Inertial force sensor and method for manufacturing the same

Abstract

To provide an inertial force sensor equipped with a package capable of suppressing the generation of a leak path.SOLUTION: An inertial force sensor includes a package including a rectangular opening frame having a plurality of corners. The inertial force sensor includes a sensor unit disposed inside the package. The inertial force sensor includes a metal lid portion having a flat plate shape and covering the entire opening frame. The inertial force sensor is disposed along the opening frame, has a closed ring shape, and includes a joint portion that joins the opening frame and the lid portion. The joint portion includes a first section in an area corresponding to each of the plurality of corners. In the first section, the joint portion includes an inner joint portion disposed on the radial inside of the ring shape, and an outer joint portion disposed on the radial outside. A specific space is formed between the inner joint portion and the outer joint portion.SELECTED DRAWING: Figure 2

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