Measurement device, and measurement jig

Abstract

To provide a measurement device and measurement jig that can improve measurement accuracy of a film thickness.SOLUTION: A measurement device according to the present invention is a measurement system that includes a probe measuring a film thickness, and a measurement jig to be attached to the probe. The measurement jig has: a base part that is shaped into a prism, and is put in a measurement surface of the film thickness; and a cylindrical guide part that is erected in the base part, and guides an advancing and retreating motion of the probe, and in the measurement jig, a through-hole is formed that penetrates the base part and guide part. The guide part has: a spring part that expands / contracts in an advancing and retracting direction of the probe; and a spring seat that is locked to the probe, and to which a load toward a side where the probe separates from the measurement surface is applied by the spring part.SELECTED DRAWING: Figure 1

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