the common deep shield region.

[0152] According to some embodiments of the present invention, a power semiconductor device is provided that includes a semiconductor layer structure having a drift region including a wide band gap semiconductor material and having a first conductivity type, and a gate trench in an upper portion of the semiconductor layer structure and having first and second sections that define an oblique angle in a plan view, wherein sidewalls of both the first and second sections of the gate trench extend along substantially the same crystallographic plane within the semiconductor layer structure.

[0153] In some embodiments, the oblique angle ranges from about 115 degrees to about 125 degrees in plan view.

[0154] In some embodiments, the power semiconductor device further comprises a well region having the second conductivity type over the drift region and defining a side of the gate trench, and a source region having the first conductivity type in an upper portion of the well region.

[0155] In some embodiments, the well region comprises one of a plurality of island well regions spaced apart from one another and each island well region defining a portion of a side of the gate trench.

[0156] In some embodiments, the well region is a first elongated well region, the power semiconductor device further comprises a second elongated well region, and the gate trench is between the first and second elongated well regions.

[0157] In some embodiments, each of the first and second elongated well regions has a zigzag shape in plan view.

[0158] In some embodiments, the power semiconductor device further comprises a plurality of island well regions between the first elongated well region and the second elongated well region.

[0159] According to some embodiments of the present invention, a power semiconductor device is provided that includes a semiconductor layer structure having a drift region including a wide band gap semiconductor material and having a first conductivity type, a gate trench on top of the semiconductor layer structure, a gate structure in the gate trench, a first elongated well region on a first side of the gate structure, the first elongated well region protruding from the drift region and having a second conductivity type, a first source region having the first conductivity type on top of the first well region, a second elongated well region on a second side of the gate structure, the second elongated well region protruding from the drift region and having the second conductivity type, and a second source region having the first conductivity type on top of the second well region. A sidewall of the first elongated well region has a first section and a third section connected to each other by a second section, the first section being parallel to the third section, and an intersection of the second section with one of the first and third sections defines an obtuse angle.

[0160] In some embodiments, an intersection of the second section with others of the first and third sections defines a reflex angle.

[0161] In some embodiments, a sidewall of the second elongated well region has a fourth section and a sixth section connected to each other by a fifth section, the fourth section being parallel to the sixth section, and an intersection of the fifth section with one of the fourth and sixth sections defines an obtuse angle.

[0162] In some embodiments, the power semiconductor device further comprises a plurality of island well regions projecting from the drift region, each of the plurality of island well regions having the second conductivity type.

[0163] In some embodiments, a plurality of island well regions are between the first and second elongated well regions.

[0164] In some embodiments, each of the island well regions has parallel sidewalls with the first and third sections of the first elongated well region.

[0165] In some embodiments, the gate structure comprises first and second portions connected to each other to form an oblique angle in plan view.

[0166] In some embodiments, the oblique angle ranges from about 115 degrees to about 125 degrees in plan view.

[0167] According to some embodiments of the present invention, a power semiconductor device is provided, the power semiconductor device including: a semiconductor layer structure having a drift region including a wide band gap semiconductor material and having a first conductivity type; a gate trench on top of the semiconductor layer structure; a gate structure in the gate trench; a first elongated well region on a first side of the gate structure, the first elongated well region having a second conductivity type; a first source region having the first conductivity type and on top of the first elongated well region; a second elongated well region on a second side of the gate structure, the second elongated well region having the second conductivity type; a second source region having the first conductivity type and on top of the second elongated well region; a plurality of third well regions between the first and second elongated well regions, each having the second conductivity type; and a plurality of third source regions having the first conductivity type on top of each third well region.

[0168] In some embodiments, each of the plurality of third well regions comprises an island having a sidewall surrounded by a gate structure.

[0169] In some embodiments, the first and second elongated well regions each have a zigzag shape.

[0170] In some embodiments, the gate structure comprises first and second portions connected to each other to form an oblique angle in plan view.

[0171] In some embodiments, the oblique angle ranges from about 115 degrees to about 125 degrees in plan view. [Brief description of the drawings]

[0172] [Figure 1A] 1 is a schematic cross-sectional view showing a method for manufacturing a conventional gate trench power MOSFET. [Figure 1B] 1 is a schematic cross-sectional view showing a method for manufacturing a conventional gate trench power MOSFET. [Figure 1C]1 is a schematic cross-sectional view showing a method for manufacturing a conventional gate trench power MOSFET. [Figure 1D] 1 is a schematic cross-sectional view showing a method for manufacturing a conventional gate trench power MOSFET. [Figure 2A] 1 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to an embodiment of the present invention. FIG. [Figure 2B] 1 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to an embodiment of the present invention. FIG. [Figure 2C] 1 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to an embodiment of the present invention. FIG. [Figure 2D] 1 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to an embodiment of the present invention. FIG. [Figure 2E] 2E is a schematic cross-sectional view taken along line 2E-2E of FIG. 2D, illustrating a cross-sectional view of the gate trench power MOSFET of FIG. 2D after metallization has been formed on the semiconductor layer structure. [Figure 2F] 2F is a schematic cross-sectional view taken along line 2F-2F of FIG. 2D, illustrating a cross-sectional view of the gate trench power MOSFET of FIG. 2D after metallization has been formed on the semiconductor layer structure. [Figure 3A] 5 is a schematic perspective view illustrating a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to a further embodiment of the present invention; [Figure 3B] 5 is a schematic perspective view illustrating a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to a further embodiment of the present invention; [Figure 3C] 5 is a schematic perspective view illustrating a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to a further embodiment of the present invention; [Figure 3D] 5 is a schematic perspective view illustrating a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to a further embodiment of the present invention; [Figure 3E]3E is a schematic cross-sectional view taken along line 3E-3E of FIG. 3D showing a cross-sectional view of the gate trench power MOSFET of FIG. 3D after metallization has been formed on the semiconductor layer structure. [Figure 3F] 3F is a schematic cross-sectional view taken along line 3F-3F of FIG. 3D showing a cross-sectional view of the gate trench power MOSFET of FIG. 3D after metallization has been formed on the semiconductor layer structure. [Figure 4A] FIG. 11 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to yet another embodiment of the present invention. [Figure 4B] FIG. 11 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to yet another embodiment of the present invention. [Figure 4C] FIG. 11 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to yet another embodiment of the present invention. [Figure 4D] FIG. 11 is a schematic perspective view showing a method for manufacturing a semiconductor layer structure of a gate trench power MOSFET according to yet another embodiment of the present invention. [Figure 4E] 4E is a schematic cross-sectional view taken along line 4E-4E of FIG. 4D, illustrating a cross-sectional view of the gate trench power MOSFET of FIG. 4D after metallization has been formed on the semiconductor layer structure. [Figure 4F] 4F is a schematic cross-sectional view taken along line 4F-4F of FIG. 4D, illustrating a cross-sectional view of the gate trench power MOSFET of FIG. 4D after metallization has been formed on the semiconductor layer structure. [Figure 4G] FIG. 4B is a schematic perspective view of a modified version of the MOSFET 300 of FIGS. 4A-4F. [Figure 4H] FIG. 4B is a schematic perspective view of a modified version of the MOSFET 300 of FIGS. 4A-4F. [Figure 5A] FIG. 1 is a perspective view of a gate trench power MOSFET according to a further embodiment of the present invention; [Figure 5B] FIG. 5B is a schematic perspective view of a small area of ​​the gate trench power MOSFET of FIG. 5A. [Figure 5C]FIG. 5B is a schematic perspective view of a small portion of a modified version of the gate trench power MOSFET of FIG. 5A. [Figure 5D] FIG. 5B is a schematic perspective view of a small portion of a modified version of the gate trench power MOSFET of FIG. 5A. [Figure 6A] 10 is a schematic perspective view showing a method for manufacturing a gate trench power MOSFET according to yet another embodiment of the present invention. FIG. [Figure 6B] 10 is a schematic perspective view showing a method for manufacturing a gate trench power MOSFET according to yet another embodiment of the present invention. FIG. [Figure 6C] 10 is a schematic perspective view showing a method for manufacturing a gate trench power MOSFET according to yet another embodiment of the present invention. FIG. [Figure 6D] 10 is a schematic perspective view showing a method for manufacturing a gate trench power MOSFET according to yet another embodiment of the present invention. FIG. [Figure 6E] 10 is a schematic perspective view showing a method for manufacturing a gate trench power MOSFET according to yet another embodiment of the present invention. FIG. [Figure 7] 1 is a flow chart illustrating a method for manufacturing a gate trench power semiconductor device in accordance with an embodiment of the inventive concept. [Figure 8] 1 is a flow chart illustrating a method for manufacturing a gate trench power semiconductor device in accordance with an embodiment of the inventive concept. [Figure 9] 1 is a flow chart illustrating a method for manufacturing a gate trench power semiconductor device in accordance with an embodiment of the inventive concept. [Figure 10] 1 is a plan view of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 11] FIG. 11 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. [Figure 12] FIG. 11 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. [Figure 13] FIG. 11 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. [Figure 14]1 is a plan view of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 15] FIG. 15 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. [Figure 16] 1 is a plan view of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 17] FIG. 17 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. [Figure 18] 1 is a plan view of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 19] 1 is a plan view of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 20A] FIG. 20 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. 19. [Figure 20B] FIG. 20 is a schematic cross-sectional view of the gate trench power MOSFET shown in FIG. 19. [Figure 21] 1A to 1C are schematic cross-sectional views showing a method for manufacturing a gate trench power MOSFET according to an embodiment of the present invention. [Figure 22] 1A to 1C are schematic cross-sectional views showing a method for manufacturing a gate trench power MOSFET according to an embodiment of the present invention. [Diagram 23] FIG. 2 is a plan view of an intermediate structure of a gate trench power MOSFET according to an embodiment of the present invention. [Figure 24] FIG. 2 is a plan view of an intermediate structure of a gate trench power MOSFET according to an embodiment of the present invention. [Diagram 25] 1A to 1C are schematic cross-sectional views showing a method for manufacturing a gate trench power MOSFET according to an embodiment of the present invention. [Figure 26] 1A to 1C are schematic cross-sectional views showing a method for manufacturing a gate trench power MOSFET according to an embodiment of the present invention. [Figure 27] 1A to 1C are schematic cross-sectional views showing a method for manufacturing a gate trench power MOSFET according to an embodiment of the present invention. [Figure 28]1 is a schematic cross-sectional view of a gate trench power according to an embodiment of the present invention. [Figure 29] 2 is a flow chart illustrating a method for manufacturing a gate trench power semiconductor device according to an embodiment of the present invention. [Diagram 30] 2 is a flow chart illustrating a method for manufacturing a gate trench power semiconductor device according to an embodiment of the present invention. [Figure 31A] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Figure 31B] FIG. 31B is a plan view of the gate structure of the gate trench power MOSFET of FIG. 31A. [Diagram 32] FIG. 31B is a schematic cross-sectional view taken along line EE' of FIG. 31A according to some embodiments of the present invention. [Diagram 33] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Diagram 34] 34 is a schematic cross-sectional view taken along line FF' in FIG. 33. [Diagram 35] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Figure 36A] FIG. 36 is a schematic cross-sectional view taken along line GG' in FIG. [Figure 36B] FIG. 36 is a schematic cross-sectional view taken along line HH' in FIG. [Figure 37] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Figure 38] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Figure 39] 1 is a schematic cross-sectional view of a gate trench power MOSFET according to some embodiments of the present invention; [Diagram 40] 1 is a schematic cross-sectional view of a gate trench power MOSFET according to some embodiments of the present invention; [Figure 41A] FIG. 1 is a plan view of a gate trench power MOSFET according to some embodiments of the present invention. [Figure 41B] FIG. 41B is a plan view of the gate structure of the gate trench power MOSFET of FIG. 41A. [Diagram 42] 35 is a flow chart illustrating a method of manufacturing the gate trench power semiconductor device of FIGS. 33 and 34 according to an embodiment of the present invention. [Diagram 43] 35A to 35C are cross-sectional views illustrating a method of manufacturing the gate trench power semiconductor device of FIGS. 33 and 34 according to an embodiment of the present invention. [Diagram 44] 35A to 35C are cross-sectional views illustrating a method of manufacturing the gate trench power semiconductor device of FIGS. 33 and 34 according to an embodiment of the present invention. [Diagram 45] 35A to 35C are cross-sectional views illustrating a method of manufacturing the gate trench power semiconductor device of FIGS. 33 and 34 according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0173] Silicon carbide-based trench-gate vertical power MOSFETs are attractive for many applications due to their inherent lower specific on-resistance, which may result in more efficient operation for power switching operations. Trench-gate vertical power MOSFETs have a lower specific resistance during on-state operation because the channel is formed on the sidewall of the gate trench. Furthermore, the carrier mobility of the sidewall channel of a trench-gate MOSFET is found to be 2 to 4 times higher than the corresponding carrier mobility of the horizontal channel of a standard (i.e., without a gate trench) vertical power MOSFET. This increased channel mobility increases the current density during on-state operation, allowing for higher switching speeds. Furthermore, the trench morphology allows for a smaller overall device pitch, which allows for greater integration. Due to the lower conduction losses (due to reduced on-state resistance) and improved switching speeds, trench-gate MOSFETs are well suited for high-frequency power applications with low to moderate voltage blocking requirements (e.g., 600 to 1200 volts). These devices have reduced requirements for associated passive components, are low cost, lightweight, and may require relatively simple cooling schemes.

[0174] Gate-trench power MOSFETs are susceptible to oxide reliability issues due to the presence of high electric fields in the oxide gate dielectric layer (also referred to herein as the gate oxide layer) that lines the bottom edge of the gate trench. The high electric fields can degrade the gate oxide layer over time and ultimately lead to device failure. The highest electric fields occur at the corner regions of the gate oxide layer where the electric field level in the gate oxide layer can increase dramatically due to field crowding effects. When a gate-trench MOSFET operates in reverse blocking operation, the highest electric field levels occur at the corners of the gate oxide layer at the bottom edge of the gate trench.

[0175] To reduce the electric field level in the gate oxide layer during reverse blocking operation, so-called "deep shield regions" are often provided below the gate trench of conventional gate trench power MOSFETs. These deep shield regions comprise a heavily doped semiconductor layer having the same conductivity type as the channel region. The deep shield regions may extend, for example, 0.5-1.0 microns or more below the bottom surface of the gate trench into the drift region of the device. The deep shield regions may also extend laterally longer than the sidewalls of the trench and / or possibly along the underside of the trench. The deep shield regions are electrically connected to the source terminal of the MOSFET by a deep shield connection pattern. However, it can be difficult to reliably implement the deep shield regions and the deep shield connection pattern.

[0176] 1A to 1D are schematic cross-sectional views illustrating a method for manufacturing a conventional silicon carbide-based gate trench vertical power MOSFET 1.

[0177] As shown in FIG. 1A, the power MOSFET 1 is a heavily doped (n + ) n-type silicon carbide substrate 10. -A silicon carbide drift region 20 is formed on the substrate 10 by epitaxial growth. A moderately doped p-type silicon carbide well layer 30 is formed on the top surface of the n-type drift region 20 by epitaxial growth or by implanting p-type dopants into the top of the n-type drift region 20. A heavily doped n + A silicon carbide source pattern 40 is formed on top of the p-type silicon carbide well layer 30, for example by ion implantation. The silicon carbide substrate 10, drift region 20, well layer 30 and source pattern 40 together with various regions / patterns formed therein constitute a semiconductor layer structure 50 of the power MOSFET 1.

[0178] As shown in FIG. 1B, an etching process can be performed to form a plurality of gate trenches 60 in the top surface of the semiconductor layer structure 50. Each gate trench 60 can extend laterally (i.e., parallel to the major surface of the semiconductor layer structure) in a first direction across the length (or width) of the power MOSFET 1. In FIGS. 1A-1D, the first direction is into the page and is shown as the x-direction. The gate trenches 60 can extend vertically (i.e., perpendicular to the major surface of the semiconductor layer structure, or in the z-direction) through the source pattern 40 and well layer 30 into the drift region 20 as shown, and the gate trenches 60 can be spaced apart from one another in a second direction (here, the y-direction, which is perpendicular to the first direction). The gate trenches 60 convert the moderately doped p-type silicon carbide well layer 30 into a plurality of p-wells 32 and convert the heavily doped n-type silicon carbide source pattern 40 into a plurality of n-type source regions 42. The portion of each p-well 32 adjacent to the gate trench 60 serves as a transistor channel 34, as described below. + A deep shield region 70 of silicon carbide is formed by ion implantation beneath each gate trench 60. The deep shield region 70 of silicon carbide may extend the entire length of each gate trench 60.

[0179] As shown in Figure 1C, an implant mask (not shown) can be used to perform a tilted ion implantation to implant p-type dopants into one of the sidewalls (here, the right sidewall) of each gate trench 60. As further shown in Figure 1C, this ion implantation step converts the lower n-type portion of each right sidewall of the gate trench 60 into heavily doped p-type deep shield connection patterns 72. These deep shield connection patterns 72 electrically connect each deep shield region 70 to the p-well 32.

[0180] Referring to FIG. 1D, a gate oxide layer 62 is formed on the bottom surface and sidewalls of each gate trench 60. A gate electrode 64 is formed on each gate insulating layer 62 to fill each gate trench 60. An intermetal dielectric layer 66 is formed on the exposed portions of the gate electrodes 64, and a source contact 80 is formed on the top of the device. The source contact 80 is physically and electrically connected to the p-well 32 and the n-type source region 42. The source contact 80 may constitute or be electrically connected to the source terminal of the MOSFET 1. A drain contact 82 is formed on the bottom surface of the substrate 10. A gate contact (not shown) is also provided that is connected to the gate electrode 64 outside the cross-sectional view of FIG. 1D.

[0181] The deep shielding regions 70 can be effective in protecting the corners of the gate insulating layer 62 from high electric fields during reverse blocking operation. Unfortunately, however, the deep shielding connection pattern 72, which electrically connects the source contact 80 to the deep shielding regions 70, renders the transistor channel 34 on the right sidewall of each gate trench 60 inoperative due to the absence of n-type semiconductor material underneath the channel 34. Thus, the deep shielding connection pattern 72 provides the necessary electrical connection between the deep shielding regions 70 and the source contact 80, but at the expense of half of the transistor channel area of ​​the MOSFET 1.

[0182] According to embodiments of the present invention, improved techniques are disclosed for forming deep shield connection patterns that electrically connect the deep shield regions of a gate trench MISFET to its source contact. The approaches disclosed herein can result in less sacrifice of the transistor's channel area, and therefore improved device performance. The following discussion of embodiments of the present invention focuses on MOSFETs rather than MISFETs, since a gate oxide layer is almost always used due to its superior electrical properties. However, it can be understood that the described embodiments can alternatively be implemented with a gate dielectric layer formed of materials other than oxide. Any suitable insulating material can be used (e.g., nitrides, oxynitrides, high-k materials, etc.).

[0183] MOSFETs according to embodiments of the invention may have gate trenches extending laterally in a first direction (x-direction in the figures below). In some embodiments, the MOSFET may be formed with stripes of heavily doped p-type material extending laterally in a second direction (y-direction in the figures below) across the gate trenches. For example, the stripes of heavily doped p-type material may extend perpendicular to the gate trenches. These stripes may extend at least to the depth of the p-type deep shield region so as to electrically connect the deep shield region to the P-well and thus to the source contact of the MOSFET. The stripes of heavily doped p-type material may, for example, occupy perhaps 15%-25% of the sidewalls of the gate trench, thus sacrificing only about 15%-25% of the total channel area of ​​the device (compared to 50% for the conventional MOSFET 1 above).

[0184] According to further embodiments of the present invention, a gate trench power MOSFET is provided that includes both a gate trench and a source trench that intersects the gate trench. For example, the source trench can extend perpendicular to the gate trench. A deep shielding region is formed beneath at least a portion of the source trench, which may optionally be formed beneath the gate trench. A source contact can be formed in the source trench to directly contact the deep shielding region. In some embodiments, the gate electrode can extend continuously within the respective gate trench, and the portion of the source contact that is within the source trench can be segmented to allow the gate electrode and source contact to "intersect" within the trench. In other embodiments, the source contact can extend continuously within the respective source trench, and the gate electrode can be segmented.

[0185] According to yet another embodiment of the present invention, there is provided a gated trench power MOSFET having a source contact that extends through the gate trench and directly contacts the deep shield region. In these embodiments, each gate electrode may include first and second gate electrode portions that extend along two sidewalls of a respective one of the gate trenches, and the source contact may extend through a central portion of the gate trench between the first and second gate electrode portions. An intermetal dielectric pattern may also be formed in each gate trench to electrically insulate the first and second gate electrode portions from the portions of the source contact that extend through the gate trench. The portions of the source contact that extend into the respective source trenches may be continuous portions that extend the entire length of the respective trenches, or may be separate plugs that extend into the respective trenches at periodic or non-periodic intervals. The gated trench power MOSFETs according to embodiments of the present invention include a reliable deep shield connection pattern (or equivalent structure) that does not sacrifice channel area of ​​the MOSFET as much as conventional deep shield connection pattern approaches. Thus, the gated trench power MOSFETs according to embodiments of the present invention may exhibit improved performance.

[0186] Now, with reference to Figs. 2A-9, embodiments of the present invention will be described. It will be understood that the features of the different embodiments disclosed herein can be combined in any manner to provide many further embodiments. Thus, although various features of the present invention are described below with reference to specific examples, it will be understood that these features may be added to other embodiments and / or used in place of the exemplary features of other embodiments to provide many further embodiments. Thus, the present invention should be understood to encompass these different combinations. Furthermore, although the exemplary embodiments focus on MOSFET implementations, it will be understood that the same techniques can be used with other gate trench power semiconductor devices such as insulated gate bipolar transistors (IGBTs), gate controlled thyristors, etc.

[0187] 2A-2F are schematic diagrams illustrating a trench gated power MOSFET 100 according to an embodiment of the present invention. More specifically, FIGS. 2A-2D are schematic perspective views illustrating a method of fabricating the semiconductor layer structure of the trench gated power MOSFET 100, and FIGS. 2E and 2F are schematic cross-sectional views along lines 2E-2E and 2F-2F, respectively, of FIG. 2D illustrating a cross-sectional view of the trench gated power MOSFET 100 of FIG. 2D after metallization has been formed on the semiconductor layer structure.

[0188] 2A, an n-type silicon carbide substrate 110 is provided. The substrate 110 may comprise, for example, a 4H-silicon carbide or a 6H-silicon carbide substrate. In other embodiments, the substrate 110 may be or include a different semiconductor material (e.g., III-nitride based materials, silicon, gallium arsenide, zinc oxide, etc.) or a non-semiconductor material (e.g., sapphire). The substrate 110 may be heavily doped with n-type impurities (i.e., n + The doping concentration of the substrate 110 may be, for example, 1×10 18 atoms / cm 3 ~1×10 21 atoms / cm3 100 .ANG., although other doping concentrations can be used. Substrate 110 can be relatively thick in some embodiments (e.g., 20-100 microns or more). It should be noted that while the substrate is shown in the figures as a relatively thin layer, this is done to allow for enlargement of other layers and regions of the device, and it will be appreciated that the substrate is generally much thicker than illustrated. Similarly, thicknesses of various other layers of MOSFETs according to embodiments of the invention may not be shown to scale in order to provide enlarged views of various portions of the device.

[0189] Lightly doped (n - ) A silicon carbide drift region 120 may be provided on the substrate 110. The n-type drift region 120 may be formed, for example, by epitaxial growth on the substrate 110. The n-type drift region 120 may be, for example, 1×10 16 ~5×10 17 Dopant / cm 3 The n-type drift region 120 may have a doping concentration of 100 . The n-type drift region 120 may be a thick region having a vertical height above the substrate 110 of, for example, 3 to 50 microns. In some embodiments, the upper portion of the n-type drift region 120 may include an n-type current spreading layer (not shown) that is more highly doped than the lower portion of the n-type drift region 120.

[0190] A moderately doped p-type well layer 130 is formed on top of the n-type silicon carbide drift region 120. The moderately doped p-type well layer 130 may be formed, for example, by epitaxial growth or by ion implantation. The moderately doped p-type well layer 130 may be doped to a doping density desired for the transistor channel of the device. In some embodiments, the moderately doped p-type well layer 130 may be doped to a doping density desired for the transistor channel of the device. For example, the moderately doped p-type well layer 130 may be doped to a doping density of 1×10 16 atoms / cm 3 ~1×10 19 atoms / cm 3The moderately doped p-type well layer 130 may have a graded doping profile in some embodiments.

[0191] 2B, an implantation mask (not shown) is formed over the structure of FIG. 2A and stripe-shaped openings (not shown) are formed in the mask. A high-energy, high-dose ion implantation process is then used to implant lightly doped (n - 2.) Form a stripe 171 of heavily doped p-type material into the silicon carbide drift region 120. The stripe 171 of heavily doped p-type material may extend to at least as deep as a gate trench that will be formed in the structure in a later processing step.

[0192] Referring to FIG. 2C, the heavily doped (n + ) n-type silicon carbide source layer 140 is formed in the upper region of the moderately doped p-type well layer 130 by ion implantation. In some embodiments, a stripe 171 of highly doped p-type material is formed in the upper region of the highly doped (n + ) n-type silicon carbide source layer 140. For example, + ) The n-type silicon carbide source layer 140 is 1×10 19 atoms / cm 3 ~5×10 21 atoms / cm 3 where the doping concentration of p-type stripe 171 is at least 1.2 times higher than the doping concentration of n-type source layer 140. The layers 110, 120, 130, 140 discussed above (and regions formed therein, such as stripe 171 and the p-type deep shield regions described below) comprise the semiconductor layer structure 150 of MOSFET 100.

[0193] Referring to FIG. 2D, a number of gate trenches 160 are etched into the top surface of the semiconductor layer structure 150. Although only one gate trench 160 (and portions of two other gate trenches) is shown in FIG. 2D, it can be seen that in general, a number of gate trenches 160 are provided, each extending in a first direction above the substrate 110 (here, the gate trenches extend in the x-direction) and spaced apart from one another in a second direction (here, the y-direction) such that the gate trenches 160 extend at lengths parallel to one another. Each gate trench 160 has a length (corresponding to the distance in the x-direction), a width (corresponding to the distance in the y-direction), and a depth (corresponding to the distance in the z-direction). The length direction is the longest direction, and thus the longitudinal axis of each gate trench 160 refers to an axis extending lengthwise down the center of the gate trench 160. In this specification, this length distance (x-direction) is referred to as the first direction. Each gate trench 160 has first and second opposing sidewalls and a bottom surface, each of which extends in a first direction and thus parallel to the longitudinal axis. The stripes 171 extend in a second direction different from the first direction such that the stripes 171 intersect the gate trenches 160. In the illustrated embodiment, the second direction is perpendicular to the first direction (i.e., the second direction is the width direction / y direction), although embodiments of the present invention are not limited thereto.

[0194] Each gate trench 160 extends through the heavily doped n-type silicon carbide layer 140 to convert the silicon carbide layer into a plurality of spaced apart heavily doped n-type silicon carbide regions 142 that function as source regions for the power MOSFET 100. Each gate trench 160 also extends through the moderately doped p-type silicon carbide layer 130 to convert the layer 130 into a plurality of p-wells 132. Each gate trench 160 also extends to the top surface of the n-type drift region 120. The sidewalls of each gate trench 160 are the exposed surfaces of the layers / regions of the semiconductor layer structure on either side of each gate trench 160. Thus, the tops of source region 142 and stripes 171 can form / build up the top of each sidewall, the middle portions of p-well 132 and stripes 171 can form / build up the central portions of each sidewall, and the bottom portions of drift region 120 and stripes 171 can form / build up the bottom of each sidewall.

[0195] As further shown in FIG. 2D, p-type dopants are implanted into the bottom surface of each gate trench 160 to form a highly doped p + A silicon carbide deep shield region 170 is formed beneath each gate trench 160. The p-type deep shield region 170 may be formed by a high energy, high dose ion implantation step that converts the portion of the lightly doped n-type drift region beneath the gate trench 160 into a heavily doped p-type region. The deep shield region 170 may extend the entire length of each gate trench 160.

[0196] 2D , stripes 171 of heavily doped p-type material extend downward beyond the top surface of deep shield region 170, and are therefore electrically connected to deep shield region 170. As such, stripes 171 act as deep shield connection patterns 172 that electrically connect deep shield region 170 to p-well 132. Because stripes 171 / deep shield connection patterns 172 extend to the top surface of semiconductor layer structure 150, p-well 132 does not need to extend to the top surface of semiconductor layer structure 150.

[0197] 2E and 2F, a conformal gate oxide layer is formed on the bottom surface and sidewalls of each gate trench 160. The conformal gate oxide layer may be formed by oxidizing the exposed silicon carbide by annealing in an oxygen-containing environment. Alternatively, the conformal gate oxide layer may be formed by an oxide deposition step. Portions of the conformal gate oxide layer may be removed to form openings through which source contacts 180 can connect to source regions 140 and deep shield connection pattern 172. Removal of these portions of the conformal gate oxide layer leaves a gate oxide layer 162 in each gate trench 160.

[0198] A gate electrode 164 is formed on each gate oxide layer 162 to fill the respective gate trench 160. The gate electrodes 164 may comprise a conductive material such as, for example, polysilicon, silicate, or metal. An intermetal dielectric layer 166 is formed on the gate oxide layer 162 and exposed portions of the gate electrodes 164, and a source contact 180 is formed on the top of the device. The source contact 180 may comprise one or more metals and is physically and electrically connected to the deep shield connection pattern 172 and the n-type source region 140. The source contact 180 may comprise or be electrically connected to the source terminal of the MOSFET 100. A drain contact 182 is formed on the bottom surface of the substrate 110. A gate contact (not shown) is also provided that is connected to the gate electrodes 164 outside of the cross-sectional views of Figures 2E and 2F.

[0199] The portion of the sidewall of the gate trench in which the deep shield connection pattern 172 (FIG. 2F) is formed does not include an npn junction structure adjacent to the gate electrode and therefore cannot operate as part of a transistor. As shown in FIG. 2D, in some embodiments, the extent of the deep shield connection pattern 172 in the first direction (i.e., the direction in which the gate trench 160 extends) may be only about 15%-25% of the extent of the area of ​​the sidewall between the deep shield connection patterns 172. Thus, only about 15%-25% of the channel area is sacrificed to provide the deep shield connection pattern 172 that electrically connects the deep shield region 170 to the source contact 180, as compared to the sacrifice of 50% of the channel area in the conventional MOSFET 1 of FIGS. 1A-1E. In other embodiments, the extent of the deep shield connection patterns 172 in the first direction may be 10%-30%, 10%-40%, 20%-40%, or 30%-40% of the extent of the sidewall area between the deep shield connection patterns 172. All such embodiments may provide improved performance compared to the MOSFET 100 of Figures 1A-1D.

[0200] 3A-3D are schematic perspective views illustrating a method of fabricating a semiconductor layer structure of a gated trench power MOSFET 200 according to a further embodiment of the present invention. Figures 3E and 3F are schematic cross-sectional views taken along lines 3E-3E and 3F-3F, respectively, of FIG. 3D, illustrating a cross-sectional view of the gated trench power MOSFET 200 of FIG. 3D after metallization has been formed on the semiconductor layer structure. MOSFET 200 is similar to MOSFET 100 described above, but can be fabricated using low energy implants to form its deep shield connection pattern.

[0201] Referring to FIG. 3A, the heavily doped (n + ) n-type silicon carbide substrate 210 is provided, which is lightly doped (n - ) silicon carbide drift region 220 is formed on substrate 210 by epitaxial growth. A moderately doped p-type well layer 230 is formed on top of n-type silicon carbide drift region 220 and a heavily doped (n +2.) An n-type silicon carbide source layer 240 is formed on a moderately doped p-type well layer 230. The substrate 210, drift region 220, well layer 230, and source layer 240 constitute a semiconductor layer structure 250. The layers 210, 220, 230, 240 are formed in the same manner and may have the same characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the gated trench power MOSFET 100 described above, and therefore will not be described further.

[0202] Referring to FIG. 3B, a plurality of gate trenches 260 are etched into the top surface of the semiconductor layer structure 250. Each gate trench 260 extends in a first direction (x-direction) above the substrate 210, and the gate trenches 260 are spaced apart from one another in a second direction (y-direction). Each gate trench 260 extends through the heavily doped n-type silicon carbide layer 240 to convert the silicon carbide layer 240 into a plurality of spaced apart heavily doped n-type regions 242. Each gate trench 260 also extends through the moderately doped p-type silicon carbide layer 230 to convert the layer 230 into a plurality of p-wells 232. Each gate trench 260 also extends into the top surface of the n-type drift region 220.

[0203] Furthermore, as shown in FIG. 3B, a p-type dopant is implanted into the lower end surface of each gate trench 260 to form a highly doped p + A silicon carbide deep shield region 270 is formed beneath each gate trench 260. The p-type shield pattern 270 may be formed by a high energy, high dose ion implantation step that converts the portion of the lightly doped n-type drift region beneath the gate trench 260 into a heavily doped p-type region. The deep shield region 270 may extend the entire length of each gate trench 260.

[0204] Referring to FIG. 3C, a photoresist implant blocking mask 276 is formed over the structure of FIG. 3B and the photoresist implant blocking mask 276 is patterned to form a plurality of stripe-shaped openings 278 therein. A pair of low-energy, high-dose angled ion implants are performed to implant opposing sidewalls of the gate trench 260 exposed through the plurality of stripe openings 278. The mask 276 may then be removed. Each low-energy, high-dose angled ion implant may have a concentration of, for example, 1×10 13 ~1×10 15 In another exemplary embodiment, the implant energy is 1×10 13 ~1×10 15 The voltage may be 10 kV to 200 kV, 10 kV to 100 kV, or 50 kV to 100 kV.

[0205] 3D, the angled ion implantation step forms heavily doped stripes 271 of p-type material in the exposed surface of the semiconductor layer structure 250. The stripes 271 extend in a second direction (y-direction) across the gate trench 260. As shown, the second direction may be perpendicular to the first direction (i.e., the direction in which the gate trench 260 extends). As shown, the stripes 271 may be formed on the top and side surfaces of the source region 240, the side surfaces of the p-well 232 exposed by the gate trench 260, the side surfaces of the drift region 220 exposed by the gate trench 260, and the top surface of the deep shield region 270. Thus, the stripes 271 of heavily doped p-type material electrically connect the deep shield region 270 to the p-well 232, thereby functioning as the deep shield connection pattern 272. Again, since the deep shielding connection pattern 272 extends to the top surface of the semiconductor layer structure 250 , the p-well 232 does not need to extend to the top surface of the semiconductor layer structure 250 .

[0206] The deep shield connection pattern 272 does not need to extend completely through the sidewall of the gate trench 260, but instead can extend only over the surface area of ​​the sidewall and the surface area of ​​the top surface of the source region 242 and the top surface of the deep shield region 270 (see FIG. 3F). Thus, compared to the deep shield connection pattern 172, a much lower implantation energy can be used to form the deep shield connection pattern 272, resulting in less damage to the semiconductor crystal.

[0207] 3E and 3F, a gate oxide layer 262 is formed (e.g., by oxidation or deposition) on the bottom surface and sidewalls of each gate trench 260, and a gate electrode 264 is formed on the gate oxide layer 262 to fill the respective gate trench 260. An intermetal dielectric layer 266, a source contact 280, and a drain contact 282 are then formed. The gate oxide layer 262, the gate electrode 264, the intermetal dielectric layer 266, the source contact 280, and the drain contact 282 may be formed in the same manner as described above with reference to FIGS. 2E and 2F, and therefore will not be described further. A gate contact (not shown) may also be formed in a conventional manner.

[0208] As can be seen, MOSFET 200 is very similar to MOSFET 100, with the primary difference being that deep shield connection pattern 272 is formed only along the top and sides of gate trench 260 and source region 240, instead of extending completely through the pillars that define gate trench 260. In an exemplary embodiment, similar to MOSFET 100 of FIGS. 2A-2F, deep shield connection pattern 272 may occupy only 15%-25% of the surface area of ​​the sidewalls of gate trench 260. In other embodiments, the extent of deep shield connection pattern 272 in the first direction may be 10%-30%, 10%-40%, 20%-40%, or 30%-40% of the extent of the area of ​​the sidewalls of gate trench 260 between deep shield connection patterns 272. All such embodiments may provide improved performance as compared to MOSFET 100 of FIGS. 1A-1D.

[0209] Figures 4A-4D are schematic perspective views illustrating a method of fabricating a semiconductor layer structure of a gated trench power MOSFET 300 according to yet another embodiment of the present invention. Figures 4E and 4F are schematic cross-sectional views taken along lines 4E-4E and 4F-4F, respectively, of Figure 4D, showing a cross-sectional view of the gated trench power MOSFET 300 of Figure 4D after metallization has been formed on the semiconductor layer structure. MOSFET 300 is substantially identical to MOSFET 200 previously described, but is fabricated using a slightly different technique.

[0210] Referring to FIG. 4A, sequentially stacked highly doped (n + ) n-type silicon carbide substrate 310, lightly doped (n - ) A semiconductor layer structure 350 is formed that includes a silicon carbide drift region 320, a moderately doped p-type well layer 330, and a moderately doped (n) n-type silicon carbide source layer 340. The semiconductor layer structure 350 may be identical to the semiconductor layer structure 250 described above, except that the n-type silicon carbide source layer 340 is not as highly doped in this embodiment. For example, the n-type silicon carbide source layer 340 may be as highly doped as 1×10 20 atoms / cm 3 It can be doped to a concentration of less than 1000 nm.

[0211] 4B, a plurality of gate trenches 360 are formed, which may be identical to gate trenches 260 described above. The gate trenches 360 convert the n-type silicon carbide layer 340 into a plurality of spaced apart n-type regions 342 and convert the moderately doped p-type silicon carbide layer 330 into a plurality of p-wells 332. + A deep shield region 370 of silicon carbide is formed beneath each gate trench 360 by ion implantation.

[0212] Referring to FIG. 4C, a photoresist implant blocking mask 376 is formed over the structure of FIG. 4B and the photoresist implant blocking mask 376 is patterned to form a plurality of stripe-shaped openings 378 therein. A higher energy, high dose non-tilted (i.e., perpendicular to the surface) ion implant is performed to further dope the exposed portions of the deep shielding regions 370. The mask 376 can be removed once the ion implantation step is complete. The high energy, high dose ion implant may be, for example, 1×10 13 ~1×10 15 In another exemplary embodiment, the implantation energy is 1×10 13 ~1x10 15 In either case, the voltage may be 200 kV to 2000 kV, 400 kV to 2000 kV, or 500 kV to 2000 kV.

[0213] 4D, during the high energy ion implantation step shown in FIG. 4C, some of the p-type ions reflect or "scatter" off the top surface of the deep shielding region 370 and implant into the portion of the sidewall of the gate trench 360 exposed by the opening 378 in the mask 376. These scattered ions convert the exposed top of the n-type drift region 320 to p-type material that electrically connects the deep shielding region 370 to the p-well 332, and also increase the p-type doping concentration of the portion of the deep shielding region 370 and the p-well 332 exposed by the opening 378. As a result, stripes 371 of p-type material are formed on the exposed surface of the semiconductor layer structure 350. These stripes 371 extend in a second direction (y-direction) to intersect the gate trench 360. Generally speaking, the reflected ions tend to reflect off the bottom of the exposed sidewall of the gate trench 360, and therefore, in some cases, the stripes 371 may not extend into the source region 342. This is because not enough p-type ions are reflected to the exposed portion of the source region 342, as shown in FIG. 4D. Thus, the stripes 371 may be discontinuous stripes. The stripes 371 of heavily doped p-type material thus electrically connect the deep shield region 370 to the p-well 332, and thus act as deep shield connection pattern 372. The ion implantation described above in connection with FIG. 4C is performed at a dose high enough to convert the exposed sidewalls of the source region 342 into heavily doped p-type regions such that the stripes 371 of heavily doped p-type material extend all the way to the top surface of the semiconductor layer structure 350, as shown in FIG. 4D.

[0214] 4E and 4F, a gate oxide layer 362 and a gate electrode 364 are formed in the gate trench 360, followed by the formation of an intermetal dielectric layer 366, a source contact 380, and a drain contact 382. The gate oxide layer 362, the gate electrode 364, the intermetal dielectric layer 366, the source contact 380, and the drain contact 382 can be formed in the same manner as described above in connection with FIG. 2E and FIG. 2F. Therefore, further description is omitted. The gate contact (not shown) can also be formed in a conventional manner. As shown in FIG. 4F, the deep shield connection pattern 372 may not extend completely through the sidewall of the gate trench 360, but instead only on the surface region of the sidewall. Furthermore, in this embodiment, the deep shield connection pattern 372 may not extend to the source region 342.

[0215] 2A-2F, the deep shield connection patterns 372 occupy only 15%-25% of the surface area of ​​the sidewalls of the gate trenches 260. In other embodiments, the extent of the deep shield connection patterns 372 in the first direction may be 10%-30%, 10%-40%, 20%-40%, or 30%-40% of the extent of the sidewall area of ​​the gate trenches 260 between the deep shield connection patterns 372. All such embodiments may provide improved performance compared to the MOSFET 100 of FIGS. 1A-1D.

[0216] Figures 4G and 4H illustrate a method of forming a MOSFET 300' that is a modified version of MOSFET 300 described above in connection with Figures 4A-4F. In particular, Figure 4G is a schematic perspective view corresponding to Figure 4A, and Figure 4H is a schematic perspective view corresponding to Figure 4A.

[0217] As shown in FIG. 4G, in this alternative embodiment, the moderately doped p-type well layer 330 of FIG. 4A is grown as a thicker moderately doped p-type well layer 330′, which is different from the heavily doped (n +A heavily doped (n) n-type silicon carbide source layer 340 is selectively implanted into the moderately doped p-type well layer 330' using an implant mask (not shown). + ) n-type silicon carbide pattern 340'. As a result, the moderately doped p-type well layer 330' includes a plurality of upwardly extending stripes 334 that extend to the top surface of the semiconductor layer structure 350.

[0218] As shown in Figure 4H, after the processing steps previously described in connection with Figures 4B and 4C are performed, the structure shown in Figure 4H is formed. A lower dose ion implantation step can be performed such that the stripe of p-type material formed by scattering of the ions does not extend to the sidewalls of the gate trench 360, but instead extends only onto the p-well 332. The upwardly extending stripe 334 provides a p-type connection to the top surface of the semiconductor layer structure 350. MOSFET 300' may be otherwise identical to MOSFET 300, and therefore further description thereof will be omitted.

[0219] Figure 5A is a schematic cross-sectional view of a trench-gated power MOSFET 400 according to a further embodiment of the invention, the cross-section being taken along a plane defined by the top surface of the semiconductor layer structure of the device, and Figure 5B is a schematic perspective view of a small region (region 402 in Figure 5A) of the trench-gated power MOSFET 400 of Figure 5A.

[0220] 5A, a top view of a semiconductor layer structure 450 of a device is shown. A plurality of gate trenches 460 extend parallel in a first direction across the top surface of the semiconductor layer structure 450. A plurality of source trenches 490 extend parallel in a second direction across the top surface of the semiconductor layer structure 450. Although the source trenches 490 are shown extending perpendicular to the gate trenches 460, embodiments of the invention are not limited in this respect.

[0221] Referring to FIG. 5B, the gate trench power MOSFET 400 includes sequentially stacked, highly doped (n +) n-type silicon carbide substrate 410, lightly doped (n - ) silicon carbide drift region 420, a moderately doped p-type well layer 430, and a heavily doped (n + 3.) n-type silicon carbide source layer 440. These layers 410, 420, 430, 440 may be formed in the same manner and have the same characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the previously described gated trench power MOSFET 100, and therefore will not be described further. The substrate 410, drift region 420, well layer 430 and source layer 440 constitute a semiconductor layer structure 450.

[0222] Both the gate trench 460 and the source trench 490 extend through the source layer 440 to define the source region 442 and through the p-type well layer 430 to define the p-well 432. The gate trench 460 and the source trench 490 also extend to the top surface of the drift region 420. In some embodiments, the gate trench 460 and the source trench 490 may have the same depth from the top surface of the semiconductor layer structure 450 and / or may be formed by the same etching process. In this embodiment, the source trench 490 does not extend all the way to the gate trench 460 such that a pillar 404 of semiconductor material is provided on either side of each gate trench 450 where the gate trench 460 intersects with the source trench 490. The pillar 404 provides a wall between each gate trench 490 and the intersecting source trench 490 on which a gate oxide layer is formed, as described below. Thus, each source trench 490 comprises a segmented source trench including a plurality of collinear spaced apart segments.

[0223] A gate oxide layer 462 and a gate electrode 464 are formed in the gate trenches 460. The gate oxide layer 462 may be formed by oxidation or deposition on the bottom surface and sidewalls of each gate trench 460. A gate electrode 464 is formed on the gate oxide layer 462 to fill each gate trench 460. In the illustrated embodiment, the gate oxide layer 462 and the gate electrode 464 extend continuously through each gate trench 460. A respective projection 484 of the source contact 480 is formed in each source trench 490. In some embodiments, the source contact 480 may be a monolithic source contact 480 that includes a downward projection 484 that extends into each source trench 490. FIG. 5B does not show the portion of the source contact 480 above the projection 484, but only shows the two downward projections 484 that extend into the first and second portions of the segmented source trench 490. It can be seen that an intermetal dielectric pattern (not shown) is provided on the upper surface of the semiconductor layer structure and the gate electrode separating the gate electrodes 464 from the source contacts 480, and that a protruding portion 484 of the source contact 480 extends through an opening in the intermetal dielectric pattern to fill the source trench 490. It can also be seen that the MOSFET 400 includes a connection (not shown) between each gate electrode 464 and a gate terminal (not shown), as well as a drain contact (not shown) at the lower end of the semiconductor substrate 410.

[0224] Furthermore, as shown in FIG. 5B, the heavily doped p + Deep shielding regions 492 of silicon carbide are formed beneath each source trench 490. The deep shielding regions 492 may be formed by implanting p-type dopants into the bottom surface of each source trench 490 before the source contacts 480 (including the overhangs 484) are formed. The p-type shielding patterns 492 may be formed by a high energy, high dose ion implantation step that converts the portions of the lightly doped n-type drift region 420 beneath the source trenches 490 into heavily doped p-type regions.

[0225] Similarly, as shown in FIG. 5B, the heavily doped P + Deep shielding regions 470 of silicon carbide may be optionally formed beneath each gate trench 460. Deep shielding regions 470 may be formed by implanting p-type dopants into the bottom surface of each gate trench 490 before the gate oxide layer 462 and gate electrode 464 are formed within the gate trench 460. The p-type shielding patterns 470 may be formed by a high energy, high dose ion implantation step that converts the portions of the lightly doped n-type drift region 420 beneath the gate trench 460 into heavily doped p-type regions. Deep shielding regions 492 and deep shielding regions 470 (if provided) may be formed by the same ion implantation process. As noted above, deep shielding regions 470 may be omitted in some embodiments.

[0226] The bottom ends of the pillars 404 interposed between the gate trench 460 and the source trench 490 may be implanted with p-type ions during an ion implantation process to convert the bottom ends of the pillars to p-type material to provide electrical connections between the deep shielding regions 492 and the deep shielding regions 470 (if provided). In some cases, the bottom ends of the pillars 404 (the regions below each pillar 404) may be implanted with enough p-type ions to provide these electrical connections based on the distribution of a high energy p-type implant. In other cases, an angled ion implant may be used to ensure that the bottom ends of the pillars 404 are converted to p-type material. Of course, if the deep shielding regions 470 are not provided, there may be no reason to convert the bottom ends of the pillars 404 to p-type material.

[0227] MOSFET 400 does not include any deep shield connection pattern because source contact 480 directly contacts deep shield region 492, which in turn directly contacts deep shield region 470. In effect, deep shield region 492 functions both as a deep shield region and as a deep shield connection pattern that electrically connects deep shield region 470 to source contact 480.

[0228] The portion of gate trench 460 adjacent source trench 490 (i.e., pillar 404) will not have a semiconductor channel region therein if the bottom end of the pillar is converted to p-type material. The pitch of source trenches 490 is expected to be such that only about 15%-25% of the surface area of ​​the sidewalls of gate trench 460 is adjacent source trench 490. MOSFET 400 therefore also exhibits improved performance as compared to the conventional MOSFET 1 of FIGS. 1A-1E.

[0229] Figures 5C and 5D show two modified embodiments 400B and 400C, respectively, of the MOSFET 400A of Figures 5A and 5B, Figures 5C and 5D corresponding to the view of Figure 5B.

[0230] As shown in FIG. 5C, MOSFET 400B is similar to MOSFET 400A shown in FIG. 5B. The main difference between the two devices is that MOSFET 400A includes a continuous gate trench 460, gate dielectric layer 462, and gate electrode 464, as well as a segmented source trench 490 and source contact protrusion 484, whereas MOSFET 400B includes a continuous source trench 490 and source contact protrusion 484, as well as a segmented gate trench 460, gate dielectric layer 462, and gate electrode 464. As shown in FIG. 5D, MOSFET 400C combines the approach of segmenting the source trench 490 and source contact protrusion 484 (as done in MOSFET 400A) with the approach of segmenting the gate trench 460, gate dielectric layer 462, and gate electrode 464 (as done in MOSFET 400B). Therefore, further description of these devices is omitted.

[0231] 6A to 6E are schematic cross-sectional views illustrating a method of manufacturing a gate trench power MOSFET 500 according to yet another embodiment of the present invention.

[0232] As shown in FIG. 6A, the heavily doped (n +) n-type silicon carbide substrate 510, lightly doped (n - A semiconductor layer structure 550 may be formed that includes a silicon carbide drift region 520 and a moderately doped silicon carbide p-well 532. + A silicon carbide source region 542 is formed on top of the p-well 532. A gate trench 560 is formed in the upper surface of the semiconductor layer structure 550 in a conventional manner. A deep shielding region 570 is formed below the gate trench 560 by ion implantation. The structure shown in Figure 6A may be identical to the structure of the conventional MOSFET 1 described above in connection with Figure 1B and will not be described further.

[0233] Referring to FIG. 6B, a gate dielectric layer 562 is formed covering the sidewalls and bottom surface of the gate trench 560. The gate dielectric layer 562 may also extend to the top surface of the semiconductor layer structure 550. A gate electrode is then formed to fill the trench 560. A mask (not shown) is then formed and the gate dielectric layer 562 and the gate electrode are etched to form a preliminary source trench 591 exposing a central portion of the deep shielding region 570 (i.e., the central portion of the gate trench 560 is reopened). The preliminary source trench 591 may be continuous (i.e., may extend the entire length of the respective gate trench) or discontinuous (shown as continuous in FIG. 6B). The preliminary source trench 591 may divide each gate electrode into first and second gate electrodes 564-1, 564-2.

[0234] Referring to FIG. 6C, an intermetal insulating pattern 566 is then formed filling the preliminary source trenches 591 and covering exposed portions of the gate electrodes 564-1, 564-2.

[0235] 6D, an etch mask (not shown) is formed and the intermetal insulation pattern 566 is etched to form source trenches 590. Each source trench 590 extends through the center of a respective gate trench 560 and exposes the deep shield region 570.

[0236] 6E, a source contact 580 is formed on the top surface of the device. The source contact 580 includes a downward protrusion 584 that fills the source trench 590. The protrusion 584 directly contacts the deep shield region 570, thus providing a direct electrical connection between the source contact 580 and the deep shield region 570, eliminating the need for a separate deep shield connection pattern.

[0237] By configuring the source contacts 580 to extend through the gate trenches 560 and directly contact the deep shield regions 570, the need for a deep shield connection pattern can be eliminated. In the illustrated embodiment, each downward projection 584 of the source contacts 580 extends the entire length of the respective gate trench 560 in which it resides, and thus the first and second gate electrodes 564-1, 564-2 may be separate contacts that are electrically connected to each other only outside the gate trenches 560. In other embodiments, the downward projections 584 may comprise plugs that do not extend the entire length of the respective gate trenches 560. In such embodiments, the first and second gate electrodes 564-1, 564-2 may be electrically connected to each other in the portion of the gate trench 560 that does not include the plugs 584.

[0238] 7 to 9 are flow charts illustrating a method for manufacturing a gate trench power semiconductor device according to an embodiment of the present invention.

[0239] 7 and 2A-4F, the process may begin with the formation of a wide band gap semiconductor layer structure (Block 600). The semiconductor layer structure may include a substrate and a plurality of semiconductor layers grown on the substrate formed by epitaxial growth and / or ion implantation. The semiconductor layer structure may include a drift region having a first conductivity type. The semiconductor layer structure may further include a well region having a second conductivity type on the drift region and a source region having the first conductivity type on top of the well region. A gate trench is formed in an upper surface of the semiconductor layer structure (Block 610). The gate trench may extend in a first direction and have a bottom surface, a first sidewall extending in the first direction, and a second sidewall extending in the first direction.

[0240] A deep shield region having a second conductivity type is formed in the semiconductor layer structure below the bottom surface of the gate trench (block 620). The deep shield region may be formed by ion implantation. A plurality of spaced apart deep shield connection patterns are formed extending in a second direction and intersecting the deep shield pattern (block 630). In some embodiments, the second direction may be perpendicular to the first direction. A channel region is defined on a sidewall of the gate trench between the deep shield connection patterns.

[0241] 8 and 5A-5D, the process may begin with the formation of a wide band gap semiconductor layer structure (block 700). The semiconductor layer structure may include a substrate and a plurality of semiconductor layers grown on the substrate by epitaxial growth and / or formed by ion implantation. The semiconductor layer structure may include a drift region having a first conductivity type. The semiconductor layer structure may further include a well region having a second conductivity type on the drift region and a source region having the first conductivity type on top of the well region. A plurality of gate trenches are formed in a top surface of the semiconductor layer structure (block 710). The gate trenches may extend in a first direction and be spaced apart from one another in a second direction perpendicular to the first direction. Each gate trench may have a bottom surface, a first sidewall extending in the first direction, and a second sidewall extending in the first direction.

[0242] A plurality of source trenches are also formed in the top surface of the semiconductor layer structure (block 720). In some embodiments, the source trenches may intersect the gate trenches and extend in a second direction. The gate trenches and the source trenches may be formed using a common etching process. A plurality of deep shielding regions having a second conductivity type are formed in the semiconductor layer structure below the bottom surfaces of the source trenches (block 730). The deep shielding regions may be formed by ion implantation. Optionally, a deep shielding region may be formed below each gate trench.

[0243] 9 and 6A-6E, the process may begin with the formation of a wide band gap semiconductor layer structure (Block 800). The semiconductor layer structure may include a substrate and a plurality of semiconductor layers grown on the substrate by epitaxial growth and / or formed by ion implantation. The semiconductor layer structure may include a drift region having a first conductivity type. The semiconductor layer structure may further include a well region having a second conductivity type on the drift region and a source region having the first conductivity type on top of the well region. A gate trench is formed in an upper surface of the semiconductor layer structure (Block 810). The gate trench may extend in a first direction and have a bottom surface, a first sidewall extending in the first direction, and a second sidewall extending in the first direction.

[0244] A deep shielding region having a second conductivity type is formed in the semiconductor layer structure below the bottom surface of the gate trench (block 820). The deep shielding region can be formed by ion implantation. The deep shielding region can be formed by ion implantation. A first gate electrode is formed on a first sidewall of the gate trench (block 830), and a second gate electrode is formed on a second sidewall of the gate trench (block 840). The first and second gate electrodes can be formed as monolithic gate electrodes, and at least a portion of an intermediate portion of the monolithic gate electrode can be removed. A source contact is formed between the first and second gate electrodes (block 850). The source contact can directly contact the deep shielding region.

[0245] FIG. 10 is a plan view of a trench gated power MOSFET. FIG. 11 is a schematic cross-sectional view taken along line A-A' in FIG. 10 showing a trench gated power MOSFET 600-1 according to an embodiment of the present invention. FIG. 12 and FIG. 13 show two modified embodiments 600-2 and 600-3, respectively, of the trench gated power MOSFET 600-1 shown in FIG. 11. FIG. 10 shows groups of elements, rather than all elements, of the trench gated power MOSFET to simplify the drawing.

[0246] 10 and 11, the gate trench power MOSFET 600-1 is a heavily doped (n + ) n-type silicon carbide substrate 610, lightly doped (n - ) silicon carbide drift region 620, and a moderately doped silicon carbide p-well 632. At the top of the p-well 632 is a heavily doped n + A silicon carbide source region 642 is provided. The semiconductor layer structure 650 includes a substrate 610, a drift region 620, a p-well 632, and a source region 642, which may collectively be referred to as a semiconductor layer structure. Each of the p-well 632 and the source region 642 may have a line shape extending longitudinally in a first direction designated as the x-direction. A drain contact 682 is provided on the underside of the substrate 610.

[0247] Between two adjacent p-wells 632, first and second gate structures 668-1 and 668-2 are provided. Each of the first and second gate structures 668-1, 668-2 may have a line shape extending longitudinally in a first (x) direction and spaced apart from each other in a second direction, shown as the y direction. A source contact 680 is provided on and electrically insulated from the first and second gate structures 668-1 and 668-2. A deep shielding region 670 is provided in the drift region 620. Each deep shielding region 670 extends from below the first gate structure 668-1 to below the second gate structure 668-2 and includes a p-type dopant. Each of the first and second gate structures 668-1 and 668-2 vertically overlaps the deep shielding region 670. As used herein, a reference to element A vertically overlapping element B (or similar terminology) means that at least one vertical line can be drawn that intersects both elements A and B. The vertical direction refers to a third direction, designated as the z-direction, that is perpendicular to the major surface of the substrate 610. The layers 610, 620, 632, 674, 670, 680, and 682 may have the same or similar characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the previously described gated trench power MOSFET 500, and therefore further description thereof will be omitted.

[0248] A connection region 686 is provided on the deep shield region 670 to provide a direct electrical connection between the deep shield region 670 and the source contact 680. The connection region 686 projects upward from the deep shield region 670 and separates the first and second gate structures 668-1 and 668-2 from each other. In some embodiments, the connection region 686 projects in the second (y) direction from a central portion of the deep shield region, as shown in FIG. 11 . In some embodiments, the connection region 686 is a semiconductor layer including a p-type dopant. For example, the connection region 686 is a silicon carbide layer including a p-type dopant. The connection region 686 can have a dopant concentration that is higher than the dopant concentration of the deep shield region 670. For example, the dopant concentration of at least a portion of the connection region 686 is greater than 5×10 17 atoms / cm 3 ~5×1020 atoms / cm 3 In some embodiments, the connection region 686 extends substantially the length of the first gate structure 686-1 in plan view, as shown in FIG.

[0249] Each of the first and second gate structures 668-1 and 686-2 includes an inner sidewall adjacent to and facing the connection region 686 and an outer sidewall opposite the inner sidewall. The inner sidewall of the first and second gate structures 668-1 and 686-2 contacts the connection region 686. Each of the first and second gate structures 668-1 and 686-2 also includes a gate electrode 664, a gate dielectric layer 662 defining an outer sidewall, and an inter-gate dielectric layer 663 defining an inner sidewall. The gate dielectric layer 662 also extends between the gate electrode 664 and the deep shielding region 670. In some embodiments, the inter-gate dielectric layer 663 has a thickness in the second (y) direction that is substantially greater than or equal to a thickness of the gate dielectric layer 662 in the second (y) direction. Each of the first and second gate structures 668-1 and 686-2 further includes a capping layer 665 for electrical isolation between the gate electrode 664 and the source contact 680. The gate electrode 664 includes a conductive material (e.g., doped polysilicon, silicided doped polysilicon, metal or composite metal, metal nitride), and each of the gate dielectric layer 662, the inter-gate dielectric layer 663, and the capping layer 665 include an insulating material (e.g., silicon oxide, silicon nitride, and silicon oxynitride).

[0250] 12, the gated trench power MOSFET 600-2 may be very similar to the MOSFET 600-1, with the main difference being that the deep shielding region 670 has a wider width in the second direction. Sidewalls on either side of the deep shielding region 670 may protrude beyond the outer sidewalls of the first and second gate structures 668-1 and 668-2 to further reduce the electric field level in the gate dielectric layer 662 adjacent the bottom corners of the first and second gate structures 668, for example, during reverse blocking operation. The deep shielding region 670 may include portions where the first and second gate structures 668 do not vertically overlap.

[0251] 13, the gated trench power MOSFET 600-3 may be very similar to the MOSFET 600-1, with the main difference being that an additional bottom dielectric layer 669 is provided between the first and second gate structures 668-1 and 668-2 and the deep shielding region 670 to further reduce the electric field level in the gate dielectric layer 662, for example during reverse blocking operation. A central portion of the top surface of each of the bottom dielectric layers 669 may be curved. In some embodiments, the bottom dielectric layer 669 may include a different material than the gate dielectric layer 662. The bottom dielectric layer 669 may include additives such as boron (B), phosphorus (P), barium (Ba), strontium (Sr), sodium (Na), potassium (K), lithium (Li), calcium (Ca), magnesium (Mg), and / or lead (Pb). In some embodiments, the first corner 642c defined by the source region 642 and / or the second corner 620c defined by the drift region 620 may be a rounded corner.

[0252] FIG. 14 is a plan view of the gated trench power MOSFET 600-4, and FIG. 15 is a schematic cross-sectional view of the gated trench power MOSFET 600-4 along line A-A' in FIG. 14 according to an embodiment of the present invention. FIG. 14 shows groups of elements, rather than all elements, of the gated trench power MOSFET 600-4 to simplify the drawing. The gated trench power MOSFET 600-4 may be very similar to the MOSFET 600-1, with the main difference being that the connection region 686 includes a wider upper portion 686u. The width of the upper portion 686u in the second direction is wider than the width of the connection region 686 in the second (y) direction. The upper portion 686u may vertically overlap the inter-gate dielectric layer 663 and at least a portion of the first and second gate structures 668-1 and 668-2, as shown in FIG. 15. The upper portion 686u of the connection region 686 increases the interfacial area with the source contact 680 and therefore forms a low resistance ohmic contact with the source contact 680.

[0253] FIG. 16 is a plan view of the gate trench power MOSFET 600-5, and FIG. 17 is a schematic cross-sectional view of the gate trench power MOSFET 600-5 along line B-B' of FIG. 16 according to an embodiment of the present invention. FIG. 16 shows groups of elements, rather than all elements, of the gate trench power MOSFET 600-5 to simplify the drawing. The gate trench power MOSFET 600-5 may be very similar to the MOSFET 600-1, with the main difference being that the connection region 686 includes a protrusion 686p. The protrusion 686p protrudes in the second (y) direction from the straight portion of the connection region 686 and protrudes into the first and second gate structures 668-1, 668-2. Similar to the top 686u of the connection region 686, the protrusion 686p of the connection region 686 increases the interfacial area with the source contact 680, thus forming a low resistance ohmic contact with the source contact 680. A cross-sectional view of the gate trench power MOSFET 600-5 along line A-A' in FIG. 16 may be substantially identical to one of those shown in FIGS.

[0254] FIG. 18 is a plan view of a gated trench power MOSFET 600-6 in accordance with an embodiment of the present invention. FIG. 18 illustrates groups of elements of the gated trench power MOSFET 600-6, rather than all of the elements, to simplify the drawing. The gated trench power MOSFET 600-6 may be very similar to the MOSFET 600-1, with the primary difference being that the device includes a plurality of collinear spaced apart connection regions 686, each of which is between the first and second gate structures 668-1 and 668-2. The plurality of connection regions 686 are spaced apart from one another in the first (x) direction.

[0255] FIG. 19 is a plan view of a gated trench power MOSFET 600-7 according to an embodiment of the present invention, and FIGS. 20A and 20B are schematic cross-sectional views of the gated trench power MOSFET 600-7 along lines C-C' and D-D' in FIG. 19, respectively. FIG. 19 illustrates groups of elements, rather than all elements, of the gated trench power MOSFET 600-7 to simplify the drawing. Referring to FIGS. 19, 20A, and 20B, portions of a semiconductor layer structure, each including a p-well 632 and a source region 642, are spaced apart from one another and arranged two-dimensionally. Each of these portions can be referred to as a protrusion because it protrudes upward relative to the bottom surface of the first and second gate structures 668-1 and 668-2. In each protrusion, the source region 642 can surround the p-well 632 in plan view. In some embodiments, each protrusion has an approximately hexagonal shape in plan view, as shown in FIG. 19.

[0256] Each protrusion is surrounded by a gate structure including a main gate structure 668m, a first gate structure 668-1, and a second gate structure 668-2. A deep shield region 670 is provided below the gate structures. MOSFET 600-7 includes a plurality of spaced apart connection regions 686 protruding upwardly from deep shield region 670.

[0257] 19 and 20A, the main gate structure 668m is disposed between the sidewalls of the adjacent opposing overhangs and includes a single gate electrode 664m. With reference to FIGS. 19 and 20B, each of the connection regions 686 is disposed adjacent to an edge of each of the overhangs and divides the single gate electrode 664m into the gate electrodes 664 of the first and second gate structures 668-1 and 668-2. In some embodiments, each of the connection regions 686 can include a wider upper portion (e.g., upper portion 686u in FIG. 15).

[0258] 21, 22 and 25 are schematic cross-sectional views illustrating a method for fabricating a gated trench power MOSFET according to an embodiment of the present invention, and FIGS. 23 and 24 are plan views of intermediate structures of gated trench power MOSFETs 600-5 and 600-7.

[0259] Referring to FIG. 21, the lightly doped (n - ) silicon carbide drift region 620 is a heavily doped (n + 25 ) n-type silicon carbide substrate 610. For example, drift region 620 may be formed by an epitaxial growth process using substrate 610 as a seed layer. Drift region 620 may be formed to have a sufficient thickness to form p-well and source regions (e.g., p-well 632 and source region 642 in FIG. 25 ) on top of drift region 620 by a subsequent process. After forming drift region 620, deep shielding regions 670 may be formed in drift region 620. Each of deep shielding regions 670 may have a line shape extending longitudinally in a first direction, as shown in FIG. 10 . Deep shielding regions 670 are formed by adding p-type dopants to drift region 620 by, for example, an ion implantation process. In some embodiments, during the ion implantation process to form deep shielding regions 670, preliminary connection regions 686′ including p-type dopants may be formed on deep shielding regions 670.

[0260] 22, a first gate trench 694-1 and a second gate trench 694-2 are formed on the top of the drift region 620 to form the connection region 686. The first and second gate trenches 694-1 and 694-2 are formed by etching the drift region 620 and / or the preliminary connection region 686'. A pair of first and second gate trenches 694-1 and 694-2 are formed on the single deep shielding region 670, and the first and second gate trenches 694-1 and 694-2 expose both sides of the deep shielding region 670 and the connection region 686. Each of the first and second gate trenches 694-1 and 694-2 and the connection region 686 may have a line shape extending longitudinally in a first (x) direction to form the MOSFETs 600-1, 600-2, 600-3. During etching of drift region 620 and / or pre-connection region 686', connection region 686 may be formed to have a wider top portion (eg, top portion 686u in FIG. 15).

[0261] After forming the first and second gate trenches 694-1 and 694-2, p-type dopants can be added to the connection region 686, for example, by an ion implantation process. For example, two separate angled ion implantation processes (represented by angled arrows in FIG. 22 ) can be performed to add p-type dopants to the connection region 686 through both sidewalls of the connection region 686 exposed to the first and second gate trenches 694-1 and 694-2. These angled ion implantation processes increase the p-type dopant concentration of the connection region 686, thereby increasing its electrical conductivity. Furthermore, the angled ion implantation processes slightly damage both sidewalls of the connection region 686 such that the both sidewalls of the connection region 686 are oxidized relatively quickly by a subsequent oxidation process. As a result, the inter-gate dielectric layer 663 formed on both sidewalls of the connection region 686 can be thicker than the gate dielectric layer 662 formed on the p-well 632 and the source region 642, as shown in FIG. 11 .

[0262] 23 and 24 are plan views corresponding to FIG. 22, showing intermediate structures of MOSFETs 600-5 and 600-7, respectively. Referring to FIG. 23, a connection region 686 is formed between a first gate trench 694-1 and a second gate trench 694-2, and includes protrusions 686p protruding in the second (y) direction from a straight portion of the connection region 686. The protrusions 686p protrude into the first and second gate trenches 694-1, 694-2 and are spaced apart from each other in the first (x) direction.

[0263] 24, a gate trench is formed exposing the deep shield region 670 by etching the drift region 620 and / or the preliminary connection region 686'. The gate trench defines a protrusion 620p of the drift region 620 and a connection region 686 protruding upward from the drift region 620. The gate trench includes a main gate trench 694m between the sidewalls of two adjacent protrusions 620p and first and second gate trenches 694-1 and 694-2 between the protrusion 620p and the connection region 686. Each of the protrusions 620p of the drift region 620 can have a hexagonal shape in plan view.

[0264] 25, a p-well 632 is formed by adding a p-type dopant to the top of drift region 620, and a source region 642 is formed by adding an n-type dopant to the top of p-well 632. Each of p-well 632 and source region 642 can be formed by, for example, an ion implantation process.

[0265] In some embodiments, the p-well 632 and the source region 642 are formed on top of the drift region 620 before the first and second gate trenches 694-1 and 694-2 are formed.

[0266] Referring again to FIG. 11, after forming the p-well 632 and the source region 642, an inter-gate dielectric layer 663 and a gate dielectric layer 662 are formed in the first and second gate trenches 694-1, 694-2, for example, by an oxidation process, and then a gate electrode 664 and a capping layer 665 are formed in the first and second gate trenches 694-1, 694-2.

[0267] 13, in some embodiments, a bottom dielectric layer 669 may be formed in the first and second gate trenches 694-1 and 694-2 prior to forming the inter-gate dielectric layer 663 and the gate dielectric layer 662. The bottom dielectric layer 669 may be formed by an oxidation process, a thin film deposition process, and / or an annealing process. The bottom dielectric layer 669 may include additives, such as boron (B), phosphorus (P), barium (Ba), strontium (Sr), sodium (Na), potassium (K), lithium (Li), calcium (Ca), magnesium (Mg), and / or lead (Pb). A subsequent etching process may be performed to partially remove the bottom dielectric layer 669 such that the sidewalls of the first and second gate trenches 694-1 and 694-2 are exposed. When the bottom dielectric layer 669 is formed by an oxidation process, a first corner 642c defined by the source region 642 and / or a second corner 620c defined by the drift region 620 may be rounded by the oxidation.

[0268] 15 , in some embodiments, a portion of the capping layer 665 is removed to expose the tops of the sidewalls on either side of the connection region 686, and then an upper portion 686u is formed on the capping layer 665. For example, the upper portion 686u may be grown from the connection region 686 via an epitaxial growth process.

[0269] 26 and 27 are schematic cross-sectional views illustrating a method for forming drift region 620 and deep shielding region 670 according to an embodiment of the present invention. Referring to FIG. 26, a lower portion of drift region 620 may be formed on substrate 610, for example, by an epitaxial growth process using substrate 610 as a seed layer, and then deep shielding region 670 may be formed by an ion implantation process. Referring to FIG. 27, an upper portion of drift region 620 may be formed on lower portion of drift region 620 and deep shielding region 670, for example, by an epitaxial growth process using lower portion of drift region 620 and deep shielding region 670 as a seed layer. Thereafter, a gate trench power MOSFET may be formed by the same process as described in relation to FIG. 21 to FIG. 25.

[0270] 28 is a schematic cross-sectional view of a gated trench power MOSFET 700 according to an embodiment of the present invention. The gated trench power MOSFET 700 may be very similar to MOSFET 500, with the primary difference being that MOSFET 700 includes a connection region 786 that includes a semiconductor material (e.g., doped polysilicon).

[0271] The MOSFET 700 is a heavily doped (n + ) n-type silicon carbide substrate 710, lightly doped (n - ) silicon carbide drift region 720, and a moderately doped silicon carbide p-well 732. +A silicon carbide source region 742 is provided on top of the p-well 732. Between two adjacent p-wells 732, first and second gate structures 768 are provided. Each of the first and second gate structures 768 includes a gate dielectric layer 762, a gate electrode 764, and an intermetal insulation pattern 766. A source contact 780 is provided on the first and second gate structures 768. A deep shielding region 770 is provided in the drift region 720. Each of the first and second gate structures 768 vertically overlaps the deep shielding region 770. A connection region 786 is provided on the deep shielding region 770 to provide a direct electrical connection between the deep shielding region 770 and the source contact 780. A drain contact 782 is provided on the bottom surface of the substrate 710. All layers shown in FIG. 28, except for the connection region 786, may have similar or identical characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the previously described gate trench power MOSFET 500, and therefore further description thereof will be omitted.

[0272] MOSFET 700 can be formed in a manner similar to that described in connection with Figures 6A-6D. After an intermediate structure of MOSFET 700 similar to that shown in Figure 6D, a connection region 786 is formed on deep shield region 770 between first and second gate structures 768, for example by an epitaxial growth process.

[0273] 29-30 are flow charts illustrating a method for manufacturing a gate trench power semiconductor device according to an embodiment of the present invention.

[0274] 29 and 21, 22, and 25, the process may begin with the formation of a wide band gap semiconductor layer structure (Block 1000). The semiconductor layer structure may include a substrate and a plurality of semiconductor layers formed on the substrate by epitaxial growth and / or ion implantation processes. The semiconductor layer structure may include a drift region having a first conductivity type.

[0275] A deep shield region having a second conductivity type is formed in the drift region (block 1010). The deep shield region may be formed by an ion implantation process. A connection region is formed on the deep shield region, projecting upwardly from the deep shield region (block 1020). The connection region is formed by forming a pair of gate trenches on the deep shield region. The pair of gate trenches expose the deep shield region. A gate structure is formed on opposing sidewalls of the connection region (block 1030).

[0276] 30 and 6A-6D and 27, the process may begin with the formation of a wide band gap semiconductor layer structure (Block 1100). The semiconductor layer structure may include a substrate and a plurality of semiconductor layers formed on the substrate by epitaxial growth and / or ion implantation processes. The semiconductor layer structure may include a drift region having a first conductivity type.

[0277] A deep shield region having a second conductivity type is formed in the drift region (block 1110). A pair of gate structures is formed on the deep shield region (block 1120). The gate structures may each extend longitudinally in a first direction and may be spaced apart from one another in a second direction perpendicular to the first direction. A portion of the deep shield region is exposed between the pair of gate structures. A connection region is formed on the deep shield region (block 1130). The connection region may be grown from the deep shield region by a selective epitaxial growth process.

[0278] FIG 31A is a plan view of a gated trench power MOSFET 800-1 according to some embodiments of the present invention, and FIG 31B is a plan view of a gate structure of the gated trench power MOSFET 800-1. FIG 32 is a schematic cross-sectional view taken along line E-E' in FIG 31. For ease of illustration, some elements of FIG 32 (e.g., capping layer 865 and source contact 880) are omitted from FIG 31A.

[0279] 31A, 31B, and 32, a gate trench power MOSFET 800-1 has a highly doped (n + ) n-type silicon carbide substrate 810, lightly doped (n - ) silicon carbide drift region 820, moderately doped silicon carbide p-well regions 832_1 and 832_2, and heavily doped n + The substrate 810 includes a silicon carbide substrate 842. Each of the source regions 842 may be on top of a respective one of the well regions 832_1 and 832_2. The drift region 820, the well regions 832_1, 832_2, and the source region 842 are collectively referred to as a semiconductor layer structure. A drain contact 882 may be provided on the bottom surface of the substrate 810. A gate trench 860 and a gate structure 868 within the gate trench 860 are provided on top of the semiconductor layer structure. Well regions 832_1 and 832_2 may be provided on either side of the gate structure 868. A source contact 880 electrically connected to the well regions 832_1 and 832_2 and the source region 842 may also be provided on the well regions 832_1 and 832_2 and on the source region 842.

[0280] As shown in FIGS. 31A-31B , the gate trench 860 and gate structure 868 can include portions that are obliquely sloped at an angle α in plan view. The angle α can be adjusted to provide consistent characteristics (e.g., threshold voltage) of the MOSFET 800-1. For example, the angle α can be in a range of about 100 degrees to about 140 degrees (e.g., 100 degrees, 105 degrees, 110 degrees, 115 degrees, 120 degrees, 125 degrees, 130 degrees, 135 degrees, or 140 degrees), or in a range of about 110 degrees to about 130 degrees. In some embodiments, the angle α can be about 120 degrees to maintain the same channel orientation throughout the device to increase cell density.

[0281] In some embodiments, the gate trench power MOSFET 800-1 may include a plurality of island well regions 832_1 spaced apart from one another, and the gate trench 860 may surround the plurality of island well regions 832_1, as shown in FIG. 31A. Each of the island well regions 832_1 may have a parallelogram shape with four internal oblique angles in a plan view and may have a parallelogram-shaped top surface. The gate trench power MOSFET 800-1 may also include a plurality of gate trenches 868 spaced apart from one another, and each of the elongated well regions 832_2 each disposed between a pair of the gate trenches 868. As shown in FIG. 31A, each of the elongated well regions 832_2 may extend continuously between its associated pair of the gate trenches 860. Thus, the gate trench power MOSFET 800-1 may include well regions 832_1 and 832_2 having different shapes and dimensions, as shown in FIG. 31A.

[0282] The gate structure 868 may include a gate dielectric layer 862 that defines an outer wall of the gate structure 868, a gate electrode 864, and a capping layer 865 on the gate electrode 864. The gate electrode 864 includes a conductive material (e.g., doped polysilicon, silicided doped polysilicon, a metal or composite metal, a metal nitride), and each of the gate dielectric layer 862 and the capping layer 865 includes an insulating material (e.g., silicon oxide, silicon nitride, and silicon oxynitride).

[0283] Deep shield regions 870 containing p-type dopants are provided in the drift region 820. Each of the gate structures 868 vertically overlaps a respective deep shield region 870. As used herein, a reference to element A vertically overlapping element B (or similar terminology) means that at least one vertical line can be drawn that intersects both elements A and B. The vertical direction refers to a direction designated as the z direction that is perpendicular to the major surface of the substrate 810. The layers 810, 820, 832_1, 832_2, 842, 862, 864, 865, 870, 880, and 882 may have the same or similar characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the previously described gate trench power MOSFET 600-1, and therefore further description thereof will be omitted.

[0284] In some embodiments, the sidewalls of the gate trench 860 may be along the same crystal plane of the semiconductor material of the semiconductor layer structure. For example, referring to FIGS. 31A-31B, the silicon carbide substrate 810 may comprise a 4H silicon carbide substrate, and the drift layer 820 and well regions 832_1 and 832_2 are grown on the substrate 810 by epitaxial growth. The gate trench 860 may be formed by forming a trench in the top surface of the semiconductor layer structure by an etching process. The section of the gate trench extending in the y-direction of FIG. 31A may be formed such that its sidewalls are cut along the a-plane or m-plane of the silicon carbide semiconductor layer structure. By selecting the angle α to be about 120 degrees, the section of the gate trench extending approximately in the x-direction of FIG. 31A is also formed such that its sidewalls are cut along the a-plane or m-plane of the silicon carbide semiconductor layer structure. As a result of this configuration, MOSFET 800-1 can advantageously have consistent electrical characteristics (eg, threshold voltage) because the channels have the same orientation within the silicon carbide lattice structure.

[0285] It will be appreciated that the angle α need not be exactly 120 degrees to obtain this benefit. For example, similar performance can be achieved when the angle α is 118 degrees or 122 degrees. However, the further the angle α is from 120 degrees, the less consistent the electrical performance across the device becomes. Thus, in some embodiments, the angle α may be between about 110 degrees and about 130 degrees, or more preferably, between about 115 degrees and about 125 degrees.

[0286] Thus, according to some embodiments, there is provided a power semiconductor device including a semiconductor layer structure including a drift region including a wide band gap semiconductor material and having a first conductivity type. A gate trench is provided in an upper portion of the semiconductor layer structure and includes first and second sections defining an oblique angle in plan view. Sidewalls of both the first and second sections can extend along the same crystallographic plane within the semiconductor layer structure.

[0287] As further shown in FIG. 31A, the well regions 832_1 and 832_2 in the gated trench power MOSFET 800-1 include both upwardly extending island well regions 832_1 and elongated well regions 832_2 in the form of elongated upwardly extending structures that extend beside the multiple upwardly extending island well regions 832_1. In some embodiments, the elongated well regions 832_2 may have a zigzag or sawtooth structure, as shown in FIG. 31A. The elongated well regions 832_2 may be spaced apart from one another. Multiple island well regions 832_1 may be located between each pair of adjacent elongated well regions 832_2. The island well regions 832_1 may be surrounded on both sides by gate structures 868.

[0288] As shown in FIG. 31A, each elongated well region 832_2 may include a sidewall including a first section and a second section. The first section may be parallel to the second section, but may not be coplanar with the second section. The sidewall of each elongated well region 832_2 may also include a third section. The third section may not be parallel to the first and second sections. The first and second sections may be connected to each other by the third section. An intersection of the third section with one of the first and second sections may define an obtuse angle. The oblique angle may range from about 115 degrees to about 125 degrees in plan view. An intersection of the third section with the other of the first and second sections may define an oblique angle. Each island well region 832_1 may include first sidewalls that are parallel to each other and to a first section of the elongated well region 832_2, and may include second sidewalls that are parallel to each other and to a third section of the elongated well region 832_2.

[0289] Fig. 33 is a plan view of a gated trench power MOSFET 800-2 according to some embodiments of the present invention, and Fig. 34 is a schematic cross-sectional view taken along line F-F' in Fig. 33. For ease of illustration, some elements of Fig. 34 (e.g., capping layer 865 and source contact 880) are omitted from Fig. 33. The gated trench power MOSFET 800-2 may be similar to MOSFET 800-1, with the main difference being that MOSFET 800-2 includes a common deep shield region 870c.

[0290] 33 and 34, the common deep shielding region 870c may include a first portion 870-1 (also referred to as a first deep shielding region) and a second portion 870-2 (also referred to as a second deep shielding region). Each of the first portion 870-1 and the second portion 870-2 may extend continuously from the lower surface of the gate structure 868 to the source contact 880 such that the common deep shielding region 870c directly contacts the source contact 880. Since no source region may be formed in the common deep shielding region 870c, the tops of the first portion 870-1 and the second portion 870 may directly contact the side of the gate structure 868, including the top of the side of the gate structure 868, and the common deep shielding region 870c may extend continuously between the side of the gate structure 868, as shown in FIG. 33 shows that the gated trench power MOSFET 800-2 includes a single common deep shield region 870c, the gated trench power MOSFET 800-2 may include multiple common deep shield regions 870c. For example, at least one common deep shield region 870c may be provided along each elongated well region 832_2, or multiple common deep shield regions 870c may be provided along each elongated well region 832_2. The number of common deep shield regions 870c in the MOSFET 800-2 and the location of each such common deep shield region 870c may be determined taking into consideration the desired channel area and the resistance between the common deep shield region 870c and the source contact 880. In some embodiments, the common deep shield region 870c may have a higher concentration of p-type dopant than the well regions 832_1 and 832_2. The well regions 832_1 and 832_2 and the common deep shield region 870c are electrically connected to each other via a source contact 880.

[0291] FIG. 35 is a plan view of a gated trench power MOSFET 900-1 according to some embodiments of the present invention, and FIG. 36A and FIG. 36B are schematic cross-sectional views taken along lines G-G' and H-H', respectively, of FIG. 35. For ease of illustration, some elements of FIG. 36A and FIG. 36B (e.g., capping layer 965 and source contact 980) are omitted from FIG. 35. The gated trench power MOSFET 900-1 may be similar to the MOSFET 600-7 shown in FIG. 19, with the main difference being that the MOSFET 900-1 includes a common deep shield region 970c and does not include the connection region 686 of the MOSFET 600-7.

[0292] 35, 36A, and 36B, MOSFET 900-1 includes well regions 932 extending upward from drift region 920 and source regions 942 on top of well regions 932. Each of well regions 932 may have a hexagonal shape in plan view. Each of well regions 932 may have a hexagonal top surface. Gate trench 960 surrounds well region 932 in plan view, and gate trench 960 and gate structure 968 within gate trench 960 include portions that are obliquely inclined at angle α′ in plan view. For example, angle α′ may be in the range of about 100 degrees to about 140 degrees (e.g., 100 degrees, 105 degrees, 110 degrees, 115 degrees, 120 degrees, 125 degrees, 130 degrees, 135 degrees, or 140 degrees). In some embodiments, the angle α' may be between about 110 degrees and about 130 degrees, or may be about 120 degrees.

[0293] A deep shielding region 970 is provided below the gate structure 968, and a common deep shielding region 970c is provided between a portion of the gate structure 968. The common deep shielding region 970c may have a hexagonal shape in plan view and may be surrounded by the gate dielectric layer 962. The common deep shielding region 970c may have a hexagonal upper surface. The common deep shielding region 970c may include a first portion 970-1 and a second portion 970-2, each of which may extend continuously from the lower surface of the gate structure 968 to the source contact 980, thereby directly contacting the source contact 980. A source region may not be formed in the common deep shielding region 970c, and therefore the tops of the first portion 970-1 and the second portion 970-2 may directly contact the side of the gate structure 968, including the top of the side of the gate structure 968, as shown in FIG. 36B.

[0294] FIG. 37 is a plan view of a gated trench power MOSFET 900-2 according to some embodiments of the present invention. The gated trench power MOSFET 900-2 may be similar to the MOSFET 900-1 shown in FIG. 35, FIG. 36A, and FIG. 36B, except for the shapes of the well regions 932 and the common deep shield regions 970c. The source region 942 may be in the upper part of the well region 932. Each of the well regions 932 may have an octagonal shape, and each of the common deep shield regions 970c may have a rectangular shape in plan view. Each of the well regions 932 may have an octagonal top surface, and each of the common deep shield regions 970c may have a rectangular top surface. The gate trench 960 and the gate structure 968 may include portions that are obliquely inclined at an angle α″ in plan view. For example, the angle α″ may range from about 100 degrees to about 140 degrees (e.g., 100 degrees, 105 degrees, 110 degrees, 115 degrees, 120 degrees, 125 degrees, 130 degrees, 135 degrees, or 140 degrees). In some embodiments, the angle α″ may be about 135 degrees. Cross-sectional views along lines I-I′ and J-J′ in FIG. 37 may be substantially similar to those shown in FIGS. 36A and 36B, respectively.

[0295] FIG. 38 is a plan view of a gated trench power MOSFET 900-3 according to some embodiments of the present invention. The gated trench power MOSFET 900-3 may be similar to the MOSFET 900-1 shown in FIG. 35, FIG. 36A, and FIG. 36B, except for the shape of the well regions 932 and the common deep shielding region 970c. The source region 942 may be in the upper part of the well region 932. Each of the well regions 932 may have a circular shape in plan view, and each of the common deep shielding regions 970c may have a generally rectangular shape with curved sides. The gate trench 960 and the gate structure 968 are provided to extend along the outer surface of the well region 932. The cross-sectional views along the lines K-′K and L-L′ in FIG. 38 may be substantially the same as those shown in FIG. 36A and FIG. 36B, respectively.

[0296] According to some embodiments of the present invention, the gated trench power MOSFET may include a Schottky contact to provide a bypass path between the P junction and the N junction. The Schottky contact may result in lower bulk current (hence lower switching losses) and / or allow higher current to flow in third quadrant operation (negative drain bias applied). The Schottky contact may be provided in a region where the distance between the gate structures is relatively long (e.g., the region where the common deep shield region 970c is provided).

[0297] FIG. 39 is a schematic cross-sectional view of a gated trench power MOSFET 900-1A. The cross-sectional view shown in FIG. 39 is similar to that shown in FIG. 35, with the main difference being that the power MOSFET 900-1A includes a Schottky contact 990. The Schottky contact 990 extends through the common deep shield region 970c and contacts the drift region 920 below the common deep shield region 970c. In some embodiments, the depth of the Schottky contact 990 may be equal to the depth of the common deep shield region 970c, as shown in FIG. 39. The Schottky contact 990 may include various metals or layered stacks of metals (e.g., Ti, Ni, W, or Pt) that are typically processed at moderate temperatures to avoid ohmic characteristics.

[0298] FIG. 40 is a schematic cross-sectional view of a gated trench power MOSFET 900-1B. The MOSFET 900-1B may be similar to the MOSFET 900-1A shown in FIG. 39, except that the MOSFET 900-1B includes a first deep shielding region 970-1 and a second deep shielding region 970-2 that are spaced apart from each other instead of a common deep shielding region 970c. A portion of the drift region 920 separates the first deep shielding region 970-1 from the second deep shielding region 970-2. Each of the first deep shielding region 970-1 and the second deep shielding region 970-2 may extend continuously from a bottom surface of the gate structure 968 to a top of the source region 942. A Schottky contact 990' may be provided on the first deep shielding region 970-1 and the second deep shielding region 970-2 and may directly contact the first deep shielding region 970-1, the second deep shielding region 970-2, and the portion of the lift region 920 between the first deep shielding region 970-1 and the second deep shielding region 970-2. The Schottky contacts 990 and 990' may have any depth between those shown in FIGS.

[0299] FIG. 41A is a plan view of a gate trench power MOSFET 1000 according to some embodiments of the present invention, and FIG. 41B is a plan view of a gate structure of the gate trench power MOSFET 1000. The gate trench power MOSFET 1000 may be similar to the MOSFET 800-1 shown in FIG. 31A, with the main difference being that the gate trench includes a plurality of main trenches 1060m and a plurality of connection trenches 1060c. The main trenches 1060m may be spaced apart from each other in the X direction and extend longitudinally in the Y direction. Each of the connection trenches 1060c connects two adjacent main trenches 1060m. A main gate structure 1068m may be provided in each of the main trenches 1060m, and a connection gate structure 1068c may be provided in each of the connection trenches 1060c. The main gate structure 1068m and the connecting gate structure 1068c may have the same structure as the gate structure 868 (see FIG. 32). The inclusion of the connecting gate structure 1068c between the gate structures 1068m increases the channel area of ​​the device. The main trench 1060m and the connecting trench 1060c may surround multiple p-well regions 1032. A source region 1042 may be provided on top of each of the p-well regions 1032.

[0300] The MOSFET 1000 may include a wide region 1075 in which no gate trench or p-well region 1032 is provided. The wide region 1075 may be used for various purposes. In some embodiments, a common deep shield region 1070c may be provided in the wide region 1075. Due to the wide region 1075, the connecting trenches 1060c connecting two adjacent main trenches 1060m may be spaced apart from each other in the Y direction by a non-uniform distance.

[0301] 41B, the main trench 1060m and the connecting gate trench 1060c may be connected to form an oblique angle β in a plan view. The angle β may range from about 100 degrees to about 140 degrees (e.g., 100 degrees, 105 degrees, 110 degrees, 115 degrees, 120 degrees, 125 degrees, 130 degrees, 135 degrees, or 140 degrees). In some embodiments, the angle β may be from about 110 degrees to about 130 degrees, or may be about 120 degrees.

[0302] The cross-sectional views along lines M-M' and N-N' in Figure 41A may be substantially identical to the cross-sectional views shown in Figures 36A and 36B, respectively. The layers 1032 and 1042 may have the same or similar characteristics (e.g., thickness, doping density, etc.) as the corresponding layers of the aforementioned gated trench power MOSFET 900-1, and the primary gate structure 1068m and the connecting gate structure 1068c may include layers that are the same or similar to the layers of the gate structure 968 of the aforementioned gated trench power MOSFET 900-1.

[0303] FIG 42 is a flow chart illustrating a method of fabricating a gated trench power semiconductor device 800-2 according to an embodiment of the present invention. FIGs 43-45 are cross-sectional views illustrating the method. The gated trench power MOSFETs 800-1, 900-1, 900-2, 900-3, and 1000 may be formed by a method the same as or similar to that described in connection with FIGs 42-45.

[0304] 42 and 43, the method may begin with the formation of a semiconductor layer structure (block 2100). The semiconductor layer structure may include a substrate 810 (e.g., a heavily doped silicon carbide substrate) and a drift region 820 (e.g., a lightly doped silicon carbide drift region) formed on the substrate 810. The substrate 810 and the drift region 820 may each have a first conductivity type (e.g., n-type). The method may also include the formation of a well region (block 2110). The well region 832 may be formed on the drift region 820 by performing an epitaxial growth process using the drift region 820 as a seed layer or by adding a second conductivity type dopant to the top of the drift region 820. In some embodiments, the well region 832 may be formed on the entire surface of the draft region 820. The well region 832 may have a second conductivity type (e.g., p-type). The method may further include forming a source region (block 2120) on top of the well region 832. The source region 842 may have a first conductivity type. The source region 842 is not formed in a region where a common deep shield region (e.g., common deep shield region 870c of FIG. 44) is formed.

[0305] 42 and 44, the method may further include forming a deep shielding region having a second conductivity type (block 2130). The deep shielding regions 870 and 870c may be formed by adding a second conductivity type dopant to a portion of the well region 832 and / or a portion of the drift region 820. The deep shielding regions 870 and 870c may have a higher concentration of the second conductivity type dopant than the well region 832. The common deep shielding region 870c may not include the source region 842 as shown in FIG.

[0306] 42 and 45, the method may include forming one or more gate trenches (block 2140). The gate trenches 860 may be formed to extend through the well region 832 and may be formed on the deep shielding region 870 or 870c. Each of the gate trenches 860 formed on the common deep shielding region 870c may expose a side of the source region 842 and a side of the common deep shielding region 870c. A bottom end of the gate trenches 860 formed on the common deep shielding region 870c may expose the common deep shielding region 870c. See FIG. 42. The method may further include forming a gate structure (block 2150). A gate structure (e.g., gate structure 868 of FIG. 34) may be formed in the gate trench 860.

[0307] In the above description, each embodiment has a specific conductivity type. In each of the above embodiments, it is understood that the opposite conductivity type device can be formed by simply reversing the conductivity of the n-type and P-type layers. Thus, it is understood that the present invention covers both n-channel and P-channel devices for each different device structure (e.g., MOSFET, IGBT, etc.). In this specification, when a contact can be either a source contact or a drain contact, it may be referred to as a "source / drain contact."

[0308] Although the present invention has been described above with respect to implementations of power MOSFETs and power IGBTs, it will be appreciated that the techniques described herein apply equally well to other similar vertical power devices having gate trenches. Thus, embodiments of the present invention are not limited to MOSFETs and IGBTs, and the techniques disclosed herein may be used with any suitable gate trench device.

[0309] The present invention has been discussed above primarily with respect to silicon carbide-based power semiconductor devices. However, silicon carbide is used herein as an example, and it will be understood that the devices discussed herein may be formed in any suitable wide band gap semiconductor material system. As an example, gallium nitride-based semiconductor materials (e.g., gallium nitride, aluminum gallium nitride, etc.) may be used in place of silicon carbide in any of the above examples.

[0310] It may also be understood that different features of different embodiments described herein may be combined to provide further embodiments. For example, it was discussed above with respect to one embodiment that a junction termination extension may be used instead of a guard ring. This is true in each embodiment disclosed herein. Similarly, a shielding region below the gate trench may be included or omitted in any of the embodiments. Any of the embodiments may also include well regions having various dopant concentrations, including a lightly doped channel region.

[0311] The embodiments of the present invention have been described above with reference to the accompanying drawings, which show embodiments of the present invention. However, it should be understood that the present invention can be embodied in many different forms and should not be construed as being limited to the above embodiments. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout.

[0312] Terms such as first, second, etc. are used throughout this specification to describe various elements, but it can be understood that these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, a first element can be called a second element, and similarly, a second element can be called a first element, without departing from the scope of the present invention. The term "and / or" includes any and all combinations of one or more of the associated listed items.

[0313] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms unless the context clearly dictates otherwise. As used herein, the terms "comprises", "comprising", "including" and / or "comprising" specify the presence of stated features, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0314] When an element, such as a layer, region, or substrate, is referred to as being "on" or extending "onto" another element, it will be understood that the element can be directly on or extending directly onto the other element, or that intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or extending "directly onto" another element, there are no intervening elements present. Also, when an element is referred to as being "connected" or "coupled" to another element, it will be understood that it can be directly connected or coupled to the other element, or that intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, it will be further understood that there are no intervening elements present.

[0315] Relative terms such as "lower" or "upper" or "upper" or "lower" or "top" or "bottom" may be used herein to describe the relationship of one element, layer or region to another element, layer or region as shown. It should be understood that these terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures.

[0316] Embodiments of the present invention are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of the present invention. The thicknesses of layers and regions in the drawings may be exaggerated for clarity. Additionally, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and / or tolerances are expected. Embodiments of the present invention are also described with reference to flowcharts. It should be understood that the steps illustrated in the flowcharts do not have to be performed in the order shown.

[0317] Some embodiments of the invention are described in relation to semiconductor layers and / or regions that are characterized as having a conductivity type, such as n-type or p-type, which refers to the majority carrier concentration of the layer and / or region. Thus, an n-type material has a majority equilibrium concentration of negatively charged electrons, and a p-type material has a majority equilibrium concentration of positively charged holes. Some materials may be designated with a "+" or "-" to indicate a relatively larger ("+") or smaller ("-") concentration of majority carriers compared to other layers or regions (e.g., n+, n-, p+, p-, n++, n--, p++, p--, etc.). However, such designations do not imply the presence of any particular concentration of majority or minority carriers in the layer or region.

[0318] In the drawings and specification, exemplary embodiments of the invention have been disclosed and, although specific terms have been employed, they are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth in the following claims.

Claims

1. a semiconductor layer structure comprising a drift region including a wide band gap semiconductor material, the drift region having a first conductivity type; a gate trench in the upper portion of the semiconductor layer structure, the gate trench having a longitudinal axis extending in a first direction and having first and second opposing sidewalls each extending parallel to the longitudinal axis, the distance between upper ends of the first and second opposing sidewalls being constant; first and second well regions having a second conductivity type different from the first conductivity type in the upper portion of the semiconductor layer structure above the drift region, the first well region constituting a part of the first sidewall and the second well region constituting a part of the second sidewall; first and second source regions having the first conductivity type on the first and second well regions, respectively; a deep shield region having the second conductivity type in the semiconductor layer structure below the gate trench; a plurality of deep shield connection patterns having the second conductivity type on the upper portion of the semiconductor layer structure and spaced apart from one another along the first direction, each deep shield connection pattern extending in a second direction different from the first direction, each deep shield connection pattern constituting a portion of the first sidewall of the gate trench and constituting a portion of the second sidewall of the gate trench; Equipped with the deep shield connection pattern electrically connects the deep shield region to the first and second well regions; the deep shield connection pattern subdivides an upper portion of the first source region into a plurality of spaced apart segments and subdivides an upper portion of the second source region into a plurality of spaced apart segments.

2. 2. The power semiconductor device of claim 1, further comprising a plurality of semiconductor channel regions having the first conductivity type on the first and second sidewalls of the gate trench, the semiconductor channel regions being located between adjacent deep shield connection patterns.

3. The power semiconductor device of claim 2 , wherein each deep shield connection pattern extends as a continuous stripe in the second direction.

4. The power semiconductor device of claim 3 , wherein the deep shield connection pattern has a higher doping concentration than the first and second well regions.

5. The power semiconductor device of claim 3 , wherein the deep shielding connection pattern extends to a top surface of the semiconductor layer structure.

6. The power semiconductor device of claim 3 , wherein the deep shield connection pattern has a higher doping concentration than the first and second source regions.

7. 4. The power semiconductor device of claim 3, wherein portions of the deep shield region aligned with respective deep shield connection patterns along the second direction have a higher doping concentration of second conductivity type dopant than remaining portions of the deep shield region.

8. a gate insulating layer in the gate trench covering a bottom surface and the first and second sidewalls of the gate trench; a gate electrode in the gate trench on the gate insulating layer; a first source / drain contact directly contacting the first source region, the second source region, and the deep shield connection pattern; a second source / drain contact on the lower surface of the semiconductor layer structure; The power semiconductor device of claim 2 , further comprising:

9. The power semiconductor device of claim 1 , wherein the second direction is substantially perpendicular to the first direction.

10. a further plurality of gate trenches in the upper portion of the semiconductor layer structure, each of the further plurality of gate trenches having respective opposing first and second sidewalls extending in the first direction; a further plurality of deep shield regions having the second conductivity type in the semiconductor layer structure beneath each of the further plurality of gate trenches, each deep shield connection pattern extending continuously in the second direction and formed on both the first sidewall and the second sidewall of each of the further plurality of gate trenches; a further plurality of semiconductor channel regions having the first conductivity type on the first and second sidewalls of each of the further plurality of gate trenches, the semiconductor channel regions being located between adjacent deep shield connection patterns in each of the further plurality of gate trenches; The power semiconductor device of claim 3 , further comprising:

11. 2. The power semiconductor device of claim 1, wherein each deep shield connection pattern comprises a stripe of p-type material extending at least as deep as the gate trench and extending to a top surface of the semiconductor layer structure.

12. 2. The power semiconductor device of claim 1, wherein each deep shield connection pattern surrounds a top and side surface of a respective portion of the first and second source regions.

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