Non-contact shape measuring machine and position adjusting method

JP2025080108A5Pending Publication Date: 2026-10-14TOKYO SEIMITSU CO LTD
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Patent Information

Application Number
JP2023193133
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-11-13
Publication Date
2026-10-14

AI Technical Summary

Technical Problem

Existing non-contact shape measuring machines face challenges in accurately and cost-effectively adjusting the position of the sensor head to ensure that the measurement surface is included in the measurement range, particularly when dealing with recesses and uneven surfaces.

Method used

The proposed solution involves a non-contact shape measuring machine with a sensor head that emits measurement light and receives reflected light, using a light receiving sensor with a size capable of receiving reflected light even when the sensor head is close to the measurement surface. This setup allows for the detection of the measurement surface within a proximity range without the need for additional sensors, enabling precise position adjustment of the sensor head.

Benefits of technology

This approach allows the sensor head to be brought close to the measurement surface at low cost and with high accuracy, ensuring that the measurement surface is fully included in the measurement range, even in cases with recesses or uneven surfaces.

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Abstract

To provide a non-contact shape measuring machine and a position adjusting method capable of bringing one of a sensor head and a measurement surface close to the other at a low cost and with high accuracy.SOLUTION: The non-contact shape measuring machine includes: a sensor head 20; a light receiving sensor 36 in which an incident position of reflected light LA on a light receiving surface 36a changes according to a distance between the sensor head 20 and a measurement surface Wa; a distance measuring unit 44 which measures the distance based on the incident position of the reflected light LA on the light receiving surface Wa; and a moving mechanism (C-axis moving mechanism) 16 which moves the other toward and away from one of the sensor head 20 and the measurement surface Wa along a moving axis (C-axis 14). A measurement range WR is predetermined at a position separated from the sensor head 20 in an emission direction of measurement light L, and the light receiving surface Wa has a size capable of receiving the reflected light LA even when the other is moved toward the one up to a position where the measurement surface Wa is included within a proximity range SR by the moving mechanism.SELECTED DRAWING: Figure 6
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